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OMRON ZS-HL-N Series Smart Sensors

3OMRON-ZS-HL-N-Series-Smart-Sensors -PRODUCT

Non-procedural Communication Command Reference

  • Cat. No. Z472-E1-01

Product Introduction

Thank you for purchasing the ZS-HL-N Series. This manual provides reference information on non-procedural communication commands for ZS-HL-N Series.

Product Setting the Communication Specifications

To change the settings of the controller communication specifications for non-procedural communication with the external device, follow these steps:

  1. Set the mode switch to FUN.
  2. Select [System] – [Communication] – [Mode] menu.
  3. Select [non-procedural].
  4. For RS-232C cable connection, select the [System] – [Communication] – [RS-232C] menu to set the appropriate communication specifications for the external device.
  5. Save the settings.

Product Format

The format of non-procedural commands are as follows:

Example: A command to acquire a measured value MEASURE command

Each character is output as an ASCII code (except for the FLOWDATA response).

  • M E A

Please refer to the manual for the full list of non-procedural commands and parameters, as well as examples of usage and revision history.

Introduction

Thank you for purchasing the ZS-HL-N Series. This manual provides reference information on non-procedural communication commands for ZS-HL-N Series. When using the ZS-HL-N Series, be sure to observe the following:

  • The ZS-HL-N Series must be operated by personnel knowledgeable in electrical engineering.
  • To ensure correct use, please read this manual thoroughly to deepen your understanding of the product.
  • Please keep this manual in a safe place so that it can be referred to whenever necessary.

Setting the Communication Specifications

Change the settings of the controller communication specifications for non-procedural communication with the external device.

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-1Use USB cable or RS-232C cable to connect ZS-HL-N Series controllers to external devices. For USB cable connection, install Smart Monitor ZS and USB driver beforehand. After installing Smart Monitor ZS, USB ports are recognized as standard COM ports, and communication is achieved as with the RS- 232C. (Setting the communication specifications including baud rate is not necessary.) For details on how to connect cable, refer to the User’s Manual for each controller.

  1. Set the mode switch to “FUN”.
  2. Select [System] – [Communication] – [Mode] menu.
  3. Select [non-procedural].
  4. For RS-232C cable connection, select [System] – [Communication] – [RS-232C] menu to set the appropriate communication specifications for the external device.
  5. Save the settings.

Format

The format of non-procedural commands are as follows:

Example: A command to acquire a measured value MEASURE command

  • Each character is output as an ASCII code (except for FLOWDATA response).

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-2

The format of returned values changes depending on the command. For the description of each command, refer to “List of Non-procedural Commands” section.

  • MEASURE / M / DATAGET
    • The returned value consists of right-aligned 11 characters and a delimiter. The unit is nm for a displacement value. The shortfalls of the characters are filled with spaces from the left.

Example: The returned value is -30.719923 mm.

30719923CR
  • BANKGET command
    • The returned value is output as 1 character bank No.

Example: The bank No. is 2.

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-16

  • VERGET command
    • The returned value is output in the following format:

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-3

  • Other commands
    • Either OK or ER is returned according to the result of the command. The command was executed properly:
OKCR

The command was not executed properly or the setting was NG:

ERCR
  • The delimiter can be selected from the following three types.
    • CR/LF/CR+LF

List of Non-procedural Commands

Command nameFormatReturned valueDescription
MEASUREMEASURE

<Task No.>

<delimiter>

<measured value>

<delimiter>

Acquires a measured value.

If <Task No.> is omitted, it requires the displayed measured value.

MM <Task No.>

<delimiter>

<measured value>

<delimiter>

Same as MEASURE command.
DATAGETDATAGET <Unit No.>

<Data No.>

<delimiter>

<Data>

<delimiter>

Acquires measurement data or setting data of the processing unit.

* For details of numbers, refer to “List of Parameters.”

DATASETDATAGET <Unit No.>

<Data No.>

<Setting value>

<delimiter>

OK <delimiter> ER <delimiter>Changes setting data of the processing unit.

* For details of numbers, refer to “List of Parameters.”

