SEMIPROBE PS4L-M6-PS4L-M8 High Frequency Wafer Probe Station
Product Usage Instructions
- Place the M-8 manual probe station on a stable surface.
- Ensure all components are securely attached and aligned.
- Connect any necessary accessories such as manipulators or probe arms.
- Turn on the power to the probe station.
- Adjust the manual X-Y stage for quick movements across the wafer.
- Use the micrometer controls for precise probe tip alignment.
- Perform measurements on wafers or individual parts as needed.
Introduction
- Example configuration pictured above: M-8 manual probe station with a vibration isolation table incorporating a rapid advance wafer stage, 200 mm tilting chuck, platen with linear lift, DC manipulators, compound optics and CCTV system.
- PS4L systems are modular and configured to suit customers’ specific requirements, see below for more example applications and configurations.
MAJOR APPLICATIONS/MARKETS SERVED:
- Device Characterization, MEMS, Optoelectronics, HF/Microwave, High Power, Photovoltaic, Failure Analysis, Research, Material Science and more.
- The SemiProbe M-8 is the most modular and flexible 200 mm manual probe system available today.
- It is built using our patented Probe System for Life (PS4L) architecture, which provides unsurpassed flexibility and significant capital equipment savings.
- With the PS4L, customers can purchase a manual 200 mm system that meets their precise specifications and requirements.
- The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe’s patented adaptive architecture.
- Unlike traditional probe systems, all foundation modules – bases, stages, chucks, microscope mounts, microscope movements, optics, manipulators, and more – are interchangeable, making the PS4L the consummate solution for many different applications and budgets.
- This unique modular design enables customers to acquire test capabilities that precisely match their requirements.
- More importantly, as the environment or test conditions change, the PS4L can easily be field-upgraded to meet these new demands.
- With this design philosophy, PS4L customers realize substantial time and cost savings over traditional probe systems because they do not need to invest in a new platform when wafer size, levels of automation, or test requirements change.
- A complete line of accessories is available for all systems including probe card holders, manipulators, probe arms & bases, probe tips, thermal chucks, environmental chambers, lasers, optics, CCTV systems, vibration isolation tables, dark boxes,s and more.
FEATURES & BENEFITS
- 200 mm manual system with an upgrade path to a 200 mm semiautomatic system
- All key components are interchangeable which enables the system to easily be configured to meet applications and budgets – present and future.
- Software and hardware modules provide a perpetual field upgrade path.
Semiautomatic & Automatic Configurations
PROBE SYSTEM FOR LIFE (PS4L): Manual, Semiautomatic & Automatic Configurations
- SemiProbe’s PS4L-M manual range of wafer probe equipment is ideal for customers that require advanced wafer probing equipment without motorized device alignment.
- A rapid advance manual X-Y stage enables quick stage movements across the wafer, with fine micrometer controls for precise probe tip alignment.
- As the user’s environment or test requirements change, the PS4L manual systems can be field upgraded with enhanced features or levels of automation, turning a manual prober into a semiautomatic or even fully automatic system.
PROBE SYSTEM FOR LIFE – MANUAL (PS4L-M): Example Customer Configurations
PS4L-M8 Configured for High Frequency Test
- The customer required a general-purpose 200 mm manual high frequency (HF) wafer probe station designed to perform measurements on whole wafers and on individual diced parts mounted on tape, over a variety of higher frequency ranges.
- ‘The configuration included individual manual manipulators with standard west/east HF probe arms for GS, SG, GSG, differential, and multi-contact wedges operating from DC to 40 GHz. In addition, the customer needed the ability to add manual manipulators for DC bias and a probe card holder for probe cards.”
PS4L-M8 Configured for Double-Sided Test
- The customer required a manual double-sided probe station (DSP) system to test silicon photonic chips and wafers using probe cards and manipulators.
- The top side of the device would be biased, and the backside of the device had a light output that was captured by a detector. The detector was mounted on a manual X, Y, Z and theta stage.
- The devices tested had a variety of dimensions, so a universal mechanically clamping chip carrier was designed to hold the devices. Carriers for different-size wafers were also required.
PS4L-M6 Configured for Magnetic Stimulation
- The customer required a magnetic stimulation manual probe station to test 150 mm MRAM wafers using a magnet placed underneath the device that could be moved in X, Y, Z and theta.
- The device would be contacted from the top with up to five manual three-axis manipulators with coaxial probe arms and DC probes while being stimulated by the magnet located beneath the device.
- The customer also needed the ability to test the devices from the top at temperatures ranging from ambient to 225 °C.
PS4L-M6 Configured for High Power Testing
- The customer required a flexible probing solution that would allow them to test wafers with voltage up to 3kV.
