Manual-Hub.com - Free English product PDF Documents!Manual-Hub.com - Free English product PDF Documents!
User Manual for INFICON models including: LDS3000 Modular Leak Detector, LDS3000, Modular Leak Detector, Leak Detector, Detector
INFICON LDS3000 (01) PDF MANUAL - Manual-Hub.com
File Info : application/pdf, 140 Pages, 9.11MB
DocumentDocumentTranslation of the original operating instructions LDS3000, LDS3000 AQ Mass spectrometer module Catalog No. 560-300, 560-600 From software version MS-Modul 2.72 https://manual-hub.com/ jiqa54en1-10-(1911) INFICON GmbH Bonner Strasse 498 50968 Cologne, Germany https://manual-hub.com/ INFICON Table of Contents Table of Contents 1 About these instructions ................................................................................................................................... 7 1.1 Other associated documents .................................................................................................................... 7 1.2 Target groups ........................................................................................................................................... 7 1.3 Warnings................................................................................................................................................... 7 1.4 Definition of terms..................................................................................................................................... 8 2 Safety ............................................................................................................................................................. 11 2.1 Intended use ........................................................................................................................................... 11 2.2 Owner requirements ............................................................................................................................... 11 2.3 Duties of the operator ............................................................................................................................. 12 2.4 Dangers .................................................................................................................................................. 13 3 Shipment, Transport, Storage ........................................................................................................................ 15 4 Description...................................................................................................................................................... 16 4.1 Function .................................................................................................................................................. 16 4.2 Device setup ........................................................................................................................................... 17 4.2.1 Entire device (LDS3000)............................................................................................................. 17 4.2.2 Entire device (LDS3000 AQ)....................................................................................................... 18 4.2.3 Connection block ........................................................................................................................ 22 4.2.4 MSB box ..................................................................................................................................... 22 4.2.5 Markings on the device ............................................................................................................... 25 4.3 Technical data ........................................................................................................................................ 25 4.4 Factory settings ...................................................................................................................................... 26 5 Mounting LDS3000......................................................................................................................................... 29 5.1 Adjust the position of the connections to the installation dimensions ..................................................... 29 5.2 Installing the mass spectrometer module on the test system ................................................................. 30 5.3 Select connection ULTRA, FINE, or GROSS ......................................................................................... 31 5.4 Establish component connection ............................................................................................................ 32 5.5 Establish electrical connections.............................................................................................................. 33 6 Mounting LDS3000 AQ (Accumulation).......................................................................................................... 34 6.1 Adjust the position of the connections to the installation dimensions ..................................................... 34 6.2 Installing the mass spectrometer module on the test system ................................................................. 35 6.3 Select components and connect............................................................................................................. 36 6.4 Establish electrical connections.............................................................................................................. 39 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) iii https://manual-hub.com/ Table of Contents INFICON 7 Operation LDS3000........................................................................................................................................ 40 7.1 Switching the device on .......................................................................................................................... 40 7.2 Default settings ....................................................................................................................................... 41 7.3 Selecting a unit for the leak rate ............................................................................................................. 42 7.4 Select device for pressure ...................................................................................................................... 43 7.5 Select Compatibility Mode ...................................................................................................................... 43 7.6 Select operation mode............................................................................................................................ 45 7.7 Select gas type (mass) ........................................................................................................................... 46 7.8 Calibrating the device ............................................................................................................................. 46 7.8.1 Time and general preferences .................................................................................................... 46 7.8.2 Internal Calibration Configuration and Start................................................................................ 49 7.8.3 External Calibration Configuration and Start............................................................................... 49 7.8.4 Start external dynamic calibration............................................................................................... 52 7.8.5 External calibration with sniffer line SL3000XL........................................................................... 54 7.8.6 Check the calibration .................................................................................................................. 55 7.8.6.1 Calibration using the internal calibration leak test.............................................................. 55 7.8.6.2 Calibration using the external calibration leak test............................................................. 55 7.8.7 Entering the calibration factor ..................................................................................................... 56 7.8.7.1 Calibration factor sniffing.................................................................................................... 56 7.8.7.2 Calibration factor vacuum .................................................................................................. 56 7.8.8 Setting machine and sniff factor.................................................................................................. 57 7.8.8.1 Setting machine and sniff factor manually ......................................................................... 57 7.8.8.2 Setting machine and sniff factor using machine calibration ............................................... 58 7.9 Starting and stopping the measurement................................................................................................. 58 7.10 Loading and saving parameters ............................................................................................................. 59 7.11 Copying measurement data, deleting measurement data ...................................................................... 60 7.12 Suppressing gas backgrounds with "ZERO" functions ........................................................................... 60 7.13 Measurement result display with signal filters ........................................................................................ 61 7.14 Control of the Gas Ballast Valve of the Backing Pump........................................................................... 62 7.15 Selecting display limits............................................................................................................................ 63 7.16 Setting trigger values .............................................................................................................................. 63 7.17 Setting capillary surveillance .................................................................................................................. 63 7.18 Set the rotation speed of the turbo molecular pump............................................................................... 64 7.19 Cathode Selection .................................................................................................................................. 65 7.20 Settings for the XL sniffer adapter .......................................................................................................... 65 iv LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Table of Contents 7.21 Resetting the settings ............................................................................................................................. 68 8 Operation LDS3000 AQ (Accumulation)......................................................................................................... 69 8.1 Switching the device on .......................................................................................................................... 69 8.2 Default settings ....................................................................................................................................... 69 8.3 Selecting a unit for the leak rate ............................................................................................................. 70 8.4 Select device for pressure ...................................................................................................................... 71 8.5 Select Compatibility Mode ...................................................................................................................... 71 8.6 Making basic settings via the wizard ...................................................................................................... 73 8.7 Determine peak ...................................................................................................................................... 