INFICON Modul1000 Modular Leak Detector Instruction Manual

The modular leak detector is designed for detecting leaks in
various systems. It includes features for mechanical and electrical
installations, power supply, and vacuum equipment connections.

Operation Modes

The device offers different operation modes for varying leak
detection needs.

Product Usage Instructions

Installation

Follow the instructions for mechanical installation, electrical
installation, power supply connection, electrical interfaces setup,
and vacuum equipment connections as outlined in the manual.

Operation

Before operating the leak detector, ensure that it is properly
installed and connected. Follow these steps:

Switching ON or OFF

To turn the device on or off, use the designated power
button.

Status LED

Monitor the status of the device through the LED indicators.

Controller

Utilize the controller to navigate through different settings
and modes.

Control Commands

Use the provided control commands to operate the leak detector
effectively.

Display

View important information and feedback on the display
screen.

Calibration

Calibrate the device according to the specific mode
required:

Vacuum Mode Calibration
Sniffer Mode Calibration

Auto Leak Test Calibration
Commander Mode Calibration

FAQ (Frequently Asked Questions)

Q: How often should calibration be performed?

A: Calibration should be performed regularly as per the usage
frequency and manufacturer recommendations to ensure accurate leak
detection.

Q: Can the leak detector be used in hazardous
environments?

A: Refer to the manual for information on restrictions of use
and hazards under normal operation to determine if it is suitable
for hazardous environments.

“`

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OPERATING INSTRUCTIONS
jinb80en1-14 (2508) T r a n s l a t i o n o f t h e o r i g i n a l

jinb80en1-14

Catalog no
550-300A 550-310A 550-330A

From software version V1.78
Modul1000
Modular leak detector

Operating Instructions

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Imprint INFICON GmbH Bonner Straße 498 50968 Köln Germany
Copyright© 2025 INFICON GmbH, Köln. This document may only be reproduced with the permission of INFICON GmbH, Köln.
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Content

1
1.1 1.2 1.3 1.4
2
2.1 2.2 2.3 2.4
3
3.1 3.2 3.3 3.3.1 3.3.2 3.3.3 3.4 3.5 3.5.1 3.5.2 3.5.3
4
4.1 4.2 4.2.1 4.2.2 4.2.3
5
5.1 5.2 5.3 5.3.1 5.4 5.4.1 5.4.2 5.5

User guidelines …………………………………………….. 1-1
Application of this manual ……………………………………………………… 1-1 Warning and danger symbols ………………………………………………… 1-1 Representation conventions ………………………………………………….. 1-2 Explanation of terms …………………………………………………………….. 1-2
Important safety instructions …………………………… 2-1
Intended use ……………………………………………………………………….. 2-1 Operator requirements …………………………………………………………. 2-1 Restrictions of use ……………………………………………………………….. 2-2 Hazards under normal use ……………………………………………………. 2-2
Description of equipment ……………………………….. 3-1
The housing ………………………………………………………………………… 3-1 Interfaces ……………………………………………………………………………. 3-3 Operating options ………………………………………………………………… 3-3 Desktop operation ……………………………………………………………….. 3-3 Installation in switch cabinet ………………………………………………….. 3-4 Remote control RC1000 ……………………………………………………….. 3-5 Scope of delivery …………………………………………………………………. 3-6 Accessories ………………………………………………………………………… 3-6 Sniffer line SL200 ………………………………………………………………… 3-6 Test chamber TC1000 ………………………………………………………….. 3-6 Set of male connectors for Interfaces ……………………………………… 3-7
Installation ……………………………………………………. 4-1
Mechanical installation …………………………………………………………. 4-1 Electrical installation …………………………………………………………….. 4-3 Power supply ………………………………………………………………………. 4-3 Electrical interfaces ……………………………………………………………… 4-3 Vacuum equipment connections ……………………………………………. 4-8
Operation modes ………………………………………….. 5-1
Vacuum ……………………………………………………………………………… 5-1 Partial flow mode …………………………………………………………………. 5-2 Auto Leak Test ……………………………………………………………………. 5-3 Auto leak test settings ………………………………………………………….. 5-3 Commander Operation …………………………………………………………. 5-4 Construction of a leak detection system ………………………………….. 5-5 Test procedure …………………………………………………………………… 5-6 Sniffer mode ……………………………………………………………………….. 5-8

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6
6.1
6.2
6.3
6.4
6.5
6.6 6.6.1 6.6.2 6.6.3 6.6.4
6.7
6.8
6.9 6.9.1 6.9.2 6.9.3 6.9.4 6.9.5 6.9.6 6.9.6.1 6.9.6.2 6.9.6.3 6.9.6.4 6.9.6.5 6.9.6.6 6.9.6.7 6.9.7 6.9.8

Operation …………………………………………………….. 6-1
Switching ON or OFF ……………………………………………………………. 6-1
Status LED ………………………………………………………………………….. 6-2
Controller ……………………………………………………………………………. 6-3
Control commands ……………………………………………………………….. 6-4
Display ……………………………………………………………………………….. 6-7
Calibration …………………………………………………………………………… 6-9 Calibration in vacuum mode ………………………………………………… 6-10 Calibrating in sniffer mode …………………………………………………… 6-11 Calibration in Auto Leak Test ……………………………………………….. 6-11 Calibrate in commander mode ……………………………………………… 6-12
Machine factor …………………………………………………………………… 6-13
Menu structure …………………………………………………………………… 6-14
Description of the menu items ……………………………………………… 6-16 Main menu back …………………………………………………………….. 6-16 Main menu display …………………………………………………………. 6-16 Main menu operating mode …………………………………………….. 6-17 Main menu Trigger & Alarms …………………………………………… 6-17 Main menu Calibration (CAL) Vacuum operating mode ……….. 6-19 Main menu Settings ……………………………………………………….. 6-21 Main menu Settings Vacuum settings …………………………… 6-21 Main menu Settings Zero & Background ………………………. 6-24 Main menu Settings Mass …………………………………………… 6-24 Main menu Settings Interfaces …………………………………….. 6-24 Main menu Settings Miscellaneous ………………………………. 6-27 Main menu Settings Loading / Saving parameters …………. 6-28 Main menu Settings Monitoring ………………………………….. 6-29 Main menu Info …………………………………………………………….. 6-31 Main menu User authorization …………………………………………. 6-32

7
7.1 7.2 7.3 7.4 7.5 7.5.1 7.6 7.7 7.7.1 7.7.2 7.7.3 7.8 7.9

Maintenance work …………………………………………. 7-1
Maintenance and service at INFICON …………………………………….. 7-1 General notes on maintenance ………………………………………………. 7-1 Maintenance plan ………………………………………………………………… 7-3 Maintenance intervals …………………………………………………………… 7-3 Description of the maintenance operations ……………………………… 7-6 Opening the device ………………………………………………………………. 7-6 Replace oil wick cartridge ……………………………………………………… 7-7 Changing the fuses …………………………………………………………….. 7-10 Summary of the electrical fuses ……………………………………………. 7-10 Replace mains fuse ……………………………………………………………. 7-11 Replacing Interface Board Fuses …………………………………………. 7-12 Parameter storage (I·STICK) replacement …………………………….. 7-13 Flood filter replacement ………………………………………………………. 7-14

Transport and disposal ………………………………….. 8-1

8.1

Returning the device for maintenance, repair or disposal ………….. 8-1

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9
9.1 9.1.1 9.1.2 9.1.3 9.1.4
9.2 9.2.1 9.2.2
9.3
9.4 9.4.1
9.5 9.5.1 9.5.2 9.5.3 9.5.4 9.5.5
9.6
9.7
10

Technical data ………………………………………………. 9-1
Device data …………………………………………………………………………. 9-1 Power supply ………………………………………………………………………. 9-1 Weight / dimensions …………………………………………………………….. 9-1 Characteristics …………………………………………………………………….. 9-1 Ambient conditions ………………………………………………………………. 9-2
Control via the PLC inputs and outputs …………………………………… 9-3 PLC inputs ………………………………………………………………………….. 9-3 PLC outputs ………………………………………………………………………… 9-5
The digital valve outputs ……………………………………………………….. 9-8
Analog output ……………………………………………………………………… 9-9 Configuration of the analog output …………………………………………. 9-9
Connection assignment ………………………………………………………. 9-12 PLC IN / AUDIO …………………………………………………………………. 9-12 PLC OUT ………………………………………………………………………….. 9-14 Pressure Gage ………………………………………………………………….. 9-15 Valves ………………………………………………………………………………. 9-18 Recorder …………………………………………………………………………… 9-20
Installation drawing of the control unit for rack installation ……….. 9-21
Commander Operation ……………………………………………………….. 9-22
Warnings and malfunction messages …………….. 10-1

11 Ordering Information ……………………………………. 11-1

12 Appendix ……………………………………………………. 12-1

12.1

Declaration of Conformity ……………………………………………………. 12-1

12.2

Declaration of Incorporation ………………………………………………… 12-2

Index …………………………………………………………… 1-1

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1 User guidelines
1.1 Application of this manual
· Please read this manual before using the Modul1000. · Save the manual so that you have it at hand at all times. · If the device is passed on to a third party, this manual must be attached.
1.2 Warning and danger symbols
Imminent threat resulting in death or serious injuries
Hazardous situation resulting in potential death or serious injuries
Hazardous situation resulting in minor injuries
Hazardous situation resulting in damage to property or the environment

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Operating Instructions

1.3 Representation conventions
Notice Refers to very important information.
1 Refers to an operation that has to be performed.
Refers to a result of a completed operation. Refers to a button to be pressed.
· A list is displayed.

1.4

Explanation of terms
Automatic tuning / Mass setting
This function adjusts the mass spectrometer so that a maximum sensitivity is achieved. The control computer changes the voltage that accelerates the ions within the selected mass range so that a maximum ion current is detected by the ion detector. During each calibration, the mass is adjusted automatically.

Automatic Measurement range selection
The amplification range of the preamplifier is automatically selected. The automatic measuring range selection of the Modul1000 overlaps the entire leak rate range as a function of the selected operating mode: Vacuum node or sniffing mode. Not only the leak rate signal but also the pressure in the DUT (inlet pressure PE) and the foreline pressure (PV) are used for control purposes.

Automatic zeroing
Measurement and automatic adaptation to the helium background in vacuum operating mode. This function determines the internal device zero, which is then deducted from the currently measured leak rate signal. This function is activated during the calibration process or when the start button is pressed, if the Modul1000 has previously run for at least 20 seconds in “Standby” or “Ventilation” operating mode. If the previously suppressed helium background continues to fall, the zero point is automatically adjusted.

Internal helium background
The existing helium partial pressure in the measurement system. The size of the internal helium background is measured in Standby operating mode and subtracted from the measured signal. (See above: Automatic zeroing)

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Operating Instructions

Minimum detectable leak rate
The minimum detectable leak rate that the Modul1000 can safely detect (5×10-12 mbar l/s).

MEASURE

MEASURE is the measurement range with an inlet pressure of less than 0.4 mbar. The minimum detectable leak rate is < 5 x 10-12 mbar l/s.

The menu allows the operator of the Modul1000 to program it according to his wishes. The menu has a structure that branches out in a tree-like manner.

Standby

The Modul1000 is ready for operation.

Turbo molecular pump
The turbo molecular pump (hereinafter abbreviated as TMP) is a vacuum pump which generates the necessary high vacuum for the mass spectrometer. The turbo molecular pump has drive electronics, also known as TMP converter.

Foreline pressure
Pressure of the backing pressure between the turbo molecular pump and the backing pump.

Factory delivery condition State of the settings of the Modul1000 as supplied by the factory.

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Operating Instructions

2 Important safety instructions

2.1

Intended use
The Modul1000 is designed for vacuum leak testing. With the sniffer version of the Modul1000 (Catalog no. 550-310), leaks can also be found on the DUT. The Modul1000 may only be used for leak testing with the gases helium and hydrogen. It may only be used in dry rooms and on a dry surface. Only use accessories from INFICON.
The intended use also includes:
· compliance with the technical data and environmental conditions, · the use of standard and original accessories, · observance of this document and compliance with the instructions and
regulations contained therein.

2.2

Operator requirements
The Modul1000 may only be installed and operated by trained personnel.
· Familiarize yourself with the function of the device. You may only install and operate the device after reading and understanding the manual.
· Check with the local, state or national authorities for special requirements and regulations.
· If you have any further questions regarding safety, operation and / or maintenance, please contact our nearest representative.

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Operating Instructions

2.3 Restrictions of use
Lethal hazard due to explosion · Use the Modul1000 only outside explosively hazardous areas.
Danger from hazardous gases The device is not suitable for corrosive, toxic, corrosive and explosive substances. · Use the device only to detect harmless materials.
2.4 Hazards under normal use
Before you install the Modul1000, read all safety instructions carefully and make sure you understand them correctly.
Hazard
Lethal hazard due to explosion If explosive gases are used as tracer gases, the gas container could explode. · Avoid flames and sparks, keep ignition sources away, and smoke only far from
the device.
Life threatening hazard from electric shock · Only operate the Modul1000 indoors and on dry ground. · Connect the Modul1000 to a 3-pin power cable and ground it using a PE
connector. · Keep the sniffer tip away from live parts. · Unplug the power cord before opening the Modul1000.