- Volume was low, therefore a manual probe system with manual manipulators and a variety of probe arms were desired.
- The probe system would get interfaced to a Keysight B1505 and due to lethal voltage levels required to test the devices, a safety enclosure was required.
- The system also had to pass a Canadian Standards Association (CSA Group) inspection.
PS4L-M8 Configured for MEMS Devices
- The customer required a 200 mm capable manual probe station to test silicon MEMS wafers, integrated with a Polytec Motion Analyzer.
- The motion analyzer would measure a variety of MEMS devices while in-plane and out-of-plane. The wafer chuck would need to be tilted in a variety of directions.
- The devices would be contacted with a probe card as well as individual manipulators with coaxial probe arms and DC probe needles.
- PS4L-M12 Configured for Device Characterization
- The customer required a 300mm manual wafer probe station for device characterization.
- Due to initial demand, a manual system was purchased that would later be automated as volumes and requirements increased.
- Configured on an antivibration table, the system included a compound microscope with four turrets capable of up to 4000x magnification.
- Four coaxial DC probe arms and individual manipulators were used to connect the devices under test.
SPECIFICATIONS
| SPECIFICATIONS | |
| Dimensions | 900 mm x 650 mm x 750 mm (35.5” x 25.4” x 29.5”) (W,H, L) – with optics |
| Weight | 75 Kg (165 lbs.) |
| Chuck Stage XY Movement | Rapid align with coarse and fine stage movements – coarse >200 mm, fine is 25 mm (X, Y) |
| Travel: Fine X, Y stage movement of 25 mm via precision micrometers | |
| Planarity: +/- 7.5 μm over a travel range | |
| Resolution: 5 μm | |
| Stage Types: Rapid Align (standard), coaxial and programmable (optional) | |
| Chuck Stage Z Movement | Z Travel: >20 mm with a precision micrometer |
| Theta Movement | Travel: Coarse (360 degrees) and fine (>10 degrees) with theta locking knob |
| Chucks | Vacuum or mechanical clamping, round or square, triaxial, HF, HV/HC, ambient, thermal & custom |
| Handle die, waffle packs, sawn wafers on the frame, broken wafers, and full wafers up to 200 mm | |
| Nickel-plated steel with concentric vacuum rings (standard), and other plating materials are available | |
| Planarity: 5 μm | |
| Platen | Aluminum with stainless steel top with removable front wedge 360-degree manipulator placement |
| Manipulator fixation – magnetic (standard), vacuum (optional with vacuum manifold kit) | |
| Platen Movement | Platen Lift: Choice of fixed or adjustable (linear) |
| Adjustable: Coarse – 40 mm, Fine – 200 um contact/separation stroke via lever – lockable | |
| Microscope Mounting/Movement | Mounting – Boom, Post or Bridge |
| Movement – Manual or Programmable – 50 x 50 mm, 50 x 75 mm, 100 x 100 mm and 200 x 200 mm | |
| Microscope (Optics) | Stereo Zoom, Zoom Tube, A-Zoom or Compound Microscope |
| Utilities | Power: AC 110/220V AC 50-60 Hz 20A |
| Vacuum: 23 Hg or -0.8 bar | |
| Note: Data and specifications vary depending on probe system configurations and accessories | |
PHYSICAL DIMENSIONS
Distributed by:
- Authorised representative, for further information
Copyright 2024 SemiProbe, Inc.
All rights reserved. Probe System for Life and SemiProbe are registered trademarks. Lab Assistant, IRIS Wafer Inspection, and Pilot control software are trademarks of SemiProbe, Inc. All other trademarks are the property of their own respective owners.
CONTACT
- 276 East Allen Street, Winooski, VT 05404, US
- 802-860-7000
- info@semiprobe.com
- semiprobe.com
- enquiries@inseto.co.uk
- +44 (0)1264 334505
FAQ
- Q: Can the M-8 manual probe station be upgraded?
- A: Yes, the M-8 probe station can be field-upgraded with enhanced features or levels of automation to meet changing requirements.
- Q: What accessories are available for the M-8 probe station?
- A: A complete line of accessories including probe card holders, manipulators, probe arms & bases, probe tips, thermal chucks,\ environmental chambers, lasers, optics, CCTV systems, vibration isolation tables, dark boxes, and more are available for the M-8 probe station.
Documents / Resources
 |
SEMIPROBE PS4L-M6-PS4L-M8 High Frequency Wafer Probe Station [pdf] Instruction Manual PS4L-M6, PS4L-M8, PS4L-M6-PS4L-M8 High Frequency Wafer Probe Station, PS4L-M6-PS4L-M8, High Frequency Wafer Probe Station, Frequency Wafer Probe Station, Wafer Probe Station, Probe Station |