Sensirion Liquid Flow Sensors: Precise Measurements for Diverse Applications
Discover Sensirion's advanced liquid flow sensors, offering precise measurements from nanoliters to liters per minute, ideal for medical, industrial, and automation applications.
Inspiring Technology
Sensirion's liquid flow meters set new standards for monitoring low liquid flow rates, liquid handling, and liquid dispensing. Their unique CMOS® Technology enables bidirectional liquid flow measurement through the sensor's flow channel wall, covering flow rates from hundreds of milliliters per minute down to single-digit nanoliters per minute. Applications in medical devices, diagnostics, and process and automation technology benefit daily from these safe and reliable sensor solutions.
For more information, visit: www.sensirion.com/liquidflow
Patented Technology
Sensirion's CMOS® flow sensor technology is based on a thermal microsensor, optimized for flow rates up to 1 l/min. A key element is the integrated digital CMOS® microchip bonded to the outside of the sensor's flow channel, allowing precise measurement through the channel wall. These liquid flow meters offer completely media-isolated flow sensing with no moving parts or obstacles in the flow path. Sensirion provides the world's smallest and most precise liquid flow meters, inspiring new designs and applications across industries. High reliability and excellent media compatibility make these sensors ideal for medical and life sciences, diagnostics, semiconductor, factory automation, and energy management applications.
The CMOS® chip integrates complete digital intelligence for signal linearization, temperature compensation, and self-test algorithms. Various digital (I²C, RS485, USB) or analog output options are available for easy testing and seamless integration. For customized solutions, contact experts at info@sensirion.com.
Flow Measurement Principle: The technology utilizes a thermal microsensor with a heater and temperature sensors positioned around a flow channel. A digital output from the chip processes the measurement.
Schematic Layout: A straight flow channel is depicted, with measurement occurring through the tubing material via a microsensor chip. The flow path includes a capillary or thin foil, a heater, and temperature sensors.
Fast, Small, Reliable
Sensirion's standard liquid flow meters offer exceptional value and eliminate the need for application-specific OEM sensor development. Inert wetted materials ensure excellent process compatibility. Industry-standard fluidic fittings allow quick assembly on the fluidic line, and downmount fittings enable compact installation in manifold systems. By using capillaries with different diameters, Sensirion's liquid flow meters cover flow rates over eight orders of magnitude, from single-digit nanoliters up to a liter per minute.
Flow Rate Examples:
- Ballpen: ~100 nl/min
- Mosquito drinking: ~10 µl/min
- Drug injection: ~5 ml/min
- Espresso machine: ~500 ml/min
Sensirion measures flow rates from single-digit nl/min up to several hundred l/min. For higher flow rates, contact info@sensirion.com.
Liquid Flow Sensor Series Overview
Sensirion offers a range of liquid flow sensors tailored for specific applications:
SLF3x Series
The SLF3x series enhances functionality with an improved price-performance ratio. It features an unprecedented turndown ratio up to 1 l/min, maximizing safety, stability, and long-term reliability for high-volume OEM applications. Tube and downmount fluidic interfaces are available.
LD20 Series
The LD20 sensors measure liquid flow rates up to 1,000 ml/h at the point of interest, enabling more direct and effective patient treatment. It combines Sensirion's proven sensing technology with a single-use design for high-volume applications in the biomedical, life sciences, and food industry sectors.
SLG Series
SLG liquid flow meters are designed for ultra-low flow rates (down to single-digit nanoliters per minute) and are ideal for dynamic liquid flow monitoring at high pressures and/or low flow rates, such as in cutting-edge UHPLC applications. The fused silica flow channel withstands pressures up to 1,200 bar.
SLI/SLS Series
Featuring Sensirion's flow meter technology in a protective housing, SLI/SLS liquid flow meters are suitable for laboratory work and automation industry use. Combined with SCC1 sensor cables, they provide RS485, analog, or USB output for reliable communication in harsh environments.
LG16 Series
With inert wetted materials and ultra-low flow capabilities, the LG16 series is a versatile addition to demanding OEM applications. Its compact and stripped-down housing is suitable for integration into instruments and other closed systems.
LS32-1500
The LS32-1500 features a compact housing with high mechanical robustness and wetted materials offering exceptional chemical resistance. It is suitable for the biomedical market and many other applications with flow rates up to 40 ml/min.
SLQ Series
Calibrated for flow rates up to 120 ml/min, the SLQ series uses high-purity wetted materials (quartz glass, PFA). It is ideal for demanding dispensing processes in the semiconductor industry and for measuring liquids with high viscosity or particles.
SLD3P Series
The SLD3P series is a new generation of digital liquid flow sensors for measurements up to 5 ml/min. It combines accuracy, miniature size, and compatibility with various therapies, making it ideal for high-volume medical devices like drug delivery patches and insulin pumps.
