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Installation Guide for Honeywell models including: Zephyr Digital Aiflow Snesors, 50080060, HAF Series High Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM
HAF Series - Low Flow - Airflow Sensors | Honeywell
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DocumentDocumentInstallation Instructions for the Honeywell ZephyrTM Digital Aiflow Sensors HAF SeriesHigh Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM Issue D 50080060 General Information CAUTION IMPROPER USE Do not use these products to sense liquid flow. Failure to comply with these instructions may result in product damage. CAUTION PRODUCT DAMAGE Do not dissamble these products. Failure to comply with these instructions may result in product damage. CAUTION IMPROPER CLEANING · Avoid cleaning the sensor; however, if it must be cleaned, use ispropyl alcohol and dry the device throroughly before use. Cap the ports or connect housing to the ports before cleaning the sensor with alcohol. Using alcohol may remove the text on the sensor label; however, the label ID is hard-coded inside the sensor. · Do not use III Tri-cholorethane, methylene chloride, methyl pyrrolidone, or any oxidizing type acide such as formic acid. · Do not use ultrasonic cleaning. Failure to comply with these instructions may result in product damage. Table 1. Materials Specifications Characteristic Parameter Wetted materials glass reinforced (GR) thermoplastic polymer, gold, silicon, silicon dioxide, silicon nitride, epoxy, PCB epoxy composite Housing Substrate Adhesives GR thermoplastic polymer PCB epoxy Electronic components silicon, gold Compliance RoHS, WEEE Table 2. Environmental Specifications Characteristic Parameter Humidity 0% to 95% RH, non-condensing Shock 30 g, 6 ms Vibration 1.33 g at 10 Hz to 500 Hz ESD Radiated immunity: ESD IEC6100-4-2 air discharge up to 8 kV, or direct contact discharge up to 4 kV Level 3 from 80 MHz to 1000 MHz per IEC61000-4-3 20 , 50, 100 , 200, 300 SLPM 1 m shielded cable with 3 cm exposed leads at connector 10, 15 SLPM 1 m shielded cable with 3 cm exposed leads at connector and 280 Ohm at MHz ferrite bead Table 3. Recommended Mounting and Implementation Characteristic Parameter Mounting screw size 10-32 Mounting screw torque 1,13 N m [20 in-lb] Electrical connection 6 pin SIP connector Pneumatic connection manifold mount, 22 mm OD tapered male fitting, G 3/8 female threaded fitting Table 4. Absolute Maximum Ratings1 Characteristic Parameter Supply voltage -0.3 Vdc to 11.0 Vdc Voltage on digital I/O output pins -0.3 Vdc to 3.0 Vdc2 Storage temp. range -40°C to 100°C [-40°F to 212°F] Maximum flow change 10,000 SLPM/s Maximum common mode pressure 4 bar | 60 psi at 25°C [77°F] Maximum flow 350 SLPM 1 Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings. 2 Digital I/O pins are diode protected at this voltage up to 2 mA. Digital bus voltage may exceed this value if the maximum digital bus current is limited to 2 mA or less. The maximum bus current is generally determined by the bus pull-up resistors. Advanced Sensing Technologies Honeywell ZephyrTM Digital Aiflow Sensors HAF SeriesHigh Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM ISSUE C 50080060 Table 5. Operating Specifications Characteristic Parameter Supply voltage 3 Vdc to 10 Vdc Supply current 20 mA max. Power: 3 Vdc 10 Vdc Calibrated temperature range1 60 mW max. 200 mW max. 0°C to 50°C [32°F to 122°F] Operating temperature range -20°C to 70°C [-4°F to 158°F] Full scale (FS) flow2 10, 15, 20, 50, 100, 200, 300 SLPM Calilbrated flow range 0 to 10, 0 to 15, 0 to 20, 0 to 50, 0 to 100, 0 to 200, 0 SLPM to 300 SLPM Calibration gas Accuracy3 0%FS to 14.3%FS 14.3%FS to 100%FS clean, dry air 0.5%FS 3.5%reading Total Error Band:4 