Sensirion Liquid Flow Sensors
Achieving Precise Low-Flow Measurement
Innovative Technology
Sensirion's liquid flow meters are setting new standards in liquid flow monitoring, processing, and distribution. Leveraging Sensirion's unique CMOS® technology, these sensors provide bidirectional liquid flow measurement in milliliters, microliters, and down to single-digit nanoliters per minute. Applications in medical devices, diagnostics, process control, and automation benefit from Sensirion's reliable sensor solutions.
For more information, visit: www.sensirion.com/liquidflow
CMOS® Technology
Sensirion's CMOS® flow sensor technology is based on thermal micro-sensors, optimized for flow rates up to 100 ml/min. The integrated digital CMOS® microchip is the core component of Sensirion's products, precisely measuring flow through the sensor's channel, bonded to the outside of the channel wall. Sensirion's liquid flow meters feature a completely isolated fluid path with no moving parts. Sensirion offers the world's smallest and most accurate liquid flow meters, inspiring new designs and applications across various industries. With excellent reliability and media compatibility, Sensirion sensors are ideal for medical and life sciences, diagnostics, semiconductor manufacturing, industrial automation, and energy management.
Beyond the sensor element, the CMOS® chip integrates complete digital intelligence and memory for signal linearization, temperature compensation, and self-test algorithms. Various digital (I2C, RS485, USB) or analog output options are available for easy testing and seamless integration. Contact Sensirion experts to discuss customized solution possibilities: info@sensirion.com
Fast, Small, Reliable
Sensirion's standard liquid flow meters offer exceptional value, eliminating the need for costly development of custom OEM sensors. They feature inert wetted materials for excellent process compatibility, standard fluid connectors for quick integration into fluidic lines, and downward-facing connectors for compact integration into piping systems. By utilizing capillaries of different diameters, Sensirion's liquid flow meters cover a flow range of more than six orders of magnitude, from single-digit nanoliters to one liter per minute.
Diagram illustrating the principle of CMOS® liquid flow sensing: A micro-sensor chip with a heater and temperature sensors is integrated into a fluid channel. Fluid flow causes temperature changes detected by the sensors, which are then processed digitally.
Examples of flow rates: Mosquito blood-sucking (approx. 10 nanoliters/min), Pen (approx. 10 microliters/min), Syringe (approx. 5 milliliters/min), Espresso machine (approx. 500 milliliters/min).
Sensirion can measure flow rates from single-digit nanoliters per minute up to hundreds of liters per minute.
For higher flow rates, please contact us: info@sensirion.com
Product Series
SLF3x Series
The SLF3x series further develops the powerful functionality and offers a higher cost-effectiveness. The sensor series features a flow range of up to 1 l/min and maximizes safety, stability, and long-term reliability in various high-volume OEM applications. Hose and downward-mount fluid connectors are available.
LD20 Series
The LD20 sensor measures liquid flow rates of up to 1,000 ml/h at the point of care, enabling more direct and effective patient treatment. It combines Sensirion's proven sensor technology with a disposable design, making it suitable for high-volume applications in the biomedical, life science, and food industries.
SLG Series
The SLG liquid flow meter is designed for ultra-low flow rates (down to single-digit nanoliters per minute) and is the ideal solution for dynamic liquid flow monitoring in high-pressure and/or low-flow environments (e.g., demanding UHPLC applications). The fused silica flow channel can withstand pressures up to 1,200 bar.
SLI/SLS Series
The SLI/SLS liquid flow meters feature a protective housing with Sensirion's flow meter technology, making them ideal for laboratory work and the automation industry. Combined with the SCC1 sensor cable, equipped with RS485, analog, or USB output, reliable communication is ensured even in harsh environments.
LG16 Series
Inert wetted materials and ultra-low flow characteristics make the LG16 series a versatile choice for demanding OEM applications. Its compact and streamlined housing is suitable for integration into instruments and other enclosed systems.
SLQ Series
The SLQ series offers calibrated flow rates up to 120 ml/min and uses only high-purity wetted materials (quartz glass, PFA), making it ideal for demanding dispensing processes in the semiconductor industry, as well as for measuring high-viscosity or particle-containing liquids.
LPG10 Series
The LPG10 series is Sensirion's smallest liquid flow sensor to date, delivering excellent performance and speed in a very small form factor. Its innovative design enables flow measurement in microfluidic planar glass substrates. With downward-facing fluid ports, it can be compactly integrated into piping systems.
