SENSIRION SFM30 Series Gas Flow Sensors
Product Information
The Sensirion gas flow sensor portfolio offers a comprehensive range of sensors optimized for medical applications. The sensors are categorized into three families based on their position in the ventilation system: Inspiratory, Expiratory, and Proximal.
Our flow sensor portfolio offers a comprehensive range of gas flow sensors optimized for medical applications. The SFM product range is specifically engineered for medical ventilation, addresses all relevant flow monitoring requirements and is organized in three families, depending on the position of the sensor in the ventilation system:
- Inspiratory
- Expiratory
- Proximal
The figure below provides a first guideline to select a suitable sensor depending on the beforementioned position in the application.
Inspiratory
In addition, some sensors offer unique features and characteristics that may be considered during sensor selection. These features are summarized in the following while the table on page 4-6 provides a comprehensive overview.
Inspiratory flow sensors
Our inspiratory flow sensors are typically used inside the ventilator to measure the individual air/O2/heliox gas lines as well as the total flow of the mixed gas before delivery to the patient.
- Selection based on operating gage pressure1
- Up to 6 bar → SFM4300
- Up to 1 bar → SFM3013
- Up to 650 mbar → SFM3505
- Lower operating overpressure: SFM3505, SFM3003 family, SFM3119.
- Consider the following criteria according to your requirements to identify the most suitable sensor in the table on page 4:
- Form factor and size
- Mechanical connection
- Measured gases
- Flow range and range of best performance
- Pressure drop across the sensor
- Analog or digital output
- Special features like gas NTC temperature sensor etc.
If you identify more than one sensor option, it is recommended to evaluate the sensor(s) in your device as the specific device design can influence the measurement.
Proximal flow sensors
Gas flow sensors specifically designed to monitor flow in close proximity to the patient, where the following main challenges have been resolved by our portfolio:
High humidity and condensation
All our proximal sensors are capable to measure saturated gas/air and feature a heater to prevent condensation at the sensor’s chip, therefore ensuring continued accuracy.
Contamination
We offer both single-use and washable sensors.
Sensor handling by medical personnel
All our proximal sensors feature a mechanical interface allowing a clip-on connection, easy to disconnect and reconnect.
Inspiration and expiration flow
All our proximal sensors allow bi-directional flow sensing.
Individual sensor packaging for single-use sensors
Individual sensors are protected against contamination from their production until their use by caregivers. Quality control is improved, supply chain management is simplified, and a customized label brings all needed information to the users.
The selection of the right sensor is based on two main criteria
- Patient group: neonates or adults/pediatric
- Use in clinical setting: single use/disposable or washable
Expiratory flow sensors
SFM3200-AW has been specifically designed for the expiratory position with a minimized pressure drop, washability, a heater and the capability to measure vapor-saturated gas/air.
Alternative options
- Proximal sensors can be used further from the patient in expiratory position, in case a disposable option is preferred.
- Inspiratory sensors can be placed in the expiratory position if measures are taken against contamination (like HMF filters) and condensation (water traps). Inspiratory sensors are not designed to be cleaned or disinfected and require non-condensing operating conditions.
Revision history
| Date | Version | Pages | Changes |
| July 2024 | 1.0 | all | First version |
| May 2025 | 1.1 | 1, 2, 4 | Delete EOL product SFM4200 |
| June 2025 | 1.2 | 5 | Include upcoming product SFM3505 |
| July 2025 | 1.3 | all | added SFM3505 in figure & text, removed SFM3200, SFM3019, greyed out SFM3100, SFM3119 in table |
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FAQ
Can Inspiratory sensors be cleaned or disinfected?
No, Inspiratory sensors are not designed to be cleaned or disinfected and should be operated under non-condensing conditions.
What is the recommended supply voltage for most of the Sensirion gas flow sensors?
The recommended supply voltage for most sensors is 3.3V within the specified range of 2.7V to 5.5V.
Documents / Resources
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SENSIRION SFM30 Series Gas Flow Sensors [pdf] Instruction Manual SFM3003-CL, SFM3003-CE, SFM3003-CET, SFM3013-CL, SFM3013-CLM, SFM30 Series Gas Flow Sensors, SFM30 Series, Gas Flow Sensors, Flow Sensors, Sensors |