10, 15, 20, 50, 100, 200 SLPM: 0%FS to 12.5%FS 12.5%FS to 100%FS 300 SLPM only: 0%FS to 12.5%FS 12.5%FS to 66.7%FS 66.7%FS to 100%FS 0.5%FS 4.0%reading 0.5%FS 4.0%reading 7.0%reading Null accuracy5 ±0.5%FS Flow response time6 1 ms Warm up time7 Resolution: 10 SLPM 15 SLPM 20 SLPM 50 SLPM 100 SLPM 200 SLPM 300 SLPM 35 ms 0.002 SLPM 0.003 SLPM 0.003 SLPM 0.008 SLPM 0.015 SLPM 0.029 SLPM 0.043 SLPM Proof pressure 10.3 bar | 150 psig Burst pressure 13.7 bar | 200 psig Bus standards8 I2C fast mode (up to 400 kHz) Reverse polarity protection no 1 Custom and extended temperature compensated ranges are possible. Contact Honeywell for details. 2 Honeywell standard for mass flow rate units is SLPM, which has reference conditions of 0°C and 1 atm. Custom units are given as LPM with listed reference conditions at the first mention. 3 Accuracy is the maximum deviation in output from nominal over the entire calibrated flow range at 25ºC. Errors include Offset, Full Scale Span, Linearity, Flow Hysteresis, and Repeatability. 4 Total Error Band (TEB) is the maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Total Error Band includes all Accuracy errors, as well as all temperature effects over the compensated temperature range, including Temperature Offset, Temperature Span and Thermal Hysteresis. 5 Null Accuracy is the maximum deviation in output from nominal at null flow over the entire calibrated temperature range. 6 Response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may be affected by the pneumatic interface). 7 Warm-up time: time to the first valid flow measurement after power is applied. 8 Refer to the Technical Note "I2C Communications with Honeywell Digital Airflow Sensors" for I2C protocol information. 2 Advanced Sensing Technologies Honeywell ZephyrTM Digital Aiflow Sensors HAF SeriesHigh Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM Figure 1. Accuracy and Total Error Band 10, 15, 20, 50, 100, 200 SLPM 300 SLPM only ISSUE C 50080060 Error (%FS) Error (%FS) 4.00% 3.00% 2.00% 1.00% 0 -1.00% -2.00% -3.00% -4.00% 0 10 20 30 Ideal 40 50 60 70 80 90 100 %FS Accuracy: 0%FS to 14.3%FS = 0.5% 14.3%FS to 100%FS = 3.5% Total Error Band: 0%FS to 12.5%FS = 0.5% 12.5%FS to 100%FS = 4.0% 8.00% 7.00% 6.00% TEB = 4.67% at 200 SLPM TEB = 7.00% at 300 SLPM 5.00% 4.00% TEB = 2.65% at 200 SLPM 3.00% 2.00% TEB = 0.5% at 43 SLPM 1.00% 0 -1.00% -2.00% -3.00% -4.00% -5.00% -6.00% -7.00% -8.00% 0 10 20 30 40 50 60 70 80 90 100 %FS Ideal Accuracy: 0%FS to 14.3%FS (0 SLPM to 43 SLPM) = 0.5% 14.3%FS to 100%FS (43 SLPM to 300 SLPM) = 3.5% Total Error Band: 0%FS to 14.3%FS (0 SLPM to 43 SLPM) = 0.5% 14.6%FS to 66.7%FS (44 SLPM to 200 SLPM) = 4.0% 66.7%FS to 100%FS (200 SLPM to 300 SLPM) = 7.0% Table 6. Ideal Transfer Function Item Digital Output Code Flow Applied Equation 16384 * [0.1 + 0.8 * (Flow Applied/Full Scale Flow)] Full Scale Flow * [(Digital Output Code/16384) - 0.1]/0.8 Digital Interface For additional details on the use of Zephyr with digital output see the Technical Note "I2C Communications with Honeywell Digital Airflow Sensors". The sensor uses the I2C standard for digital communication with a slave address specified in the datasheet Nomenclature and Order Guide. Following sensor power-up, each of the first two read sequences shown in Figure 2 will respond with 2 bytes of the unique 4-byte Serial Number. The first read after power-up will respond with the two most significant bytes of the Serial Number, while the second read will respond with the two least significant bytes of the Serial Number. For reliable performance, allow sensor to be powered for the sensor startup time before performing the first read, then allow a 10 ms command response time before performing the second read. Advanced Sensing Technologies 3 