BANKGETBANKGET<delimiter><Bank No.>

<delimiter>

Acquires the current bank No.
BANKSETBANKSET<Bank No.>

<delimiter>

OK <delimiter> ER <delimiter>Switches to the designated bank No.
ZERORSTZERORST

<Task No.>

<delimiter>

OK <delimiter> ER <delimiter>Executes a zero-reset. If <Task No.> is omitted, it executes on the task currently displayed as a result. If

<Task No.> is set to 4, it executes on all the tasks.

ZEROCLRZEROCLR

<Task No.>

<delimiter>

OK <delimiter> ER <delimiter>Cancels a zero-reset. If <Task No.> is omitted, it executes on the task currently displayed as a result. If

<Task No.> is set to 4, it executes on all the tasks.

DATASAVEDATASAVE

<delimiter>

OK <delimiter> ER <delimiter>Saves all the bank data on the flash memory of the controller.
VERGETVERGET<delimiter><Type/Version>

<delimiter>

Acquires version information of the system. Example: ZS-LDC 1.100<delimiter>
FLOWDATAFLOWDATA

<delimiter>

OK <delimiter> ER <delimiter>Used to acquire measurement data at the shortest intervals possible.

For details, refer to “FLOWDATA Reference.”

  • Specifying the node
    • Specify @xx at the beginning of the command.
    • If the node No. is 1, specify @01. (Be sure to note double digits.)
    • If the node No. is omitted, the command operates on the node that received it.
  • Format of a returned value
    • A returned value for MEASURE,M,DATAGET, CFLOGGET,CFDATGET is the right aligned 11 characters.
  • Upper case and lower case characters
    • For alphabetic, only upper case characters are accepted.
  • Task No.
    • Omit <Task No.> when issuing a command for ZS-LDC.
    • Task Nos are assigned as follows: 0: TASK1 1: TASK2 2: TASK3 3: TASK4.

List of Parameters

The following parameters can be obtained or set by DATASET or DATAGET command:

Unit No.Data No.ParameterSetting range/Output rangeOthers
00Measurement mode0: STANDARDWhen multi-task mode
1: HI-RESOis OFF.
2: HI-SPEED
3: HI-SENS
4: CUSTOM
Measurement mode1: STANDARDWhen multi-task mode
2: HI-RESOis ON.
3: HI-SENS
4: CUSTOM
12Start position of area 10 to 639 (pix)
14End position of area 10 to 639 (pix)
13Start line of area 10 to (No. of additional lines – 1)
15End line of area 10 to (No. of additional lines – 1)
24Start position of area 20 to 639 (pix)
26End position of area 20 to 639 (pix)
25Start line of area 20 to (No. of additional lines – 1)
27End line of area 20 to (No. of additional lines – 1)
18Exposure time2 to 200 (1 div: 0.1ms)Parameters for
When multi-task mode is OFF.CUSTOM mode
5 to 200 (1 div: 0.1ms)
When multi-task mode is ON.
19Number of additional1 to 200
linesWhen multi-task mode is OFF.
8 to 200
When multi-task mode is ON.
20Line skipping0: OFF
1: ON
222-area mode0: OFF
1: ON
23Compensation mode0: OFF
1: Start position compensation
2: End position compensation
3: Start/End position
compensation
32Measurement cycle112 to 20000 (us)
192Reference point teach for1: Execute teach
compensation mode
1932-area teach1: Execute teach
10Head installation0: Diffuse

1: Regular

Unit No.Data No.ParameterSetting range/Output rangeOthers
20LD power mode0: Auto

1: Auto-scale

2: Fixed

2Surface to be controlled for light amount0: Peak

1: First surface

2: Second surface

3: Third surface

6LD power when fixed0 to 800 (1 div: 0.1%)
13Lower limit of LD power0 to 800 (1 div: 0.1%)
14Upper limit of LD power0 to 800 (1 div: 0.1%)
32Incident level0 to 4095
36LD power0 to 800 (1 div: 0.1%)
37Incident level

(First surface)

0 to 4095
38Incident level

(Second surface)

0 to 4095
39Incident level

(Third surface)

