User Manual for mks models including: MTN-BLHS Series Mid Travel Steel Linear Stages with Brushless Motor, MTN-BLHS Series, Mid Travel Steel Linear Stages with Brushless Motor, Linear Stages with Brushless Motor, Stages with Brushless Motor, Brushless Motor

MTN-BLHS User's Manual

Newport User's Manual

Bernard BARTH

MTN-BLHS User's Manual


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MTN-BLHS - User s Manual ?3
MTN-BLHS Series
Mid-Travel Steel Linear Stages with Brushless Motor

GU NS

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ARANTE CIFICATIO

USER'S MANUAL

A1254D

MTN-BLHS Series
Warranty

Mid-Travel Steel Linear Stages with Brushless Motor

CAUTION
Please return equipment in the original (or equivalent) packing.
You will be responsible for damage incurred from inadequate packaging if the original packaging is not used.

Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport's discretion.
To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated service facility. Repairs will be made and the instrument returned, transportation prepaid. Repaired products are warranted for the balance of the original warranty period, or at least 90 days.
Limitation of Warranty This warranty does not apply to defects resulting from modification or misuse of any product or part.
CAUTION Warranty does not apply to damages resulting from: · Incorrect usage:
­ Load on the stage greater than maximum specified load. ­ Carriage speed higher than specified speed. ­ Improper grounding.
¬ Connectors must be properly secured. ¬ When the load on the stage represents an electrical risk, it must
be connected to ground. ­ Excessive or improper cantilever loads. · Modification of the stage or any part thereof.
This warranty is in lieu of all other warranties, expressed or implied, including any implied warranty of merchantability or fitness for a particular use. Newport Corporation shall not be liable for any indirect, special, or consequential damages.
© 2018 by Newport Corporation, Irvine, CA. All rights reserved. Original instructions. No part of this document may be reproduced or copied without the prior written approval of Newport Corporation. This document is provided for information only, and product specifications are subject to change without notice. Any change will be reflected in future publishings.

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Table of Contents

Mid-Travel Steel Linear Stages with Brushless Motor

Warranty .................................................................................................................ii EC Declaration of Conformity...............................................................................v Definitions and Symbols......................................................................................vii Warnings ..............................................................................................................viii Caution ...................................................................................................................ix
1.0 -- Introduction.................................................................................1
2.0 -- Description ...................................................................................2
2.1 Design Details ............................................................................................2
3.0 -- Characteristics ............................................................................3
3.1 Definitions ..................................................................................................3 3.2 Mechanical Specifications .......................................................................4 3.3 Load Specification Definitions.................................................................4 3.4 Load Characteristics and Stiffness .........................................................5 3.5 Stage Weights ............................................................................................5
4.0 -- Drive and Motor.........................................................................5
4.1 Brushless Motor Characteristics ............................................................5 4.2 Command Signals......................................................................................6 4.3 Sensor Position..........................................................................................7 4.4 Feedback Signal Position .........................................................................7 4.5 Pinouts........................................................................................................8 4.6 MCAB-3-B Cable.........................................................................................8
5.0 -- Connection to Newport Controllers ................................9
5.1 Warnings on Controllers ..........................................................................9 5.2 Connection...............................................................................................10 5.3 Cables .......................................................................................................10
6.0 -- Connection to Non-Newport Electronics ....................11
6.1 Connections .............................................................................................11
7.0 -- Dimensions.................................................................................12
8.0 -- Accessories .................................................................................13
8.1 EQ160 Bracket .........................................................................................13 8.2 MTN-BP Base Plate..................................................................................14 8.3 MTN-TP Top Plate...................................................................................14

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9.0 -- Maintenance ..............................................................................15
9.1 Maintenance ............................................................................................15 9.2 Repair .......................................................................................................15 9.3 Calibration ...............................................................................................15
Service Form .........................................................................................................17

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EC Declaration of Conformity

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UK Declaration of Conformity

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Definitions and Symbols

The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur.
General Warning or Caution

The exclamation symbol may appear in warning and caution tables in this document. This symbol designates an area where personal injury or damage to the equipment is possible. The following are definitions of the Warnings, Cautions and Notes that may be used in this manual to call attention to important information regarding personal safety, safety and preservation of the equipment, or important tips.
WARNING Warning indicates a potentially dangerous situation which can result in bodily harm or death.
CAUTION Caution indicates a potentially hazardous situation which can result in damage to product or equipment.
NOTE Note indicates additional information that must be considered by the user or operator.
European Union CE Mark

The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European Union (CE) regulations and recommendations.
Warnings and Cautions
ATTENTION This stage is a Class A device. In a residential environment, this device can cause electromagnetic interference. In this case, suitable measures must be taken by the user.

