VPG-A6 IN-LINE PROCESS
GAS FILTER
ULTRA-HIGH EFFICIENCY FILTRATION
DOWN TO 2nm AND BELOW
The industry-leading VPG-A6 Vapor Process Gas filter is an ultralow pressure drop, ultra-high efficiency in-line filter designed for vapor and process gas filtration. This patent-protected 316L SS filter is chemical- and thermally-resistant and provides up to 99.9999999999% (twelve 9s) of efficiency 2.5nm – an estimated particle penetration of less than one part per trillion (ppt). The extremely low-pressure drop of this filter makes it easier to work in ultra-low pressure environments and reduces the risk of gas-phase reactions occurring in the filter.
Conventional high-purity, point-of-use gas filters are used in a compressed gas line for particle removal. The VPG-A6 filter is also used downstream of a vaporizer under vacuum flow conditions to prevent particles, which could potentially be in the gas/vapor mixture, from entering the Chemical Vapor Deposition (CVD) or Atomic Layer Deposition (ALD) process chamber. Due to its unique design, the VPG-A6 filter has more thermal mass than competitive offerings, making it particularly well suited for use downstream of a vaporizer in a heated line – acting as almost a second-stage heat exchanger.
Applications
- Vapor process gas
- Ultra-high purity gas
- High temperature
- Inert or reactive gases
- High and ultra-high vacuum
- Semiconductor manufacturing
Features and Benefits
- 316 Stainless Steel
- The ultra-high particle removal efficiency
- Ultra-low pressure drop
- Solid core – more thermal mass
- ½” VCR fittings
SPECIFICATIONS
VPG-A6 IN-LINE PROCESS GAS FILTER
| Efficiency* @ 1 SLPM | 2.Snm 10 nm 50 nm |
99.9999999999% (twelve 9s) 99.99999999% (ten 9s) 99.999997% (seven 9s) |
| Filter Media | Sintered 316L SS Fiber | |
| Wetted Materials | Stainless Steel 316L | |
| Temperature Range (°C) | <400 (inert gases) | |
| Max Operating Pressure (psis) | 2500 | |
| Max. Differential Pressure (psid) | 500 | |
| Flow Rate Range (SLPM) | 0-30 | |
| Weight (kg/lb) | 0.45/1 | |
| Fittings** | 1/2″ male VCR with 7/8-14 thread | |
**Filtration efficiency at atmospheric pressure
**Alternative fitting options available by request
VPG-A6 Pressure Drop vs Flow Rate
Industry Leading, Patent-protected Design
Cross-flow construction and short fiber 316L stainless steel media provide ultra-high efficiency with ultra-low pressure drop. Solid core provides more thermal mass for better performance downstream of a vaporizer.
Specifications are subject to change without notice.
The MSP logo is a registered trademark of MSP Corporation.
TSI and the TSI logo are registered trademarks of TSI Incorporated.
UNDERSTANDING, ACCELERATED
TSI Incorporated – Visit our website www.tsi.com for more information.
USA Tel: +1 800 874 2811
India Tel: +91 80 67877200
Germany Tel: +49 241 523030
Documents / Resources
 |
MSP VPG-A6 IN-LINE Process Gas Filter [pdf] User Guide VPG-A6 IN-LINE, Process Gas Filter |