74 8.8 Store leak rate of calibration leaks.......................................................................................................... 75 8.9 Calibrating the device ............................................................................................................................. 76 8.9.1 Time and general preferences .................................................................................................... 76 8.9.2 Entering the calibration factor ..................................................................................................... 77 8.9.3 Calibration factor vacuum ........................................................................................................... 77 8.9.4 Calibrating................................................................................................................................... 77 8.10 Perform ZERO ........................................................................................................................................ 80 8.11 Setting machine and sniff factor ............................................................................................................. 81 8.11.1 Setting machine and sniff factor manually .................................................................................. 81 8.12 Carrying out a measurement .................................................................................................................. 82 8.13 Loading and saving parameters ............................................................................................................. 83 8.14 Copying measurement data, deleting measurement data ...................................................................... 83 8.15 Adjust "Zero time factor AQ" ................................................................................................................... 84 8.16 Selecting display limits............................................................................................................................ 84 8.17 Set the rotation speed of the turbo molecular pump............................................................................... 84 8.18 Cathode Selection .................................................................................................................................. 85 8.19 Resetting the settings ............................................................................................................................. 85 9 Using the expansion module (LDS3000, LDS3000 AQ)................................................................................. 87 9.1 Selecting the type of expansion module ................................................................................................. 87 9.2 Settings for I/O module IO1000 .............................................................................................................. 87 9.2.1 General interface settings ........................................................................................................... 87 9.2.2 Assigning inputs and outputs ...................................................................................................... 88 9.2.2.1 Assigning the digital inputs of the I/O module .................................................................... 95 9.2.2.2 Assigning the digital outputs of the I/O module.................................................................. 97 9.3 Settings for bus module BM1000............................................................................................................ 99 10 Warning and error messages (LDS3000, LDS3000 AQ).............................................................................. 100 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) v https://manual-hub.com/ Table of Contents INFICON 10.1 Illustration of error codes with the help of the status LEDs................................................................... 108 11 Operating CU1000 (optional)........................................................................................................................ 109 11.1 Touchscreen elements ......................................................................................................................... 109 11.1.1 Measurement display elements ................................................................................................ 109 11.2 Elements of the error and warning display ........................................................................................... 112 11.3 Settings and functions .......................................................................................................................... 112 11.3.1 Touch screen settings............................................................................................................... 113 11.3.2 Operator types and authorizations............................................................................................ 116 11.3.2.1 Logging out the operator .................................................................................................. 117 11.3.3 Functions .................................................................................................................................. 118 11.3.3.1 Resetting the settings....................................................................................................... 118 11.3.3.2 Recording data................................................................................................................. 118 11.3.3.3 Calling up information ...................................................................................................... 119 11.3.4 Updating the software ............................................................................................................... 123 11.3.4.1 Updating the software of the control unit.......................................................................... 123 11.3.4.2 Checking and updating the software version of the MSB box.......................................... 123 11.3.4.3 Updating the software of the I/O module.......................................................................... 124 12 Maintenance ................................................................................................................................................. 126 12.1 Maintenance at INFICON ..................................................................................................................... 126 12.2 General maintenance information......................................................................................................... 126 12.3 Maintenance plan ................................................................................................................................. 127 12.4 Maintenance work................................................................................................................................. 128 12.4.1 Change oil reservoir of turbo molecular pump .......................................................................... 128 13 Decommissioning the measuring instrument................................................................................................ 133 13.1 Shutting down the leak detector ........................................................................................................... 133 13.2 Disposing of the mass spectrometer module........................................................................................ 133 13.3 Returning the mass spectrometer module............................................................................................ 133 14 Appendix....................................................................................................................................................... 134 14.1 CE Declaration of Conformity ............................................................................................................... 134 14.2 Declaration of Incorporation.................................................................................................................. 135 14.3 Declaration of Contamination ............................................................................................................... 136 14.4 RoHS .................................................................................................................................................... 137 vi LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON About these instructions | 1 1 About these instructions This document applies to the software version stated on the title page. Product names may occur in the document, which are added for identification purposes only and belong to the respective owner of the rights. This operating manual describes the installation and operation of the LDS3000 mass spectrometer module. It is available in two variants: · LDS3000 · LDS3000 AQ (accumulation), switchable to all other operating modes. 1.1 Other associated documents Operating Manual Control Unit CU1000 jina54 Operating instructions bus module jiqb10 Operating instructions I/O module jiqc10 Operating instructions XL sniffer adapter jinxa54 Interface protocols jira54 1.2 Target groups These operating instructions are intended for the owner and for technically qualified personnel with experience in leak detection technology and integration of leak detection devices in leak detection systems. In addition, the installation and use of the device require knowledge of electronic interfaces. 1.3 Warnings DANGER Imminent hazard resulting in death or serious injuries WARNING Hazardous situation resulting in potential death or serious injuries CAUTION Hazardous situation resulting in minor injuries LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 7 / 140 1 | About these instructions INFICON NOTICE Hazardous situation resulting in damage to property or the environment 1.4 Definition of terms Mention of helium in the manual The device is a helium leak detector. If you want to use a forming gas instead of helium to detect the hydrogen contained therein, the information for helium also applies to hydrogen. Accumulation In connection with leak testing, it is about the enrichment of tracer gas over a definable period of time. This allows the detection of small leak rates without the use of a vacuum chamber. Helium or forming gas can be used. When you talk about "AQ" in this manual, it's about accumulation mode. It is only available for devices in the AQ version. Automatic tuning / mass setting This function adjusts the mass spectrometer so that a maximum leak rate indicator is achieved. In order to detect a maximum ion current with the ion detector, the control computer adjusts the voltage for accelerating the ions within the selected mass range accordingly. During each calibration, there is an automatic adjusted. Operation mode The leak detector distinguishes between the operation modes "vacuum" and "sniffing". With the operation mode "vacuum", generally the tracer gas flows into the test object. The pressure in the test object is less than the ambient pressure. In the operation mode "sniffing" the tracer gas flows out from the test object and is extracted with a sniffer probe. The pressure in the test object is greater than the ambient pressure. FINE FINE denotes the connection to the turbo molecular pump for inlet pressures up to 0.4 mbar. This is also used for the "sniffing" operation mode. Forming gas Forming gas is a collective term for gas mixtures of nitrogen and hydrogen. 