Bruker Contour X-200 Optical Profiler User Manual
Equipment Description
The Bruker Contour X-200 is a non-contact optical profiler designed for three-dimensional surface profile measurements. It utilizes two primary working modes: VSI (Vertical Shift Interference) and PSI (Phase Shift Interference).
Key Features:
- Phase shifting interferometry (PSI) for roughness and small steps (< 135 nm)
- Vertical scanning interferometry (VSI) for rough surfaces and steps up to 10 mm high
- PSI vertical resolution: <0.01 nm
- VSI Step Height Accuracy: <0.75 %
- Lateral resolution: 0.38 µm
- Location: Zone 15
The VSI mode, based on white light vertical scanning interferometry, is suitable for device measurements with a maximum measurable topography of 10mm. It may have limitations for measuring slopes depending on the optics' numerical aperture and surface roughness (as referenced in table 1, which is not included in this document). The PSI mode, employing optical phase-shifting, is optimized for roughness measurements where pixel-height differences are less than 135nm. The system supports automatic stitching to capture larger measurement areas.
[Image Description: A photograph of the Bruker Contour X-200 optical profiler. The instrument is a sophisticated, benchtop metrology system featuring a prominent optical head with objectives, a stage for sample placement, and a connected computer workstation displaying measurement data.]Principle
Bruker Contour X surface profiler systems are non-contact optical profilers that employ two distinct technologies to measure a wide range of surface heights.
- Phase shifting interferometry (PSI) mode: Allows measurement of smooth surfaces and small steps.
- Vertical scanning interferometry (VSI) mode: Enables measurement of rough surfaces and steps up to 10 millimeters high.
User Guide
- Login to the Bruker Contour X-200 using the zone 15 main PC.
- Caution: DO NOT PLACE ANY SAMPLE ON THE STAGE TO AVOID RISK OF COLLISION WITH OBJECTIVES.
- Open the Vision 64 Software on the X-200 PC. The software will initialize.
- Move the stage using the joystick until it is clear of the objectives. Keep the button on the joystick pressed for high-speed movement. Load the sample and activate the vacuum switch. Adjust the light intensity.
- In "Measurement Setup", configure the following parameters:
- Mode: Select VSI/USI for steps up to 10 mm, and PSI for roughness measurements and steps up to 135 nm.
- Lens: Choose the appropriate lens.
- Multiplier/FOV: Set the magnification and field of view.
- Focus on the sample surface using the rotating knob. Keep the "FAST" button pressed if needed to find the interference fringes.
- Note: An autofocus option is available. To use it, first approach the objective close to the sample, stopping before contact. Then, press "Autofocus". The objective will move upwards, minimizing collision risk.
- Reduce the number of fringes (to reduce sample tilt) by adjusting the corresponding knobs on the front and left of the stage holder. For VSI, aim for <15 fringes; for PSI, aim for 1 fringe. If measuring a step, it is recommended that the fringes are perpendicular to the step.
- In "Measurement Parameters", select:
- The speed of acquisition.
- The backscan distance (distance the objective travels upwards from the starting position before acquisition begins).
- The length of the measurement.
- Leave other parameters unchanged to begin.
- Click on "Single Acquisition".
- A live view of the acquisition can be monitored by selecting "Height Map" during the measurement.
- Data leveling is required to remove sample tilt and/or curvature. To perform this, right-click on "Terms Removal (F-Operator)" within the "Data Analyzer" tab. Select the desired leveling type and specify the regions for analysis by checking the "Use terms mask" option, then define the mask by clicking "Edit Mask".