0 to 4095
30Measurement objectWhen multi-task mode is OFF. 0: STANDARD

1: PCB

2: Mirror

3: Glass surface

4: Glass thickness

When multi-task mode is ON. 0: STANDARD

1: PCB

2: Mirror

3: Glass surface

2GLASS/GLASS

THICKNESS mode

0: Mode 1

1: Mode 2

3Image smoothing level0: No filter

1: Filter size 2

2: Filter size 4

3: Filter size 8

4: Filter size 16

When the measurement object is changed, the settings are initialized according to the selected object.
4Background removing

level before addition

0 to 255 (tone)
6Edge threshold0: 0%

1: 12.5%

2: 25%

3: 37.5%

4: 50%

5: 62.5%

6: 75%

7: 87.5%

Unit No.Data No.ParameterSetting range/Output rangeOthers
40Mutual interference

prevention mode

0: OFF

1: ON

1Mutual interference

prevention timing

0: Timing A

1: Timing B

50Gain setting1 to 5
400Measurement mode0: OFF

1: Average

2: Peak

3: Bottom

4: Thickness

5: Gap

6: K+mX; +nY

TASK1 settings.

 

The settings in Unit Number 40 are valid only for multi-task mode.

3Parameter X0: None

1: TASK 1

2: TASK 2

3: TASK 3

4: TASK 4

4Parameter Y0: None

1: TASK 1

2: TASK 2

3: TASK 3

4: TASK 4

5Parameter K-999999999 to 999999999 (nm)
8Parameter M-100 to 100 (1div: 0.1)
9Parameter N-100 to 100 (1div: 0.1)
1Surface for measurement (Area 1)0: First surface

1: Second surface

2: Third surface

3: Peak

10Surface for measurement (Area 2)0: First surface

1: Second surface

2: Third surface

3: Peak

11Measurement position 1 (for thickness measurement)0: None

1: Average

2: Peak

3: Bottom

12Measurement position 2 (for thickness measurement)0: None

1: Average

2: Peak

3: Bottom

13Measurement area0: Area 1

1: Area 2

14Width of peak bottom0 to 255
32Measurement value

(First surface)

– (nm)
33Measurement value

(Second surface)

– (nm)
Unit No.Data No.ParameterSetting range/Output rangeOthers
4034Measurement value (Third surface)– (nm)TASK1 settings.

 

The settings in Unit Number 40 are valid only for multi-task mode.

410Scaling mode0: OFF

1: ON

1Span value-20000 to 20000 (1 div: 0.0001)
2Offset value-999999999 to 999999999 (nm)
422Smooth0: OFF

1: ON

432Average0: 1 time

1: 2 times

2: 4 times

3: 8 times

4: 16 times

5: 32 times

6: 64 times

7: 128 times

8: 256 times

9: 512 times

10: 1024 times

11: 2048 times

12: 4096 times

442Differential type0: OFF

1: ON

3Differentiation cycles1 to 5000 (ms)
452Hold type0: Through

1: Peak

2: Bottom

3: Peak to peak 4: Average

5: Sampling

3Trigger method0: External input

1: Self up

2: Self down

4Trigger level-999999999 to 999999999 (nm)
5Trigger hysteresis0 to 999999999 (nm)
6Trigger delay (ms)0 to 5000 (ms)
7Sampling period (ms)1 to 5000 (ms)
8Trigger delay mode0: OFF

1: ON

465Offset at zero reset-999999999 to 999999999 (nm)
7Zero reset mode0: REAL

1: HOLD

64Status0: OFF

1: ON

  • If GLASS/MODE 2 or GLASS THICKNESS/MODE 2 is selected, a process using multiple tasks will be performed, as in the multi-task mode.

The following processes are assigned to the respective tasks:

TASK 1Calculates Area 1 displacement value.
TASK 2Calculates Area 2 displacement value.
TASK 3GLASS: Calculates the result of the NEAR side of TASK 1 and TASK 2.
GLASS THICKNESS: Calculates the difference value between TASK1 and TASK2.
TASK 4Unused

The measurement conditions can be set for each task in this mode.