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Operating Instructions

Danger to life from electric shock The insulating properties of plastics used, for example in power supply units, can deteriorate at very low humidity. If parts become live in the event of a fault, an electric shock may occur. · Avoid storage and operation of the device in excessively low humidity. Minimum
humidity during transport and storage: 10%, minimum humidity during operation: 30%.
Hazard of injury and contamination by toxic gases Use the Modul1000 to detect only harmless substances. The device is unsuitable for toxic, corrosive, microbiological, explosive, radioactive or other harmful substances. · Please contact the manufacturer if such an application is planned.
Lethal hazard due to implosion Connected test objects and connections must be able to withstand the negative pressure during vacuum operation. Otherwise, further protective measures must be taken (e.g. splinter protection). · Only connect containers and components suitable for vacuum to the inlet flange
of the Modul1000.
Danger of hydrogen explosion Hydrogen is a flammable and explosive gas. · Only use test gases with a hydrogen concentration that cannot explode in
combination with oxygen. For the permissible composition of gas mixtures available for purchase, please refer to the safety data sheets of the respective manufacturers.

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Warning
Danger for wearers of implants such as pacemakers There is a strong permanent magnet in the device. The magnetic fields can interfere with the function of the implant when the device cover is removed. · As a wearer of such devices, maintain a distance of at least 10 cm between the
leak detector and the implant. · Furthermore, observe the safety instructions of the implant manufacturer.
Risk of injury from rotating parts · Allow the Modul1000 to rest for at least 20 minutes before transporting.
Fire hazard due to overload, short circuit and overheating · Observe the permissible ambient conditions. · Ensure sufficient ventilation, especially at the ventilation openings: Free space
at the front, rear and sides at least 10 cm. · Keep heat sources away from the device. · Use the specified fuses. · Ensure regular maintenance of the fan filter. · Make sure that the power switch or power plug is always easily accessible. · Disconnect the device from the mains immediately if smoke is emitted from the
device.
Risk of injury due to the device falling · Carry the Modul1000 with two persons.
Injury to back due to heavy weight · Carry the Modul1000 with two persons.

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Important safety instructions

Operating Instructions

Health damage caused by exhaust gases and vapors · Connect an exhaust hose before operating in closed rooms. · Do not pump out hazardous gases.
Danger due to suction effect at the inlet flange When operating the device in the “Vacuum” operating mode, a vacuum is created at the inlet flange. The suction effect on hands or limbs can cause injuries or trigger uncontrolled movements due to startling. · Pay attention to this danger especially when using a remote control! · Make sure that no objects get into the inlet. · Protect long hair when the inlet flange is open. · Connect the inlet flange to a test assembly or close it with a blank flange.
Supposed risk · If it is to be assumed that safe operation is no longer possible, put the device out
of operation and secure it against unintentional start-up. · Please contact the INFICON service. Notice This can be the case: · if the device shows visible signs of damage, · if a fluid has penetrated the device, · if the device is no longer functions, · after extended storage under unfavorable conditions, · after being subjected to significant strain from transport.

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Caution
Injuries and property damage due to high voltages The electronics of the Modul1000 can be damaged by high voltage. · Assign digital inputs with a maximum voltage of 30V.
Injuries and property damage due to high electrical load The electronics of the Modul1000 can be damaged by an excessive electrical load. · Load relay outputs with max. 60V DC or 25V AC / 1A with ohmic load. · Load semiconductor outputs with max. 30V / 1A.
Injuries and property damage without safe mains disconnection The electronics of the Modul1000 can be destroyed if devices are connected to the Modul1000, the electronics of which do not have a safe separation from the mains. · Only connect devices to the Modul1000 whose connections are also safely
disconnected from the mains.
Injuries and material damage due to liquid penetration The Modul1000 can be destroyed if liquid is penetrated. · If liquid has penetrated the Modul1000, do not turn on the Modul1000 and
contact the INFICON service.

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Important safety instructions

Note

Operating Instructions

Turbomolecular pump can be damaged · Make sure that no foreign objects enter the inlet of the leak detector. · Do not move the leak detector jerkily during operation. · Do not move it until 2 minutes after it has been turned off and the inlet has been
vented. Otherwise, do not move it for 6 minutes.
Material damage due to aggressive substances The Modul1000 will be destroyed by aggressive substances. · Avoid contact with bases, acids, solvents and extreme temperatures.

Material damage by testing inappropriate materials
The Modul1000 can become unusable by inappropriate materials. The filter at the inlet of the Modul1000 should prevent the penetration of dirt into the vacuum system.
· Only use helium or hydrogen with the device.

Material damage due to incorrect mains voltage
The electronics of the Modul1000 can be damaged by incorrect mains voltage. · Before switching on, check that the operating voltage of the device matches the
local mains voltage.

Material damage due to overheating
The Modul1000 can be damaged by overheating, for example, by closing the openings.
· Keep the openings for air inlet and air outlet free. · Observe service messages and replace contaminated air filters.

Important safety instructions

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Material damage due to incorrect storage The Modul1000 can be destroyed if stored for months or years under unfavorable conditions (wet, too cold, too high above sea level). (See technical data!) · If the Modul1000 has been stored in these circumstances, leave it switched off. · Contact the INFICON service.
Material damage due to improper transport The Modul1000 can be damaged by improper transport. · Only transport the Modul1000 in its original packaging.
Calibration leak can be destroyed by excessive pressure · To avoid too high pressure and a risk of explosion for the calibration leak used,
observe the permissible ambient conditions for the storage and use of calibration leaks. See also Module1000, chapter 9.1.4 Ambient conditions.

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Operating Instructions

3 Description of equipment
The Modul1000 is a helium leak detector which has been designed to be installed in leak test work stations or integrated machines. The analysis system with turbo molecular pump and a complete control unit are integrated in a compact housing. Depending on the set operating mode, the Modul1000 can execute overriding control functions in a leak test system. Multiple signal and status outputs allow the universal integration in existing or new system versions. The operating parameters set by the user are stored in a separate memory module (I·STICK) which can be withdrawn easily. All device configurations and the necessary maintenance works can be performed without opening the device. To generate the fore-vacuum required for the operation of the turbo-molecular pump, as well as for evacuation of the connected DUT, a backing pump with a pumping speed of >2 m³/h has to be connected. It must be able to generate a final pressure of <1×10-2 mbar.
3.1 The housing
1
2

Fig. 3-1 Left side view and front view

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Description of equipment

3-1

Operating Instructions

5 6 11

9
10 4

Fig. 3-2 Right side view and back view

Item Description 1 Inlet flange DN25 KF 2 Loudspeaker / Air inlet 3 Openings for unlocking the
cover the cover 4 Recess handles 5 Status LED 6 Air filter 7 Connection DN25 KF for Backing pump

Item Description 8 Vent connection FESTO coupling
Hose 8 mm 9 Mains socket with main switch and
Mains fuses 10 Connection DN25 KF for
Backing pump or sniffer line 11 Electrical interfaces

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Fig. 3-3 Cut-out in the bottom side of Modul1000
Item Description 1 Connection for the backing pump (screwed flange)

3-2

Description of equipment

Operating Instructions

3.2 Interfaces

Connectors:
LED yellow, LED green CONTROL UNIT (PC) RS232 REMOTE CONTROL PLC IN / AUDIO PLC OUT RECORDER PRESSURE GAUGE ACCESSORIES VALVES,

3.3

Fig. 3-4
The two 16-pin plug connectors PLC OUT and VALVES are keyed so they cannot be interchanged. For the PLC OUT, coding tongues are inserted on the pins 1 and 16, for the VALVES connector, the tongues are on the pins 3 and 14. For maximum cable lengths see chaptersiehe 4.2.2 Electrical interfaces.
Operating options
The Modul1000 can be operated via the control unit for desktop operation or the operating unit for the installation in a switch cabinet. The Modul1000 provides an extensive software menu which serves for operation and configuration (refer to chapter 9.2 Control via the PLC inputs and outputs). This control unit offers access to the menu structure. The control unit can optionally be connected to the Modul1000 via 0.7 m or 5 m long connecting cables. The control unit is for configuring and controlling the Modul1000 individually and parameters as well as measured values can be read out.

3.3.1 Desktop operation
The control unit can be placed on even desktops and does not slip.

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11 2

Fig. 3-5 Control Unit for Desktop Operation

Item 1 2 3 4 5 6 7

Description LCD display
Button no. 1 Button no. 2 Button no. 3 Button no. 4 START button with LED Control unit

Item 8 9 10 11 12 12 14

Description Button no. 5 Button no. 6 Button no. 7 Button no. 8 Menu button STOP / Vent button with LED ZERO button with LED

3.3.2

Installation in switch cabinet
The operating unit (control unit as mounted version) is intended to be integrated in the front of a 19” rack system.

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Fig. 3-6 Operating unit for the installation in a switch cabinet

3-4

Description of equipment

Operating Instructions

3.3.3

Remote control RC1000
The wireless remote control RC1000 allows the operation of the device from a distance of up to 100 m. The remote control allows the functions START, STOP / VENT (STOP / ventilate), and ZERO (background) to be used, it shows the measured leak rate as a bar graph on the display as a figure or as a diagram (see the technical manual of the RC1000).
The measurement values can be stored in the internal memory of the RC1000 for a period of up to 24 hours. Then the data can easily be transferred to a USB stick.
An internal trigger can be set to provide a warning if the limit leak rates are exceeded. The warning occurs visually on the display and audibly via the built-in loudspeaker or the connected headset.
The remote control RC1000 is in a robust housing, which allows working ergonomically. Magnets on the lower side allows installation in horizontal of vertical metal surfaces. The remote control RC1000 can control the leak detector via a cable with a length of up to 28 meters.

Fig. 3-7 RC1000 wireless remote control

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Operating Instructions

3.4

Scope of delivery
· Leak detector for helium and hydrogen, Modul1000 · Mains connection cable (country-specific) · Set of spare fuses · Folder with documents · Tools for opening the cover: 8 mm Allen-key · Metering orifice DN25, 2 mm

3.5 Accessories
Accessories Sniffer line SL200 Test chamber TC1000 Set of male connectors for Interfaces Control unit (desktop version) Control unit (mounting version 19 inches) Connecting cable for control unit, 1 m Connecting cable for control unit, 5 m
Remote control RC1000 – RC1000WL wireless – RC1000C cable version – Extension cable, 8 m, for RC1000C

Cat. No. / Ref. No. 140 05 551-005 551-110 551-100 551-101 551-103 551-102
551-015 551-010 140 22

3.5.1

Sniffer line SL200
The Modul1000, in the version as vacuum or sniffer leak detector needs the sniffer line SL200 to be able to work in sniffer mode.

3.5.2

Test chamber TC1000
The vacuum chamber TC1000 serves for integrated testing of helium-filled parts. The test procedure can be configured individually in the software menu of Modul1000 and runs automatically after the chamber has been closed.

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Description of equipment

Operating Instructions

3.5.3

Set of male connectors for Interfaces
The connector kit includes the following plugs: PLC IN / AUDIO, PLC OUT, RECORDER, PRESSURE GAUGE, VALVES, ACCESSORIES

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Description of equipment

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4 Installation
Injury to back due to heavy weight · Carry the Modul1000 with two persons.
4.1 Mechanical installation
· The Modul1000 is suitable for mounting underneath and above table workstations.
· The leak detector may only be operated on a horizontal surface.
Risk of injury due to the device falling down · Place the device on a level and non-slippery surface.
Risk of stumbling over lines · When laying lines or connecting a sniffer line, make sure that trip hazards are
avoided.
Material damage from overheated device The device heats up during operation and can overheat without sufficient ventilation. · Please note the technical specifications. The maximum permissible ambient
temperature must not be exceeded during the operation of the Modul1000! · Ensure there is adequate ventilation especially at the air inlet and air outlet
openings. · Keep heat sources away from the device.

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Operating Instructions

Material damage due to strong vibrations
Depending on the applications connected, the device may be exposed to strong vibrations or shocks that may damage the device.
· If shock or vibrations are to be expected, use flexible connections for the connection of the device and if possible avoid direct connections.
· In such cases, use flexible connections for the connection of test chambers, angle valves or similar accessories.
The following figure illustrates the impact and vibration direction when using angle valves, test chambers or similar accessories:

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Material damage due to contamination of the vacuum area
If objects or particles enter the vacuum area of the device, the device may be damaged.
· Be careful that objects or particles do not get into the device each time you unplug the connectors.
· Ensure the presence and functionality of built-in filters.

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Installation

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4.2 Electrical installation

4.2.1

Power supply
The socket for the connection of the mains voltage is located on the rear panel (see Fig. 3-2/ 9). Place the device where you can always reach the mains plug.

Danger from electric shock
Improperly earthed or protected products may be dangerous to life in case of a fault. The use of the device is not permitted without a connected protective conductor. · Only use the included 3-wire power cable. · Only move the device when the power cord is not plugged in. · Check the power cord for damage before each use.

4.2.2

Electrical interfaces
All the electrical interfaces of the Modul1000 are clearly arranged in a connection panel (See Fig. 3-2).

Measurement results can be falsified To avoid undesired influence on measurement results, observe the maximum cable lengths. · CONTROL UNIT: 5 m shielded (INFICON accessories) · RS232: 3 m · REMOTE CONTROL: 30 m · PLC IN / OUT: 30 m · RECORDER: 30 m · PRESSURE GAUGE: 30 m · ACCESSORIES: 3 m · VALVES: 30 m

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Installation

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Operating Instructions

Connectors:
LED yellow, LED green CONTROL UNIT (PC) RS232 REMOTE CONTROL PLC IN / AUDIO PLC OUT RECORDER PRESSURE GAUGE ACCESSORIES VALVES,

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Fig. 4-1 Electrical interfaces

Valves

Via the VALVES connection, external valves can be controlled.

PLC inputs and outputs
The connector plug set should be used to connect the control inputs and outputs (PLC IN / PLC OUT). The connectors are not included in the scope of supply.

Control unit

The “operating unit table version” or “operating unit rack version” is connected to the CONTROL UNIT connection via the corresponding connection cable.

