Sensirion SFM Series Gas Flow Sensors
Sensirion offers extensive experience in designing mass flow sensor solutions for medical technology and industrial automation applications, making us your ideal partner for developing new products. Sensirion's mass flow sensors are suitable for various fields, offering the following key performance characteristics:
- Excellent repeatability
- Fast response time
- Outstanding low-flow sensitivity
- Wide dynamic range
- Reliability and robustness
- Bidirectional measurement
For more information, please visit www.sensirion.com/gasflow.
Unique Measurement Technology
Sensirion's mass flow sensors achieve fast and precise measurements across a wide dynamic range, all at an affordable price. At the core of Sensirion's flow sensors is a thermal mass flow measurement principle, integrating the sensor element and signal conditioning circuitry onto a single chip. This unique technological approach, derived from innovative CMOSens® technology, ensures excellent performance and robustness while controlling costs. Consequently, Sensirion's high-sensitivity flow meters are the preferred choice for leading manufacturers.
Diagram Description: A diagram illustrates the thermal mass flow measurement principle. Airflow enters from the left, passing over a heating element and then a temperature sensor. The cooling effect on the sensor due to airflow is measured to determine the flow rate.
Convenient and Fast Evaluation Kits
The SEK-Flow Sensing evaluation kit is a testing tool for Sensirion's mass flow sensors. It is affordably priced and user-friendly, enabling quick and precise measurements. The evaluation kit includes a cable for direct connection to a computer. Some kits also include an additional Sensirion sensor hub for multiplexing. Software can be downloaded from the Sensirion website, allowing users to view measurements at different resolutions and mass flow values (units: standard liters per minute / slm), with data logging and export to Excel capabilities.
Image Description: An image shows a compact, cylindrical gas flow sensor. It has a black housing with connectors at one end and a transparent section revealing the internal sensor chip and circuitry.
Product Overview and Specifications
Sensirion's mass flow meter series features temperature compensation and is factory-calibrated across the entire range, eliminating the need for user recalibration or drift compensation. Based on over 20 years of proven technology, the SFM series sensors are designed for high-volume production.
For Ambient Pressure and Dry Gases
All flow sensors designed for ambient pressure and gas applications utilize carefully selected materials and drift-free technology for long service life and high reliability. The SFM3505 series features O-ring connectors, a compact size, and can withstand overpressures up to 650 mbar. Its novel flow chamber design provides excellent accuracy, low noise, and minimal pressure drop across a wide flow range of ±300 standard liters per minute. Additionally, the SFM3505-70-CO₂ model offers CO₂ flow measurement up to 70 standard liters per minute.
The SFM3003 series is equipped with medical cone connectors compliant with ISO5356 standards, calibrated for air, oxygen, and O₂/air mixtures, and can operate at 0.3 bar overpressure. This series offers three different versions corresponding to different flow rates and pressure drops: SFM3003-300-CL, SFM3003-300-CE, and SFM3013-300-CL. There is also a version calibrated for H₂/O₂ mixtures: SFM3013-300-CLM.
For Ambient Pressure and Humid Gases
Mass flow sensors designed for humid and potentially condensing gases measure flow rates up to 250 standard liters per minute. A built-in heater prevents condensation on the chip, ensuring excellent performance even in humid environments. All sensors feature snap-on cable connectors for easy installation and removal. For specific applications, such as in medical settings, sensors may be washable or autoclavable. The SFM3x00-AW series is washable and autoclavable, while the SFM3x0x-D series is disposable. The SFM3304-D features a 22 mm medical cone connector with a dead volume of less than 10 ml. The SFM3400-AW/D features a 15 mm medical cone connector with a dead volume of less than 1 ml. Disposable sensors are also available in customized individual packaging.
For High-Pressure Environments
The SFM4xxx, SFM5xxx, and SFM6xxx series sensors are ideal for high-pressure scenarios, capable of withstanding internal pressures of several bar for years. These sensors are robust, suitable for harsher environments, and calibrated for various gases. The SFM4300 can measure forward flow of air, oxygen, carbon dioxide, and nitrous oxide, as well as their mixtures, up to 20 and 50 standard liters per minute. The SFM6000 series offers a smaller flow range, supports RS485 communication, and has interchangeable connectors. The SFM5xxx series features a metal housing and interchangeable connectors, providing high-precision measurements across various flow ranges and withstanding pressures up to 10 bar. Additionally, SFM5xxx and SFM6xxx series are available in mass flow controller versions.