Technical Specifications
| Model | Full Scale Flow Rates | Typ. Accuracy of Measured Value (H²O) | Bidirectional Operation | Analog Output | RS485 | I²C Length | Requires SCC1 Cable | Fluidic Connector Ports | Maximum Pressure |
|---|---|---|---|---|---|---|---|---|---|
| SLF3S-0600F | 2000 µl/min H²O 2000 µl/min HC |
5% | Yes | ✔ | > 100 m for RS485, 30 cm for I²C | 1/4"-28 flat-bottom port for 1/16" or 1/8" OD tubing | 12 bar | ||
| SLF3S-1300F/ SLF3C-1300F |
40 ml/min H²O 40 ml/min HC |
10% | Yes | ✔ | > 100 m for RS485, 30 cm for I²C | 1/4"-28 flat-bottom port for 1/8" OD tubing | 12 bar | ||
| SLF3S-4000B | 600 ml/min H²O 600 ml/min HC |
10% | Yes | ✔ | > 100 m for RS485, 30 cm for I²C | 6 mm OD Barb | 3 bar | ||
| SLF3S-0600D | 2000 µl/min H²O 2000 µl/min HC |
5% | Yes | ✔ | > 100 m for RS485, 30 cm for I²C | Downmount | 10 bar | ||
| SLF3S-1300D | 40 ml/min H²O 40 ml/min HC |
10% | Yes | ✔ | > 100 m for RS485, 30 cm for I²C | Barbed fittings | 3 bar | ||
| LD20-2600B | 1,000 ml/h H²O | 5% | Yes | 0 to 10 V 4 to 20 mA |
✔�b2; | > 100 m for RS485, 30 cm for I²C | ✔�b2; | Stainless steel 10-32 coned port for 1/16" OD tubing | 1200 bar |
| SLG-0075 | 5 µl/min H²O | 10% | Yes | ✔ | > 100 m for RS485, 30 cm for I²C | 1/4"-28 flat-bottom port for 1/16" or 1/8" OD tubing | 50 bar | ||
| SLI-0430 | 80 µl/min H²O 500 µl/min HC |
5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/16" or 1/8" OD tubing | 12 bar |
| SLI-1000 | 1000 µl/min H²O 10 ml/min HC |
5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/16" or 1/8" OD tubing | 12 bar |
| SLI-2000 | 5 ml/min H²O 80 ml/min HC |
5% | Yes | 0 to 10 V | ✔ | > 100 m for RS485, 30 cm for I²C | ✔ | UNF 6-40 coned port for 1/32" OD tubing | 200 bar |
| LG16-0150 | 7 µl/min H²O 70 µl/min HC |
5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/16" or 1/8" OD tubing | 100 bar |
| LG16-0430 | 80 µl/min H²O 500 µl/min HC |
5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/16" or 1/8" OD tubing | 15 bar |
| LG16-1000 | 1 ml/min H²O 10 ml/min HC |
5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/16" or 1/8" OD tubing | 12 bar |
| LG16-2000 | 5 ml/min H²O | 5% | Yes | 0 to 10 V | ✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/8" OD tubing | 12 bar |
| SLS-1500 | 40 ml/min H²O | 5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/8" OD tubing | 12 bar |
| LS32-1500 | 40 ml/min H²O | 5% | Yes | 0 to 10 V�b9; 4 to 20 mA�b9; |
✔ | > 100 m for RS485, 30 cm for I²C | ✔ | 1/4"-28 flat-bottom port for 1/8" OD tubing | 12 bar |
| SLQ-QT105 | 120 ml/min HC 120 ml/min H²O |
10% / 5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | Super 300 type pillar fitting 4 x 3 mm | 12 bar | |
| SLQ-QT500 | 120 ml/min HC | 5% | Yes | 0 to 10 V 4 to 20 mA |
✔ | > 100 m for RS485, 30 cm for I²C | PFA tube with 6.35 mm (1/4") OD, 4.35 mm ID | 12 bar |
Notes:
�b9; Requires SCC1 connectivity kit
�b2; Requires LD20 base station
Calibrated flow rates for water (H²O) and hydrocarbons (HC) are provided.
Evaluation Kits
To facilitate initial measurements, Sensirion offers liquid flow evaluation kits. These kits include all necessary components for evaluation, such as cabling, fluidic and electrical connectors, and mounting parts.
For more information, visit: www.sensirion.com/lf-ek
[Image Description: SLF3x Evaluation Kit components laid out, including sensor, cables, connectors, and mounting hardware.]
Customized Solutions
Sensirion's sensor experts collaborate with customers to develop innovative solutions for specific requirements. This includes customization of flow rates, space constraints, resistance to aggressive chemicals, low-cost designs, and disposable sensor options for high-volume applications.
Leveraging cutting-edge sensor technology and expertise in liquid flow sensing, Sensirion has achieved many successful customer projects. The focus is on understanding customer needs and skillfully applying the technology's benefits, such as modifying packaging, wetted materials, fluidic or electrical interfaces, and improving dead volume or pressure resistance.
Key Benefits of Sensirion's Technology:
- Various Flow Rates: Years of experience and high sensor sensitivity enable measurements across a wide range of flow rates, from nanoliters to liters per minute.
- High Speed: The integrated MEMS sensor on a CMOS chip provides ultra-fast response times, as fast as 20 ms, due to its small thermal mass.
- Flexibility and Cost Efficiency: Advanced technology allows for customized sensor solutions that are both high-performance and cost-effective.