Remote control
The cable-connected RC1000 remote control is connected to the REMOTE CONTROL connector. Use a ferrite on the cable (eg Würth 742 711 31). Lay the cable twice through the ferrite and place it as close as possible to the 14-pin connector.
Sniffer line SL200 or Test chamber TC1000 (ACCESSORIES)
The sniffer line SL200 or the test chamber TC1000 can be connected to the connection ACCESSORIES. Use a ferrite on the cable (eg Würth 742 711 31). Lay the cable twice through the

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ferrite and place it as close as possible to the 14-pin connector.

External Pressure measurement points

If the Modul1000 is used in commander mode, an additional pressure measuring point must be connected to the PRESSURE GAUGE connection. Connect the pressure measurement point to the eight-pin Phoenix connector “PRESSURE GAUGE” as follows.

Contact
1
2 3 4 5 6

Assignment 24V fused with F3 on the interface board (0.8A, maximum output current at this contact together with contact 1 at the PLC IN connector) GND Input 1 GND to input 1 Input 2 (not supported by the current software) GND to input 2

Notice

The pressure transmitters to be connected can be supplied via the contacts 1 and 2 from the Modul1000. If the power supply is supplied from external power supplies, it must be noted that the contacts 4 and 6 must have a maximum potential of ± 4V compared to contact 2. Otherwise there is a risk of damage.

Notice The sensor is adjusted correctly by the zero point and full scale of the output curve.

Danger to life due to electric shock!
· Before opening the housing, disconnect the leak detector from the mains!
The Modul1000 can process measured values in the form of current and voltage. In the delivery state, input 1 is configured for current measurement 4 – 20 mA, input 2 is for voltage measurement 0 – 10 V.
In order to change the configuration of the input of the pressure measuring point, the corresponding jumper must be inserted on the interface board inside the Modul1000. Open the device to do this.
The jumpers are located on the interface board and are accessible after opening the hood.
By switching the jumper to plug-in contact XP5, the setting of the input 1 can be changed. For a current signal, pin 1 and 2 is connected by XP5, for a voltage signal pin 2 and 3. By changing the jumper to plug-in contact XP4, the setting of input 2, which is not supported in the current software, will change.

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Operating Instructions

Fig. 4-2 Jumper XP5 and XP4

Item Description

Pin 1

Pin 2

Item Description 3 Pin 3

Analog Recorder output

Both of the recorder outputs can be used to record the leak rate, the inlet pressure, and the foreline pressure. The output voltage is updated every 50 ms.

Contact 1 2 3 4

Assignment Analog output 1 GND GND Analog output 2

RS232 interface
A PC can be connected directly to the Modul1000 via the RS232 interface. The Modul1000 is then controlled by means of corresponding command sets as described in the interface description.

Contact
1
2 3
4 5 6 7 8 9

Assignment 24 V can be connected via jumper XT2, max. current consumption 0.3 A (pin 2 and 3 connected). In the delivery state, 24 V is not connected (pin 1 and 2 connected). TxD RxD GND 24V can be connected via jumper XT1 (pin 2 and 3 connected). In the delivery state, GND 24 V is not connected (pin 1 and 2 connected). GND RS232 Not connected Not connected Not connected Not connected

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Operating Instructions

With the plug-in bridge field XT1 or XT2, earth or 24V can be connected to the RS232 interface by switching the respective plug-in bridge (pin 2 and 3). Delivery state: XT1 or XT2, pin 1 and 2 bridged “Factory settings (Standard) RS232”.
Danger to life due to electric shock! · Before opening the housing, disconnect the leak detector from the mains! The jumpers are located on the interface board and are accessible after opening the hood.

Fig. 4-3 Jumper XT2 and XT1

Item Description

Pin 1

Pin 2

Pin 3

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4.2.3 Vacuum equipment connections
Backing pump
The backing pump connection is located on the left front of the device or on the bottom. As an alternative, the pump connection can also be made on the right side in the vacuum version of the Modul1000.
1 Unscrew the connection flange with the open-end wrench AF13 to remodel it and
remove the seal.
2 Unscrew the plug of the connector that you are going to use
.
3 Screw the plug with the seal into the opening of the remote connection flange. 4 Screw the connection flange with the seal.
Notice With the sniffer version of the Modul1000, only the pump connection on the left side and on the bottom can be used.
The backing pump used must meet the following specification: · The connecting hose should not be less than a minimum diameter of 15 mm. · The backing pump should have a pumping speed of > 2 m³ / h and · an achievable final pressure of < 1 x 10-2 mbar. If the backing pump has a magnet-controlled gas ballast valve or flushing gas valve, this can be controlled via the valve output V22 of the Modul1000.
DUT/Test system
The connection to the DUT or the test system is via the DN25 KF inlet flange on the top of the Modul1000. In order to be able to measure with the leak detector even at pressures higher than 0.4 mbar, the orifice supplied can be installed in front of the inlet of the leak detector. If the orifice is mounted in the suction line of the leak detector, the maximum inlet pressure is 3 mbar. Since the pumping speed is greatly reduced when using an orifice, the evacuation with a partial flow pump makes sense. In order to obtain short signal response times of the Modul1000, the orifice should be mounted as close as possible to the DUT / test system. The Modul1000b has the orifice already installed and can also measure up to 3 mbar.
Notice The maximum permissible load perpendicular to the flange is 400 N.

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Operating Instructions

Fig. 4-4 Installing the orifice

Ventilation

Normally, the DUTs or connected vacuum chambers are vented with ambient air after the test has been completed. If necessary, the DUTs can be ventilated with a different gas (e.g. fresh air, dry air, nitrogen, etc.) to atmospheric pressure. In these cases, the gas supply must be connected to the flood connection (8 mm hose connection) on the left side of the device. The gas pressure at the flood connection must not exceed 1100 mbar (absolute). An external venting valve can be connected to valve outlet V21.

Sniffer line

The connection for the sniffer line is only available with the sniffer version of the Modul1000 (catalog number 550-310). This connection can be connected to the optional SL200 sniffer line. The electrical connection of the SL200 is made via the ACCESSORIES connection socket.

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Operating Instructions

5 Operation modes
The following vacuum operating modes are available: · Vacuum, · Commander, · Auto Leak Test. In these operating modes, a partial flow pump can additionally be used. In the sniffing version of the Modul1000 there is also the operating mode: · Sniff.

5.1

Vacuum

In normal vacuum mode, the Modul1000 is operated as a “stand-alone” leak detection device.
The DUT or the vacuum chamber is evacuated only via the inlet flange of the leak detector. The pumping speed at the inlet of the leak detector is dependent on the backing pump used and the internal conductance of the device.
From a pressure of less than 0.4 mbar, the device changes to measuring mode and outputs the currently measured leak rate.
The pumping speed at the inlet when measuring is only determined by the device internal turbo molecular pump and is 2.5 l/s.

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Operating Instructions

5.2

Partial flow mode
In order to increase the effective pumping speed at the vacuum chamber or the DUT, an external partial flow valve can be connected to the valve outlet V20. The increased pumping speed accelerates evacuation processes and the signal response time of the Modul1000.
Depending on the setting, the partial flow pump can only be connected via an external partial flow valve only during evacuation or during evacuation and measurement. If the partial flow pump is also switched on during the measurement, the pumping speed of the partial flow pump for helium must be taken into account by setting the machine factor accordingly (see Chapter 6.9). External calibration is also recommended (see Chapter 6.6).
An additional external ventilation valve V21 can be connected for fast ventilation.

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Fig. 5-1 Partial flow mode
Item Description V20 Partial flow valve

Item Description V21 Venting valve

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5.3

Auto Leak Test
In Auto Leak Test operating mode, components filled with helium can be tested integrally in a vacuum chamber. The Modul1000 takes over the entire control of the test sequence.
The test sequence is divided into the following steps:
Evacuating the vacuum chamber,
Measuring the leak rate and
subsequently ventilating the vacuum chamber.
At the end of the test, if the leak rate exceeds the set trigger value during the measurement period, the device outputs “PASS” via the control unit. If the trigger is exceeded, the device outputs the message “FAIL”.
The test can alternatively also be carried out in partial flow mode.
After activation of START, the entire test sequence runs automatically. When the optional test chamber TC1000 is used, the test sequence starts automatically when the chamber lid is closed.

5.3.1

Auto leak test settings
The Auto Leak Test operating mode can be selected via the control unit or the RS232 interface.
The test sequence can be individually adapted to your leak detection application. The corresponding settings can be made via the control unit or the RS232 interface (see interface description).

Measuring time
The measuring time starts as soon as the Modul1000 changes from the evacuation phase to the measuring mode. A minimum and a maximum measuring time can be entered.
If the trigger level 1 is not reached after the minimum measuring time has elapsed, the measurement is terminated with “PASS”.
If the trigger level 1 is exceeded after the maximum measuring time has elapsed, the measurement is terminated with “FAIL”.
Otherwise the measuring result is displayed after the measurement time has elapsed.

Trigger level

If the set trigger level 1 is exceeded at the end of the measuring time, the Modul1000 outputs the message “FAIL” and thus signals a leaking DUT.

Parts number
A part counter can be activated in the software menu, which assigns a number to the individual measurement cycles. The last 12 measurement results can be displayed with the date and test result on the “Test Log” menu page.

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Operating Instructions

Serial error message
The software menu can be used to set a serial error message after a certain number of consecutive measurements with the result “FAIL”. The number of consecutive measurements necessary for Modul1000 to issue a serial error message can be set between 2 – 9. It can also be deactivated.
In order to ensure that such an accumulation of successive “FAIL” measurements is not caused by helium background in the test equipment, a reference measurement is recommended.
Reference measurement
For a test system contaminated with helium, it is possible to perform a reference measurement. In the software menu, you can set whether a reference measurement is allowed. If it is approved, it can be called up in the measurement screen.
During a reference measurement, the Modul1000 determines the internal helium background of the test equipment and deducts this from the measuring results during the following measurement cycles.
To reduce the level of the of the test equipment background, the vacuum system of the installation is evacuated and ventilated three times during a reference measurement before the actual background measurement.

5.4

Commander Operation
If the Modul1000 is integrated into a leak detection system, it can take over the control of the entire integral chamber test procedure in Commander Operation. All necessary valves for the helium filling of the DUT, as well as the necessary pressure measuring point, can be connected directly to the Modul1000. The test run supports a device for helium recovery, too.
The test can alternatively be carried out in partial flow mode to accelerate the leak detection process.

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Operation modes

Operating Instructions

5.4.1

Construction of a leak detection system
The construction of a leak detection system with the Modul1000 commander function corresponds essentially to that of a conventional integral leak test system. The vacuum chamber is evacuated by the Modul1000, alternatively also in the partial flow mode (Fig. 5-1 Partial flow mode). The DUT located in the vacuum chamber is connected to the helium filling device through the chamber walls and is charged with helium in the evacuated state of the vacuum chamber.
As a result of the pressure difference between the helium pressure in the DUT and the vacuum in the vacuum chamber, for a leaky DUT, helium flows from the leakage into the vacuum chamber and further into the leak detector where it is quantitatively detected as a leakage gas stream.

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Fig. 5-2 Leak detection system

Item Description

V30 Evacuate valve (DUT)

V31 Flood valve (DUT)

V32 Valve for helium recovery

V33 Filling valve (DUT)

V34

Emergency valve (open without power)

Item Description

Vacuum chamber

Device Under Test (DUT)

Pressure measuring point

Vacuum pump (DUT)

Backing pump (Modul1000)

Operation modes

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Helium filling device
The helium filling device consists of the vacuum pump, the valves V30 – V34, a pressure measuring point and the helium supply.
Valves V30, V31, V32, V33, V34 The test sequence of the Commander Software includes the control of all necessary valves belonging to the helium filling of the DUT. The control of the valves takes place via the connection “VALVES”.
Notice We recommend using pressure-operated valves.
Pressure measuring point The helium supply of the DUT and a heavy plate test contained in the test sequence are pressure-controlled and therefore require a pressure measuring point which covers a measuring range of < 50 mbar up to the maximum filling pressure of the DUT. The characteristic curve and the measuring range of the measuring point used must be set at the Modul1000. The pressure measuring point is connected via the “PRESSURE GAUGE” connection on the right side of the device.
Vacuum pump The DUT is evacuated via the vacuum pump before filling with helium in order to largely remove the air contained in the component. A pump with a final pressure < 50 mbar is recommended.