8 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON About these instructions | 1 GROSS GROSS donates the connection to the turbo molecular pump with the lowest sensitivity. This allows high inlet pressures (up to 15 mbar). Internal helium background The measurement system of the leak detector also contains a residual amount of helium. This creates an internal measurement signal component (background signal), which overlaps the display of the leak right from the beginning and thus disturbs the search for leaks. So that this background signal can be suppressed, an internal "background suppression" can be activated with the factory settings. Minimum detectable leak rate The minimum detectable leak rate which can be detected by the leak detector under ideal conditions (< 5 x 10-12 mbar l/s). ULTRA ULTRA denotes the connection to the turbo molecular pump for the measurement range with the highest sensitivity at inlet pressures below 0.4 mbar (adjustable). Background signal Helium or hydrogen (as part of water) are natural components of air. Operation mode "Vacuum": Before any leak detection, a certain amount of the adjusted tracer gas is already in the volume on the surfaces of the test chamber, supply lines, and even in the leak detector itself. This certain amount of tracer gas generates a measurement signal which is called the "Background signal". The ongoing evacuation of the test chamber continuously reduces this background signal. Operation mode "Sniffing": Ambient air is continuously fed into the leak detector via the sniffer line. The amount of helium or hydrogen occurring naturally in air creates a constant background signal. Foreline pressure Pressure of the backing pressure between the turbo molecular pump and the backing pump. ZERO There is helium that is weakly bound to the surfaces of a specimen as a natural part of the ambient air and is pumped bit by bit into the measurement system of the leak detector. It produces a slowly decreasing measurement signal. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 9 / 140 1 | About these instructions INFICON If you want to hide this background signal or the display of existing leaks, then use the ZERO function. 10 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON 2 Safety Safety | 2 Improper use 2.1 Intended use The device is a modular leak detector for installation in industrial leak testing unit systems. The tracer gases that can be measured with the device are helium and hydrogen (forming gas). The LDS3000 is suitable for overpressure and negative pressure testing, whereby in addition to the test in vacuum, a local test with a sniffer line is also possible. The LDS3000 AQ is intended for the measurement of test gases when enriched in an external measuring chamber, but can also be rebuilt for all other purposes. You must install, operate and service the device only in compliance with these operating instructions. Comply with application limits, see "Technical Data". Avoid the following, non-intended uses: · Use in radioactive areas · Pumping down of explosive, aggressive, corrosive, flammable, toxic or reactive substances · Pumping down of condensible fluids and vapors · Aspiration of liquids into the device · Operation with excessive gas loads · Operation with excessive foreline pressure · Operation at too high ambient temperature · Flushing with excessive flushing rate · Usage of the pumps in plants where sudden loads and vibrations or periodic forces act upon the pump 2.2 Owner requirements The following notes are for companies or any person who is responsible for the safety and effective use of the product by the user, employee or third party. Safety conscious operation · Operate the device only if it is in perfect technical condition and has no damage. · Only operate the device in accordance with this instruction manual, in a safety and risk conscious manner. · Adhere to the following regulations and observe their compliance: LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 11 / 140 2 | Safety INFICON Intended use General applicable safety and accident prevention regulations International, national and local standards and guidelines Additional device-related provisions and regulations · Only use original parts or parts approved by the manufacturer. · Keep this instruction manual available on site. Personnel qualifications · Only instructed personnel should be permitted to work with and on the device. The instructed personnel must have received training on the device. · Make sure that authorized personnel have read and understood the operating instructions and all other applicable documents. 2.3 Duties of the operator · Read, observe, and follow the information in this manual and in the work instructions provided by the owner. This concerns in particular the safety and warning instructions. · Always observe the complete operating instructions for all work. · If you have any questions about operation or maintenance that are not answered in this manual, please contact Customer Service. 12 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Safety | 2 2.4 Dangers Hazards due to liquids and chemicals Permanent magnets Dangers from electric power Kinetic energy Injury from bursting objects The measuring instrument was built according to the state-of-the-art and the recognized safety regulations. Nevertheless, improper use may result in risk to life and limb on the part of the user or third parties, or damage to the measuring instrument or other property may occur. Liquids and chemical substances can damage the instrument. · Comply with application limits, see "Technical Data". · Do not suck up liquids with the instrument. · Avoid sniffing gases, such as hydrogen, above the lower explosion limit. The allowable composition of venal gas mixtures can be read in the safety data sheets of the respective manufacturers. · Only use the device away from areas with a risk of explosions. Permanent magnets in the device pose a hazard to health. Cardiac pacemaker may be affected in their function. · Keep a sufficient distance from the device. · Always comply with the distances recommended by the pacemaker manufacturer without fail. The device is operated with electrical voltages of up to 24 V. Inside the device there are voltages that are considerably higher. There is a danger to life from the contact of conductive parts inside the device. · Disconnect the device from the power supply prior to any installation and maintenance work. Make sure that the electric power supply cannot reconnected without authorization. · Before starting the leak test, disconnect electrically operated test objects from the power supply. The device contains electric components that can be damaged from high electric voltage. · Make sure before connecting to the power supply that the supply voltage is 24 V +/- 5 %. If the rotating parts in the turbo molecular pump are blocked because of some damage, high centrifugal forces must be absorbed. If this is not successful, the mass spectrometer module will breakaway and possibly cause damage to property or personal injury. · Make sure the mount of the mass spectrometer module is able to absorb a braking torque of 820 Nm. There is risk of injury from bursting objects causes by a test object notwithstanding the vacuum pressure when a test object is connected. · Take appropriate precautions. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 13 / 140 2 | Safety INFICON Danger due to imploding measuring chamber An external measuring chamber connected to an LDS3000 AQ is pumped off at approximately 60 sccm. Within normal measurement times (2 - 30 seconds) no dangerous negative pressure is generated. If the measuring chamber is leak-proof, but not vacuum resistant, and continues to pump, it may implode. This can occur, for example, in a 1-liter measuring chamber after about 10 minutes. · Do not continue pumping a measuring chamber after the measuring time has expired. · Consider suitable protective measures! 14 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Shipment, Transport, Storage | 3 3 Shipment, Transport, Storage Scope of delivery Transport Item Mass spectrometer module1) Plug for 24V connection Pressure sensor PSG500 Self-locking nuts Plug for Output Plug for Gauges Exit Inlet module (LDS3000 AQ version only) Adapter DN16 with throttle2) (LDS3000 AQ version only) Instruction manual USB flash drive with instructions, 3D drawings and videos Quantity 1 1 1 4 1 1 1 1 1 1 1.) Includes either 560-300 LDS3000 or 560-600 LDS3000 AQ (accumulation). 2.) See "Select components and connect [} 36]". Please check the delivery for completeness after receiving the device. NOTICE Damage due to unsuitable packaging material Transport in unsuitable packaging material can damage the device. Transport the device only in the original packaging material. Keep original packaging material. Storage NOTICE Damage to property due to missing attachment of the vibration damper Secure the vibration damper with the transport screws to prevent damage due to vibration. Always store the device in compliance with the technical data, see "Technical Data". LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 15 / 140 4 | Description 4 Description INFICON 4.1 Function Objective Mode AQ (Accumulation) Device Interfaces Other accessories The mass spectrometer module is a detection device for the test gases helium and hydrogen. Integrated in test systems, the device is used to detect gas being emitted from a test object in order to indicate leaks. The device can be used both as a vacuum leak detector and a sniffer leak detector. Sniffer lines with different lengths are available for the sniffer mode. In order to be able to detect small leak rates without the use of a vacuum chamber, devices for the AQ mode are connected to an external measuring chamber. In the external measuring chamber, the tracer gas is enriched (accumulation). The test object filled with helium or forming gas under pressure is brought into the measuring chamber or pressurized in the measuring chamber. If there is a leak in the test object, the concentration of helium or forming gas in the measuring chamber will increase. This increase is measured and output as a leak rate. The mass spectrometer module is part of the leak detection system LDS3000 and LDS3000 AQ. Es can be operated in a test system together with a bus module or I/O module and a data cable without additional INFICON accessories. The MSB box outputs data on digital interfaces to the control unit CU1000, I/O module IO1000 or bus module BM1000. With the available accessories XL sniffer adapter and sniffer line SL3000XL, it is possible to capture leaks at a larger distance from the expected leak if the detection limit is deteriorated (operation in "high flow" mode). 16 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON 4.2 Device setup 4.2.1 Entire device (LDS3000) Description | 4 Fig. 1: Mass spectrometer module LDS3000 1 Connection block. Connections for test system, backing pump, pressure sensor PSG500, internal calibration leak and sniffer line, see also "Connection block [} 22]". 2 Pressure sensor PSG500 for measuring the pressure of the backing pump 3 Preamplifier of the mass spectrometer module 4 Turbo molecular pump with cooling unit 5 MSB box. Interfaces to the mass spectrometer module (see "MSB box [} 22]") 6 Inverter for turbo-molecular pump 7 Fasteners for installing the mass spectrometer module in a test system 8 Rating plate containing mass spectrometer module specifications LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 17 / 140 4 | Description INFICON 4.2.2 Entire device (LDS3000 AQ) In the accumulation version, the mass spectrometer module is integrated into a special measurement setup by hardware and software. 5 12 3 4 1 6 7 10 49 48 Fig. 2: Accumulation: Overview of the structure 1 Measuring chamber with fan. Not included in delivery. 2 ISO-KF DN16 (Screw-in). Not included in delivery. You can obtain the screw-in via the INFICON homepage under "Vacuum Components". 3 Inlet module 4 Corrugated tube. Not included in delivery. You can obtain the corrugated hose via the INFICON homepage under "Vacuum Components". 