| Feature | SFM3003-300-CL | SFM3505-300-X | SFM3304-250-D | SFM3400-33-D | SFM4300-20-O/P/B | SFM6000* | SFM5400/5500* |
|---|---|---|---|---|---|---|---|
| Flow Range | -30 to 300 slm | -150 to 300 slm | -250 to 250 slm | -33 to 33 slm | 0 to 20 slm | 0 to 5, 20 or 50 slm | 0 to 50 sccm and 0 to 100 slm |
| Accuracy (% of reading) | 2% (<200 slm) | N: 1% (all range) | 3% (all range) | 3% (all range) | 2% (all range) (Air, O₂) | 2% (all range) (Air, O₂) | 0.8% (all range) (Air/N₂, He, O₂, H₂) |
| Noise (N: % of reading) / Repeatability (R: % of reading) | N: 1% (<200 slm) | N: 1% (all range) | N: 0.5% (< 250 slm) | N: 0.5% (all range) | R: 0.21% (all range) | R: 0.2% (all range) | R: 0.1% (all range) |
| Pressure Drop | < 5 mbar @ 200 slm | < 7.5 mbar @ 200 slm | < 19 mbar @ 200 slm | < 1 mbar @ 25 slm | < 25 mbar @ 20 slm | < 150 mbar @ 50 slm | < 100 mbar @ full scale |
| Fluid Connection | I2C | O-ring, inlet diameter 14 mm | Medical cone (22mm) | Medical cone (15mm) | O-ring (8mm), push-in, bottom mount connector | Push-in, bottom mount connector | Legris OD 6 mm, can be replaced with G 1/4" threaded connector |
| Communication Interface | I2C | I2C | I2C | I2C | I2C | RS485, Modbus*, Analog*, DeviceNet* (*only for SFM5400) | RS485, Modbus*, Analog*, DeviceNet* (*only for SFM5400) |
| Sampling Time (ms) | 0.5 ms | 0.25 ms | 0.5 ms | 0.5 ms | 0.5 ms | 1 ms | 1 ms |
| Calibration Gas | Air, O₂, O₂/air mixture | Air, O₂ | Air | Air | Air, O₂, CO₂, N₂O and their mixtures | Air/N₂, O₂, He, H₂, CH₄, N₂O, CO₂ | Air/N₂, O₂, He, H₂, CH₄, N₂O, CO₂ |
| Voltage (V) | 2.7-5.5 V | 3.2-3.4 V | 3.15-3.45 V | 4.75-5.25 V | 3.0-5.5 V | 22.8-25.2V | 15-24 V |
| Max Working Pressure (bar) | 0.2 bar | 0.65 bar | 0.1 bar | 0.1 bar | 10 bar | 10 bar | 10 bar |
| Type/Other Versions | SFM3003-300-CL: -30 to 300 slm SFM3003-300-CE: -150 to 300 slm SFM3003-300-CET: Additional gas temperature sensor SFM3013-300-CL: 1 bar overpressure SFM3013-300-CLM: H₂/O₂ mixture calibration SFM3020: Analog output | SFM3505-300: 2.3% typical accuracy SFM3505-300-X: 1% typical accuracy SFM3505-70-CO₂: CO₂ flow up to 70 slm | SFM3304-250-D: Disposable SFM3300-250-AW: Washable, autoclavable | SFM3400-33-D: Disposable SFM3400-33-AW: Washable, autoclavable | SFM4300-20-O/P/B: 20 slm range, O-ring/push-in/bottom mount connectors SFM4300-50-O/P/B: 50 slm range, Air & O₂ only, O-ring/push-in/bottom mount connectors | SFM6000D-5 slm: 5 slm range SFM6000D-20 slm: 20 slm range SFM6000D-50 slm: 50 slm range | SFM5500-50sccm: 50 sccm range SFM5500-0.5slm: 0.5 slm range SFM5500-2slm: 2 slm range SFM5500-10slm: 10 slm range |
All models are available in mass flow controller versions.
Our Services
? Expert Consultation
- Highly experienced sales team
- Global distribution network
? Product Evaluation
- Comprehensive product portfolio
- User-friendly evaluation kits for easy sensor assessment
- Technical documentation: Datasheets, code, application notes
?️ Design Support
- Assistance in integrating Sensirion sensors into your application
- Proven practices to ensure your production concepts align with our sensors
♾️ Lifetime Support
- Reliable and flexible supply chain
- Continuous product innovation to meet your future needs
⚙️ Customized Solutions
- Different flow rates
- Different gases (multi-gas options)
- Special size requirements
