SEMIPROBE PS4L-M Probe Station Instruction Manual
PROBE SYSTEM FOR LIFE – MANUAL PROBE STATION (PS4L-M)
The Probe System for Life (PS4L) family of wafer probing systems is designed based on SemiProbe’s patented adaptive architecture. Unlike traditional probe systems, all foundation modules – bases, stages, chucks, microscope mounts, microscope movements, optics, manipulators and more – are interchangeable, making the PS4L the consummate solution for many different applications and budgets.
- Configured to meet your application and budget
- All key components are interchangeable to adapt to application changes
- Designed to be perpetually field upgradeable
- The most modular & flexible system on the market
Microscope Mounts/Movements/Lifts:
- Mounts: Boom, Post or Bridge
- Movements: Manual, Programmable or Gantry
- Lifts: Manual, Programmable or Pneumatic
Optics:
- StereoZoom: Low Magnification (50x—100x)
- Large field of view (FOV)
- Large working distance (WD)
- Compound: High Magnification (>100x- 400x)
- Smaller field of view (FOV)
- Smaller working distance (WD)
- Specialty: Zoom-Tube, A-Zoom
Platens:
- Fixed—No movement
- Linear Lift with Contact/Separation Stroke
Bases:
- Breadboards—Bench top
- M6 Holes, 25 mm on Center
- Tables—Vibration Isolation
- Several sizes and shapes available
Wafer Chucks:
- Round, Square or Lift-Pin
- 50 mm to >450 mm
- Vacuum Rings or Vacuum Holes
- Coaxial, Triaxial, HF or Double-Sided
- Non-Thermal & Thermal
Wafer Stages:
- Manual & Programmable
- 50 mm to >450 mm
- Upgrade Path:
- Manual to Manual—larger travel
- Manual to Semiautomatic
- Semiautomatic to Automatic
Accessories:
- CCTV Systems—Color Cameras & Monitors
- Manipulators—Manual & Programmable
- Probe Arms—coax, triax, HF & Kelvin
- Bases—Magnetic, Vacuum or Bolt down
- Probe Card Holders
- Probe Tips
- Localized Environmental Chamber (LEC)
- Laser Cutter
- Vacuum Pumps & Air Compressors
Copyright 2024 SemiProbe, Inc.
All rights reserved. Probe System for Life and SemiProbe are registered trademarks. Lab Assistant, IRIS Wafer Inspection and Pilot control software are trademarks of SemiProbe, Inc. All other trademarks are the property of their own respective owners.
276 East Allen Street, Winooski, VT 05404, US | 802-860-7000 | info@semiprobe.com | semiprobe.com
Documents / Resources
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SEMIPROBE PS4L-M Probe Station [pdf] Instruction Manual PS4L-M, PS4L-M Probe Station, Probe Station, Station |