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Warnings

Mid-Travel Steel Linear Stages with Brushless Motor

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WARNING The motion of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved.
WARNING Do not use this stage when its motor is emitting smoke or is unusually hot to the touch or is emitting any unusual odor or noise or is in any other abnormal state. Stop using the stage immediately, switch off the motor power and then disconnect the electronics power supply. After checking that smoke is no longer being emitted contact your Newport service facility and request repairs. Never attempt to repair the stage yourself as this can be dangerous.
WARNING Make sure that this stage is not exposed to moisture and that liquid does not get into the stage. Nevertheless, if any liquid has entered the stage, switch off the motor power and then disconnect the electronics from power supply. Contact your Newport service facility and request repairs.
WARNING Do not insert or drop objects into this stage, this may cause an electric shock, or lock the drive. Do not use this stage if any foreign objects have entered the stage. Switch off the motor power and then disconnect the electronics power supply. Contact your Newport service facility for repairs.
WARNING Do not place this stage in unstable locations such as on a wobbly table or sloping surface, where it may fall or tip over and cause injury. If this stage has been dropped or the case has been damaged, switch off the motor power and then disconnect the electronics power supply. Contact your Newport service facility and request repairs.
WARNING Do not attempt to modify this stage; this may cause an electric shock or downgrade its performance.
WARNING Do not exceed the usable depth indicated on the mounting holes (see section "Dimensions"). Longer screws can damage the mechanics or cause a short-circuit.
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Caution

Mid-Travel Steel Linear Stages with Brushless Motor

CAUTION Do not place this stage in a hostile environment such as X-Rays, hard UV,... or in any vacuum environment (except vacuum compatible versions).
CAUTION Do not place this stage in a location affected by dust, oil fumes, steam or high humidity. This may cause an electric shock.
CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures. This may cause an electric shock. · Operating temperature: +10 to +35 °C · Storage temperature: -10 to +40 °C (in its original packaging) · Vacuum compatible versions can be steamed at +60 °C
CAUTION Do not move this stage if its motor power is on. Make sure that the cable to the electronics is disconnected before moving the stage. Failure to do so may damage the cable and cause an electrical shock.
CAUTION Be careful that the stage is not bumped when it is being carried. This may cause it to malfunction.
CAUTION When handling this stage, always unplug the equipment from the power source for safety.
CAUTION When the carriage is in its end-of-run position, it is strongly recommended not to go beyond this point as this may damage the stage mechanism.
CAUTION Contact your Newport service facility to request cleaning and specification control every year.

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Mid-Travel Steel Linear Stages with Brushless Motor MTN-BLHS Series

1.0 --Introduction

This manual provides operating instructions for the MTN-BLHS stage that you have purchased.

MTN-BLHS Series linear stages.
RECOMMENDATION We recommend you read carefully the chapter "Connection to electronics" before using the MTN-BLHS stage.

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Mid-Travel Steel Linear Stages with Brushless Motor

2.0 --Description

MTN-BLHS are reliable all-steel construction stages with excellent stiffness, load capacity and thermal stability. They are ideal for applications that require moving heavy loads at high-speed with very fine repeatability.
Available in 100, 200 and 300 mm travel versions, the MTNBLHS stages can bear up to 100 kg centered load, when mounted horizontally. The ball screw drive along with linear guides guarantee fast, smooth and accurate motion trajectory, while the non migrating ball cage design prevents from drift.

2.1

Design Details

Base Material Bearings Drive Mechanism Drive Screw Pitch Feedback Limit Switches Origin Cable

Stainless Steel Linear ball bearings with anti- cage migration Ballscrew drive 4 mm 40,000 cts/rev. Optical Optical, centered 3m

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3.0 --Characteristics

3.1

Definitions

Specifications of our products are established in reference to ISO 230 standard part II "Determination of accuracy and repeatability of positioning numerically controlled axes".

This standard gives the definition of position uncertainty which depends on the 3 following parameters:

Absolute Accuracy Difference between ideal position and real position.

