HORIBA Reticle/Mask Particle Detection Integrated System Instruction Manual
Tshawb nrhiav PD Xpadion los ntawm HORIBA, ib qho kev sib xyaw ua ke tsim los rau cov khoom siv hluav taws xob semiconductor reticle / daim npog ntsej muag pom pom. Ua tiav qhov kev soj ntsuam siab mus rau 0.1µm hais nrog cov tshuab kho qhov muag kho tau. Calibration thiab siv cov lus qhia suav nrog.