5 Blank flange 6 Mass spectrometer module 7 Power supply 24 V 8 Dry backing pump with separate power supply. Not included in delivery. You can order the "Diaphragm pump LDS AQ" from INFICON under the order number 560-630, furthermore the "DIN Rail Power supply 24 V, 10 A" under the order number 560-324. 9 GROSS throttle flange 10 Pressure sensor PSG500 for measuring the inlet pressure 11 Not illustrated: ISO-K centering rings and seals. Not included in delivery. You can get them from INFICON's homepage under "Vacuum Components". 18 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Description | 4 1 34 2 3 Fig. 3: Mass spectrometer module (execution accumulation) 1 Pressure sensor PSG500 for measuring the inlet pressure 2 GROSS throttle flange with connecting hose to backing pump 3 Corrugated hose to the measuring chamber 4 ULTRA connections blind flanged LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 19 / 140 4 | Description INFICON 1 2 Fig. 4: Inlet module 1 Electrical connection for the inlet module. The inlet module does not require an electrical connection for connection to a measuring chamber. When using a two-chamber system, the inlet module valve can be switched by applying 24V. Further information can be obtained from the INFICON Service if required. 2 Filter. A cleaning of the filter is not provided. Available as a replacement filter from INFICON under the order number 200009701 (10 pieces). Dirty filters replace with a socket wrench, 8 mm. Just unscrew the filter. Do not loosen any more screws. Calibrate after changing the filter. The inlet module is connected to the measuring chamber with the filter side. Accessories of the customer To complete the measurement setup, missing parts can be provided by the customer. If you want to use your own backing pump, make sure it is a dry backing pump with a gas flow greater than 60 sccm and a base pressure of less than 5 mbar. It should have its own power supply. If you want to use your own control unit, please note that the wizard for performing the measurement settings, calibrating and setting the ZERO function is only located on the INFICON CU1000 control unit. See also "Select components and connect [} 36]". Optional accessories from INFICON With the exception of the measuring chamber, the required parts are also offered by INFICON. · Control unit CU1000 (including wizard for carrying out important settings) · I/O1000 (The I/O module is a device interface between a leak detector and an external controller) 20 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Description | 4 · BM1000 (The bus module is a device interface between e.g. the MSB box of the mass spectrometer module LDS3000 and an external controller.) · Corrugated hose, available on the homepage of INFICON under "Vacuum components". · ISO-KF connections (eg screw-in flange), available on the homepage of INFICON under "Vacuum components". · ISO-K centering rings and seals, available on the homepage of INFICON under "Vacuum components". · DIN rail power supply 24V, 10A from INFICON (catalog number 560-324) for the dry backing pump of INFICON · Dry backing pump from INFICON (catalog number 560-630) Connection for hose ID 10 mm Connection for silencer (optional) Connection Plus (24 V) Fig. 5: INFICON backing pump Connection minus LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 21 / 140 4 | Description 4.2.3 Connection block INFICON Fig. 6: Connection block 1 Connection ULTRA 2 Connection FINE/SNIFFER 4.2.4 MSB box 3 Connection GROSS/FOREPUMP Fig. 7: MSB box connections OUTPUT Connection for gas ballast and three valves Connection plug arrangement 1 Valve 2 (gas ballast), 24 V, max.1 A 2 Valve 3 (not used, reserve) 3 Valve 4 (not used, reserve) 4 Valve 6 (not used, reserve) 5 GND SNIFFER Electrical connection for the sniffer line 22 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Description | 4 GAUGES, EXT Connection for optional external service gauges (0 - 10 V / 0 - 20 mA) for INFICON service Connection plug arrangement 1 +24-V-Output, max. 200 mA 2 Input for P3 service gauge, 0 - 10 V 3 GND 4 Reference to input for P3 service gauge 5 20 mA input for P3 service gauge 1 (See also Figure MSB box) Connection for pressure sensor PSG500, calibration leak and suppressor on the preamplifier (premounted, three-core cable) 24VDC Connection for 24 V power supply pack used to supply mass spectrometer module, control unit, I/O module and bus module. 2 (See also Figure MSB box) Connection for inverter turbo molecular pump and fan turbo molecular pump (premounted, two-core cable) ION SOURCE Connection for ion source 3 (See also Figure MSB box) Connection for preamplifier Power LED / Status LED The Power LED and Status LED indicate the status of the device. Power LED Off Green Green Green Status LED Red Blue Orange Green Meaning Device not ready for operation Turbo molecular pump is starting Emission is switched on Emission is stable LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 23 / 140 4 | Description INFICON Power LED Green Status LED Violet Green Error codes of the status LED Green, flashes slowly Green, flashes fast Green, flashes Off Green Green, flashes Meaning Rotation speed of the turbo molecular pump is not within the normal range Different activities of the unit Supply voltage < 21.6 V Supply voltage > 26.4 V Software is being updated Software is being updated SERVICE RS232 connection for INFICON Service I/O / ANYBUS CONTROL UNIT Connection for I/O or bus module or control unit The connections "I/O Anybus" and "Control Unit" have the same functions. You have the choice of connecting: Control unit CU1000 + I/O module IO1000 Control unit CU1000 + bus module BM1000 STATUS Status LED The Power LED and Status LED indicate the status of the unit. 24 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Description | 4 4.2.5 Markings on the device DANGER Permanent magnets in the device pose a hazard to health. Cardiac pacemaker may be affected in their function. Keep a sufficient distance from the device. Always comply with the distances recommended by the pacemaker manufacturer without fail. Device cannot be scrapped with the normal domestic waste. 4.3 Technical data Mechanical data Electrical data Power input 560-300, 560-600 max. 10 A Physical data Response time in Sniffer mode Maximum inlet pressure Run-up time Detectable gases Minimum detectable leak rate vacuum mode Minimum detectable leak rate sniffer mode Detectable masses Ion source 560-300, 560-600 Gross: < 5 s, Fine/Ultra: < 1 s 0,2 mbar - 18 mbar 150 s Helium, hydrogen 5E-12 mbar l/s 1E-7 mbar l/s 4He, H2, mass 3 (e.g. H-D, 3He or H3) 2 longlife Iridium filaments, Yttrium-oxide coated LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 25 / 140 4 | Description INFICON Minimum detectable leak rate forming gas or helium Measurement range Pressure in test chamber Time constant of the leak rate signal 560-600 (AQ mode) 1 x 10-7 mbar l/s 6 decades 1 atm < 1 s Ambient conditions 560-300, 560-600 Permissible ambient temperature (during 10 °C ... 45 °C operation) Max. altitude above sea level 2000 m Permissible magnetic field max. 7 mT Max. relative humidity above 40 °C 50% Max. relative humidity from 31 °C to 40 °C 80% ... 50% (decreasing linearly) Max. relative humidity to 40 °C 80% Storage temperature -20 °C ... 60 °C Pollution degree II 4.4 Factory settings Parameter AO upper limit exp. Operation mode AQ chamber volume AQ measurement time Zero time factor AQ Bus module address Clogged pressure capillary monitoring - with XL Sniffer Adapter (low flow) Broken pressure capillary monitoring - with XL Sniffer Adapter (low flow) Clogged pressure capillary monitoring - with XL Sniffer Adapter (High Flow) Broken pressure capillary monitoring - with XL Sniffer Adapter (High Flow) Factory setting 1 x 10-5 Vacuum AQ 1) 1 l 1) 10 s 1) 4 1) 126 0.4 mbar 0.2 mbar 2 mbar 0.6 mbar 150 mbar 400 mbar 26 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Description | 4 Parameter Pressure unit (interface) Emission Filter leak rate threshold Filter ZERO time Filter mode Gas percentage in H2 (M3, He) Gas ballast I/O module log Calibration request Calibration factor VAC/SNIF Mx (for vacuum, sniffing and all masses) Cathode selection Compatibility mode Config. Analog output 1 Config. Analog output 2 Config. Analog output scaling Configuration of digital outputs Configuration of digital Inputs Leak rate unit SNIF, (display and interface) Factory setting mbar On 1 x 10-10 5 s I·CAL 100 % 5 % H2 (-, 100 % He) 1) Off ASCII On 1.0 Auto Cat1 LDS3000 AQ 1) Leak rate mantissa Leak rate exponent 0.5 V / decade Pin 1: Trigger 1, inverted Pin 2: Trigger 2, inverted Pin 3: Trigger 3, inverted Pin 4: Trigger 4, inverted Pin 5: Ready Pin 6: Error, inverted Pin 7: CAL request, inverted Pin 8: Open, inverted Pin 1: Select dyn. / normal CAL Pin 2: Sniff Pin 3: Start/Stop, inverted Pin 4: ZERO Pin 5: External CAL Pin 6: Internal CAL Pin 7: Clear Pin 8: ZERO update Pin 9: Pin 10: mbar l/s LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 27 / 140 4 | Description Parameter Leak rate unit VAC, (display and interface) Leak rate upper limit VAC (interface) Leak rate lower limit VAC (interface) Leak rate upper limit SNIF (interface) Leak rate lower limit SNIF (interface) Fan mode Machine factor in standby Machine factor / Sniff factor Mass Module on the I/O connection Nominal state TMP calibration leak external SNIF calibration leak external VAC calibration leak internal Open calibration leak internal Sniffer line detection Sniffer key ZERO Language TMP rotation speed Trigger level 1 (2, 3, 4) Preamplifier test at CAL Maintenance warning ZERO with start ZERO mode 1) in AQ mode Factory setting mbar l/s 1.0 x 10-1 1.0 x 10-12 1.0 x 10-1 1.0 x 10-8 Fan always on Off 1.0 (for all masses) 4 IO1000 On 9.9 x 10-2 9.9 x 10-2 9.9 x 10-2 Off On On English 1500 1000 1) 1 x 10-5 mbar l/s 5 x 10-5 (1 x 10-5) mbar l/s 1) On Off Off Suppress everything INFICON 28 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON 5 Mounting LDS3000 Mounting LDS3000 | 5 5.1 Adjust the position of the connections to the installation dimensions Select location Select the most helium-free environment possible for the measurement setup. For reliable measurements with the device, the helium content in the air must be less than 10 ppm. By nature, air contains 5 ppm (0.0005%) helium. Mount MSB box In order to ideally match the installation position space, the MSB box can be turned and rotated. The MSB box is seated in two guide rails and can be pushed into the housing from the left or from the right. It can also be rotated, if necessary, so that the labels are upside down. The locking washer must be released to pull out the MSB box. If the MSB box is to be pushed into housing from the other side, the locking washer must also be tightened on the other side of the housing. An appropriate threaded hole is available. Fig. 8: Lock LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 29 / 140 5 | Mounting LDS3000 INFICON 5.2 Installing the mass spectrometer module on the test system The mass spectrometer module can be mounted in any position. 30 / 140 Fig. 9: Components of a fastener 1 Hexagon socket head screw 5 M8 x 50 2 Washer 6 3 MO bearing 7 4 Test system 8 You will need: - Self-locking nuts M8 - Open-end wrench, SW13 - Allen wrench SW6 - Holes for installation inside the test system Nut M8 (self-locking) Base frame Spring rubber MSB box guide LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Mounting LDS3000 | 5 In delivery condition, the bearings are attached to the base frame with the hexagon socket screws and transport nuts. Use the supplied self-locking nuts for the installation of the mass spectrometer module not the transport nuts. The background must be stable. WARNING Severe injuries due to mass spectrometer module breaking out If not screwed down properly, the mass spectrometer module can be caused to break out if the rotor of the turbo molecular pump suddenly locks up. This can result in injuries of the most severe kind. Make sure the mount of the mass spectrometer module is able to absorb a braking torque of 820 Nm. 1 Drill through-holes: X distance: 283 mm Y-distance: 121,5 mm Through hole in sheet: Ø 9 mm Fixing screws: M8 x 50 2 Remove transport nuts. 3 Place the mass spectrometer module on top of the through-holes and screw it down using the fasteners as shown in the upper figure . 