SFM3003-CL Series Gas Flow Sensors
User Guide
SFM3003-CL Series Gas Flow Sensors
Selection guide for Sensirion gas flow sensors
Finding the right flow sensor (SFM) for your medical ventilation or high flow device.
Our flow sensor portfolio offers a comprehensive range of gas flow sensors optimized for medical applications. The SFM product range is specifically engineered for medical ventilation, addresses all relevant flow monitoring requirements and is organized in three families, depending on the position of the sensor in the ventilation system:
- Inspiratory
- Expiratory
- Proximal
The figure below provides a first guideline to select a suitable sensor depending on the beforementioned position in the application.
At ambient pressure
| Form Factor | Digital | Analog |
| Compact | SFM33119 | SFM3100 |
| Medical cones | SFM3003, 3013, 3200 | SFM3020 |
At high pressure / gas mixing
Low flows < 50 slm
SFM4300
Expiratory
| Way of use | Humid patient gas |
| washable | SFM3200-AW |
| single-use | SFM3304-D |
Proximal
| Way of use | Adult | Neonatal |
| washable | SFM3300-AW | SFM3400-AW |
| single-use | SFM3304-D | SFM3400-D |
In addition, some sensors offer unique features and characteristics that may be considered during sensor selection. These features are summarized in the following while the table on page 4-6 provides a comprehensive overview.
Inspiratory flow sensors
Our inspiratory flow sensors are typically used inside the ventilator to measure the individual air/O2/heliox gas lines as well as the total flow of the mixed gas before delivery to the patient.
- Selection based on operating gage pressure¹
• > 1bar → SFM4300
• > 150mbar → SFM3013
• Lower operating pressure: all other sensors (SFM3003 family, SFM3100, SFM3119 and SFM3200). - Consider the following criteria according to your requirements to identify the most suitable sensor in the table on page 4:
• Form factor and size
• Mechanical connection
• Measured gases
• Flow range and range of best performance (low or high flows)
• Analog or digital output
• Special features like gas NTC temperature sensor etc.
If you identify more than one sensor option, it is recommended to evaluate the sensor(s) in your device as the specific device design can influence the measurement.
Proximal flow sensors
Gas flow sensors specifically designed to monitor flow in close proximity to the patient, where the following main challenges have been resolved by our portfolio:
- High humidity and condensation
All our proximal sensors are capable to measure saturated gas/air and feature a heater to prevent condensation at the sensor’s chip, therefore ensuring continued accuracy. - Contamination
We offer both single-use and washable sensors. - Sensor handling by medical personnel
All our proximal sensors feature a mechanical interface allowing a clip-on connection, easy to disconnect and reconnect. - Inspiration and expiration flow
All our proximal sensors allow bi-directional flow sensing. - Individual sensor packaging for single-use sensors
Individual sensors are protected against contamination from their production until their use by caregivers. Quality control is improved, supply chain management is simplified, and a customized label brings all needed information to the users.
The selection of the right sensor is based on two main criteria
- Patient group: neonates or adults/pediatric
- Use in clinical setting: single use/disposable or washable
Expiratory flow sensors
SFM3200-AW has been specifically designed for the expiratory position with a minimized pressure drop, washability, a heater and the capability to measure vapor-saturated gas/air.
Alternative options
- Proximal sensors can be used further from the patient in expiratory position, in case a disposable option is preferred.
- Inspiratory sensors can be placed in the expiratory position if measures are taken against contamination (like HMF filters) and condensation (water traps). Inspiratory sensors are not designed to be cleaned or disinfected and require non-condensing operating conditions.
