HORIBA Advanced Techno

HF/HCI Concentration Monitor HF-960H

Ideal for measuring high concentrations of hydrofluoric acid, hydrochloric acid, etc.

Product Overview

The HF-960H accurately measures concentrations of hydrofluoric and hydrochloric acid used in semiconductor manufacturing and other processes. Measurement is based on conversion to concentration from four-electrode conductivity measurements, enabling a wide range of measurements from low to high concentrations. The dedicated FES-510 series sensor is made from materials highly resistant to chemicals, making this unit ideal for managing hydrofluoric and hydrochloric acid, even in high concentrations.

Features a four-electrode carbon sensor with outstanding resistance to chemicals.

Image Description: A textual representation of the HORIBA HF-960H Indication Converter, a compact black electronic device with a digital display showing '10.00' and '25.0', and control buttons labeled MEAS, CAL, MNT, A, V, ENT. It is identified as an 'Indication Converter HF-960H'.

Image Description: A textual representation of the HORIBA FES-510 series four-electrode carbon sensor, a flow-type sensor with a black body and a cable. It is labeled 'Sensor FES-510-3/4' and '4-Electrode Carbon Sensor FES-510'.

Key Features

Wide range compatibility

Automatic decimal point adjustment enables a wide range of measurement for HF and HCl concentrations, from 0.000 to 10.00%.
Automatic display range switching

The display range automatically switches from high to low concentrations. This unit also allows the user to monitor changes while maintaining effective conductivity resolution.
Enables four types of measurement

HF concentration, HCl concentration, conductivity, and temperature. HF and HCl concentrations are measured while compensating for temperatures based on relevant characteristic data. This unit can also measure the conductivity of other chemicals.
Chemical resistant four-electrode carbon sensor

The sensor is a new FES-510 series four-electrode flow-type sensor made from glass carbon, which is highly resistant to chemicals.
4-channel transmission output

Equipped with four output channels, which can be allocated to HF concentration, HCl concentration, conductivity, and temperature. Choose from two types of current output: 4 to 20 mA DC, or 0 to 20 mA DC.
24 V DC power supply
RoHS compliant

The HF-960H is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB.

Specifications (Indication Converter)

Model	HF-960H
Measurement method	4-electrode carbon flow-type conductivity measurement - concentration conversion
Sensor input	1-channel
Temperature sensor specifications	Platinum resistance 1000Ω/0°C
Measuring range	HF concentration: 0 to 10% HCl concentration: 0 to 10% Conductivity: 0 to 1000 mS/cm (without temperature compensation) Temperature: 0 to 100°C (Decimal places selectable: 1 or 2)
Repeatability	HF/HCl concentration: Within ±0.5% of full scale (in equivalent input) Conductivity: Within ±1.0% of full scale (in equivalent input)
Linearity	HF/HCl concentration: Within ±0.5% of full scale (in equivalent input) Conductivity: Within ±1.0% of full scale (in equivalent input)
Transmission output	No. of outputs: 4 Type: 4 to 20 mA DC or 0 to 20 mA DC (I/O insulation type) Maximum load resistance: 900Ω Output range: Custom setting possible within measurement range. (Negative terminals connected internally)
Contact output	No. of outputs: 5 (Alarm outputs: R1, R2, R3, R4, Error alarm RF) Contact type: Relay contact, SPST (R1-R4), SPDT (RF) Contact rating: 240 V AC, 1A and 30 V DC, 1A (resistance load) Contact function: Selectable (upper/lower limit operation, ON/OFF control, delay operation for R1-R4; error, trouble warning, maintenance for RF)
Contact input	No. of inputs: 1 Contact status: Open collector no-voltage contact Contact function: Transmission output hold
Communications output	RS-485 input/output
Calibration function	Conductivity: Based on specified compensation coefficient for cell constant Temperature: Calibrated by comparison with reference thermometer
Transmission output Hold function	Selectable (previous value hold, optional value hold; previous value hold only during maintenance mode)
Self-diagnosis function	Sensor diagnosis (short-circuit, disconnection of temperature sensor), Converter error
Temperature compensation	HF and HCl specific temperature compensation Input of optional temperature compensation coefficient (Reference temperature: 25°C, Coefficient: 0 to 3%/°C) Temperature compensation range: HF: 0 to 80°C, HCl: 0 to 80°C, Conductivity: 0 to 100°C. (Out-of-range compensation is extended.)
Ambient environment	Temperature: -5 to 45°C, Relative humidity: 20 to 85% (without condensation)
Power supply	24 V DC ±10%, 10 W (max.)
Protective structure	Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
Mass	Approx. 550g
Conforming standards	CE marking, FCC Part 15
Compatible sensors	FES-510 series (flow-type carbon sensor)

Specifications (4-electrode carbon flow-type conductivity sensor)

Model	FES-510 -1/4	FES-510 -3/8	FES-510 -1/2	FES-510 -3/4	FES-510 -1	FES-510 -6_4	FES-510 -10_8
Liquid end material	Glass carbon (electrode), PFA (body), Kalrez® (seal)
Piping size	1/4 inch	3/8 inch	1/2 inch	3/4 inch	1 inch	Ø6/Ø4 mm	Ø10/Ø8 mm (Made by order)
Sample flow rate	0 to 2 L/min	0 to 8 L/min	0 to 10 L/min	0 to 15 L/min	0 to 25 L/min	0 to 2 L/min	0 to 8 L/min
Sample pressure range	0 to 0.5 MPa for 5 to 50°C, 0 to 0.1 MPa for above 100°C. For 50 to 100°C, pressure range is plotted between 0.5 MPa and 0.1 MPa as shown on the line graph.
Sample temperature	5 to 100°C (Aqueous solution which boils at 100°C)
Cable length	10 m (standard)

Dimensions and Diagrams

Indication Converter Dimensions

Image Description: Diagram showing the external dimensions of the HORIBA HF-960H Indication Converter, with measurements in millimeters (mm) and inches (in). It includes a 'Panel Cut Size' diagram.

Sensor Dimensions

Image Description: Diagrams illustrating the dimensions of the HORIBA FES-510 series four-electrode carbon sensors, with measurements in millimeters (mm). Two variants, FES-510-3/4 and FES-510-1/2, are shown with detailed views of their construction and connection points.

Pressure vs. Temperature Graph

Diagram Description: A line graph titled 'FES-510 Pressure resistance type' plotting 'Pressure range MPa' on the Y-axis against 'Liquid temperature °C' on the X-axis. The graph shows how pressure resistance changes with liquid temperature, with specific data points and ranges indicated.

Contact Information

Please read the operation manual before using this product to assure safe and proper handling of the product.

The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. It is strictly forbidden to copy the content of this catalog in part or in full.

Website: http://www.horiba-adt.jp/index_e.htm