5.3 Select connection ULTRA, FINE, or GROSS The operation mode of the vacuum connection and the rotation speed of the turbo molecular pump define: · Minimum detectable leak rate (MDLR) · Constantly permissible inlet pressure (pmax) · Pumping speed (S) The following information applies to the use of helium as a tracer gas. To reach the MDLR, the following conditions must be met: · The LDS3000 must be in operation for at least 20 minutes. · Ambient conditions must be steady (temperature, no vibrations/shocks, clean environment) · The specimen must be operated with switched-off ZERO until to the background is stable. The ZERO function may be switched on only after that. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 31 / 140 https://manual-hub.com/ 5 | Mounting LDS3000 Connection ULTRA FINE GROSS MDLR: pmax: pmax short-term (< 3 s): S: MDLR: pmax: pmax short-term (< 3 s): S: MDLR: pmax: S: INFICON Turbo molecular pump rotation speed 1000 Hz 5 x 10-12 mbar l/s 1500 Hz 1 x 10-11 mbar l/s 0.2 mbar 0.2 mbar 0.2 mbar 0.4 mbar 5 l/s 1 x 10-11 mbar l/s 6 l/s 5 x 10-11 mbar l/s 0.9 mbar 0.4 mbar 0.9 mbar 0.7 mbar 1.8 l/s 1 x 10-9 mbar l/s 2.5 l/s 2 x 10-8 mbar l/s 18 mbar 15 mbar depends on the backing pump 32 / 140 Exceedance of the constantly permissible inlet pressure generates the warning "TMP overheating". NOTICE Material damage due to pressure surges Pressure surges exceeding the maximum inlet pressure will damage the mass spectrometer module. - Do not exceed the maximum inlet pressure. 1 Set the operation mode vacuum connection and the rotation speed turbo molecular pump in accordance with the physical vacuum conditions found in the test system. 2 Connect the mass spectrometer module to the "ULTRA", "FINE" or "GROSS" connections on the vacuum system of the test system. 3 Set the rotation speed of the turbo molecular pump. 5.4 Establish component connection 1 Connect pressure sensor PSG500 to one of the GROSS/FOREPUMP connections. 2 Connect the backing pump to the second GROSS/FOREPUMP connection. 3 For sniffer mode, connect the sniffer line to one of the FINE-/SNIFFER connections. 4 If available, connect internal calibration leak 560-323 to the second free flange (FINE or ULTRA) of the vacuum connection. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Mounting LDS3000 | 5 When using a sniffer valve: For the device to operate correctly upon opening of the sniffer valve, no additional line can be connected between the connection block and the sniffer valve or between the sniffer valve and the sniffer line. 5.5 Establish electrical connections All electrical connections run from and to the MSB box. NOTICE Material damage if power supply pack has the wrong specifications or is connected improperly A power supply pack that has the wrong specifications or is connected improperly can destroy the unit. Use a suitable power supply pack: Use a power supply pack that supplies an output voltage with electrically protective separation, output voltage: 24 V +/- 5%, current capacity: min. 8 A If the short-circuit current of the power supply pack is > 10 A, connect a fuse between power supply pack and mass spectrometer module. Use a power cable with a large enough cross section. 1 Connect the 24 V power cable to the included plug (connections: +24 V on 1+ and GND on 1-). 2 Connect the power cable to the socket "24VDC". 3 Connect the control unit to the socket "Control Unit". 4 Connect the I/O or bus module to the Socket "I/O" . 5 Connect pressure sensor PSG500 and, if used, calibration leak 560-323 on the cable of socket "1". For socket 1 see "MSB box [} 22]". 6 Connect the sniffer line to the socket "Sniffer" . 7 Connect gas ballast valve to the socket "Output". LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 33 / 140 6 | Mounting LDS3000 AQ (Accumulation) INFICON 6 Mounting LDS3000 AQ (Accumulation) 6.1 Adjust the position of the connections to the installation dimensions Select location Select the most helium-free environment possible for the measurement setup. For reliable measurements with the device, the helium content in the air must be less than 10 ppm. By nature, air contains 5 ppm (0.0005%) helium. Mount MSB box In order to ideally match the installation position space, the MSB box can be turned and rotated. The MSB box is seated in two guide rails and can be pushed into the housing from the left or from the right. It can also be rotated, if necessary, so that the labels are upside down. The locking washer must be released to pull out the MSB box. If the MSB box is to be pushed into housing from the other side, the locking washer must also be tightened on the other side of the housing. An appropriate threaded hole is available. 34 / 140 Fig. 10: Lock LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Mounting LDS3000 AQ (Accumulation) | 6 6.2 Installing the mass spectrometer module on the test system The mass spectrometer module can be mounted in any position. Fig. 11: Components of a fastener 1 Hexagon socket head screw 5 M8 x 50 2 Washer 6 3 MO bearing 7 4 Test system 8 You will need: - Self-locking nuts M8 - Open-end wrench, SW13 - Allen wrench SW6 - Holes for installation inside the test system Nut M8 (self-locking) Base frame Spring rubber MSB box guide LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 35 / 140 6 | Mounting LDS3000 AQ (Accumulation) INFICON In delivery condition, the bearings are attached to the base frame with the hexagon socket screws and transport nuts. Use the supplied self-locking nuts for the installation of the mass spectrometer module not the transport nuts. The background must be stable. WARNING Severe injuries due to mass spectrometer module breaking out If not screwed down properly, the mass spectrometer module can be caused to break out if the rotor of the turbo molecular pump suddenly locks up. This can result in injuries of the most severe kind. Make sure the mount of the mass spectrometer module is able to absorb a braking torque of 820 Nm. 1 Drill through-holes: X distance: 283 mm Y-distance: 121,5 mm Through hole in sheet: Ø 9 mm Fixing screws: M8 x 50 2 Remove transport nuts. 3 Place the mass spectrometer module on top of the through-holes and screw it down using the fasteners as shown in the upper figure . 6.3 Select components and connect 5 12 3 4 1 6 7 10 49 48 Fig. 12: Accumulation: Overview of the structure 1 Measuring chamber with fan. Not included in delivery. 36 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Mounting LDS3000 AQ (Accumulation) | 6 2 ISO-KF DN16 (Screw-in). You can obtain the screw-in via the INFICON homepage under "Vacuum Components". 3 Inlet module 4 Corrugated tube. Not included in delivery. You can obtain the corrugated hose via the INFICON homepage under "Vacuum Components". 5 Blank flange 6 Mass spectrometer module 7 Power supply 24 V 8 Dry backing pump with separate power supply. Not included in delivery. You can order the "Diaphragm pump LDS AQ" from INFICON under the order number 560-630, furthermore the "DIN Rail Power supply 24 V, 10 A" under the order number 560-324. 9 GROSS throttle flange 10 Pressure sensor PSG500 for measuring the inlet pressure 11 Not illustrated: ISO-K centering rings and seals. Not included in delivery. You can get them from INFICON's homepage under "Vacuum Components". LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 37 / 140 6 | Mounting LDS3000 AQ (Accumulation) INFICON ü You have the INFICON mass spectrometer module (accumulation), a corrugated tube and the connections shown. ü You have a dry backing pump with its own power supply. All dry vacuum pumps can be used with a gas flow of more than 60 sccm at a basic pressure of under 5 mbar. This manual describes how to use the dry INFICON backing pump (catalog number 560-630). ü You have a suitable measuring chamber. Information about the measuring chamber can be obtained from INFICON. Note that a measuring chamber that is leak-proof but not vacuum-resistant can implode if it is pumped further out than usual measuring times. See also "Carrying out a measurement [} 82]". 1 Connect the pressure sensor PSG500 to the FINE connector. 2 Connect a corrugated tube to the FINE port on the mass spectrometer module. 3 Connect the open end of the corrugated tube to the measuring chamber via the inlet module. 4 Install the GROSS throttle flange at the GROSS / FOREPUMP port of the mass spectrometer module. 5 Connect the open end of the GROSS throttle flange hose to the backing pump. 6 Establish the electrical connection of the backing pump. When using the INFICON backing pump (catalog number 560-630), proceed as follows: ð Determine if the plus and minus terminals on the terminal block are already connected to cables by the manufacturer. 38 / 140 + - Fig. 13: Connection strip on the dry backing pump of INFICON ð If so, connect plus and minus cables to a DC power source, 24 V +/- 10%, 5 A. ð If not, insert the positive and negative cables with ferrules 8 mm AWG 18 with red insulation into the corresponding terminals and then connect the cables to a DC power source, 24 V +/- 10 %, 5 A. The backing pump exhaust air opening should be as far as possible from the test chamber. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON See also 2 Entire device (LDS3000 AQ) [} 18] Mounting LDS3000 AQ (Accumulation) | 6 6.4 Establish electrical connections All electrical connections run from and to the MSB box. NOTICE Material damage if power supply pack has the wrong specifications or is connected improperly A power supply pack that has the wrong specifications or is connected improperly can destroy the unit. Use a suitable power supply pack: Use a power supply pack that supplies an output voltage with electrically protective separation, output voltage: 24 V +/- 5%, current capacity: min. 8 A If the short-circuit current of the power supply pack is > 10 A, connect a fuse between power supply pack and mass spectrometer module. Use a power cable with a large enough cross section. 1 Mount the 24 V power supply cable to the enclosed plug (connections: +24 V on 1+ and GND on 1-). 2 Connect the power supply cable to the "24VDC" socket. 3 Connect the operating unit to the "Control Unit" socket. 4 Connect the I/O or bus module to the "I/O" socket. 5 Connect the pressure sensor PSG500 to the cable of socket 1. For socket 1 see "MSB box [} 22]". LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 39 / 140 7 | Operation LDS3000 INFICON 7 Operation LDS3000 You can use the following accessories in combination with the mass spectrometer module: · Control unit CU1000 · Bus module BM1000 · I/O module IO1000 With the available accessories XL sniffer adapter and sniffer line SL3000XL, it is possible to capture leaks at a larger distance from the expected leak if the detection limit is deteriorated (operation in "high flow" mode). LDS3000 AQ devices can also be used if they are not operated in AQ mode. Additional information on the control unit, the modules and the XL sniffer adapter is included in the documents: · Operating Manual Control Unit CU1000 · Operating instructions I/O module IO1000 · Operating instructions bus module BM1000 · Operating instructions XL sniffer adapter · Interface protocols LDS3000 The paths listed in the following sections refer to the operation of the mass spectrometer module with the control unit CU1000. If the bus module or the I/O module is used, the actions must be implemented within the scope of the protocol that is used. The path information for the control unit always starts in the main menu. WARNING Danger to life and material damage due to unsuitable operating conditions There is danger to life due to unsuitable operating conditions. The device can become damaged. Avoid changing the position of the device in an abrupt manner. Avoid extreme external vibrations and impact. 