Honeywell ZephyrTM Digital Aiflow Sensors HAF SeriesHigh Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM ISSUE C 50080060 Figure 2. Sensor I2C Read and Write Sequences I2C Read: Slave responds to Master with data Data Byte 0 (Most Significant) Data Byte 1 (Least Significant) SDA S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 MA D7 D6 D5 D4 D3 D2 D1 D0 MN S SCL I2C Read: Master sends data to Slave Command Byte SDA S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 SA S SCL Bit Name Description S Start condition Master pulls SDA from high to low while SCL remains high S Stop condition Master allows SDA to float from low to high while SCL remains high A6 Address bit I2C Slave Address is the 7 Most Significant Bits for the first transmitted byte 1 Read/write bit Read = 1, Write = 0 D7 Data bit Read = 1, Write = 0 SA Slave ACK Slave pulls SDA low MA Master ACK Master pulls SDA low MN Master NACK Master allows SDA to float high After the power-up read sequence described above, the sensor will respond to each I2C read request with a 16-bit (2 byte) digital flow reading. Read requests taken faster than the Response Time (1 ms) are not guaranteed to return fresh data. The first two bits of each flow reading will be `00', while non-flow responses (such as error and status codes) will begin with `11'. There are several user commands available as shown in Table 7. Following an I2C write sequence of a user command, the sensor will respond to the next I2C read request with a 16-bit response. Possible responses to user commands can be seen in Table 8. Table 7. User Command Descriptions Command Byte (Hexadecimal) Command Name 0x01 GetSerialNumber 0x02 PowerOnReset 0x03 Checksum 1Ta8ble 8. Sensor Response Descriptions Sensor Response (Hexadecimal) Response Name 0xCCA5 POSACK 0xCC99 BadCommand 0xCC9A BadParam 0xCC9B Failure 0xCC90 BadChecksum 0xCCBB Busy Command Description Next two read requests will each return two bytes of the sensor's unique 4-byte Serial Number. Force Power-On reset of sensor microcontroller. Calculates EEPROM Checksum and compares to production Checksum value. If the values match, the next read request will respond with 0xCCA5. Otherwise, the next read will respond with 0xCC90. Response Description non-response command was executed successfully command byte was not recognized command sent with incorrect parameter bytes command failed during execution checksum did not match stored value sensor is busy calculating the checksum value Command Response Time (Max.) 10 ms 20 ms 1 s The maximum sink current on SCL or SDA is 2 mA. Therefore, if the pull-up resistors are biased by VDD, and if VDD reaches the maximum supply voltage of 6 V, then the pull-up resistors for SCL and SDA must be greater than 3.0 kOhm to limit the sink current to 2 mA. The typical value for SCL and SDA pull-up resistors is 4.7 kOhm (this value depends on the bus capacitance and the bus speed). 4 Advanced Sensing Technologies Honeywell ZephyrTM Digital Aiflow Sensors HAF SeriesHigh Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM ISSUE C 50080060 Figure 3. Mounting Dimensions (For reference only: mm [in].) Port Style: Manifold Mount 8 [0.3] 16,0 [0.63] 71,2 [2.80] 55,2 [2.17] 30,0 [1.2] 14,6 [0.58] A 4X 5,60 [0.220] 4X 5,20 [0.205] 14,5 [0.57] 54,4 [2.14] 44,0 [1.73] Mounting Footprint 16,0 [0.63] 22,0 [0.87] 71,2 [2.80] 55,2 [2.17] 30,6 [1.20] A 4X 15,0 [0.59] 44,0 33,0 [1.73] [1.30] 54,4 [2.14] B 34,5 [1.36] 33 [1.3] 42,4 [1.67] 51,5 [2.03] 54 [2.1] 4X 4,50 [0.177] 22,0 [0.87] C 4,0 [0.16] 87 [3.4] 63,2 [2.49] Port Style: 22 mm OD Tapered Male Fitting per ISO 5356 14 [0.6] 39,5 [1.56] 18,3 [0.72] 21,0 [0.83] 2X 5,70 [0.22] 14,8 [0.58] A 2X 5,20 [0.205] 8 [0.3] 4,0 [0.16] 63,2 [2.49] 87 [3.4] 2X 13,0 DIA. [0.51] D A Pin 1. B 