5.4.2

Test procedure
1 The DUT is located in the vacuum chamber connected to the Modul1000 inlet. The
DUT is connected to the helium filling device by a suitable coupling.
2 After initiating the START signal, the Modul1000 starts evacuating the vacuum
chamber. If a partial flow pump is connected to the Modul1000, the partial flow valve V20 (Fig. 5-1) is controlled and the test sequence is supported according to the partial flow setting by the partial flow pump.
3 Prior to the actual helium test, a heavy plate test is carried out in order to establish
coarse leakages at the DUT or the leak detection system. When the chamber pressure of 100 mbar is reached, a check is made as to whether the DUT pressure has fallen and has fallen below the preset pressure p_A_Grobleckstest (gross leak test). If this is the case, the measuring cycle is terminated with the error message 91.
4 If the system passes the gross leak test, the valve V30 opens and the DUT is
evacuated. If the DUT pressure falls below the prescribed pressure (p_B_Abpumpdruck) within the prescribed time (t_A_Abpumpzeit), the valve V30 closes. Otherwise, the measuring cycle is terminated with error message 92.
5 If the chamber pressure falls within the preset time (t_F_Meterbereitschaft) to the
switching pressure, the device changes to measuring mode. This switching pressure is in the menu: “Main menu –> Settings –> Monitoring –> Pressure limits for vacuum ranges” settable between 0.2 mbar and 0.4 mbar. Depending on the “background suppression” setting, an automatic background subtraction may be performed:

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Operating Instructions

· When set to “OFF”: Zero is not performed
· When set to “ON”: A zero is performed after the time t_B_Zeroverzögerung (zero delay)
· When set to: “Stable”: A zero is performed within the time t_B_Zeroverzögerung (zero delay) if the leak rate signal is stable enough to detect a leak in the magnitude of the set trigger level 1. If this condition is not fulfilled within the time t_B_Zeroverzögerung (zero delay), the measuring cycle is terminated with error message 98.
If the chamber pressure is not low enough for switching to the measuring mode within the preset time t_F_Messbereitschaft, the sequence is terminated with the error message 94.
6 After evacuating the DUT, the valve V33 is opened and the filling process of the
component begins with helium. If the pressure in the DUT reaches the set filling pressure p_C_Fülldruck within the set time t_C_Füllzeit, the valve V33 is closed again and the filling process is completed. If the filling pressure is not reached in time, the measuring cycle is terminated with error message 93.
7 The actual leak testing is now started. After the set time t_G_Messzeit has elapsed,
the measured leak rate is output. If, during the leak test, the test piece pressure falls below the pressure p_E_Druckabfallschwelle due to a leak in the system, the measuring cycle is terminated with the error message 99.
8 After the measuring time has elapsed, the valve V32 is opened.
The helium is returned from the DUT to the helium filling device until the pressure in the DUT has reached the release pressure p_D_Entspanndruck. V32 is then closed again.
If this is not done within the predetermined time t_D_Entspannzeit , the measuring cycle is terminated with the error message 95.
9 In order to remove the remaining helium from the DUT, the valve V30 is opened and
the DUT is evacuated via the pump 4 to the pressure p_B Abpumpdruck.
This must be done within the specified time t_A_Abpumpzeit, otherwise the measuring cycle is terminated with the error message 96.
10 Valve V30 is closed. The DUT is vented to atmospheric pressure via valve V31.
If the predefined DUT pressure p_A_Groblecktest is not reached within the time t_E_Belüftungszeit, the measuring cycle is terminated with the error message 97.
11 Subsequently, the vacuum chamber is ventilated to atmospheric pressure by the
Modul1000 (and the external Flood Valve V21 (Fig. 5-1) if connected).

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5.5

Sniffer mode
The Modul1000 in the sniffer version can be used as a vacuum as well as a sniffer device.
To be able to use it as a sniffer leak detector, the optional sniffer line SL200 must be connected to the “Sniff” connector on the right side of the Modul1000. In the measuring mode, the module then sucks a constant gas stream through the sniffer line. Helium contained in this gas stream is output as a leak rate. In the sniffer mode, the detection limit is limited to < 1 × 10-7 mbar l/s by the high atmospheric helium background.
The gas flow through the sniffer line is approx. 25 sccm.
The electrical connection is made via the “ACCESSORIES” connector. The setting “Operating mode” must be set to “Sniff”.
In the “SNIFF” mode, the red LED on the sniffer probe signals a bad DUT and the green LED indicates a good DUT.
For sniffer lines with active buttons on the sniffer probe, the external background suppression can be switched-on. Pressing the button for 3 seconds will switch off the external background suppression.

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Operation modes

Operating Instructions

6 Operation

6.1

Switching ON or OFF

Switch ON Switch OFF

Install the device as described in the Chapter Installation. Connect the mains cable and switch on the device. The power switch and the power cord are located on the rear panel. The run-up starts automatically after pressing the mains switch. During the run-up ( 3 min.), the following appears on the display of the control unit: · Rotational speed of turbo molecular pump · Foreline pressure · State of emission · Active cathode · A bar graph showing the run-up progress After the run-up is complete, the device is in the “standby” state.

Material damage caused by penetrating oil
Switching off the external backing pump can cause oil to seep into the running leak detector and cause damage to it.
· Switch off the leak detector first! · Only then switch off the backing pump.

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6.2

Status LED
The LED indicates the operating condition of the device:

Operating status Run up Standby / Vent Evacuate Measuring Calibration Errors / Warnings / Maintenance messages

Green LED Flashes alternately on on on Flashes synchronously
off

Yellow LED Flashes alternately off Flashes slowly on Flashes synchronously
Flashes quickly

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Operating Instructions

6.3

Controller
The Modul1000 can be controlled via the control unit, via a remote control, via the PLC inputs or via the RS232 interface. The menu item “Control location” is used to select from these options.
(See: Main menu Settings Interfaces Control location)

Control unit

Using the optional control unit, all device functions can be programmed, controlled and read out.
The functions and the structure of the control units for table operation (see Kap. 3.3.1) and the device operation for installation in a control cabinet (see Kap. 3.3.2) are identical.

Remote control
The basic functions Start, Stop, Vent and Zero can be carried out using the optional remote control (see Kap. 3.3.3). Also, the volume can be changed. If the “LOCK” display is active, the control of the Modul1000 has been disabled via the remote control within the menu point “Control location”.

RS232 interface A PC can be connected directly to the Modul1000 via the RS232 interface. The control commands are then sent to the device via corresponding interface commands as described in the interface description.
PLC inputs and outputs The most important control commands can also be sent to the module1000 via a PLC. The functions of the inputs and outputs are configurable.

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6.4

Control commands
The following control commands can be sent to the Modul1000 via the corresponding buttons on the optional control unit / remote control, via the PLC control inputs or via the RS232 interface.

START

When the control unit is connected, the LED in the START button flashes during the evacuation process. It lights up continuously during the measurement.
If the control unit START activates in the active measuring mode, the maximum leak rate display (holding function) is activated. The largest leak rate measured since the start is displayed. Pressing the START button again initializes this hold function.
The LED in the button signals the sequence:

LED flashes: LED on:

Evacuate Measuring mode

When START is activated, Modul1000 starts evacuating the connected DUT. If the pressure at the inlet of the leak detector reaches a pressure of <0.4 mbar, the Modul1000 automatically changes to the measuring mode. This pressure threshold is in the menu
“Settings Monitoring Pressure limit for vacuum range”
Configurable.

STOP / VENT
The STOP command terminates the measurement and the leak detection device changes to the “Standby” state.
Pressing the STOP button briefly interrupts the measurements. If the button is pressed longer, the inlet is ventilated according to the conditions defined in the “Delay of ventilation” menu.
LED on: Inlet flooded.

ZERO

Pressing the ZERO button activates the background suppression. To cancel the background suppression, simply press the ZERO button again for 3 seconds.
The function of the ZERO button is indicated by the LED:
LED on: ZERO enabled

Notice

The ZERO function should first be activated when the leak rate signal is stable. In the setting I·Zero, the ZERO function can only be used if the falling background signal is stable.

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Operating Instructions

Fig. 6-3 Zero function (background suppression)

Press the MENU button to display the selection menu on the display.

Displaybuttons
The function of the eight buttons on the left or right of the display depends on the currently selected menu level. The respective functions are then described in the display.
Numerical input
If a menu page has been opened in which numeric entries can be made, proceed as follows:
· If no numerical value is to be changed, button no. 1 should be pressed to cancel.
· The number whose value can be changed is displayed inverted. The position to be changed can be selected using (button no. 8) and (button no. 4).
· To change the digit at the selected point, press the button with the corresponding digit pair. A sub-menu opens, in which the desired digit value can be selected. After selection, the sub-menu closes automatically and the next input point of the whole number is displayed inverted and can be changed. After the last digit has been reached, all corrections must be confirmed by pressing the “OK” button.

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Operating Instructions

Fig. 6-4 Example of a numerical input of trigger level 1
To change the trigger threshold from 1.0×10-9 mbar l/s to 3×10-9 mbar l/s, press button 2/3 (button no. 3). A sub-menu opens in which the desired value 3 (button 4) can be selected.

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Operating Instructions

6.5

Display

The display shows measured values, operating modes, device parameters and their values as well as the functions of the eight buttons on the left and right of the display.

Run up

After switching on, the Modul1000 outputs various status information via the display.

Status line

The status line at the bottom of the display outputs the following device information after the Modul1000 has run-up.

Display symbols

Meaning

Explanation

Volume

See chapter Volume for the acoustic signal

S1, 2, 3 · ·

Trigger 1, 2, 3 Covered mass

If the trigger thresholds are exceeded, these symbols are displayed inverted. The number of points shows the mass number (4 points = helium, 2 points = hydrogen).

Warning triangle

See Chapter 4.4.2

VAC

Operating mode

ZERO

COR

Corrected leak rate

Auto Leak Test I·ZERO STABLE

Auto Leak Test
I·ZERO Stable

VAC, SNIFF, COMMAND or AUTO LEAK TEST indicate the selected operating mode Indicates whether the background suppression function is active. Indicates whether the leak rate is corrected with the machine factor.
Indicates whether the model was selected.
Indicates that the function I·ZERO is active. Indicates that the background signal is stable.

Standby

After run-up is completed the Modul1000 automatically changes to standby and is ready to measure.

Evacuate

After pressing the START button the Modul1000 evacuates the inlet. The evacuation time depends on the volume connected to the Modul1000 and the backing pump or the partial flow pump.

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Operating Instructions

Fig. 6-5 Evacuate

Measuring

As soon as the pressure at the inlet of the Modul1000 falls below the set pressure limit, the device changes to measuring mode.

p 1

p 2

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V22

Fig. 6-6 Measuring Measurement view

6-8

Operation

In the measuring mode two different displays can be selected for the measured value display.
· Numeric display with large numbers and as bar display

Operating Instructions

Fig. 6-7 · Graphical display as a function of the measuring time

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Fig. 6-8
Switching between the numeric display and the graphical display is done with button 8. It bears alternately the symbol numeric representation or graphic representation.

6.6 Calibration

Switching off the preamplifier test

The device tests the installed preamplifier during calibration. You can switch off of the amplifier test. This increases the speed of the calibration, but reliability drops off.

0 OFF 1 ON

Control unit

Switch-on > Monitoring > Preamplifier test ON/OFF

Binary protocol

Commands 154 / 155

ASCII protocol

Command *CONFig:AMPTest (ON,OFF)

Operation

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6.6.1

Calibration in vacuum mode
The Modul1000 can be calibrated in different ways. For each calibration the mass spectrometer is adjusted to maximum sensitivity (Auto tune). A distinction is made between internal and external calibration, depending on the test leak used.
The calibration can be started in any of the following ways, regardless of the control location:

Internal manual Internal automatic external manual external automatic

Set control location LOKAL, RS232 ASCII LOKAL, RS232 ASCII, RS232 BINARY, SPS LOKAL, RS232 ASCII, RS232 BINARY, SPS LOKAL, RS232 ASCII

For the internal calibration, the internal test leak installed in the Modul1000 is used.
A separate test leak is needed for external calibration. External calibrations have the advantage that they can be carried out under the boundary conditions (pressure, measuring time) which are similar or equal to the subsequent measurements.
If a device operation is connected to the Modul1000, the LEDs in the START, STOP / VENT and ZERO buttons are illuminated during calibration.

Notice Before calibration, the leak detector should be warm for at least 20 minutes.

Internal calibration
When using a partial flow pump in the measuring mode, the correct machine factor must be set before the 1st calibration.
The internal calibration is also not carried out in partial flow mode when setting “partial flow in measuring mode”. The correction is made via the adjusted machine factor.

Automatic internal calibration
After the calibration has been started, the entire calibration process is carried out automatically.
The signal settling time of the test leak (CAL settling time), which is adjustable in the menu, is used, which must first be adjusted to the volume at the inlet. The CAL settling time increases according to the volume connected to the inlet.

Manual internal calibration
After starting the calibration, the Modul1000 opens the internal test leak and pumps out the inlet. Depending on the connected volume, the signal settling time of the test leak increases. Therefore, the operator must confirm that the test leak signal has reached a steady level.

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Operating Instructions

External calibration
The external calibration offers the advantage that it takes account of the applicationspecific measurement conditions. Instead of the test object or at a suitable location of the leak detection system, a suitable calibration leak can be connected to the inlet of the Modul1000.
Calibration leaks with electromagnetic valve can be connected to the VALVES port on the back of the device. The valve is then automatically controlled by the Modul1000.
Before calibration, the corresponding value of the calibration leak, which is used to calibrate the Modul1000, must be stored in the settings of the Modul1000. This can be done via the optional control unit or via the RS232 interface.
With the setting “partial flow in measuring mode” the external calibration is carried out in partial flow mode.
Automatic external calibration
An automatic external calibration requires a calibrated leak with an electromagnetic valve. The electrical connection is made via the “VALVES” connector. After starting the automatic external calibration, the Modul1000 automatically runs through the entire calibration process.
The signal settling time of the test leak (CAL settling time), which is adjustable in the menu, is used, which must first be adjusted to the volume at the inlet. .
The CAL settling time increases according to the volume connected to the inlet.
Manual external calibration
For manual external calibration, the test leak valve must be manually opened and closed. The steady test lead signal must also be confirmed manually. When using the control unit or the device control, the user is guided through the calibration routine through the display.

6.6.2

Calibrating in sniffer mode
Applies only to devices with catalog numbers 550-310 and 550-330.
Calibration in the sniffing mode is analogous to external manual calibration in vacuum mode. With the optional sniffing cable connected to the Modul1000, both a sniffer line and the helium background must be measured. The steady test leak signal and the steady background value must be confirmed manually.

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6.6.3

Calibration in Auto Leak Test
4 types of calibration are selectable: · internal automatic · internal manual

Operation 6-11

Operating Instructions

· external automatic · external manual
For external calibration, a separate test leak is required, which is attached to the chamber. For partial flow mode, an external calibration should always be carried out.
Calibration procedure:
1 Manually open test leak of it opens automatically, 2 evacuate, 3 Confirm stable signal with manual calibration, 4 auto tune (adjust to maximum sensitivity), 5 vent, 6 evacuate, after the measurement time has elapsed, use the signal with the test leak
open,
7 vent, 8 close the test leak, evacuate, apply the background signal after expiration of the
measurement time,
9 vent

6.6.4

Calibrate in commander mode
The test gas supply is not activated during calibration. 4 types of calibration are selectable: · internal automatic · internal manual · external automatic · external manual

For external calibration, a separate test leak is required, which is attached to the chamber.
The course of the calibration is as in the vacuum mode.