7.1 Switching the device on 1 Switch on the backing pump. 2 Establish the power supply to the mass spectrometer module. ð System starts up automatically. 40 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 ð If an XL Sniffer Adapter and the CU1000 are connected, your will be asked after run-up, whether the "XL Sniffer Adapter" operation mode should be set. This does not apply to devices in AQ mode. Longer run-up time for devices in AQ mode To counteract falsification of the measurement results by an increased background value, the warm-up time after switching on is about 10 minutes. Wait at least 60 minutes before determining the peak or before calibrating. See also "Carrying out a measurement [} 82]". 7.2 Default settings Language selection Select the display language. The factory setting is English. (The display on the handle of the SL3000XL sniffer line shows messages in English instead of in Russian and Chinese.) German, English, French, Italian, Spanish, Portuguese, Russian, Chinese, Japanese Setting date and time Control unit LD protocol ASCII protocol Setting the date Format: DD.MM.YY Settings > Set up > Control unit > Language Command 398 *CONFig:LANG Control unit LD protocol ASCII protocol Setting the time Format: hh: mm Settings > Date/Time > Date Command 450 *HOUR:DATE Control unit LD protocol ASCII protocol Settings > Date/Time > Time Command 450 *HOUR:TIME LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 41 / 140 7 | Operation LDS3000 INFICON 7.3 Selecting a unit for the leak rate Leak rate unit display Selecting the leak rate unit in the display for vacuum or sniff 0 mbar l/s (factory setting) 1 Pa m3/s 2 atm cc/s 3 Torr l/s 4 ppm (not VAC, not AQ) 5 g/a (not VAC, not AQ) 6 oz/yr (not VAC, not AQ) 7 sccm (AQ only) Control unit LD protocol ASCII protocol Display > Units (display) > Leak rate device VAC (SNIF) Command 396 (vacuum) Command 396 (sniffing) Command *CONFig:UNIT:VACDisplay Command *CONFig:UNIT:SNDisplay Leak rate unit interface Selecting the leak rate unit of the interfaces for vacuum or sniff 0 mbar l/s (factory setting) 1 Pa m3/s 2 atm cc/s 3 Torr l/s 4 ppm (not VAC) 5 g/a (not VAC) 6 oz/yr (not VAC) 7 sccm (AQ only) Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > Units (interface) > Leak rate device VAC (SNIF) Command 431 (vacuum) Command 432 (sniffing) Command *CONFig:UNIT:LRVac Command *CONFig:UNIT:LRSnif 42 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 Pressure unit interface 7.4 Select device for pressure Selecting the pressure device of the interfaces 0 mbar (factory setting) 1 Pa 2 atm 3 Torr Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > Units (interface) > Pressure unit Command 430 (Vacuum/Sniff) Command *CONFig:UNIT:Pressure 7.5 Select Compatibility Mode To retrofit an existing leak detection system LDS1000 / LDS2010 with a LDS3000, activate the appropriate compatibility mode: · Compatibility mode for LDS1000 or · Compatibility mode for LDS2010 When changing to a compatibility mode all parameters are to be reset to factory settings and the device is to be restarted. The language is displayed according to the factory setting. To change the language, see "Default settings [} 41]". If you want to use the LDS3000 later in normal operation mode, make sure to save your parameters on a USB flash drive, see "Loading and saving parameters [} 59]". You can load the saved parameters again after you have switched to normal operation. Compatibility mode for LDS1000 Compatibility mode for LDS2010 Mode LDS3000 Mode XL Sniffer Adapter Mode AQ (This mode is only available for AQ devices. It is preset for AQ devices. Switching to other modes is possible.) Control unit LD protocol ASCII protocol Settings > Set up > Compatibility > Compatibility mode Command 2594 (dec) Command *CONFig:COMP The following table shows the functional differences between and common features of LDS2010 and LDS3000: LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 43 / 140 7 | Operation LDS3000 INFICON LDS2010 LDS3000 Trigger outputs without joint reference with joint reference other outputs with joint reference with joint reference Trigger 1 (sniffer LED, relay exit, audio signal) Control of sniffer LED, PWM audio Control of sniffer LED, audio outputs an the control unit for active outputs an the control unit for active speakers speakers Limit Low / High (serial interfaces, display, analogue output) Limit Low affects all outputs, Limit High only the display separately adjustable for interface protocols, display and analog outputs Gas ballast (3 settings) OFF: Switches the gas ballast valve 0 = Off of the pump module off. 1 = on, but controllable via digital ON: Switches the gas ballast valve input on IO1000 of the pump module on until the next mains-off. 2 = on, but not controllable via digital input on IO1000 If "CAL fashion" is unequal to 3 (menu item 26), the gas ballast valve can be controlled with digital input DynCAL. F-ON: Fixed on enables switching the gas ballast valve on permanently (power failure-proof and independent of the digital inputs). Control mode LOCAL, RS232, RS485 None, control is also possible from all control locations. LDS1000 compatibility mode 9.2 other functions Default values and error messages (default values are output via interface, the touchscreen shows the original message - -> reason: new hardware can cause errors that did not exist with previous models) Correcting the leak rate in Standby adjustable (yes/no) (machine factor) adjustable (yes/no) ZERO with start starting with V1.02 like LDS2010 Opening the sniffer valve in SNIF after start in SNIF after start Rotation speed of turbo molecular only 2 rotation speeds adjustable pump Adjustable via serial interface from 750 Hz to 1500 Hz, via operator unit 1000 Hz and 1500 Hz Address RS485 Yes, because bus capable No, because not bus capable Sniffer key on/off selectable selectable 44 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 LDS2010 LDS3000 Default value for int. calibration leak 1E-15 mbar l/s 9.9E2 mbar l/s Default value ext. calibration leak VAC/SNIF mode 1E-7 mbar l/s 9.9E2 mbar l/s Setting range for int. calibration leak 10E-7 1E-9 ... 9.9E-1 mbar l/s Machine factor adjustment manually manually/automatically Machine / sniff factor value range Machine factor: 1E-3...9.9E+3 Sniffer factor: 1E-3...9.9E+3 Machine factor: 1E-4...1E+5 Sniffer factor: 1E-4...1E+4 Pressure: Capillary surveillance 20 available, pressure adjustable Analog output fixed characteristics freely configurable Calibration request Preamplifier temperature change 5 K or 30 min Preamplifier temperature change 5 K or 30 min. or TMP rotation speed changed Pressure / leak rates units (VAC/ yes SNIF) for all interfaces Control unit and rest separated User permissions 3 levels over PIN on the control unit 4 levels through control unit or or key switch optional key switch Key-operated switch permanently installed can, if required, be connected externally, see "Assigning the digital inputs of the I/O module [} 95]" (Key switch) 7.6 Select operation mode The device has the following operation modes: · Vacuum mode · Sniffer mode · XL Sniffer Adapter (sniffing mode with a high flow rate, XL Sniffer Adapter required). The device automatically switches over to the "XL Sniffer Adapter" if you connect an XL Sniffer Adapter. The LDS3000 AQ is preset to "AQ". If necessary, you can reset "AQ" under "Compatibility Mode". Select operation mode LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 45 / 140 7 | Operation LDS3000 0 1 2 VAC (vacuum) SNIF (sniffing) Operation mode XL Sniffer Adapter INFICON Control unit LD protocol ASCII protocol Operation mode vacuum operation or sniffing mode: Main menu > Features > VAC / SNIF Operation mode XL Sniffer Adapter: Settings > Set up > Accessories > XL Sniffer Adapter Command 401 Command *CONFig:MODE 7.7 Select gas type (mass) The machine, calibration and sniff factor are dependent on the configured mass and are saved in the mass spectrometer module. 2 H2 (Hydrogen, forming gas) 3 3He or deuterated hydrogen (HD), not in AQ mode 4 4He (Helium) (factory setting) Control unit LD protocol ASCII protocol Settings > Mass Command 506 with value 2 (3, 4) Command *CONFig:MASS 2 (3, 4) For devices with AQ mode: The easiest way to change the gas type is via the wizard. 7.8 Calibrating the device 7.8.1 Time and general preferences NOTICE Incorrect calibration because of operating temperature that is too low Calibrating the device in the cold state can deliver incorrect measurement results. For optimum accuracy the device should have been turned on at least 20 minutes previously. 46 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 It is recommended to calibrate the device once per shift in the desired operating modes and for the desired gases. Thereafter you can switch between the operation modes and gases without re-calibrating. Additionally applicable for operation with the XL Sniffer Adapter: The device should be calibrated once per shift in LOW FLOW and in HIGH FLOW. Thereafter you can switch between the different flows without re-calibrating. Calibration is also required after the following actions: · Sniffer line replacement · Filter replacement · Prompt for calibration by the system Switching off the preamplifier test The device tests the installed preamplifier during calibration. You can switch off of the amplifier test. This increases the speed of the calibration, but reliability drops off. 0 OFF 1 ON Control unit LD protocol ASCII protocol Settings > Set-up> MS-module > Preamplifier > Test > Preamplifier test with CAL Command 370 Command *CONFig:AMPTest (ON,OFF) Enabling calibration request If Calibration request is enabled, the device will prompt the operator to perform a calibration 30 minutes after it has been switched on and in case of temperature changes greater than 5°C. 0 OFF 1 ON Control unit LD protocol ASCII protocol Functions > CAL > Settings > CAL request. > Calibration request or Settings > Set-up> CAL request. > Calibration request Command 419 *CONFig:CALREQ (ON,OFF) Calibration warning Wrn650 The warning message Wrn650 "Calibration within the first 20 minutes is not recommended" can be allowed or suppressed. 0 OFF (suppressed) LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 47 / 140 7 | Operation LDS3000 1 ON (allowed) INFICON Control unit LD protocol ASCII protocol Functions > CAL > Settings > CAL request. > Calibration warning W650 or Settings > Set-up> CAL request. > Calibration warning W650 Command 429 *CONFig:CALWarn ON (OFF) Calibration Features The device can be calibrated in all its operation modes. A distinction is made between internal and external calibration. Internal calibration can be performed using the optional built-in test leak. A separate calibration leak is needed for external calibration. External calibrations have the advantage that they can be performed under conditions such as pressure and measuring time, which are similar to the later measurement. internal external external-dynamic - with internal calibration leak - autotune (mass adjustment) - determine the calibration factor with the steady signal of the test leak - amplifier test - determination of the background. Adjust if necessary after calibrating the machine or sniffer factor, see "Setting machine and sniff factor [} 57] " - Not with the XL Sniffer Adapter - Vacuum operation: with external calibration leak in test equipment - Sniffing mode: with external calibration leak - Consideration of the characteristics of the testing equipment (pressure, partial flow ratio) - Amplifier test - Autotune (mass adjustment) - Determine the calibration factor after the signal of the calibration leak has settled - Determination of the background - with external calibration leak in test equipment - Consideration of the characteristics of the testing equipment (pressure, partial flow ratio, measuring time) - Measuring time according to the dynamic waveform - Amplifier test 48 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 - Determine the calibration before the signal of the test leak has settled - Determination of the background 7.8.2 Internal Calibration Configuration and Start Prerequisite for the calibration with the internal calibration leak is the one-time entry of the leak rate of the calibration leak. Leak rate of internal calibration leak Define the leak rate of the calibration leak you wish to use during calibration. Calibration will not be possible unless you enter the value here. 1E-9 ... 