13MM PRESSURE SENSOR
13V: SEMI F20 compatible, 316L stainless steel, media-isolated sensors for High Purity (HP) and Ultra-High Purity (UHP) applications
The Honeywell 13V stainless steel pressure sensor is designed for HP/UHP clean rooms used in semiconductor wafer processing, thin-film deposition for solar panels/displays, food and beverage processing/packaging, aircraft and medical device manufacturing, nano-drug/biopharmaceutical production, and advanced R&D labs.
Benefits of the New Sensor
- SEMI F20 compatible – sensor suitable for UHP application
- Excellent offset drift – low offset shift during prolonged vacuum and high temperature making it versatile for multiple applications
- Port compatible with multiple gases (semiconductor mfg.) – savings from maintaining a single product
- High-volume manufacturing setup – reliable and consistent delivery with short lead times
Special attention is paid to the material selection. The internal design is optimized to meet the most stringent metal-alloy impurity and surface roughness standards in applications that involve measurement of gases and liquid flow in harsh environments. Designed with a SEMI F20 compatible ring and diaphragm, this sensor exhibits exceptional corrosion resistance to the aggressive nature of halogenated gases commonly encountered in semiconductor manufacturing processes. Its robust construction ensures minimal offset drift even when exposed to extreme vacuum and high temperature conditions while maintaining accurate pressure measurement.
For more specifications, refer to the datasheet.
Key Application Areas
The sensor is designed for demanding applications across various industries. The original document illustrates these applications with icons and images, showing connections from the central pressure sensor to:
- Bio Pharmacy (vial icons)
- Mass Flow Control (flow meter icons)
- Semiconductor Wafer Tools (manufacturing equipment, including a MIC LAYER DEPOSIT SEQUENCE CHART: PURGE, PULSE, PURGE, REACTOR)
- Integrated Gas (gas cylinder icons)
- Food & Beverage (bottle/container icons)
- Thin-Film Deposition Tools (specialized deposition equipment)
- R&D Labs (laboratory equipment)
- Solar Panels (visual of solar panels)
- Display (visual of electronic displays)
- Advanced Optics (visual of optical components)
These visuals depict environments such as clean rooms, solar panel manufacturing, laboratory settings, and food processing facilities.