  • Configuration of Task
    • The ZS-HLDC-N performs task processing.
    • The processing units for each task are grouped into 20 units.
    • To refer to the processing unit of TASK N, therefore, add 20×(N-1) to the above processing unit No.

Example: To change the averaging process of TASK2, refer to or set to a parameter with:

  • Process unit No.=43+20×(2-1)=63 and
  • Data No.=2
Unit No.Data No.ParameterSetting range/Output rangeOthers
1200Hysteresis width0 to 999999999 (nm)Setting judgment process
1Timer mode0: OFF

1: OFF-Delay

2: ON-Delay

3: One shot

2Delay time1 to 5000 (ms)
3Judgment output TASK0: TASK 1

1: TASK 2

2: TASK 3

3: TASK 4

1210Non-measurement

settings

0: Keep

1: Clamp

1222Monitor focus mode0: OFF

1: ON

3Monitor focus distance

value 1

-999999999 to 999999999 (nm)
4Monitor focus distance

value 2

-999999999 to 999999999 (nm)
5Monitor focus current

value 1

4 to 20 (mA)
6Monitor focus current

value 2

4 to 20 (mA)
7Monitor focus voltage

value 1

-10 to 10 (V)
8Monitor focus voltage

value 2

-10 to 10 (V)
12221Output mode TASKWhen multi-task mode is OFF. 0: OFF

1: ON

When multi-task mode is ON. 0: OFF

1: TASK 1

2: TASK 2

3: TASK3

4: TASK4

23Output at CLAMPVoltage output 0: MAX

1: 10 V

2: 9 V

3: 8 V

4: 7 V

5: 6 V

6: 5 V

7: 4 V

8: 3 V

9: 2 V

10: 1 V

11: 0 V

12: -1 V

13: -2 V

14: -3 V

15: -4 V

16: -5 V

17: -6 V

18: -7 V

19: -8 V

20: -9 V

21: -10 V

22: MIN

Current output 0: MAX

1: 20 mA

2: 19 mA

3: 18 mA

4: 17 mA

5: 16 mA

6: 15 mA

7: 14 mA

8: 13 mA

9: 12 mA

10: 11 mA

11: 10 mA

12: 9 mA

13: 8 mA

14: 7 mA

15: 6 mA

16: 5 mA

17: 4 mA

123

Digital output

2Monitor focus mode0: OFF

1: ON

3Monitor focus distance

value 1

-999999999 to 999999999 (nm)
4Monitor focus distance

value 2

-999999999 to 999999999 (nm)
5Monitor focus current

value 1

0 to 65535
6Monitor focus current

value 2

0 to 65535
7Clear monitor focus1: Clear
1238Output at CLAMP0 to 65535
10Output TASK (When the

measurement value is output)

0: TASK 1

1: TASK 2

2: TASK 3

3: TASK 4

4: Consecutively

11Output mode0: OFF

1: Measurement value

2: Judgment

12Update cycle0 to 100
124

Logging

2Mode0: OFF

1: ON

3Buffering period1 to 65535
4Buffer size per item of

data

1 to 1000
14TASK 10: OFF

1: ON

When multi-task mode is ON.
15TASK 20: OFF

1: ON

16TASK 30: OFF

1: ON

17TASK 40: OFF

1: ON

240

Parallel input

4Input 00: Low Active

1: High Active

5Input 1
6Input 2
7Input 3
8External input mode0: Normal mode

1: Bank switching mode

9Control TASK setting0: TASK1

1: TASK2

2: TASK3

3: TASK4

When multi-task mode is OFF

  • When selecting a mode other than “GLASS/MODE 2” and “GLASS THICKNESS/ MODE 2”.
Unit No.Data No.ParameterSetting range/Output rangeOthers
482Lower limit of

threshold

-999999999 to 999999999 (nm)
3Upper limit of

threshold

-999999999 to 999999999 (nm)
4Hysteresis width0 to 999999999 (nm)
5Timer mode0:OFF

