Sevenstar CS200-C MFC/MFM User's Manual

This user manual provides comprehensive guidance for the Sevenstar CS200-C Mass Flow Controller (MFC) and Mass Flow Meter (MFM). It details critical information for correct and safe operation, installation procedures, device functions, maintenance protocols, troubleshooting steps, and warranty services.

The CS200-C series MFC/MFM is engineered for demanding industrial applications, delivering high accuracy and interface flexibility. It finds extensive use in sectors such as semiconductor and IC fabrication, specialized materials science, chemical processing, pharmaceutical manufacturing, and environmental protection systems.

Key applications include microelectronic process equipment, vacuum deposition systems, optical fiber manufacturing, and various analytical instruments. The device supports multiple digital interfaces, including RS-485, DeviceNet, and ProfiBus, enhancing its integration capabilities.

For additional product information and support, please visit the official Sevenstar website at www.mfcsevenstar.cn.

Models: CS200-C High Purity Mass Flow Controller Gas Flowmeter, CS200-C, High Purity Mass Flow Controller Gas Flowmeter, Mass Flow Controller Gas Flowmeter, Controller Gas Flowmeter, Gas Flowmeter, Flowmeter

File Info : application/pdf, 41 Pages, 1.53MB

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SC142 CS200C User Manual2023.12(不涉密)

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Preview CS200-C MFC/MFM User's Manual by Sevenstar
Comprehensive user manual for the Sevenstar CS200-C Mass Flow Controller (MFC) and Mass Flow Meter (MFM). Covers installation, functions, maintenance, troubleshooting, and warranty information for industrial and semiconductor applications.