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6-12 Operation

Operating Instructions

6.7

Machine factor
The machine factor takes into account the fact that the Modul1000 is used in parallel with a pumping system (partial flow method).
Since, in such an installation configuration, only a part of the leakage gas flows through the leak detector, the Modul1000 outputs smaller measured values on the basis of an internal calibration by the partial flow ratio.
To prevent this, the machine factor can be stored in the software menu of the Modul1000. The measured leak rates are then multiplied by an internal calibration multiplied by the machine factor.
The machine factor can be estimated taking into account the helium pumping speed of the Modul1000 and the external pump.
The measurement of the leak rate is more accurate using an external test leak with the DUT – once with the external pump switched and once without. The ratio of the two results gives the machine factor.
The machine factor can also be used to correct the leak rate display with respect to the air equivalence. The machine factor for this correction is: 3.7 x 10-1.
If this setting is used, the status on the display is indicated by COR.

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Operation 6-13

Operating Instructions

6.8 Menu structure

Display Operating mode Trigger & Alarms
Calibration

Linear / logarithmic scaling Auto / manual display range Time axis Contrast Background in standby Lower display limit
Trigger level 1 Trigger level 2 Trigger level 3 Volume Units Alarm delay Audio Alarm Type Internal automatic Internal manual External automatic External manual

Vacuum settings

Main menu Modul1000

Settings

Zero & Background Mass
Interfaces

Miscellaneous

Purge & gas ballast Delayed venting Partial flow
Auto leak test settings
Commander functions
Machine factor Internal test leak leak rate Background suppression Zero Control location RS232 External manometer Define PLC output Define PLC inputs Recorder Gas ballast output Date / Time Language Leak rate filter Parts number CAL settling time
Maintenance intervals

measuring time Trigger level 1 Serial error message Parts number Reference measurement Commander timing Commander pressure thresholds Background suppression Trigger 1 level
Characteristics Zero point Full deflection
Recorder output Recorder output scaling
Maintenance interval, TMP reset Maintenance message for TMP Maintenance interval fan filter Maintenance message fan filter Maintenance message overall device on/off

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6-14 Operation

Operating Instructions
Main menu Modul1000

Settings

Loading / saving parameters monitoring

Display settings Display internal data Vacuum schematic Interfaces
Info Logged data

Use authorization

Calibration factors Service Access to CAL function Change device PIN Change PIN menu

Save under “PARA SET 1” Save under “PARA SET 2” Save under “PARA SET 3” Load default value Load “PARA SET 1” Load “PARA SET 2” Load “PARA SET 3” Calibration request Paging function Contamination protection Pressure limit for vacuum range Pressure limit for sniffing mode Maximum evacuation time Preamplifier
Error list display Maintenance list Display calibration history Test logs Delete test logs

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Operation 6-15

Operating Instructions

6.9

Description of the menu items
The menu items to which the respective description refers are printed in bold letters. Press the MENU button to display the selection menu on the display. The software menu opens at the menu level at which it was previously exited. Press the MENU button again to exit the software menu. When pressing the MENU button for approx. 2 seconds, the display changes to the top menu level, the main menu.

6.9.1

Main menu back
Goes back to the previous page, does not change the settings.

6.9.2

Main menu display
Linear / logarithmic scaling
This setting can be used to change the scaling of the bar display and the Y axis (see Chapter “Measured value display”)
It can be selected between linear and logarithmic representation. Only in the logarithmic representation can the number of displayed decades be changed by pressing the “” and “” buttons.

Auto / manual display range
The upper limit of the bar graph as well as the graphical display can be set manually or automatically.
· Manual: If you select manually, you can set any upper display limit between 10+3 mbar l/s and 10-8 mbar l/s for the bar display or for the Y axis for graphical leak rate display. The lower display limit is determined by the scale setting (see Chapter Linear logarithmic scale).
· Automatic: In the “automatic” setting, the bar display and the Y axis are automatically tracked when the display area is above or below the display of graphical leak rate display.

Time axis
The length of the time axis in the trend mode can be changed in several steps from 16 to 960 s.

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6-16 Operation

Operating Instructions

Contrast
You can change the contrast of the display. Changes to the contrast are immediately visible. Under normal conditions a contrast setting of approx. 50 is recommended.

If the display was set so bright or dark that menu items cannot be read anymore, the contrast can be set to the factory default as follows:
1 Switch off the Modul1000 and switch it on again
2 During the run-up phase, press buttons 3 and 7 simultaneously until you can read the
display again.
This setting is only applied permanently when the setting in the contrast menu is confirmed. If no confirmation is given, the module1000 will revert to the old control settings when it is switched on again.

Background in standby In standby mode, the device-internal helium background can be displayed.

Lower display limit
This setting limits the display of the leak rate in the measurement mode. It is effective only for the vacuum mode. The lower display limit affects the graphical leak rate output as well as the numerical leak rate output. The Modul1000 does not show any leak rates lower than the lower display limit. The lower display limit is freely selectable between 1×10-5 and 1×10-11 mbar l/s.

6.9.3

Main menu operating mode
Changing the operating modes is only possible in standby mode. he following operating modes can be selected: Commander (see Kap. 5.4) Sniffing (see Kap. 5.5) Auto leak test (see Kap. 5.3) Vacuum (see Kap. 5.1)

6.9.4

Main menu Trigger & Alarms
Trigger Level 1 (2 or 3)
Up to three leak rate trigger thresholds can be set under these menu items. If the measured leak rate exceeds the set trigger thresholds, the Modul1000 behaves as follows:
Display: The symbols for trigger 1, 2 or 3 are displayed inverted at the bottom of the display.
Relay output: The trigger relay of the PLC outputs switches.
Alarm / loudspeaker: If trigger threshold 1 is exceeded, an alarm signal is triggered through the loudspeaker of Modul1000.

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Operation 6-17

Operating Instructions

Volume
The hearing can be damaged by the alarm signal. The alarm level of the Modul1000 can exceed 85dB (A). · Only use the alarm signals for a short time or use ear protection.
In the menu item “Volume”, the volume of the acoustic signals can be adjusted by pressing the “” and “” buttons to the left and right of the value of the volume. In addition, the volume can also be changed in the measuring mode on the measuring surface with the buttons marked with a loudspeaker. If a minimum volume is set in the “Volume” menu item, a lower volume than the minimum volume cannot be set in the measurement area or in the “Loudspeakers” menu item. Beep sound: The beep sound of the Modul1000 can be switched on or off by means of the “Beep on” or “Beep off” button. If the beep sound is switched on, the module1000 signals certain status changes by a short signal sound.
Units The units in which the Modul1000 expresses measurement results can be changed. It is possible to choose between the pressure units mbar, Pa, atm and Torr as well as the leak rate measurement units mbar l/s, Pa m3/s, Torr l/s, atm cc/m and atm cc/ s. In the Sniff mode, the units of measure ppm, g/a, oz/yr can be selected.
Alarm delay In order to avoid triggering of the trigger alarm by high background, for example, during an evacuation process, an alarm delay time can be set. After the Modul1000 has switched from evacuation to measuring mode, the alarm delay time starts. Trigger 1 does not trigger until the set alarm delay time has elapsed or the leak rate measured value was briefly lower than the set trigger value 1. The alarm delay time can be variably set between zero and ten minutes. If the time is extended beyond 10 minutes, the alarm delay time automatically jumps to infinity.
Audio Alarm Type Three different alarm types can be selected. · Pinpoint:
The tone of the acoustic signal changes its frequency only within a leak rate window which comprises a range from a decade below the value of trigger threshold 1 to a decade above the value for trigger threshold 1. Below this window the sound is constantly low and above the window it is constantly high. For example: The trigger threshold 1 is 4 × 10-7 mbar l/s. Thus the window ranges from 4 × 10-8 mbar l/s up to 4 × 10-6 mbar l/s.
6-18 Operation

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Operating Instructions

· Leakage Rate Proportional: The frequency of the audible signal is proportional to the bar graph display. The frequency range is 300 Hz to 3300 Hz.
· Setpoint: The pitch is proportional to the leak rate. However, a tone will sound only if the leak rate has exceeded trigger 1.
· Trigger alarm: If the trigger level1 is exceeded, a signal tone is output.

6.9.5

Main menu Calibration (CAL) Vacuum operating mode
Internal automatic If the internal automatic calibration method is selected, the Modul1000 performs the entire calibration process independently. In automatic calibration methods, the Modul1000 automatically runs through the following sequences: · Internal test leak is opened automatically, evacuation of the inlet · Measuring the test leak · Auto tune (adjustment to maximum sensitivity of the mass spectrometer) · Internal test leak is automatically closed, measuring the helium background · Display of the newly determined calibration

Internal manual
If a manual calibration method is selected, various inputs must be made during the calibration procedure.
1 Only for the external manual calibration method, if the displayed leak rate does not
match the value of the test leak used, the test leak value must be entered. The internal manual calibration already starts by selecting the calibration method.
By pressing the “Change leak rate” button, the value of the test leak used can be entered (see also Chapter Changing values).
After setting the test leak value, the calibration process must be started by pressing the “Start” button.
2 After the calibration process is started, the Modul1000 evacuates the inlet area. 3 As soon as the maximum inlet pressure of the Modul1000 is reached, the Modul1000
displays an initially fluctuating measuring signal in the form of a bar display. After a time dependent on the volume associated with the inlet, this indicator stabilizes.
As soon as the bar display has assumed a stable value, this must be confirmed by pressing the “OK” button.
4 In a next step, the Modul1000 compares the mass spectrometer to maximum
sensitivity.
5 For external manual calibration, the Modul1000 prompts you to close the external
test leak.
Once the external test leak has been closed, confirm by pressing the OK button.

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Operation 6-19

Operating Instructions

No action is required for manual internal calibration.
6 No inputs are required during the actual calibration phase. 7 In a last step, the Modul1000 saves the newly determined calibration factor.
If the newly determined calibration factor deviates by a factor of two from the calibration factor previously determined in the calibration, the acceptance of the new values must be confirmed. Pressing “Yes” takes over the newly determined calibration factor. Pressing “No” does not take over the newly determined calibration factor. The Modul1000 also uses the calibration factor found in the previous calibration. External automatic This requires the connection of an external test leak with an electromagnetic valve. After selecting this calibration method, the entire calibration is carried out automatically. At the end of the calibration process (after approx. 25 s), a beep sounds. Then the leak detector is ready for further use. You can set the time before opening / closing the test leak until a stable measuring signal is obtained. External manual
1 Make sure the test leak is connected and open. 2 Read the leak rate at the test leak and compare it with the leak rate displayed. If there
are any deviations, press the Edit Leak Rate button and correct the value. If the leak rates match, press START.
3 The bar display shows a signal, which may fluctuate only slightly. If this is the case,
press OK.
4 Close the external test leak and confirm with OK. 5 The bar display shows a signal that cannot be reduced any further. Small fluctuations
are acceptable. If this is the case, press OK (button no. 8). The Modul1000 displays the old and the recalculated calibration factor.
6-20 Operation

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Operating Instructions

6.9.6 Main menu Settings

6.9.6.1

Main menu Settings Vacuum settings
Purge & Gas Ballast The following functions can be selected in the “Purge & Gas Ballast” menu. · Manual purge · Automatic purge · Manual gas ballast

Delaying the ventilation
By briefly pressing the “Stop / Vent” button, the Modul1000 is reset from the measuring mode to the standby mode. If the “Stop / Vent” button is pressed longer, the inlet of the device is additionally vented.
The length of time the Stop / Vent button must be pressed so that the inlet of the Modul1000 is vented depends on the time set in the “Delay ventilation” menu.
There may be a time duration corresponding to the button inscription, “no ventilation”, or “immediate”. If “no ventilation” is selected, the inlet cannot be ventilated by means of the stop button. If “immediate” is selected, the module1000 immediately switches to standby mode by pressing the “Stop / Vent” button.

Partial flow
The partial flow mode can be set and configured in the partial flow menu. It is possible to connect the partial flow pump separately only for the measuring operation and for the evacuation phase.

Main menu Settings Vacuum settings Auto Leak Test Settings
Measuring time In this software menu the measurement time can be determined in the Auto Leak test. A measurement time between 1 second and 30 minutes can be set.
Trigger Level 1 In the software menu trigger level 1, the rejection leak rate for the Auto Leak Test can be set.
Serial error message The serial fault message function can be activated in the “Serial error message” menu and the number of consecutive “FAIL” measurements leading to the serial fault message can be determined.