1:OFF DELAY

2:ON DELAY

3:ONE SHOT

6Delay time1 to 5000 (ms)
  • When selecting “GLASS/MODE 2” or “GLASS THICKNESS/MODE 2” mode.
Unit No.Data No.ParameterSetting range/Output rangeOthers
882Lower limit of

threshold

-999999999 to 999999999 (nm)
3Upper limit of

threshold

-999999999 to 999999999 (nm)
4Hysteresis width0 to 999999999 (nm)
5Timer mode0:OFF

1:OFF DELAY

2:ON DELAY

3:ONE SHOT

6Delay time1 to 5000 (ms)

When multi-task mode is ON

  • Can be set for each TASK.
Unit No.Data No.ParameterSetting range/Output rangeOthers
482Lower limit of-999999999 to 999999999 (nm)TASK1 settings.
thresholdFor TASK2 to
TASK4, the unit
3Upper limit of-999999999 to 999999999 (nm)
thresholdnumbers are as
follows:
4Hysteresis width0 to 999999999 (nm)
5Timer mode0:OFF

1:OFF DELAY

TASK2: 68
2:ON DELAY

3:ONE SHOT

TASK3: 88

TASK4: 108

6Delay time1 to 5000 (ms)

FLOWDATA Reference

What is FLOWDATA?

  • The ZS-HL-N series implements high speed sampling measurement up to 110us.
  • Handling these measurement data with an external device requires reading in a large amount of data.
  • The ZS-HL-N series are provided with a mechanism which enables to handle and acquire measurement data by a given bundle.
  • This bundle of data is called a FLOWDATA.

How to acquire FLOWDATA

FLOWDATA is batch output if the controller has accepted the command for acquiring a FLOWDATA when data is accumulated for the specified buffer size (max. 1000 data). A device receiving data (such as PC) needs to issue the command before the ZS controller accumulates measurement data for the buffer size.

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-4

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-1If the controller has not received the command when measurement data for the buffer size is accumulated in the controller, the past data is overwritten: In this case, it raises an error flag for buffer overflow. A device receiving data (such as PC) needs to check this flag to see if the commands have been issued in time.

Format

After outputting the command for acquiring FLOWDATA, the binary data is output in the following format:

  • Header division (4bytes): Data division (4bytes)

Configuration of FLOWDATA

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-1Binary data is used for response data of FLOWDATA to give the highest priority to the speed. Therefore, general purpose communication tools such as HyperTerminal may not be used to receive the data.

Buffer size and buffer intervals

The buffer size of measurement data to be accumulated in the ZS controller and its buffer intervals can be changed. Change the following parameters:

  • DATAGET and DATASET commands are used to change and refer to the parameters.
Unit No.Data No.ParameterDescription
1242FLOWDATA accumulation mode0: OFF

1: ON

3Buffer intervals1 to 65535 (pcs)
4Buffer size1 to 1000 (pcs)

Logging data

Data to be accumulated in the ZS controller can be selected.

  • When multi-task mode is OFF
  • When GLASS/MODE 2 or GLASS THICKNESSS/MODE 2 is selected for the measurement object
Unit No.Data No.ValueDescription
12450No accumulation
1Accumulation of result of area 1
2Accumulation of result of area 2
3Accumulation of result of glass surface or glass thickness
  • When a mode other than the above is selected for the measurement object.
Unit No.Data No.ValueDescription
12450No accumulation
1Accumulation
  • When multi-task mode is ON
Unit No.Data No.ValueDescription
124140Does not accumulate the result of TASK 1
1Accumulate the result of TASK 1
150Does not accumulate the result of TASK 2
1Accumulate the result of TASK 2
160Does not accumulate the result of TASK 3
1Accumulate the result of TASK 3
170Does not accumulate the result of TASK 4
1Accumulate the result of TASK 4

Configuration of FLOWDATA Response

1 packet of FLAWDATA
Header divisionData division
1st byte2nd byte3rd byte4th byte
ABCDEFGHIJKLDataMeaning of data
81124512111532Number of bits
  • =Total
    • 64 bits