| Form factor | Sensor | Measured gases | Flow range [slm] | Pressure drop @flow[slm] |
Typ. accuracy [%m.v.] @flow[slm] |
Recommended supply voltage (allowed) |
Special features |
| Inspiratory flow sensors | |||||||
| Medical cones 22mm (ISO5356) This form factor usually gives better accuracy at higher flows |
SFM3003-CL | • Air • O² • Air/O² mixtures |
-30 to +300 | @60: 80Pa @200: 500Pa |
@200: ±2% | 3.3V (2.7 – 5.5V) |
• Low pressure drop |
| SFM3003-CE | -150 to +300 | @60: 100Pa @200: 600Pa |
@200: ±2.5% | 3.3V (2.7 – 5.5V) |
• Extended negative flow range | ||
| SFM3003-CET | -150 to +300 | @60: 100Pa @200: 600Pa |
@200: ±2.5% | 3.3V (2.7 – 5.5V) |
• Extended negative flow range • NTC temperature sensor in gas path |
||
 |
SFM3013-CL | -30 to +300 | @60: 80Pa @200: 500Pa |
@200: ±2% | 3.3V (2.7 – 5.5V) |
• Low pressure drop • Higher pressure resistance up to 1bar gauge |
|
| SFM3013-CLM | Air/O²:-30 to +300 HeliOx: -30 to +200 |
@60: 80Pa @200: 500Pa |
@200: ±2% | 3.3V (2.7 – 5.5V) |
• Higher pressure resistance up to 1bar gauge • Additional HeliOx calibration |
||
| SFM3019 | -10 to +240 | @60: 80Pa @200: 500Pa |
@200: ±2% | 3.3V (2.7 – 5.5V) |
• See successor SFM3003-300-CL | ||
 |
SFM3020 | • Air • O² • Air/O² mixtures formula provided |
-10 to +160 | @60: 80Pa @200: 500Pa |
@160: ±2% | 5V | • Analog output 0.5 – 4.5V |
| SFM3200 | • Air • O² • Air/O² mixtures formula provided |
-100 to +250 | @60: 100Pa @200: 750Pa |
@100: ±3% | 5V | • See successor SFM3003-CL or CE | |
| Compact This form factor usually gives better accuracy at low flows/smaller offset |
SFM3100-VC | • Air • O² • Air/O² mixtures formula provided |
-24 to +240 | @60: 300Pa @200: 1600Pa |
@60: 2.5% | 5V (4.75 – 5.25V) |
• NTC temperature sensor in gas path • Analog output 0.095 – 2.45V • See successor SFM3119 (digital) |
 |
SFM3119 | • Air • O² • Air/ O² mixtures |
-10 to +240 | @60: 200Pa @200: 1600Pa |
@100: 2% | 3.3V (2.7 – 5.5V) |
• Digital output |
O-ring / Push-in Legris /Down-mount  |
SFM4300 | • Air • O² • CO² • N²O • Mixtures |
0 to 20 0 to 50 |
@20: 2500Pa @50: 10000Pa |
@20: 2% @50: 4% |
3.3V (3.0 – 5.5V) |
• Air, O², CO², N²O and mixtures up to 20slm • Air, O² and mixtures up to 50s lm • High resolution 0.4sccm for 20slm ranges • Operating pressures up to 7 bar |
| Expiratory flow sensors | |||||||
| Medical cones 22mm (ISO5356-1)  |
SFM3200-AW | • Air • O² • Air/ O² mixtures formula provided |
-100 to +250 | @60: 100Pa @200:750Pa |
@100: 3% | 5V | • Bidirectional • Autoclavable & cleanable • Integrated heater to prevent condensation |
| Medical cones 22mm (ISO5356-1)  |
SFM3300-D | -250 to +250 | -250 to +250 | @60: 180Pa @200: 1400Pa |
@100: 3% | 5V | • See successor SFM3304-D for OEM projects • Suitable for adults and children • Single-use • Integrated heater to prevent condensation • Available in catalog distribution |
| SFM3300-AW | -250 to +250 | -250 to +250 | @60: 180Pa @200: 1400Pa |
@100: 3% | 5V | • Suitable for adults and children • Autoclavable & cleanable • Integrated heater to prevent condensation |
|
| SFM3304-D | -250 to +250 | -250 to +250 | @60: 100Pa @200: 1150Pa |
@100: 3% | 3.3V (3.15 – 3.45V) |
• Improved independence to inlet conditions • Suitable for adults and children • Single-use • Integrated heater to prevent condensation • Includes individual sensor packaging • Only available for OEM projects |
|
15mm (ISO5356-1) |
SFM3400-D | -33 to + 33 | -33 to + 33 | @5: 100Pa @25: 900Pa |
@33: 3% | 5V | • Suitable for neonates • Single-use • Integrated heater to prevent condensation |
| SFM3400-AW | -33 to + 33 | -33 to + 33 | @5: 100Pa @25: 900Pa |
@33: 3% | 5V | • Suitable for neonates • Autoclavable & cleanable • Integrated heater to prevent condensation |
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Revision history
| Date | Version | Pages | Changes |
| Jul-24 | 1 | all | First version |
| May-25 | 1.1 | 1, 2, 4 | Delete EOL product SFM4200 |
© Copyright Sensirion AG 7/7
Documents / Resources
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SENSIRION SFM3003-CL Series Gas Flow Sensors [pdf] User Guide SFM3003-CL, SFM3003-CE, SFM3003-CET, SFM3013-CL, SFM3013-CLM, SFM3019, SFM3020, SFM3200, SFM3003-CL Series Gas Flow Sensors, SFM3003-CL Series, Gas Flow Sensors, Flow Sensors, Sensors |