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Operation 6-21

Operating Instructions

Parts number The part counter can be activated in the software menu part numbers and a start value can be determined, from which counting is performed after each test cycle. Reference measurement A reference measurement can be started in this software menu item.
Main menu Settings Vacuum settings Commander Functions In the “Commander Functions” menu item, all parameters of the Commander function can be configured.
Commander timing Here, the times for the individual sequences can be set. The setting range is from 0.1 to 999.9 seconds
t_A pump-down time Maximum time to reach the set DUT pressure “p_B pump down pressure” Factory setting: 30 seconds
t_B zero delay Time delay until ZERO is executed (if zero “enabled”) or time within which I·ZERO is executed (if I·ZERO is activated). Factory setting: 10 seconds
t_C full time Maximum time to reach the filling pressure “p_C filling pressure” in the DUT Factory setting: 30 seconds
t_D relaxing time Maximum time to reach the release pressure “p_D Relaxing pressure” Factory setting: 30 seconds
t_E flooding time Maximum time to reach the flood pressure p_A gross leak test Factory setting: 10 seconds
t_F measuring readiness Maximum time to reach themeasuring mode Factory setting: 10 seconds
t_G measuring time Time after which the leak rate signal has settled. Factory setting: 10 seconds
6-22 Operation

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Operating Instructions

Commander pressure thresholds p_A gross leak test Pressure to which the DUT is allowed to sink Factory setting: 900 mbar p_B pump down pressure Pressure to which the DUT is pumped Factory setting: 40 mbar
p_C filling pressure Pressure to which the DUT is filled with helium Factory setting: 2000 mbar
p_D relaxing pressure Pressure to which the helium is discharged from the DUT Factory setting: 1100 mbar
p_E pressure drop threshold Pressure which the DUT must not fall below during the leak rate measurement Factory setting: 1800 mbar
Main menu Settings Vacuum settings Machine Factor After internal calibration, the machine factor takes into account the ratio between the effective pumping speed of the Modul1000 and that of the system pump state in the measuring mode. The machine factor takes into account the fact that a parallel external pumping system is used. On the basis of an internal calibration, all measured leak rates would be too small in such a case. The measured leak rates are multiplied by the machine factor and displayed as a result. This factor is used only in the vacuum mode (not in the sniffing mode). The machine factor can be estimated, taking into account both the helium pumping speed of the Modul1000 and the external pump. The measurement of the leak rate is more accurate using an external test leak with the DUT – once with the external pump switched and once without. The difference between the results determines the machine factor. The machine factor can also be used to correct the leak rate display with respect to the air equivalence. The machine factor for this correction is 3.7 x 10-1. If the machine factor is not equal to 1, this status is indicated on the display by “COR”.
Main menu Settings Vacuum settings Internal test leak leak rate
The value of the internal test leak can be entered here.
Operation 6-23

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Operating Instructions

6.9.6.2

Main menu Settings Zero & Background
Background suppression
Inlet area: In addition to the internal background, the background of the inlet area is also subtracted from the measuring signal by pressing the START button. The value has to be determined by means of the function “Background determination inlet area” in the “Zero & background” menu.
Only internally: The internal background is measured by pressing the START button and subtracted from the measuring signal.

Inlet area background determination
For this function, the device must be in the following state: · Vacuum mode · Condition ventilated (at least 1 minute) · Inlet blank flange · At least 20 minutes from power on.

Zero
The I·Zero function enables the ZERO button to be released only if the leak rate is stable. In this setting, the slope of the falling background signal is measured. The leak rate signal must be sufficiently stable to find a leak about the size of the set trigger 1. This is indicated by the message STABIL in the status bar. The I·Zero function is locked as long as the leak rate signal is not stable enough. (Slope of the falling background signal is > 0.5 x set trigger value1.) The set trigger value 1 is displayed in the display when the I·ZERO function is activated.

6.9.6.3

Main menu Settings Mass
In the “Mass” software menu, the tracer gas used for the leak detection can be changed. Choices are
H2 (Hydrogen) He (Helium) 3He (Helium isotope with mass 3)

6.9.6.4

Main menu Settings Interfaces
The electrical interfaces of the Modul1000 can be configured in the software menu “Interfaces”.

Main menu Settings Interfaces Control Location PLC The Modul1000 is controlled by the digital input. The START, STOP and ZERO buttons on the device are disabled.
RS232

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6-24 Operation

Operating Instructions

The Modul1000 is controlled via the RS232 interface from an external computer. In this operating mode the module cannot be operated via the keyboard.
All Control interfaces PLC, RS232 and local.
Local and PLC The Modul1000 is controlled by the START, STOP and ZERO buttons on the device as well as via the digital inputs.
Local and RS232 The module is controlled by the START, STOP and ZERO buttons on the device as well as via the RS232 interface.
Local The Modul1000 is controlled by the START, STOP and ZERO buttons.

Main menu Settings Interfaces RS232 Local The leak detector continuously sends the status and the leak rate without request.

Binary Allows the reading of device parameters, e.g. during maintenance.

UL2xxLeak Ware
When a PC is connected to the controller, it is possible to read measured values via the software package Leak Ware. (For the operation of the Leak Ware, see the corresponding instructions for use).

Notice

The calibration function of the Leak Ware is not suitable for operation with the Modul1000. Please execute the “STORE DATA” function in the “Single Part Measurement” operating mode so that the measured value recording starts.

ASCII Allows operation of the Modul1000 via an RS232 terminal. For details, refer to the interface description.
Main menu Settings Interfaces External Manometer
In Commander mode, the Modul1000 must be connected to an external pressure measuring point. In the software menu “External manometer” the characteristics and the zero point as well as full stroke of the pressure gage used must be entered.
Characteristics:The characteristics can be entered: Current linear, voltage linear, current logarithmic, voltage logarithmic.

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Operation 6-25

Operating Instructions

Zero point: The zero point (pressure value) of the connected sensor can be assigned with the corresponding current or voltage value.
Full deflection: The full deflection (pressure value) of the connected sensor can be assigned with the corresponding current or voltage value.
Main menu Settings Interfaces Define PLC outputs
In this sub-menu, the pin assignment of the PLC output connector (PLC-OUT) can be changed. To define the PLC outputs, proceed as follows:
1 Use the left-hand arrow buttons to select the connection pin to be configured for the
PLC-OUT connector
2 Use the right arrow buttons to assign one of the listed functions to the selected
connection pin.
3 After the PLC outputs have been defined as required, the settings must be saved by
pressing the “OK” button.
Main menu Settings Interfaces Define PLC inputs
In this sub-menu, the pin assignment of the PLC input connector (PLC-IN) can be changed. To define the PLC inputs, proceed as follows:
1 Use the left-hand arrow buttons to select the connection pin to be configured for the
PLC-IN connector
2 Use the right arrow buttons to assign one of the listed functions to the selected
connection pin.
3 After the PLC inputs have been defined as required, the settings must be saved by
pressing the “OK” button. The PLC inputs and the PLC outputs can be inverted in the menu and via the serial interface. The inversion is also stored in the parameter sets.
Main menu Settings Interfaces Recorder
In this sub-menu, the signals to be recorded by a recorder can be assigned to the two writer outputs (analog outputs).
Recorder output See Kap. 9.4 analog output (recorder output).
Recorder output scaling In this sub-menu you can adjust the scaling of the recorder outputs. This setting is only effective when selecting the signals LR lin or LR log. The upper display limit of the analog output can be set by pressing the arrow buttons to the left and right of the “Upper limit” value. By pressing the arrow buttons to the left and right of the “scale” value, the scale can be adjusted in increments of 0.5, 1, 2, 2.5, 5, 10 volts/decade, the total range being 10 V. (Only for “LRlog”)
6-26 Operation

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Operating Instructions

Example for signal LRlog:
1 Upper limit set to 10-5 (= 10 V) 2 Scale set to 5 V//decade
Lower limit value is thus at 10-3 (= 0 V)
Main menu Settings Interfaces Gas ballast Output
· inverted: Output level HIGH with closed gas ballast / purge valve
· normal: Output level HIGH with open gas ballast / purge valve

6.9.6.5

Main menu Settings Miscellaneous Date / Time
Set the time and date if necessary.

Language
The languages can be German, English, Italian, French, Polish, Katakana, Chinese or Spanish.
The default language is English.
If an incorrect language has been set incorrectly, the Modul1000 can be switched to “English” by pressing buttons 2 and 6 simultaneously. The setting is not saved automatically, but must be made via this menu item.
Leak rate filter
The leak rate filter type can be selected here. The factory setting is I·CAL.
The abbreviation I·CAL stands for Intelligent Calculation Algorithm for leak rates. This ensures that the signals are averaged at optimal time intervals and this is based on each leak rate range. I·CAL also determines interference spikes, which bear no relevance to the leak rate signals and delivers unusually short reaction times even with low leak rate signals.
The algorithm used provides excellent sensitivity and response time; the use of this setting is strongly recommended.
The filter type Fixed uses a fixed mean time of 0.2 seconds.

Parts number
In this menu you can set the function of automatic counting of parts to be tested.

CAL settling time
This menu can be used to set the time for an internal or external automatic calibration from the opening of the test leak valve to the detection of the stable signal. The time is dependent on the volume that is at the inlet during calibration.

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Operation 6-27

Operating Instructions

Maintenance intervals

Maintenance inter- Resets the maintenance interval of the overall device
val device reset (see Chapter 7 Maintenance work)

Maintenance inter- Resets the maintenance interval of the turbo molecular

val, TMP reset

pump

(see chapter 7 Maintenance work)

MaintenanceVia the menu item “Maintenance message for TMP”, the

message

maintenance message, which appears automatically after

For TMP

the maintenance interval has elapsed, can be deactivated.

Maintenance inter- In the “Maintenance interval fan filter” menu, the

val fan filter

maintenance interval can be set in 500-hour increments.

The highest value is 4000 hours. If there is a high dust

content of the air at the site, a short interval period should be

selected.

Maintenance

In the menu “Fan filter maintenance message”, the

message fan filter maintenance message, which appears automatically after

the maintenance interval has elapsed, can be deactivated.

MaintenanceThe maintenance messages can be switched on or off for

message for thethe overall device.

overall device ON/

OFF

Notice

Maintenance messages should be deactivated only if there is a separate maintenance schedule and the maintenance, authorizations, intervals etc. described in chapter 7 were taken into consideration.

Material damage due to overheating
If the maintenance message is ignored and a dirty air filter is not replaced, the Modul1000 may overheat.

6.9.6.6

Main menu Settings Loading / Saving parameters Save under “PARA SET 1” Save under “PARA SET 2” Save under “PARA SET 3”
By pressing the buttons “Save PARA SET 1” to “Save PARA SET 3” the current menu settings of the Modul1000 can be saved. On the menu page that appears, a new name can be given to the stored parameter set by pressing the “Change name” button.
Load “PARA SET 1” Load “PARA SET 2” Load “PARA SET 3”

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Operating Instructions

PLC IN Pin 3 PLC IN Pin 4 PLC IN Pin 5 PLC IN Pin 6 PLC IN Pin 7 PLC IN Pin 8 PLC IN Pin 9 PLC IN Pin 10

The previously stored parameter sets can be loaded and activated with the buttons “Load PARA SET 1” to “Load PARA SET 3”.

Load default value

By pressing the “Load default values” button, one of the four factory parameter sets can be loaded:

Default Parameter set 1 START STOP ZERO CAL CAL INTERN CAL EXTERN CLEAR GAS BALLAST

Default Parameter set 2 START_STOP GAS BALLAST ZERO CAL CLEAR NOT USED NOT USED NOT USED

Default Parameter set 3 START STOP ZERO INV GAS BALLAST ON GAS BALLAST OFF NOT USED NOT USED NOT USED

Default
Parameter set 4 START/STOP CAL ZERO ON

PLC OUT Pin 3 PLC OUT Pin 4 PLC OUT Pin 5 PLC OUT Pin 6 PLC OUT Pin 7 PLC OUT Pin 8 PLC OUT Pin 9 PLC OUT Pin 10 PLC OUT Pin 11 PLC OUT Pin 12 PLC OUT Pin 13 PLC OUT Pin 14

TRIGGER 1 TRIGGER 2 TRIGGER 3 ZERO ACTIVE EMISSION ON ERROR CAL ACTIVE CAL REQUEST OPEN OPEN OPEN OPEN

ERROR WARNING EMISSION ON CAL ACTIVE GAS BALLAST CAL REQUEST MEASURE ZERO ACTIVE TRIGGER 1 TRIGGER 2 TRIGGER 3 REC STROBE

MEASURE ERROR MEASURE EMISSION ON GAS BALLAST TRIGGER 1 TRIGGER 2 TRIGGER 3 OPEN OPEN OPEN OPEN

EMISSION ON INV TRIGGER1 INV TRIGGER2 INV ERROR

RECORDER Pin 2 LR MANTISSA LR MANTISSA LR MANTISSA RECORDER Pin 3 LR EXPONENT LR EXPONENT LR EXPONENT

LR unit Pressure unit Control location

mbar l/s mbar LOCAL

Pa m3/s Pa LOCAL, PLC

Factory setting: Parameter set 1

6.9.6.7

Main menu Settings Monitoring
Calibration request
Here you can set whether or not the operator should be reminded of the need for calibration. The factory setting is “OFF”.
When the calibration request is activated, a corresponding message will be displayed 30 minutes after power-up, or if the temperature in Modul1000 has changed by more than 5 °C since the last calibration.

Paging function

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Operating Instructions

If the Modul1000 is connected to a wireless remote control RC1000WL, an acoustic signal can be activated, which is heard on the remote control in order to locate and identify it.
Contamination protection
When this mode is switched on, the Modul1000 will close all valves as soon as the measured leak rate exceeds the limit for the contamination protection. This will prevent an excess amount of helium from entering the mass spectrometer. Consequently, the leak detector is prevented from becoming contaminated by helium.
Pressure limit for vacuum range
In this menu, the switchover point set at the factory can be set from evacuation to the ULTRA measuring mode. This can be necessary if the Modul1000 is pumped down with gases other than air. The pressure signal of the gas type inlet pressure gage (Pirani) can then deliver the corresponding switching values of the sequence flow. This can be compensated by changing the switching point. Factory setting: 0.4 mbar (Modul1000) or 3 mbar (Modul1000b)
Pressure limit for sniffing mode
This function is activated automatically in sniffing mode. The pressure limits define a maximum and a minimum inlet pressure. If the pressure is not within this range, error messages / warnings are output: Foreline pressure > Maximum pressure: Error message E63 (Caliper defective) Foreline pressure > Minimum pressure: Warning W62 (Gas flow through the caliper is too low).
6-30 Operation

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Operating Instructions

Maximum evacuation time
This menu item is used to determine when a gross leak message is to be made. The gross leak monitoring works on two levels and the threshold can be adjusted when required (factory settings 30 min.). This menu point is especially useful with series tests that always have the same test conditions.
After pressing the Start button the DUT is evacuated. If the corresponding pressure conditions are not reached or not undershot (p1 < 100 mbar or p1 < pressure limit for vacuum range) during the times to be set here, the evacuation process is interrupted and a warning message is displayed. (W75 or W76)
The times to be selected depend, on the one hand, on the desired reaction time for the gross leak test, and on the other hand, on the available DUT volume and on the effective pumping speed. If the duration is infinite, the oil level of a rotary vane pump used should be checked more frequently.
Preamplifier
Preamplifier test during calibration:
The device tests the installed preamplifier during calibration. If the test is switched off, the calibration will be faster, but the reliability will be reduced.