SLD3P Series
The SLD3P series is a new generation of digital liquid flow sensor platforms, with a measurement range of up to 5 ml/min. This sensor offers precise measurement, a small footprint, and compatibility with various therapies, providing an accurate, disposable solution for medical devices such as drug delivery patches and insulin pumps.
| Model | Full Scale Flow | Typical Accuracy of Reading | Bidirectional Operation | Output | Cable Length | Fluid Connector Port | Max Pressure |
|---|---|---|---|---|---|---|---|
| SLF3S-0600F | 2000 µl/min H₂O 2000 µl/min HC |
5% | 1/16" or 1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
12 bar | |||
| SLF3S-1300F | 40 ml/min H₂O 40 ml/min HC |
10% | 1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
||||
| SLF3S-4000B | 600 ml/min H₂O 600 ml/min HC |
10% | Yes | I²C, RS485 | 30 cm for I²C | 6mm OD barbed | 3 bar |
| SLF3S-0600D | 2000 µl/min H₂O 2000 µl/min HC |
5% | Downward mount | 10 bar | |||
| SLF3S-1300D | 40 ml/min H₂O 40 ml/min HC |
10% | |||||
| LD20-2600B | 1,000 ml/h H₂O | 5% | Yes | I²C, RS485, Analog (0 to 10 V, 4 to 20 mA) | 30 cm for I²C > 100 m for RS485 |
Barbed connector | 3 bar |
| SLG-0075 | 5 µl/min H₂O 80 µl/min H₂O |
10% | Yes | I²C | 30 cm for I²C | 1/16" OD tubing Port: 0-32 UNF cone |
1200 bar |
| SLI-0430 | 500 µl/min HC | 1/16" OD tubing Port: Stainless steel 0-32 cone |
50 bar | ||||
| SLI-1000 | 1000 µl/min H₂O 10 ml/min HC |
5% | Yes | I²C, RS485, Analog (0 to 10 V, 4 to 20 mA) | 30 cm for I²C > 100 m for RS485 |
1/16" or 1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
12 bar |
| SLI-2000 | 5 ml/min H₂O 80 ml/min HC |
1/16" or 1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
15 bar | ||||
| LG16-0150 | 7 µl/min H₂O 70 µl/min HC |
1/32" OD tubing | 200 bar | ||||
| LG16-0430 | 80 µl/min H₂O 500 µl/min HC |
5% | Yes | I²C | 30 cm for I²C | UNF 6-40 cone | 100 bar |
| LG16-1000 | 1 ml/min H₂O 10 ml/min HC |
1/16" or 1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
15 bar | ||||
| LG16-2000 | 5 ml/min H₂O | Analog (0 to 10 V) | 1/16" or 1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
12 bar | |||
| SLS-1500 | 40 ml/min H₂O | 5% | Yes | I²C, RS485, Analog (0 to 10V, 4 to 20 mA) | 30 cm for I²C > 100 m for RS485 |
1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
12 bar |
| LS32-1500 | 40 ml/min H₂O | 5% | Yes | I²C, Analog (0 to 10 V, 4 to 20 mA) | 30 cm for I²C | 1/8" OD tubing Port: 1/4"-28 Flat-Bottom |
12 bar |
| SLQ-QT105 | 120 ml/min HC | 10% | Yes | Analog (0 to 10 V, 4 to 20 mA) | > 100 m for RS485, 30 cm for I²C |
Super 300 type pillar fitting 4 × 3 mm | 12 bar |
| SLQ-QT500 | 120 ml/min H₂O 120 ml/min HC |
5% | Yes | Analog (0 to 10 V, 4 to 20 mA) | > 100 m for RS485, 30 cm for I²C |
6.35 mm (1/4") OD PFA tubing, 4.35 mm ID | 12 bar |
Legend: H₂O = Water, HC = Hydrocarbons
Liquid Flow Meter Kits
For quick and easy initial measurements, all of Sensirion's SLI, SLS, SLG, and SLQ liquid flow meters can be ordered as part of a liquid flow meter kit. In addition to your chosen liquid flow meter, the kit includes USB and analog interface cables for electrical connection, software for viewing and logging, and a set of fluid connectors.
For the LPG10, LD20, and SLF3x series liquid flow sensors, Sensirion offers specific evaluation kits that include additional accessories for mounting and electrical connection.
For more information, visit: www.sensirion.com/liquidflowmeterkit
Image shows an SLF3x evaluation kit.
Customized Solutions
Innovative ideas sometimes require new solutions. Sensirion's sensor experts are eager to find ways to realize interesting applications using Sensirion's technology. Sensirion can design customized solutions for specific requirements, such as flow rate, limited space constraints, resistance to corrosive chemicals, low cost for high-volume applications, or disposable sensors.
With expertise in liquid flow sensing technology, Sensirion has successfully completed numerous projects. Sensirion's key objective is to understand customer requirements and leverage Sensirion's core technological advantages to benefit the customer: improved packaging, wetted materials, fluid or electrical interfaces, and enhancements for low-volume or high-pressure applications.
Wide Measurement Range
Leveraging years of experience and expertise combined with highly sensitive sensors, Sensirion's measurement range covers nanoliters per minute to liters per minute.
High Speed
The low thermal mass of the MEMS sensor integrated into the CMOS chip enables ultra-fast response times of 20 milliseconds.
Flexibility and Cost-Effectiveness
Thanks to Sensirion's advanced technology, customized sensor solutions can be flexibly adapted to customer requirements, ensuring excellent performance and cost-effectiveness.
