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HORIBA STEC Manuals & User Guides

HORIBA STEC specializes in precision fluid control components, including mass flow controllers and pressure regulators for the semiconductor manufacturing industry.

Tip: include the full model number printed on your HORIBA STEC label for the best match.

About HORIBA STEC manuals on Manuals.plus

HORIBA STEC is a leading global manufacturer of fluid control components and systems, operating as a key division of the HORIBA Group. The company is renowned for its high-precision Mass Flow Controllers (MFCs), liquid source vaporization systems, and automatic pressure regulators, which are critical in semiconductor and LCD manufacturing processes.

With a focus on accuracy, reliability, and advanced flow measurement technology, HORIBA STEC supports complex industrial applications requiring strict control of gases and liquids. Their product lineup includes the SEC and SECF series, widely utilized in vacuum and gas control systems worldwide.

HORIBA STEC manuals

Latest manuals from manuals+ curated for this brand.

HORIBA STEC UR-Z712 Auto Pressure Regulator Instruction Manual

January 10, 2026
HORIBA STEC UR-Z712 Auto Pressure Regulator Specifications Model UR-Z712MC (-UC) (-B) UR-Z712MO (-UC) (-B) Applicable fluid Gas   Pressure range Gage pressure type:20-950kPa(G)10-500kPa(G) ※only for primary pressure regulataion specfication Absolute pressure…

HORIBASTEC PE-D10 Monitor Unit Instruction Manual

instruction manual
Instruction manual for the HORIBASTEC PE-D10 Monitor Unit, detailing its features, specifications, setup, operation, alarm functions, and safety guidelines for industrial mass flow control applications.

HORIBA STEC support FAQ

Common questions about manuals, registration, and support for this brand.

  • What is the recommended warming-up time for HORIBA STEC mass flow controllers?

    Generally, power should be supplied for at least 30 minutes without gas flowing to ensure the device reaches thermal stability and flow rate accuracy.

  • What is the standard warranty period for HORIBA STEC products?

    Products are typically warranted for one (1) year (parts and labor) from the date of shipment, covering defects not caused by customer neglect or improper operation.

  • Can I install HORIBA STEC MFCs in any orientation?

    Yes, many models such as the SEC(F) series cite 'Free' mounting orientation, largely without degradation of performance, though correct flow direction must be observed.

  • How do I connect the electrical interface for the SECF-N135MGMR?

    Depending on the model, connections are made via a D-subminiature 9-pin connector or specialized digital interface connectors (e.g., CC-Link, PROFIBUS). Refer to the specific pinout table in your instruction manual.

  • What does it mean if the Status LED on my GR series regulator turns red?

    A solid red Status LED typically indicates an error or irregular condition has occurred in the device. Check the manual for specific error codes or troubleshooting steps.