Accuracy
Difference between ideal position and real position after the compensation of linear errors.
Linear errors include: cosine errors, inaccuracy of screw or linear scale pitch, angular deviation at the measuring point (Abbe error) and thermal expansion effects. All Newport motion electronics can compensate for linear errors.
The relation between absolute accuracy and on-axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor x Travel

Repeatability Ability of a system to achieve a commanded position over many attempts.

Reversal Value (Hysteresis)
Difference between actual position values obtained for a given target position when approached from opposite directions.

Minimum Incremental Motion (MIM or Sensitivity)
The smallest increment of motion a device is capable of delivering consistently and reliably.

Resolution
The smallest increment that a motion device can theoretically move and/or detect. Resolution is not achievable, whereas MIM, is the real output of a motion system.
Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it moves.

The testing of accuracy, repeatability, and reversal error are made systematically with test equipment in controlled environment (20 ±1 °C).
A linear cycle with 21 data points on the travel and 4 cycles in each direction gives a total of 168 points.

Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com

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3.2
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Mechanical Specifications

Travel Range (mm) MIM (µm) Uni-directional Repeatability, Typical (Guaranteed) (1) (µm) Bi-directional Repeatability, Typical (Guaranteed) (1) (µm) Accuracy, Typical (Guaranteed) (1) (µm) Maximum Speed (mm/s) Pitch, Typical (Guaranteed) (1) (2) (µrad) (3)
Yaw, Typical (Guaranteed) (1) (2) (µrad) (3)

100; 200; 300 0.3
±0.2 (±0.25)
±0.3 (±0.5)
±2.0 (±4.0) 250
MTN100BLHS: ±10 (±20) MTN200BLHS: ±20 (±40) MTN300BLHS: ±30 (±60) MTN100BLHS: ±10 (±17) MTN200BLHS: ±17 (±35) MTN300BLHS: ±30 (±53)

1) For the definition of Typical and Guaranteed specifications see "Motion Basics Terminology & Standards" Tutorial at www.newport.com
2) Over 100 mm travel. 3) To obtain arcsec units, divide mrad value by 4.8.

CAUTION
To reach specifications stated, stages must be fixed on a plane surface with a flatness of 5 µm.

3.3

Load Specification Definitions

Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
This value is given with speed and acceleration specified for each stage, and with a load perpendicular to bearings.

Axial Load Capacity (±Cx) Maximum load along the direction of the drive train.

Off-Centered Load (Q) Maximum cantilever-load the bearing can move: Q Cz ÷ (1 + D/100) D: Cantilever distance.

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ky X

3.4

Load Characteristics and Stiffness

Z
Cz + Cx

D Q
kx Y

­ Cx

Cz, Normal centered load capacity on bearings Cx, Direct load capacity on X axis -Cx, Inverse load capacity on X axis kax, Compliance in roll kay, Compliance in pitch kaz, Compliance in yaw Q, Off-center load where: D = Cantilever distance in mm

1000 N 200 N 200 N 4 µrad/Nm 6 µrad/Nm 5 µrad/Nm Q Cz ÷ (1 + D/100)

CAUTION
To achieve maximum speed and acceleration performance with the set of parameters provided by default, it is recommended not to exceed 35 kg load on a single-axis and 20 kg on an XY configuration.

3.5

Stage Weights

Weights indicated in the table below are average values.

MTN100BLHS MTN200BLHS MTN300BLHS MCAB-3-B 3-meter Cable

Weight [lb (kg)] 23.15 (10.5) 28.44 (12.9) 33.95 (15.4) 1.54 (0.7)

4.0 --Drive and Motor

4.1

Brushless Motor Characteristics

Number of poles Number of phases Rated voltage Rated speed Rated torque Peak torque Peak current Resistance per phase Inductance per phase Torque constant Electromotive force

4 3 36 V 4,000 rpm 0.32 Nm 1 Nm 16.5 A 0.45  1.4 mH 0.063 Nm/A 6.6 V/krpm

CAUTION
High RMS current will generate motor heating which will degrade characteristics of the stage, such as repeatability, accuracy, etc...

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4.2

Command Signals

Direction +

Amplitude

2 1.5
1 0.5
0 -0.5
-1 -1.5
-2 0.001

Induced Voltages + Direction

L-M

M-N

L-N

0.251

0.501 Period

0.751

NOTE
The values above indicate voltage induced by energized coil of one phase on next phase coil. A positive value for L-M would indicate a higher voltage on L relative to M.

