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MEMS Module User's Guide

This user's guide provides comprehensive information on the MEMS Module for COMSOL Multiphysics. It introduces users to the simulation of Micro-Electro-Mechanical Systems (MEMS), detailing various physics interfaces and modeling techniques essential for designing and analyzing microsystems.

The MEMS Module extends COMSOL Multiphysics' capabilities, offering specialized tools for phenomena crucial in MEMS design, including:

Electromechanics
Thermoelasticity
Piezoresistivity
Microfluidics
Electrostatics and Electric Currents
Structural Mechanics
Electrical Circuits and SPICE integration

This guide serves as a reference for both fundamental concepts and advanced modeling strategies, enabling users to effectively simulate complex MEMS devices such as sensors, actuators, and microfluidic systems.

For further information, support, and product details, visit the COMSOL website.

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