Details of header division

DataNameDescription
AUnusedReserved bit
BFLOWDATA overflow bitNormally set to 0.Set to 1 when there is an overflow in FLOWDATA accumulation.
CDecimal informationNormally set to 0.0: nm order, 1: mm order
DTASK No.TASK1 to TASK4 (*1)
EUnusedAlways 0
FUnit states (Input)Indicates ON/OFF states of various input lines. (*2)
GFLOWDATA stop bit
  • All data are set to 1 if FLOWDATA does not flow over subsequently. (Always set to 1 for one-shot requests)
  • All data are set to 0 if FLOWDATA continues to flow over. (Until FLOWDATA is stopped after requested (in succession)
HTASK judgment result bitIndicates the TASK judgment result of data source. (*3)
IDisabledReserved bit
J
K
LUnit states (Output)Indicates output states (states of measurement results). (*4)
DataMeasurement dataSigned 32 bit data

When the decimal info division is 0, the unit of the data is nm. When the decimal info division is 1, the unit of the data is mm

  • TASK No.=bit data+1

Example: bit data=10B=2 (dec) indicates TASK3 data.

The input lines are, from the lower bit, assigned to:

In case of ZS

  • Input terminal 4 (Unused. Always set to 0.)
  • Input terminal 3
  • Input terminal 2
  • Input terminal 1
  • Input terminal 0 (5 inputs in total.)

Data to be received and their states are as follows:

  • 00b=Not executed
  • 01b=LOW
  • 10b=PASS
  • 11b=HIGH

The output states are, from the lower bit, assigned to:

In case of ZS

  • Output terminal 4 (Busy output)
  • Output terminal 3 (Enable output)
  • Output terminal 2 (Low output)
  • Output terminal 1 (Pass output)
  • Output terminal 0 (High output)

(5 outputs in total). States in parenthesis indicate the standard states.

[FLOWDATA setting example]
  • DATASET 124 2 1: FLOWDATA accumulation mode ON
  • DATASET 124 3 1: 1 buffer interval
  • DATASET 124 4 1: 1 buffer size
  • DATASAVE: Data save

FLOWDATA

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-5

Example of Usage

To give an example, provided below is a procedure to communicate by non-procedural commands using Windows standard tool HyperTerminal.

Start up HyperTerminal

HyperTerminal is located under [Program]-[Accessory]-[Communication].

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-6

  1. Enter an appropriate project name. 3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-7
  2. Select the COM port connected to the ZS in the Connection Method section.3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-8
  3. Set the communication conditions.3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-9
  4. HyperTerminal is started up.

To make the interaction with commands easier, set echo and other functions

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-10

  1. Open [Property].3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-11
  2. Select the setting tag, and then ASCII settings.3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-12
  3. Check the following items, and press OK to complete the setting.
  • Change ZS into “RUN” mode.
  • Perform non-procedural communication.

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-13

  1. Input a command, and then press the return key.3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-14
  2. A returned value responding to the command is returned from the controller.

Revision History

A manual revision code appears as a suffix to the catalog number at the bottom of the front and back covers of this manual.

3OMRON-ZS-HL-N-Series-Smart-Sensors -FIG-15

Revision codeDateRevised contents
012022, Nov.Original production

OMRON Corporation

Industrial Automation Company

Regional Headquarters

OMRON EUROPE B.V.

  • Wegalaan 67-69, 2132 JD Hoofddorp The Netherlands
  • Tel: (31) 2356-81-300
  • Fax: (31) 2356-81-388

OMRON ASIA PACIFIC PTE. LTD.

  • 438B Alexandra Road, #08-01/02 Alexandra Technopark, Singapore 119968
  • Tel: (65) 6835-3011
  • Fax: (65) 6835-2711

OMRON ELECTRONICS LLC

OMRON (CHINA) CO., LTD.

  • Room 2211, Bank of China Tower, 200 Yin Cheng Zhong Road, PuDong New Area, Shanghai, 200120, China
  • Tel: (86) 21-5037-2222
  • Fax: (86) 21-5037-2200

©OMRON Corporation 2022 All Rights Reserved.
In the interest of product improvement, specifications are subject to change without notice.

Cat. No. Z472-E1-01

Documents / Resources

OMRON ZS-HL-N Series Smart Sensors [pdf] User Manual
ZS-HL-N Series Smart Sensors, ZS-HL-N Series, Smart Sensors, Sensors

References

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