4X 10-32 pan head screws 1,13 N m [20 in-lb] torque. C 2X Gland for O-Ring AS568-113, 13,94 mm ID x 2,62 mm [0.549 in ID x 0.103 in W. Two O-rings, AS568A-113 Durometer A65 to A80 Silicon or Viton, are required to seal sensor to manifold. O-rings are not included. D Flow channel. Mounting Footprint 14 [0.6] 14,5 [0.57] 39.5 [1.56] 14,8 [0.58] A 14,5 [0.57] 54,4 [2.14] 44,0 [1.73] 44,0 35,1 [1.73] [1.38] 54,4 [2.14] C 68 [2.7] 30 [1.2] 110 [4.3] 2X 18,3 B 2X 21,0 68 [0.72] [0.83] [2.7] 35 [1.4] 42,4 [1.67] 18,0 [0.71] 54 [2.1] 51,5 [2.03] 2X 4,50 [0.177] A Pin 1. B 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque. C 15 mm ID/22 mm OD tapered fitting per ISO 5356. Advanced Sensing Technologies 5 Honeywell ZephyrTM Digital Aiflow Sensors HAF SeriesHigh Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM ISSUE C 50080060 Figure 3. Mounting Dimensions (For reference only: mm [in], continued.) Port Style: G 3/8 Female Threaded Fitting per ISO 1179 16 [0.63] 2X 1,5 [0.06] 39,5 [1.56] 2X 18,3 [0.72] 2X 5,70 [0.22] 14,8 [0.58] A 2X 5,20 [0.205] 44,0 [1.73] 14,5 [0.57] 54,4 [2.14] B C Mounting Footprint 16 [0.63] 2X 1.5 [0.06] 39,5 [1.56] 14,8 [0.58] A 14,5 [0.57] 71 [2.8] 44,0 35,1 [1.73] [1.38] 54,4 [2.14] 2X 18,3 [0.72] 34,5 [1.36] 30,0 [1.18] 71,4 [2.81] 18,0 [0.71] 51,5 [2.03] 54 [2.1] 35 [1.4] 42,4 [1.67] 2X 4,50 [0.177] A Pin 1. B 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque. C ISO 1179 G3/8, recommended torque is 1,7 ±0,6 N m [15 ±5 in-lb]. Electrical connector part number is JST (Japan Solderless Terminals) B6B-PH-K-S. Mating connector part numbers are JST PHR-6 (socket) and JST SPH-002T-P0.5L (crimp terminal). Table 9. Pinout (Digital Function) Pin 1 Pin 2 NC SCL Pin 3 VVDD Pin 4 ground Pin 5 SDA Pin 6 NC 6 Advanced Sensing Technologies Honeywell ZephyrTM Digital Aiflow Sensors HAF SeriesHigh Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM ISSUE C 50080060 Honeywell Advanced Sensing Technologies 830 East Arapaho Road Richardson, TX 75081 sps.honeywell.com/ast WARNING PERSONAL INJURY DO NOT USE these products as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Failure to comply with these instructions could result in death or serious injury. Warranty/Remedy Honeywell warrants goods of its manufacture as being free of defective materials and faulty workmanship during the applicable warranty period. Honeywell's standard product warranty applies unless agreed to otherwise by Honeywell in writing; please refer to your order acknowledgement or consult your local sales office for specific warranty details. If warranted goods are returned to Honeywell during the period of coverage, Honeywell will repair or replace, at its option, without charge those items that Honeywell, in its sole discretion, finds defective. The foregoing is buyer's sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In no event shall Honeywell be liable for consequential, special, or indirect damages. While Honeywell may provide application assistance personally, through our literature and the Honeywell web site, it is buyer's sole responsibility to determine the suitability of the product in the application. Specifications may change without notice. The information we supply is believed to be accurate and reliable as of this writing. However, Honeywell assumes no responsibility for its use. For more information Honeywell Advanced Sensing Technologies services its customers through a worldwide network of sales offices and distributors. For application assistance, current specifications, pricing or the nearest Authorized Distributor, visit our website or call: Asia Pacific +65 6355-2828 Europe +44 (0) 1698 481481 USA/Canada +1-800-537-6945 50080060-D-EN | D | 05/21 © 2021 Honeywell International Inc. All rights reserved.