Direction +

Amplitude

7 6 5 4 3 2 1 0 0.001

Hall Voltages + Direction

Hall L

Hall M

Hall N

0.251

0.501 Period

0.751

NOTE Motor phases and Hall signals are shifted in phase by 30°.

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4.3

Sensor Position

­ EOR Limit

Home Position (Origin) at Center of Travel Range

+ EOR Limit
Mechanical Zero
Index Pulse

Index Pulse

Direction ­

Stage Travel Range MOTION

Direction +

End-of-Run and Mechanical Zero are 5 V open collector type.

The Index Pulse provides a repeatable Home Position at ±1 step.

CAUTION
"End-of-Run" and "Mechanical Zero" are active signals and should not be connected to any other source.

4.4

Feedback Signal Position

1234

Encoder 1 Phase A
0
Encoder 1 Phase A
0
Encoder 1 Phase B
0
Encoder 1 Phase B
0

Direction +

Direction +

Direction ­

MOTION

Direction +

The incremental sensor consists of an optical scale and an encoder head. When the carriage moves, the encoder head generates square signals in quadrature and sends to pins #19, #20, #23 and #24 of the SUB-D25 connector.

NEWPORT CONNECTOR PIN # STAGE SUD-D25 OR SUB-D15

Encoder Phase A 19

13

Encoder Phase A 23

6

Encoder Phase B 20

14

Encoder Phase B 24

7

Index Pulse Phase I 15

15

Index Pulse Phase I 25

8

21

12

22

5

USER

Output Signals

} +5 V 5%
150 mA max. 0 V

Encoders & Sensors Power Supply

"Encoder" and "Index Pulse" are "differential pair" (type RS-422) type output signals. Using these signals permits a high immunity to noise. Emission circuits generally used by Newport are 26LS31 or MC3487. Reception circuits to use are 26LS32 or MC3486.

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4.5

Pinouts

The pinout diagram for the MTN-BLHS stage SUB-D25M connector is shown below.

MTN-BLHS

1

Phase L Motor

2

Phase L Motor

3

N.C.

4

N.C.

5

Phase M Motor

6

Phase M Motor

7

Phase N Motor

14

1

8

9

Phase N Motor Thermistor

10

Hall L

11

Hall M

12

Hall N

13

Mechanical Zero

14

Ground

15

Index Pulse I

25

16 13

17

0 V + End-of-Run

18

­ End-of-Run

19

Encoder Phase A

20

Encoder Phase B

21

+5 V

22

0 V

23

Encoder Phase /A

24

Encoder Phase /B

25

Index Pulse /I

4.6

MCAB-3-B Cable

A 3-meter MCAB-3-B cable is supplied with each stage (see section 5.3: "Cables").

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5.0 --Connection to Newport Controllers

5.1

Warnings on Controllers

Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. Read the controller user's manual carefully before operating the instrument and pay attention to all written warnings and cautions.

WARNING Disconnect the power plug under the following circumstances: · If the power cord or any attached cables are frayed or damaged in
any way. · If the power plug is damaged in any way. · If the unit is exposed to rain, excessive moisture, or liquids are spilled
on the unit. · If the unit has been dropped or the case is damaged. · If you suspect service or repair is required. · Whenever you clean the electronics unit.

CAUTION To protect the unit from damage, be sure to: · Keep all air vents free of dirt and dust. · Keep all liquids away from the unit. · Do not expose the unit to excessive moisture (85% humidity). · Read this manual before using the unit for the first time.

WARNING All attachment plug receptacles in the vicinity of this unit are to be of the grounding type and properly polarized. Contact your electrician to check your receptacles.
WARNING This product is equipped with a 3-wire grounding type plug. Any interruption of the grounding connection can create an electric shock hazard. If you are unable to insert the plug into your wall plug receptacle, contact your electrician to perform the necessary alterations to ensure that the green (green-yellow) wire is attached to earth ground.
WARNING This product operates with voltages that can be lethal. Pushing objects of any kind into cabinet slots or holes, or spilling any liquid on the product, may touch hazardous voltage points or short out parts.

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5.2

Connection

There is a label on every stage indicating its part and serial numbers.

WARNING Always turn the controller's power OFF before connecting to a stage.

NOTE
These stages are ESP compatible. Enhanced System Performance is Newport's exclusive technology that enables Newport ESP motion controllers to recognize the connected Newport ESP stage and upload the stage parameters. This ensures that the user can operate the motion system quickly and safely.

