Mass Flow Controllers Manuals / Datasheets / Instructions

SENSIRION SFC6xxx Series Mass Flow Controllers User Manual

SENSIRION SFC6xxx Series Mass Flow Controllers - Featured Image

Learn how to use SENSIRION's SFC6xxx and SFM6xxx I2C Interface for precise control of the SFC6000 and SFM6000 series mass flow controllers. Get specifications, pin assignments, and measurement modes in this comprehensive user manual.

SENSIRION SFC5400 Mass Flow Controllers User Guide

SENSIRION-SFC5400-Mass-Flow-Controllers-FEATURED

Learn about SENSIRION's high-precision mass flow controllers with state-of-the-art signal processing on a single chip. Choose the right model, such as the SFC5400 or SFC5500, for superior accuracy and repeatability. No recalibration needed. Find out more in the evaluation kit EK-F5x for the SFX5xxx series.