9.9E-1 mbar l/s Control unit LD protocol ASCII protocol Settings > Configuration> Operating Mode > Vacuum > Reference leak int. > Calibration leak internal or Features > CAL > Settings > Calibration leak int. Command 394 Command *CONFig:CALleak:INT Opening/closing the calibration leak Opening/closing the calibration leak. This is automatically carried out with the internal calibration. If the calibration leak is opened using the control unit or the interface, then no internal calibration can take place. The calibration leak must first be closed again in this case. 0 close 1 Open Control unit LD protocol ASCII protocol Functions > Valves > Open internal calibration leak Command 12 Command *STATus:VALVE:TestLeak (ON, OFF) Start calibration Operating unit: Features > CAL > Intern LD protocol: 4, Parameter 0 ASCII protocol: *CAL:INT IO1000: CAL internal, see "Settings for I/O module IO1000 [} 87]" ð Calibration is performed automatically. 7.8.3 External Calibration Configuration and Start Requirement for the calibration with the external calibration leak is the one-time entry of the leak rate of the calibration leak and an open calibration leak. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 49 / 140 https://manual-hub.com/ 7 | Operation LDS3000 INFICON In vacuum mode, the calibration leak is installed in or on the test system and opened before calibration. In Sniffer mode, sniffing with the sniffer line is always performed on the open calibration leak. Leak rate of external Define the leak rate of the calibration leak you wish to use during calibration. calibration leak vacuum Calibration will not be possible unless you enter the value here. A specific leak rate must be set for each gas (mass). 1E-9 ... 9.9E-2 mbar l/s Leak rate of external calibration leak sniffing Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Vacuum > Ext. calibration leak > Mass 2 (3, 4) > external calibration leak VAC H2 (M3, He) or Functions > CAL > Settings > Ext. calibration leak (for current mass in selected unit) Command 390 Command *CONFig:CALleak:EXTVac (for current mass in selected unit) Define the leak rate of the calibration leak you wish to use during calibration. Calibration will not be possible unless you enter the value here. A specific leak rate must be set for each gas (mass). 1E-9 ... 9.9E-2 mbar l/s Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniffing > Ext. calibration leak > Mass 2 (3, 4) > external calibration leak SNIF H2 (M3, He) or Functions > CAL > Settings > Ext. calibration leak (for current mass in selected unit) Command 392 Command *CONFig:CALleak:EXTSniff (for current mass in device selected unit) LD and ASCII protocol: The status must be queried via: Command 260 or *STATus:CAL 1 Open external calibration leak or hold sniffer line to calibration leak. 2 Start measurement. 3 Wait until leak rate signal is tuned and stable. 50 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 4 Start calibration: Control unit: Features > CAL > Extern LD protocol: 4, Parameter 1 ASCII protocol: *CAL:EXT IO1000: see the figure below. ð Request to "close calibration leak" 5 Vacuum mode: Close calibration leak inside the test system. Sniffer mode: Remove sniffer line from calibration leak. ð Leak rate signal decreases. 6 Confirm measured background value is stable: Control unit: "OK" LD protocol: 11, Parameter 1 ASCII protocol: *CAL:CLOSED IO1000 see the figure below. ð Calibration is completed if: Control unit: Old and new calibration factor are displayed LD protocol LD instruction 260 provides 0 (READY) ASCII protocol: Command *STATus:CAL? provides IDLE IO1000 see the figure below. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 51 / 140 7 | Operation LDS3000 INFICON 52 / 140 Fig. 14: External calibration with IO1000 using the example of sniffer line SL3000XL, description of PLC inputs and outputs: "Assigning inputs and outputs [} 88]" 7.8.4 Start external dynamic calibration To taken into account the special time and pressure conditions of a test bench a dynamic calibration can be performed. No auto tuning takes place in the calibration mode. The time between opening the external calibration leak and activating the calibration can be selected so that it is optimally suited to the normal measurement sequence of the plant. Requirements: One-time input of the leak rate of the calibration leak and an open calibration leak, see "External Calibration Configuration and Start [} 49]". LD and ASCII protocol: The status must be queried via: Command 260 or *STATus:CAL? 1 Open external calibration leak or hold sniffer line to calibration leak. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 2 Start measurement. 3 Wait until the leak rate signal is optimally suited to the normal measurement sequence of the plant. 4 Start calibration: Control unit: Features > CAL > Dynamic LD protocol: 4, Parameter 2 ASCII protocol: *CAL:DYN IO1000 see the figure below. ð Request to "close calibration leak" 5 Vacuum mode: Close calibration leak inside the test system. Sniffer mode: Remove sniffer line from calibration leak. ð Leak rate signal decreases. 6 Confirm measured background value: Control unit: "OK" LD protocol: 11, Parameter 1 ASCII protocol: *CAL:CLOSED IO1000 see the figure below. ð Calibration is completed if: Control unit: Old and new calibration factor are displayed LD protocol LD instruction 260 provides 0 (READY) ASCII protocol: Command *STATus:CAL? provides IDLE IO1000 see the figure below. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 53 / 140 7 | Operation LDS3000 INFICON Fig. 15: Fig. 7 External dynamic calibration with IO1000 using the example of sniffer line SL3000XL, description of PLC inputs and outputs:"Assigning inputs and outputs [} 88]" 7.8.5 External calibration with sniffer line SL3000XL The procedure complies with that of external or external dynamic calibration in sniffer mode. Low flow and high flow must be calibrated separately. To ensure optimal calibration with hydrogen or forming gas for low flow and high flow, the calibration leak must meet the following requirements: 100 % H2: LR > 1 x 10-4 Forming gas (95/5): LR > 2 x 10-3 For calibration, we recommend our calibration leak with catalog number 12322. 54 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 7.8.6 Check the calibration To check whether a re-calibration is necessary, check the already existing. 7.8.6.1 Calibration using the internal calibration leak test The test is only possible with the setting "Mass 4". Start test: Control unit: Features > CAL > Test int. LD protocol: 4, Parameter 4 ASCII protocol: *CAL:PROOFINT IO1000: CAL test internal, see "Settings for I/O module IO1000 [} 87]" ð Test is performed automatically. 7.8.6.2 Calibration using the external calibration leak test LD and ASCII protocol: The status must be queried via: Command 260 or *STATus:CAL 1 Open external calibration leak or hold sniffer line to calibration leak. 2 Wait until leak rate signal is tuned and stable. 3 Start test: Control unit: Functions > CAL > Test ext. LD protocol: 4, Parameter 5 ASCII protocol: *CAL:PROOFEXT IO1000 compare figure in "External Calibration Configuration and Start [} 49]". ð Request to "close calibration leak" 4 Vacuum mode: Close calibration leak inside the test system. Sniffer mode: Remove sniffer line from calibration leak. ð Leak rate signal decreases. 5 Confirm measured background value is stable: Control unit: "OK" LD protocol: 11, Parameter 1 ASCII protocol: *CAL:CLOSED IO1000 compare figure in "External Calibration Configuration and Start [} 49]". ð Test is completed if: Control unit: Result is displayed LD protocol: As with the other steps, the status must be queried ASCII protocol: As with the other steps, the status must be queried IO1000 compare figure in "External Calibration Configuration and Start [} 49]". LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 55 / 140 7 | Operation LDS3000 INFICON 7.8.7 Entering the calibration factor The calibration is usually determined by the appropriate calibration routine. Therefore, it is usually not necessary to adjust the calibration factor manually. An incorrectly set calibration inevitably leads to wrong leak rate indicator! 7.8.7.1 Calibration factor sniffing Entry of the calibration factors for masses 2, 3, 4 in low flow and in high flow. The values will be overwritten during the next calibration. "High Flow-" or XL settings are available only in operation mode "XL Sniffer Adapter". The calibration factor for low flow also applies to sniffer applications that are not carried out in the operation mode "XL sniffer adapter". The calibration factors are managed separately to earth and to "High Flow" and "Low Flow". 0.01 ... 100 Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniffing > Calibr. factor > mass 2 (3, 4, 2 XL, 3 XL, 4 XL) >calibration factor SNIF H2 (M3, He, XL H2, XL M3, XL He) Commands 519, 521 Command *FACtor:CALSniff or *FACtor:CALSXL for the current mass 7.8.7.2 Calibration factor vacuum Also applies to devices in AQ mode. Entry of calibration factors for masses 2, 3, 4. The values will be overwritten during the next calibration. 0.01 ... 5000 Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Vacuum > Calibr. factor > mass 2 (3, 4) > calibration factor VAC H2 (M3, He) Command 520 Command *FACtor:CALVac 56 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 7.8.8 Setting machine and sniff factor The internal calibration will only calibrate the measurement system of a mass spectrometer module that is uncoupled from the test system. If the measurement system is operated in parallel to an additional pump system after an internal calibration though (following the partial flow principle), the measurement system will indicate a leak rate that is too low based on the partial flow ratio. With the help of a corrective machine factor for vacuum mode and a sniff factor for sniffer mode, the measurement system indicates the actual leak rate. The factors are taken into consideration along wit the ratio of effective pumping speed of the measurement system in a comparison to the pumping speed of the measurement system on the test system. 7.8.8.1 Setting machine and sniff factor manually ü Mass spectrometer module calibrated internally. 1 Measure external calibration leak using the test system. ð The device indicates a leak rate that is too low based on the partial flow ratio. 