Preamplifier test during measurement:
In the measuring mode, the device checks whether the built-in preamplifier switches very frequently between the amplifier ranges (error message 20). This would indicate a defective preamplifier. If false alarms are generated, you can disable this test.

6.9.7

Main menu Info Display settings
In this picture you can see most important measurement settings.

Display internal data
This menu item goes over several pages and displays all internal data.

Vacuum schematic
The vacuum diagram of the Modul1000 is displayed. This diagram shows, among other things, which valves are currently open or closed. For partial flow mode and the use of the Commander functions, the corresponding vacuum diagrams are displayed on additional menu pages.

Interfaces
This menu item provides an overview of the interfaces (configuration and status).

Logged data
The history of errors, maintenance and tests can be displayed here. (See below)

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Operation 6-31

Operating Instructions

Calibration factors
The calibration factors for the various masses or operating modes and the machine factor are displayed.
Service
This menu item is only accessible to INFICON’s authorized service personnel.
Main menu Info Loggeddata Error list display The last 12 device errors are listed.
Maintenance list The times of the last 12 maintenance sessions are displayed.
Display calibration history The data from the last 12 calibration procedures are displayed.
Test logs The test logs are stored if part number is activated.
Delete test logs The stored test logs can be deleted.

6.9.8

Main menu User authorization Access to CAL function
Here you can block access to the calibration function and open it.

Change device PIN
Access to the Modul1000 can be restricted by entering or changing the device PIN. If the device PIN is different from 0000, the module1000 asks for this PIN immediately after switching on. The Modul1000 cannot be used without entering the device PIN.

Changing the menu PIN
Here you can set and change a 4-digit PIN to block access to the menu via the control unit.

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6-32 Operation

Operating Instructions

7 Maintenance work
The Modul1000 is a specially designed and constructed instrument for industrial use. The components and assemblies used meet the highest quality standards and are largely maintenance-free.
However, to maintain the warranty claims for the Modul1000, it is necessary to comply with the maintenance intervals listed below.
A maintenance contract for the Modul1000 with INFICON or a service partner authorized by INFICON is recommended.

7.1

Maintenance and service at INFICON
If you submit a device to INFICON for maintenance or repair, indicate whether the device is free from hazardous substances or has been contaminated. If it is contaminated, indicate the nature of the hazard. For this purpose, use a form “contamination declaration” prepared by us, which we will send to you on request. A copy of the form can be found at the end of this technical manual. Copies of the form are also permissible.
Attach the form directly to the device or attach it to the device in the package!

Notice

The Declaration of Conformity is essential to ensure compliance with statutory requirements and the protection of our employees. INFICON must return devices without a “Contamination Declaration” to the sender.

7.2

General notes on maintenance

Maintenance work for the Standards is divided into 3 service levels:

· Service level I Customer

· Service level II Customer with technical training

· Service level III Authorized INFICON service technician

Maintenance work on the Service Level II and III may only be carried out by persons authorized and trained by INFICON GmbH Cologne.

Please observe the safety instructions for all maintenance work on the Standards!

If you have your own maintenance schedule and are authorized to carry out maintenance work, then you can switch off the maintenance messages. See Kap. 6.9.6.5

Notice

Compliance with the following maintenance schedule is mandatory for cases where warranty claims are asserted for Modul1000. In the event, that the appropriate maintenance work was not carried out, the claim for warranty for these assemblies expires.

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Maintenance work

7-1

Operating Instructions

Life threatening hazard from electric shock · Disconnect the leak detector from the mains for all maintenance work!

Material damage from pollution
· For work on the vacuum system, pay attention to a clean environment and use a clean tool.

The Modul1000 has 3 independently running maintenance counters. In detail:
1 Maintenance counter for air filter.
The default setting is 1500 operating hours. The maintenance counter can be varied or switched off. It can thus be adapted to the operating conditions of the device.
2 Maintenance counter 5000 operating hours.
Serves the inspection and cleaning of valve drives and valve block.
3 Maintenance counter 2 years
Serves the maintenance of the turbo molecular pump.
The reaching of one of the above maintenance intervals is displayed as a warning on the control unit of the Modul1000 each time the device is switched on. The message is generated until the maintenance interval has been acknowledged. The maintenance counter 2 is only released for acknowledgment of service levels II and III in the service menu.

Notice

Backing pump
The backing pump is not part of the device delivery. Therefore, the maintenance intervals and instructions prescribed by the manufacturer of the backing pump apply to the maintenance of the backing pump.
Damage to the Modul1000, which is clearly due to faulty behavior of the backing pump, cannot be asserted on warranty.

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7-2

Maintenance work

Operating Instructions

7.3 Maintenance plan

Assembly

Maintenance work Standards

Vacuum system Valve block

Clean valve, replace valve seals Dismantle and clean the valve block Replace the flood gas line filter Adjust Pirani Recalibrate the internal test leak

Operating hours / years

1500 5000 15000

1/4 1

Service level

Replacement
part no.

III III I, II,III III

200000594 200002002 200000683

Turbo pump

molecular Change the oil wick cartridge Change the bearing and the oil wick cartridge

II & III 200003801

III

Electrical Fan assembly

Replace the chassis hood filter elements Clean the fan chassis & turbo pump

200001552

Maintenance schedule legend
· I Service level I Customer · II Service level II Customer with INFICON training · III Service level III Authorized INFICON service technician · X Carry out maintenance as per operating hours or duration · X1 Carry out maintenance work as per operating hours · X2 Carry out maintenance work as per duration · 1 Depending on environment and use · 2 Depends on environmental influences, operating conditions, contamination,
and application process (optional)

7.4 Maintenance intervals
The maintenance plan for the Modul1000 can be subdivided into three maintenance groups for an easy overview. · 1500 Hour maintenance · 5000 Hour maintenance · 2 Year maintenance

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Maintenance work

7-3

Operating Instructions

1500 Hour maintenance
The 1500-hour maintenance can be performed by an operator or by a customer-own maintenance staff. The maintenance intervals can be adapted to the ambient conditions of the device and are variable. If desired, the maintenance interval can be switched off.
To carry out the 1500 hours of maintenance, the filter cartridges in the chassis hood must be checked and replaced if they are contaminated. The replacement of the filter elements can be carried out while the device is running without opening the device hood. For the exchange see the following Fig. 7-1.

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Fig. 7-1 Removing the filters from the chassis housing

Item Description 1 Filter cartridge

Item Description 2 Chassis Modul1000

Work to be performed Check / replace air filter

Material required · Replacement filter for fan

Order no. 200001552

5000 Hour maintenance
The 5000 hour maintenance should be carried out by an INFICON service technician or a person authorized by INFICON.
The valve drives must be inspected, cleaned and the valve seals or valve caps renewed every 5000 operating hours. The flood filter is to be checked depending on the application after 5000, but at the latest after 15000 hours of operation it is to be replaced.
After 15,000 operating hours, the valve block must be completely cleaned. The valve block must be disassembled for this.

7-4

Maintenance work

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Operating Instructions

Notice

The internal helium standard leak has a certificate with a validity period of one year after delivery of the leak detector. It is recommended to have the certificate renewed annually by INFCON GmbH. The internal helium standard leak is checked in all functions and a new certificate is issued for another year.

Work to be performed

Material required

Clean valve actuators, replace · Valve seal kit valve seals and valve caps (5000 hours)

Check / replace flood filter (5000 / · Replacement filter for flood

15,000 hours)

gas line

Clean valve block completely (15,000 hours)

· Sealing kit detection system compl.

Recalibrate the internal test leak (recommended annually)

Test and readjust Pirani sensors ( 15,000 hrs.)

Order no. 200000594
200000683 200002002

2 year maintenance: Oil wick cartridge (optional)
The optional 2-year maintenance of the turbo molecular pump oil wick cartridge should be carried out by a INFICON service technician or a person authorized by INFICON. Customers who have received a corresponding training from an authorized person can carry out this maintenance within their own responsibility.
The oil wick cartridge of the turbomolecular pump can be replaced after 2 years, depending on the operating conditions and contamination of the oil. Please follow the instructions in Chapter 7.6 for the exchange of the oil wick cartridge.

Work to be performed Replace oil wick cartridge

Material required · Oil wick cartridge

Order no. 200000577

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Maintenance work

7-5

Operating Instructions

7.5

Description of the maintenance operations
Modifications to Modul1000 which go beyond the normal scope of the maintenance measures may only be carried out by trained personnel.
The removal of the device hood is not required for maintenance purposes as described in this Chapter. Replacing a fuse however, requires opening the device. In order to avoid any possible danger with this, the procedure is described below.

7.5.1 Opening the device
Required tools Allen wrench 8 mm

Life threatening hazard from electric shock · Disconnect the leak detector from the mains before removing the device cover!

Danger for wearers of implants such as pacemakers There is a strong permanent magnet in the device. The magnetic fields can interfere with the function of the implant when the device cover is removed. · As a wearer of such devices, maintain a distance of at least 10 cm between the
leak detector and the implant. · Furthermore, observe the safety instructions of the implant manufacturer.
To open the Modul1000, proceed as follows.
1 Turn off the mains switch and remove the mains cable. 2 Remove the quick release ring from the test port. 3 Use the Allen wrench AF 8 mm to open the (ROTO-LOCK) fasteners on either side
of the unit cover. See Fig. 7-2 for more information.

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7-6

Maintenance work

Operating Instructions

Fig. 7-2 Opening the device cover
1 Turn the Roto-Lock locks to the “OPEN” position. 2 Carefully lift off the device hood. 3 Proceed in reverse order when refitting the device cover. When refitting the device
cover, make sure that no electrical connections are pinched between the hood and the chassis.
4 To close the device cover, turn the Roto-Lock locks towards the “CLOSE” position.

7.6

Replace oil wick cartridge
The turbo molecular pump is filled with an operating fluid for the lubrication of the ball bearings. The oil wick cartridge of the turbomolecular pump can be replaced after 2 years, depending on the operating conditions and contamination of the oil.

Required tools Special tool pin wrench

Required material Oil wick cartridge P/N: 200 000 577

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Maintenance work

7-7

Operating Instructions

Only in the flooded state can the sealing cover be opened from the oil wick cartridge. · Before starting any maintenance work, make sure that the mass spectrometer
and the turbo pump are completely flooded.
1 To flood the turbo molecular pump, switch on the fore-vacuum connection for
Standards disconnection and switch on the device for approx. 10 to 25 s. After approx. 10 s valve V2 opens and mass spectrometer and turbo molecular pump are flooded. Wait at least another 10 s until the high vacuum system has been completely flooded.
2 Turn off the mains switch again and disconnect the device from the mains supply. 3 Turn the device on a lengthwise side so that you have access to the revision shaft
on the bottom of the device.
Notice Be careful not to damage the fore-vacuum connections.
4 To replace the turbo molecular pump oil wick cartridge, the cap must be unscrewed
on the bottom of the turbo molecular pump. See Fig. 7-3/3 for more information.

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1
2 3 4

Fig. 7-3 sealing cover oil wick cartridge

Item Description 1 Fore-vacuum connection 2 Engagement special tool

Item Description 3 Sealing cover oil wick cartridge 4 Revision shaft

7-8

Maintenance work

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Operating Instructions

5 Unscrew the cap on the underside of the turbo molecular pump using a special tool
(pin wrench).
6 After the sealing cover has been removed, the oil wick cartridge is accessible. Use a
screwdriver to pry out the oil wick cartridge and dispose of it according to local regulations.
7 Inserting a new oil wick cartridge.
See Fig. 7-4 for more information.
Do not press the oil wick cartridge in completely. The oil wick cartridge is correctly positioned over the sealing cover after screwing it into place. See also the operating instructions for Pfeiffer PT 0208 BN / I.
8 Replace O-ring (Fig. 7-4/2) with a new O-ring. Make sure that the new O-ring is
inserted in the correct position. An incorrectly mounted O-ring will result in gross leaks, which lead to a malfunction of the device.
9 Finish by refitting and tightening the cover.
1
2

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Fig. 7-4 Replace oil wick cartridge

Item Description 1 Oil wick cartridge

Item Description 2 O-ring

Maintenance work

7-9

Operating Instructions

7.7 Changing the fuses

The replacement of fuses on printed circuit boards is not possible without their removal. The removal without ESD protective measures is grossly negligent and can lead to damage to the device!