5.3

Cables

All MTN-BLHS stages are delivered with MCAB-3-B 3-meter cables with a SUB-D25M connector for direct connection to Newport Controllers.

2.28 (58) DISCONNECTED

LOCKING KNOBS

ø.39 (10)

CABLE CONNECTOR

STAGE

SUB-D25 CONNECTOR SHOWN
DIMENSIONS IN INCHES (AND MILLIMETERS)
BENDING STATIC CABLE: 1.50 (38) CABLE IN MOTION: 3.78 (96)
WARNING This cable is shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable).
WARNING Keep the motor cables at a safe distance from other electrical cables in your environment to avoid potential cross talk.

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6.0 --Connection to Non-Newport Electronics

6.1

Connections

WARNING
Newport is not responsible for malfunction or damage of MTN-BLHS stages when used with non-Newport controllers.

WARNING
Newport guarantees " " compliance of MTN-BLHS stages only if used
with Newport cables and controllers.
It is the customer's responsibility to modify the cable and take care of sensor signal connections, when using the stage with non-Newport controllers.
End-of-Runs and Mechanical Zero are open collector type with a 5.6 V protective Zener diode.

NEWPORT STAGE

Iin max.: 16 mA V max.: 5.25 V

5.6 V

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7.0 --Dimensions
2.28 (58)

4 HOLES M4 THD DEPTH: .31 (8), ON SQR 1.34 (34)

9 HOLES M6 THD DEPTH: .39 (10), .98 (25) SPACING
4 HOLES M6 THD, ON SQR 2.48 (63) C'BORED FOR CAPTIVE SCREWS

6.30

6.40

(160)

(162.5)

2.05 (52)

2 HOLES ø.41 (10.5) ACCESS FOR MOUNTING TO BODY ON SQR 1.98 (50.4)

L2

SUB-D25M CONNECTOR

2 HOLES ø.41 (10.5) ACCESS FOR MOUNTING TO BODY ON SQR 2.48 (63)

MODEL SHOWN: MTN200BLHS
DIMENSIONS IN INCHES (AND MILLIMETERS)

BOTH SIDES: 4 HOLES M6 THD, DEPTH: .31 (8) FOR ACCESSORIES AND HANDLING

SQR 3.54 (90)

BOTH SIDES: HOLE M5 THD, DEPTH: .39 (10) FOR GROUNDING

.79

.31 (8)

(20)

B

2.36 (60)

B

A

4 HOLES ø.30 (7.5) FOR MOUNTING ON SQR 1.97 (50) AND SQR 2.00 (50.8)
4 HOLES M6 THD DEPTH: .39 (10), ON SQR 5.04 (128)

L1
HOLES ø.41 (10.5) ACCESS FOR CAPTIVE SCREWS TO CARRIAGE ON SQR 2.48 (63)
4 HOLES ø.30 (7.5) FOR MOUNTING ON SQR 2.48 (63)

2.66 (67.5)

7.07 (179.5)

1.57 (40)
2.33 (59.2)

1.97

2.00

(50)

(50.8)

4 HOLES

FOR M6 SCREWS

C

D

4 HOLES FOR 1/4-20 SCREWS

MODEL MTN100BLHS MTN200BLHS MTN300BLHS

A 2.95 (75) 3.54 (90) 3.54 (90)

B .20 (56) 4.69 (119) 6.14 (156)

C

D

L1

L2

­

­ 11.81 (300) 5.94 (151)

3.94 (100) 6.00 (152.4) 15.75 (400) 7.91 (201)

9.84 (250) 8.00 (203.2) 19.69 (500) 9.88 (251)

MTN100BLHS

MTN300BLHS

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8.0 --Accessories

8.1

EQ160 Bracket

The EQ160 right-angle brackets (to order separately) can be used for vertical mounting configurations of a MTN-BLHS stage.

NOTE The carriage can drift once power is turned off.

