Selection guide for Sensirion gas flow sensors

Finding the right flow sensor (SFM) for your medical ventilation or high flow device.

Overview of Sensirion Gas Flow Sensors

Sensirion's flow sensor portfolio offers a comprehensive range of gas flow sensors optimized for medical applications. The SFM product range is specifically engineered for medical ventilation, addresses all relevant flow monitoring requirements, and is organized in three families, depending on the position of the sensor in the ventilation system:

  1. Inspiratory
  2. Expiratory
  3. Proximal

The figure below provides a first guideline to select a suitable sensor depending on the application position.

Inspiratory Flow Sensors

Inspiratory flow sensors are typically used inside the ventilator to measure the individual air/O2/heliox gas lines as well as the total flow of the mixed gas before delivery to the patient.

Selection can be based on operating gage pressure:

Consider the following criteria for sensor selection:

A table detailing inspiratory flow sensors:

Form Factor Sensor Measured Gases Flow Range [slm] Pressure Drop @flow[slm] Typ. Accuracy [%m.v.] @flow[slm] Recommended Supply Voltage (allowed) Special Features
Medical cones 22mm (ISO5356) SFM3003-CL Air -30 to +300 @60: 80Pa
@200: 500Pa
@200: ±2% 3.3V (2.7 - 5.5V) Low pressure drop
SFM3003-CE Air, O2 -150 to +300 @60: 100Pa
@200: 600Pa
@200: ±2.5% Extended negative flow range
SFM3003-CET Air, O2 -150 to +300 @60: 100Pa
@200: 600Pa
@200: ±2.5% Extended negative flow range
SFM3013-CL Air/O2 mixtures -30 to +300 @60: 80Pa
@200: 500Pa
@200: ±2% Low pressure drop
SFM3013-CLM Air/O2 mixtures Air/O2: -30 to +300
Heliox: -30 to +200
@60: 80Pa
@200: 500Pa
@200: ±2%
Heliox: ±4.5%
Higher pressure resistance up to 1bar gauge
Additional Heliox calibration
SFM3020 Air, O2, Air/O2 mixtures -10 to +160 @60: 80Pa
@200: 500Pa
@160: ±2% 5V Analog output 0.5 – 4.5V
Compact SFM3100-VC NRND Air, O2, Air/O2 mixtures -24 to +240 @60: 300Pa
@200: 1600Pa
@60: 2.5% 5V (4.75 - 5.25V) NTC temperature sensor in gas path
Analog output 0.095 – 2.45V
SFM3119 Air, O2, Air/O2 mixtures -10 to +240 @60: 200Pa
@200: 1600Pa
@100: 2% Digital output
See successor SFM3505
SFM3505 Air, O2, Air/O2 mixtures -150 to +300 @60: 85Pa
@200: 750Pa
@full flow range: 2.3% (3505-300)
1.5% (300-X)
3.3V (3.2 - 3.4V) Upcoming in Q4 2025
Available in two performance versions regular (3505-300) and high accuracy (3505-300-X) and for CO2 flow (3505-70-CO2)
SFM4300 Air, O2, CO2, N2O, Mixtures 0 to 20 (Air, O2, CO2, N2O and mixtures)
0 to 50 (Air, O2 and mixtures)
@20: 2500Pa
@50: 10000Pa
@20: 2%
@50: 4%
3.3V (3.0 - 5.5V) High resolution 0.4sccm for 20slm ranges
Operating pressures up to 7 bar

Proximal Flow Sensors

Gas flow sensors specifically designed to monitor flow in close proximity to the patient, where the following main challenges have been resolved:

Sensor selection is based on two main criteria:

A table detailing proximal flow sensors:

Form Factor Sensor Measured Gases Flow Range [slm] Pressure Drop @flow[slm] Typ. Accuracy [%m.v.] @flow[slm] Recommended Supply Voltage (allowed) Special Features
Medical cones 22mm (ISO5356-1) SFM3300-D Air, O2, Air/O2 mixtures -250 to +250 @60: 180Pa
@200: 1400Pa
@100: 3% 5V See successor SFM3304-D
Suitable for adults and children
Single-use
Integrated heater to prevent condensation
SFM3300-AW Air, O2, Air/O2 mixtures -250 to +250 @60: 180Pa
@200: 1400Pa
@100: 3% 5V Available in catalog distribution
Suitable for adults and children
Autoclavable & cleanable
Integrated heater to prevent condensation
SFM3304-D Air, O2, Air/O2 mixtures -250 to +250 @60: 100Pa
@200: 1150Pa
@100: 3% 3.3V (3.15 - 3.45V) Improved independence to inlet conditions
Suitable for adults and children
Single-use
Integrated heater to prevent condensation
Includes individual sensor packaging
15mm (ISO5356-1) SFM3400-D Air, O2, Air/O2 mixtures -33 to +33 @5: 100Pa
@25: 900Pa
@33: 3% 5V Suitable for neonates
Single-use
Integrated heater to prevent condensation
SFM3400-AW Air, O2, Air/O2 mixtures -33 to +33 @5: 100Pa
@25: 900Pa
@33: 3% 5V Suitable for neonates
Autoclavable & cleanable
Integrated heater to prevent condensation

Expiratory Flow Sensors

The SFM3200-AW is specifically designed for the expiratory position with a minimized pressure drop, washability, a heater, and the capability to measure vapor-saturated gas/air.

Alternative options:

A table detailing expiratory flow sensors:

Form Factor Sensor Measured Gases Flow Range [slm] Pressure Drop @flow[slm] Typ. Accuracy [%m.v.] @flow[slm] Recommended Supply Voltage (allowed) Special Features
Medical cones 22mm (ISO5356-1) SFM3200-AW Air, O2, Air/O2 mixtures -100 to +250 @60: 100Pa
@200: 750Pa
@100: 3% 5V Bidirectional
Autoclavable & cleanable
Integrated heater to prevent condensation

Revision History

Date Version Pages Changes
July 2024 1.0 all First version
May 2025 1.1 1, 2, 4 Delete EOL product SFM4200
June 2025 1.2 5 Include upcoming product SFM3505
July 2025 1.3 all added SFM3505 in figure & text, removed SFM3200, SFM3019, greyed out SFM3100, SFM3119 in table
Models: SFM3003-CL, SFM3003-CE, SFM3003-CET, SFM3013-CL, SFM3013-CLM, SFM30 Series Gas Flow Sensors, SFM30 Series, Gas Flow Sensors, Flow Sensors, Sensors

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Sensirion GF AN SFM-02 Selection Guide

References

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