7.7.1 Summary of the electrical fuses

Designation Mains switch

Technical data Fuse protection for 2 x T 6.3 A Power supply fuse (2-phase OFF)

Wiring level:
Designation F10 F11

Technical data Fuse protection for

T 6.3 A

Turbo molecular pump converter

T 0.8 A

Fans

Power supply ZWS240PAF-24/TA:

Designation F1

Technical data Fuse protection for

F 6.3 A

Fuse protection – power supply unit

I/O printed circuit card:

Designation F1; F2 F3

Technical data Fuse protection for

T 0.8 A

not used

T 0.315 A

not used

Summary of the electrical fuses

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7-10 Maintenance work

Operating Instructions

MSV printed circuit card:

Designation F1 F2 F3 F4

Technical data Fuse protection for

T 2A

24 V main fuse for MSV board

T 3.15 A

Anode heater (not used)

T 1A

±15 V;+5 V DC/DC converter

M 0.032 A Anode-cathode voltage (85 V)

Interface boards:

Designation

Technical data

T 1A

24 V CONTROL UNIT

T 0.8 A

24 V REMOTE CONTROL; PC RS232

T 0.8 A

24 V PRESSURE GAGE; PLC IN

T 1.6 A

24 V PLC OUT; VALVES; ACESSORIES

T 1.0 A

VALVES V30 – V33 feed (max. 30 V)

T 1.0 A

VALVES V34 – V37 feed (max. 30 V)

Notice Replacing the fuse can only be carried out by a qualified electrician, as removal of the device hood is usually necessary.

7.7.2 Replace mains fuse

Danger to life due to electric shock! · Before replacing the fuse, unplug the power cord of the Modul1000. · Only install fuses with the specified values in the Modul1000.
Required tools · Slotted screwdriver size 1
Required material · Melting fuse 2 x T 6.3 A The main fuses of the Modul1000 are housed in the mains plug of the unit. · To replace the main fuses, use a screwdriver to open the cover flap guarding the fuse link. Insert the screwdriver into the corresponding groove and open the cover flap. See Fig. 7-5 for more information. · Make sure there are two functional fuses in the fuse holder.

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Maintenance work 7-11

Operating Instructions

1 4
2
3

Fig. 7-5 Changing the fuses
Item Description 1 Cover flap 2 Melting fuse T 6.3 A

Item Description 3 Fuse link 4 Groove opening

7.7.3

Replacing Interface Board Fuses
The interface board (SSK) contains the fuses for the inputs and outputs on the board. A summary of the fuses and their use can be found under Summary of the electrical fuses.

Required tools · Allen key AF 8

Required material

· Complete fuse set

Order no.: 200 000 641

Access to the fuses is only possible when the device cover has been removed from the Modul1000. Proceed as described in 7.5.1 Opening the device for this purpose.

Notice Please observe the relevant safety instructions in this chapter.
· After removing the device hood, the fuse is accessible on the interface board. See Fig. 7-6 for more information.

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7-12 Maintenance work

Operating Instructions

F 1 F 2

F 3

F 4

F 5 F 6

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Fig. 7-6 Interface board fuses (SSK)

Item Description 1 Interface board SSK

Item Description 2 I·STICK

7.8 Parameter storage (I·STICK) replacement
The application parameters of the customer are stored on the I·STICK. If a backup device has to be installed, the user parameters can simply be transferred to the backup device by replacing the I·STICK.
Required tools
· Allen key AF 8 · Screwdriver size 1

Required material
· I·STICK Access to the I·STICK is only possible when the device cover has been removed from the Modul1000. Proceed as described in 7.5.1 Opening the device for this purpose.
Notice Please observe the relevant safety instructions in this chapter. · To replace the I·STICK, loosen the two screws with which the I·STICK is screwed
on the socket. See Fig. 7-7 below for more information.

Maintenance work 7-13

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Operating Instructions

7.9

Fig. 7-7 I·STICK replacement
Item Description 1 I·STICK

Item Description 2 Mounting screws

After the screws have been loosened, remove the I·STICK from the socket and replace it with the I STICK of the defective unit. The installation is carried out in the reverse order.

Flood filter replacement
The flood filter is checked or exchanged within the scope of the 5000 hours of maintenance. When used in extreme operating conditions, shorter maintenance times is more realistic.

Required tools · Allen key AF 8

Required material

· Replacement filter (2 pieces)

Order no.: 200 000 683

Access to the flood filter is only possible when the device hood has been removed from the Modul1000. Proceed as described in 7.5.1 Opening the device for this purpose.

Notice Please observe the relevant safety instructions in this chapter.

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7-14 Maintenance work

Operating Instructions

· To remove the flood filter, disconnect the hose connections from the quick couplings. By pressing the outer ring on the quick couplings, the hose can be pulled off. Refer to Fig. 7-8 for the installation position.

Fig. 7-8 Modul1000 replacement flood filter

Item Description 1 Flood filter

Item Description 2 Hose guide

Notice

Let only trained personnel work with and on the device. The trained personnel must have received training on the device. Make sure that authorized personell have read and understood this manual and all other applicable documents before starting work.

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Maintenance work 7-15

7-16 Maintenance work

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Operating Instructions

8 Transport and disposal
Danger of damage The Modul1000 can be damaged by improper transport. · Only transport the Modul1000 in its original packaging.
8.1 Returning the device for maintenance, repair or disposal
Danger due to harmful substances Contaminated devices could endanger health. The contamination declaration serves to protect all persons who come into contact with the device. Devices sent in without a return number and completed contamination declaration will be returned to the sender by the manufacturer. · Fill in the declaration of contamination completely.
1 Contact the manufacturer and send in a completed declaration of contamination
before return shipment. You will then receive a return number and the shipping address.
2 Use the original packaging when returning. 3 Before shipping the instrument, attach a copy of the completed contamination
declaration to the outside of the package. For contamination declaration see below.

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Transport and disposal

8-1

Operating Instructions

Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Description of product Type Article Number Serial Number

Reason for return

Operating fluid(s) used (Must be drained before shipping.)

The product is free of any sub-

stances which are damaging to

health

yes

Process related contamination of product:

toxic

no 1) yes

caustic

no 1) yes

biological hazard

yes 2)

explosive

yes 2)

radioactive

yes 2)

other harmful substances no 1) yes

1) or not containing any amount of hazardous residues that exceed the permissible exposure limits

2) Products thus contaminated will not be ac-
cepted without written
evidence of decontamination!

Harmful substances, gases and/or by-products Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name

Chemical name (or symbol)

Precautions associated with substance

Action if human contact

Legally binding declaration:
I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may arise. The contaminated product will be dispatched in accordance with the applicable regulations.

O rganization/company Address Phone Email Name

Post code, place Fax

Date and legally binding signature

Company stamp

This form can be downloaded from our website.
INFICON GmbH Bonner Str. 498,50968 Cologne, Germany Tel: +49 221 3474 2222 Fax: +49 221 3474 2221 www.inficon.com leakdetection.service@inficon.com

Copies: Original for addressee – 1 copy for accompanying documents – 1 copy for file of sender
zisa01e1-a

Fig. 8-1 Sample for a contamination declaration form

If you dispose of the Modul1000, please observe the legal regulations for the disposal of electronic devices.

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8-2

Transport and disposal

9 Technical data

Operating Instructions

9.1 Device data
9.1.1 Power supply
Mains voltage and frequency Power consumption Protection type basic unit
Protection type control unit

100V – 240V ±10%, 50/60 Hz < 400 VA EN 60529 IP20 U 50E Typ 1 EN 60529 IP40 U 50E Typ 1

9.1.2 Weight / dimensions
Dimensions (L × W × H) Weight Switching capacity level dB (A) Sound pressure level in dB (A) Noise level dB (A) 0.5 m distance Audio alarm in dB (A) Contamination value (as per IEC 60664-1) Over-voltage class (as per IEC 60664-1) Main cable

535 × 350 × 339 mm 30 kg < 70 < 56 < 56 90 2 II 3m

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9.1.3 Characteristics

Max. inlet pressure (Modul1000)

0.4 mbar

Max. inlet pressure (Modul1000b)

3.0 mbar

Minimum detectable helium leak rate In vacuum mode (ULTRA) Lower detection limit in sniffing mode

< 5×10-12 mbar l/s < 5×10-8 mbar l/s

Maximum allowable gas flow in the sniffer line

25 sccm

Maximum displayable helium leak rate

0.1 mbar l/s

Measurement range

12 decades

Max. pumping speed (helium) at the inlet

ULTRA mode

2.5 l/s

Time constant of the leak rate signal (63% of the final < 1 s value)

Detectable masses

2, 3 and 4

Run-up time (after switching on)

3 min

Mass spectrometer

180° magn. Sector field

Ion source (2 cathodes)

Iridium/Yttrium oxide

Inlet flange

DN25 KF

Valves

electromagnetic

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Technical data

9-1

Operating Instructions

9.1.4 Ambient conditions
For use in rooms Permissible ambient temperature (during operation)
Permissible storage temperature
Maximum relative humidity
Minimum humidity during transport and storage Minimum humidity during operation Max. allowable height AMSL (during operation)

+10° C to +40° C
50° F to 104° F 0° C to +60° C
32° F to 140° F 80% at 31° C / 88° F, falling linearly to 50% at 40° C / 104° F 10% 30% 2000 m

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9-2

Technical data

9.2 Control via the PLC inputs and outputs
If the Modul1000 is to be controlled via the PLC inputs and outputs, the control location “PLC”, “All” or “Local and PLC” (see chapter, or SB) must be selected.
9.2.1 PLC inputs

Operating Instructions

The electronics of the Modul1000 can be destroyed if the input voltage is too high. The input voltage must not exceed 30 V DC.

The 14-pin Phoenix connector is located on the back of the device and is labeled PLC IN / AUDIO. The pin assignment of the connection socket can be freely configured (see also interface description)

Contact
1
2 3 4 5 6 7 8 9 10 11 12 13 14

Assignment

24V fused with F3 on the interface board (0.8 A, maximum current output at this

contact together with contact 1 at the connection PRESSURE GAUGE)

GND

freely configurable PLC input

e.g. START (factory setting)

freely configurable PLC input

e.g. STOP (factory setting)

freely configurable PLC input

e.g. ZERO (factory setting)

freely configurable PLC input

e.g. CAL (factory setting)

freely configurable PLC input

e.g. CAL INTERNAL (factory setting)

freely configurable PLC input

e.g. CAL EXTERNAL (factory setting)

freely configurable PLC input

e.g. CLEAR (factory setting)

freely configurable PLC input

e.g. GAS BALLAST (factory setting)

PLC GND (as per ref. potential)

free

AUDIO_OUT

5V level, PWM output

GND 24V

Use a ferrite on the cable (eg Würth 742 711 31). Lay the cable twice through the ferrite and place it as close as possible to the 14-pin connector.
The contacts are numbered from left to right.
Fault or warning messages may occur when the connection cable is disconnected or unplugged during operation.
Description of how the digital inputs work:
A signal between 0V to 7V is recognized as LOW, a signal > 13V is recognized as HIGH. The maximum signal level is 30 V DC. All functions can also be selected in inverted form.

Notice The signals at these inputs are only accepted if the control location is at PLC or Local and PLC.

ZERO Flank-controlled input Change from LOW to HIGH: Switch ZERO on. Change from HIGH to LOW: Switch ZERO off.

Technical data

9-3

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Operating Instructions

START / STOP Flank-controlled input Change from LOW to HIGH: Perform START. Change to LOW: Perform STOP.
START Flank-controlled input Change from LOW to HIGH: Perform START
STOP Flank-controlled input Change from LOW to HIGH: Perform STOP. If this this input is HIGH for longer that the “Delayed Ventilation” ventilate additionally.
VENT Flank-controlled input Change from LOW to HIGH: Flood
GAS BALLAST Flank-controlled input Change from LOW to HIGH: Gas Ballast / Switch-on flushing. Change from HIGH to LOW: Gas Ballast / Switch off flushing.
CLEAR Flank-controlled input Change from LOW to HIGH: Confirm the error message or abort a calibration.
CAL Flank-controlled input Change from LOW to HIGH: If the device is in standby mode: Start internal automatic calibration. If the device is in measurement mode: Start external manual calibration (prerequisite: external test leak must be open and leak rate signal stable) Change from HIGH to LOW: For external calibration: Confirmation that the external test leak is closed and the leak rate signal is stable.
CAL INT Flank-controlled input Change from LOW to HIGH: Start internal automatic calibration.

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9-4

Technical data

Operating Instructions

CAL EXT Flank-controlled input Change from LOW to HIGH: Start external manual calibration.
CYCLE (Flank-controlled START / STOP input) State-controlled input Change from LOW to HIGH: In the standby state START is executed and the STOP state is executed.
GAS BALLAST ON Flank-controlled input Change from LOW to HIGH: The gas ballast valve is opened.
GAS BALLAST OFF Flank-controlled input Change from LOW to HIGH: The gas ballast valve is closed.
ZERO ON Flank-controlled input Change from LOW to HIGH: Switch ZERO on ZERO is turned off when the device changes to Standby.
SNIFF State-controlled input Change from LOW to HIGH in the Standby state: Switch to SNIFF operating mode. Change from HIGH to LOW in the Standby state: Switch to the set operating mode.

9.2.2

PLC outputs
The 16-pin Phoenix connector is located on the back of the device and is labeled PLC OUT. The pin assignment of the connection socket can be freely configured.

Notice Relay outputs (contact 3-12): Max. load 60V DC / 25V AC / 1A ohmic load, for up to 500,000 switching operations.
Semiconductor relay outputs (contact 13, 14)

Documents / Resources

INFICON Modul1000 Modular Leak Detector [pdf] Instruction Manual
550-300A, 550-310A, 550-330A, Modul1000 Modular Leak Detector, Modul1000, Modular Leak Detector, Leak Detector, Detector

References

User Manual

INFICON Modul1000 Modular Leak Detector Instruction Manual

Modul1000 Modular Leak Detector

Specifications

Product Information

User Guidelines

Description of Equipment

Operation Modes

Product Usage Instructions

Installation

Operation

Switching ON or OFF

Status LED

Controller

Control Commands

Display

Calibration

FAQ (Frequently Asked Questions)

Q: How often should calibration be performed?

Q: Can the leak detector be used in hazardous
environments?

Documents / Resources

References

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