BOTH SIDES: 3 Hc M5 SCREWS
FOR SETTING THE SQUARENESS ON MTN AND MTM STAGES
4.49 (114) 6.57 (167)

SQR 3.94 (100)

2 x 9 HOLES M6 THD, .98 (25) SPACING
FOR FIXING ILS STAGES

SQR 2.48 (63) 5.04 (128) 3.94 (100)

.47 (12)
3.86 (98)
2 x 4 HOLES ø.26 (6.6) C'BORED ø.43 x .25 (11 x 6.4)
2 x 8 HOLES ø.26 (6.6) C'BORED ø.43 x .25 (11 x 6.4) FOR FIXING MTN OR MTM STAGES

2.36 (60)
5.04 (128)

7.28 13.6

(185) (345)

5.04

(128)

7.13 (181)

4.17

3.54

(106)

(90)

MTN300 MTM250 MTN200/MTM200
MTN100
.47 (12)

5.04 (128)
5.04 (128)
8.11 6.14 (206) (156) 4.72 (120)

6.50 (165) 7.44 (189)

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8.2

MTN-BP Base Plate

The MTN-BP base plate must be to ordered separately.

4 HOLES ø.26 (6.6), ON SQR 7.87 (200) C'BORED ø.43 x .26 (11 x 6.5)

.39

(10)

4 HOLES ø.26 (6.6),

ON SQR 2.48 (63)

C'BORED ø.43 x .26 (11 x 6.5)

2 HOLES ø.47 (12), 2.48 (63) SPACING

SQR 8.66 (220)

4 HOLES ø.26 (6.6) ON 6.0 x 8.0 (152.4 x 203.2) C'BORED ø.43 x .26 (11 x 6.5)
NOTE For an XY assembly, the lower stage must be equipped with a MTN-BP base plate. It also allows to fasten the stage to an interface with an imperial hole pattern.

8.3

MTN-TP Top Plate

This MTN-TP top plate is necessary if you need an interface with an imperial hole pattern (to be to ordered separately).

.47 (12)

21 HOLES 1/4-20 THD, 1.00 (25.4) SPACING
SQR 4 (120)

4 HOLES ø.26 (6.6), ON SQR 2.48 (63) C'BORED ø.43 x .26 (11 x 6.5)

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9.0 --Maintenance

RECOMMENDATION
Please contact Technical Sales Support team for recommendations on application specific maintenance.

9.1

Maintenance

The MTN-BLHS stage requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution.

PRECAUTIONS
The MTN-BLHS stage must be used or stocked in a clean environment, without dust, humidity, solvents or other substances.

RECOMMENDATION
It is recommended to return the stage to Newport for re-lubrication after 2000 hours of use.
If the MTN-BLHS stage is mounted on a workstation and cannot be easily removed, please contact Newport's After Sales Service for further instructions.

9.2

Repair

CAUTION Never attempt to disassemble a component of the stage that has not been covered in this manual. To disassemble a non specified component can cause a malfunction of the stage.
If you observe a malfunction in your stage, please contact us immediately to arrange for a repair.

CAUTION
Any attempt to disassemble or repair a stage without prior authorization will void your warranty.

9.3

Calibration

CAUTION
It is recommended to return your MTN-BLHS stage to Newport once a year for recalibration to its original specifications.

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MTN-BLHS Series

Mid-Travel Steel Linear Stages with Brushless Motor

A1254D0 - EDH0410En1040 -- 08/23

16

Service Form

Your Local Representative Tel.: Fax:

Name: Company:

Return authorization #:
(Please obtain prior to return of item)

Address:

Date:

Country:

Phone Number:

P.O. Number:

Fax Number:

Item(s) Being Returned:

Model #:

Serial #:

Description:

Reasons of return of goods (please list any specific problems):

17

A1254D0 - EDH0410En1040 -- 08/23

Visit MKS I Newport Online at: www.newport.com

North America & Asia Newport Corporation 1791 Deere Ave. Irvine, CA 92606, USA
Sales Tel.: +1 (949)-863-3144 e-mail: sales@newport.com
Technical Support Tel.: +1 (949)-863-3144 e-mail: tech@newport.com
Service, RMAs & Returns Tel.: +1 (949)-863-3144 e-mail: service@newport.com

Europe MICRO-CONTROLE Spectra-Physics S.A.S 7 rue des Plantes 45340 Beaune-la-Rolande France
Sales Europe (EMEAI) Tel.: +49 (0) 6151-708-0 e-mail: germany@newport.com
Sales France Tel.: +33 (0)1 60 91 68 68 e-mail: france@newport.com
Sales UK Tel.: +44 (0)1235 432 710 e-mail: uk@newport.com
Technical Support e-mail: tech_europe@newport.com
Service & Returns Tel.: +33 (0)2 38 40 51 55 DST-BEA-RMA-service@newport.com



References

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