User Manuals, Instructions and Guides for Pluto products.
PLUTO NFD-100 SQF Flow Rate FOUP User Manual
Learn about the specifications and usage instructions for the NFD-100 SQF Flow Rate FOUP. This IoT device measures gas flow, dust quantity, and FOUP settling level. It includes features like a flow sensor monitor, particle counter, vacuum pump, and lithium-ion battery pack. Follow precautions for proper use.