2 Setting machine or sniff factor, see below. Setting the machine factor ð The device indicates the actual leak rate. Devices in AQ mode: The machine factor "1" is preset. This setting should not be changed. Corrects a possible deviation between internal and external calibration in vacuum mode. Should be at value 1.00 without the option internal calibration leak. After the value is changed, the leak rate resulting from the change is displayed. This simplifies adjustment. Value range 1E-4...1E+5 Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Vacuum > Machine factor > Mass 2 (3, 4) > machine factor VAC H2 (M3, He) Command 522 Command *FACtor:FACMachine Setting the sniff factor Corrects a possible deviation between internal and external calibration in sniffer mode Value range 1E-4...1E+4 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 57 / 140 https://manual-hub.com/ 7 | Operation LDS3000 INFICON 58 / 140 Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniffing > Sniff factor Mass 2 (3, 4) > Sniff factor H2 (M3, He) Command 523 Command *FACtor:FACSniff 7.8.8.2 Setting machine and sniff factor using machine calibration ü Internal calibration leak connected. ü External calibration leak installed in or on the test system and closed. ü Leak rates of internal and external calibration leak are entered. ü LD and ASCII protocol: The status must be queried via: Command 260 or *STATus:CAL 1 Start machine calibration. Control unit: Functions > CAL > Machine (Sniffer) LD protocol 4, Parameter 3 ASCII protocol: *CAL:FACtor_Machine, *CAL:FACtor_Snif IO1000 see figure in "External Calibration Configuration and Start [} 49]" ð Internal calibration is performed automatically. ð Request "Open calibration leak" (external calibration leak). 2 Open external calibration leak and valve (if present) between the leak detector and the system. 3 Confirm tuned and stable leak rate signal. Control unit: "OK" LD protocol: 11, Parameter 1 ASCII protocol: *CAL:ACKnowledge IO1000 see figure in "External Calibration Configuration and Start [} 49]" ð Request "Close calibration leak" (external calibration leak). 4 Close external calibration leak. Leave existing valve open. 5 Confirm tuned and stable leak rate signal. Control unit: "OK" LD protocol: 11, Parameter 1 ASCII protocol: *CAL:CLOSED IO1000 see figure in "External Calibration Configuration and Start [} 49]" ð Machine or sniff factor is determined. 7.9 Starting and stopping the measurement Switches between measuring and standby operation START = Standby --> Measuring LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON STOP = Measuring --> Standby Operation LDS3000 | 7 Enable/disable correction of the leak rate in Standby Control unit LD protocol ASCII protocol Functions > Start/Stop Commands 1, 2 Command *STArt, *STOp During the measurement ZERO is possible. The trigger outputs switch depending on the leak rate and the trigger threshold. Sniff is possible. External calibration is started during the activation of digital input CAL. During standby ZERO is not possible. The output at the trigger outputs is: Leak rate value exceeded threshold. Sniff is not possible. Internal calibration is started during the activation of digital input CAL. In vacuum mode, the machine factor can be activated or deactivated during the correction of the leak rate for Standby. The sniffer valve is closed in Sniffer mode in Standby. The Sniff factor is therefore canceled in this setting. 0 OFF (machine factor is not considered in Standby.) 1 On (machine factor is considered in Standby.) Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > LR correction > Machine factor in standby Command 524 7.10 Loading and saving parameters You can use a USB flash drive on CU1000 to backup and restore the control unit and mass spectrometer module parameters. Save parameter: "Functions > Data > Parameter > Save > Save parameter" Loading parameters: ü The currently set compatibility mode must match the compatibility mode in the parameter file. See also Select Compatibility Mode [} 43]. "Functions > Data > Parameter > Load > Load parameter" LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 59 / 140 7 | Operation LDS3000 INFICON 7.11 Copying measurement data, deleting measurement data The measurement data can be saved to a USB flash drive with CU1000. · "Functions > Data > Recorder > Copy > Copy files" The measurement data can be deleted on the CU1000. · "Functions > Data > Recorder > Delete > Delete files" 7.12 Suppressing gas backgrounds with "ZERO" functions "ZERO" can be used to suppress undesired helium backgrounds. If "ZERO" is enabled, the currently measured leak rate value will be interpreted as a helium background and subtracted from all subsequently measured values. The background value suppressed by "ZERO" is adjusted automatically if the background changes inside the device. The background value is automatically adjusted depending on the set ZERO time, except for filter setting I·CAL, see "Measurement result display with signal filters [} 61]". Activating and deactivating <variable linkid="658744588" name="1035">ZERO</ variable> Activating/deactivating "ZERO" 0 ON 1 Off Control unit LD protocol ASCII protocol Function > ZERO > ZERO Command 6 Command *ZERO Activating and deactivating "ZERO with start" ZERO with Start suppresses the helium background automatically when a measurement is started. 0 ON 1 Off Setting ZERO mode Control unit LD protocol ASCII protocol Settings > ZERO/Filter > ZERO > ZERO with start Command 409 Command *CONFig:ZEROSTART Determines the degree of the helium background suppressed by ZERO (only with filter "fixed" and "2-stage"). 0 all decades 60 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 1 1 2 decades 2 2 3 decades 3 2 decades 4 3 4 decades 5 19/20 of the helium background are suppressed Control unit LD protocol ASCII protocol Settings > ZERO/Filter > ZERO > ZERO > mode Command 410 Command *CONFig:DECADEZero Deactivating the ZERO key on the sniffer Deactivation of the ZERO key (ZERO adjustment) prevents that the measurement is influenced inadvertently. 0 ON 1 Off Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniffing > Sniffer > Keys > ZERO key sniffer Command 412 Command *CONFig:BUTSniffer 7.13 Measurement result display with signal filters Select signal filter With the signal filters, the leak rate indicator regarding slope and noise behavior can be influenced. Generally select signal filter I·CAL for the operation mode "Vacuum". Generally select signal filter I-Filter for the operation mode "Sniff". If the signal filter should simulate the time behavior of older units, then select filter "Fixed" or "2-Zone". I·CAL The leak rates are averaged at time intervals that are optimized for the range of the leak rates. The algorithm used offers excellent sensitivity and response time. Use of this setting is strongly recommended. fixed The leak rates are averaged at fixed intervals of 0.2 seconds. 2-zone The filter is compatible with LDS1000 and LDS2000. The averaging period is switched depending on the filter leak rate threshold. I-Filter Filter optimized for sniffer mode. (Default with XL Sniffer Adapter set) LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 61 / 140 7 | Operation LDS3000 I-Filter slope suppress. INFICON Same as I-Filter, but with additional slope suppression. The edge suppression corrects the measurement changes during the warm-up phase. Setting the filter leak rate threshold Control unit LD protocol ASCII protocol Settings > ZERO/Filter > Filter > Filter mode Command 402 Command *CONFig:FILTER Leak rate background in mbar l / s for the averaging period. The averaging period is 10.24 s below this value. Above this value, the averaging period is 160 ms. Setting applies only to filter "2-stage". 1E-11 ... 9.9E-3 Setting filter ZERO time Control unit LD protocol ASCII protocol Settings > ZERO/Filter > Settings > Filter 2-zone Command 403 Command *CONFig:LRFilter Update interval for the offset value with negative leak rate signal (except for I·CAL filter). Resolution 0.1 s (50 = 5.0 s) Control unit LD protocol ASCII protocol Settings > ZERO/Filter > Settings filter > ZERO time Command 411 Command *CONFig:ZEROTIME 7.14 Control of the Gas Ballast Valve of the Backing Pump Controlling the gas ballast valve The mass spectrometer module can control an electric 24 V gas ballast valve of the backing pump via the "Output" connection. Controlling the gas ballast valve using digital outputs. 0 Off 1 On 2 Continuously on Control unit LD protocol ASCII protocol Functions > Valves > Gas Ballast Command 228 62 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 7.15 Selecting display limits Display range Lowering and raising the display limits: If very small leak rates are not of interest for your application, raising the lower limit of the display can facilitate the assessment of the leak rate indicator. up to 15 decades in VAC up to 11 decades in SNIF up to 8 decades in AQ mode If an unsuitable setting causes the usable range to be less than the decade, the upper limit is shifted until a visible decade remains. Note: The current display limits are shown in the control unit when setting between the two parameters. Using the command 399 with the LD protocol the current display limit can be read out. Control unit LD protocol ASCII protocol Display > Display limits Command 397 Command: *CONFig:DISPL_LIM:HIGH Command: *CONFig:DISPL_LIM:LOW 7.16 Setting trigger values The mass spectrometer module has four independent trigger values. If the measured leak rate exceeds the set trigger values, the corresponding digital outputs of IO1000 are activated. In addition, exceeding the Trigger 1 on the control unit is highlighted. In the AQ mode, the calculation at the recommended measuring time refers to the trigger value 1. 1 / 2 / 3 / 4 Control unit LD protocol ASCII protocol Setting > Trigger > Trigger 1 (2, 3, 4) > Trigger level Command 385 Command *CONFig:TRIGger1 (2, 3, 4) 7.17 Setting capillary surveillance Pressure value capillary clogged You set a minimum pressure value in order to detect if the 25/300-sccm capillaries are blocked. If the value is fallen short of, the system issues warning 540. Error message 541 is output with strong lower deviation. 1E-3 ... 18 mbar LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 63 / 140 https://manual-hub.com/ 7 | Operation LDS3000 INFICON Pressure value capillary broken Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Capillary > Blocked > Pressure capillary blocked Command 452 Command *CONFig:PRESSLow You set a maximum pressure value in order to detect if the 25/300-sccm capillaries are blocked. If the value is exceeded, the system issues warning 542. 1E-3 ... 18 mbar Detection of a missing sniffer line Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Capillary > Broken > Pressure capillary broken Command 453 Command *CONFig:PRESSHigh Automatic detection of a missing sniffer line. This function should be deactivated if a sniffer line that is not automatically detected is used. 0 ON 1 Off Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Sniffer > Messages > Sniffer line detection Command 529 7.18 Set the rotation speed of the turbo molecular pump Rotation speed of turbo molecular pump In some applications, it may be advisable to reduce the rotation speed of the turbomolecular pump, to increase the sensitivity of the device. As a result, however, the maximum allowable inlet pressure decreases at the GROSS, FINE and ULTRA connections. After changing the rotation speed recalibration is required! For devices with AQ mode: Do not change the set 1000 Hz. 64 / 140 Rotation speed of turbo molecular pump in Hertz 1000 1500 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 Control unit LD protocol ASCII protocol Settings > Set up > MS module > TMP > Settings > TMP rotational speed 501 *CONFig:SPEEDTMP 7.19 Cathode Selection Selecting a cathode The mass spectrometer includes two cathodes. In the factory setting the device uses cathode 1. If it is defective, the device automatically switches to the other cathode. With this setting it is possible to select a certain cathode. 0 CAT1 1 CAT2 2 Auto Cat1 (automatic switching to cathode 2, factory setting) 3 Auto Cat2 (automatic switching to cathode 1) 4 OFF Control unit LD protocol ASCII protocol Settings > Set up > MS module > Ion source > Cathode selection 530 *CONFig:CAThode *STATus:CAThode 7.20 Settings for the XL sniffer adapter For operation with the XL Sniffer Adapter you have to use the SL3000XL sniffer line, - Select the "XL Sniffer Adapter" operation mode, see "Select operation mode [} 45]". Function of right sniffer key Activate or deactivating the right key of the SL3000XL sniffer line (switching between low flow and high flow). Deactivating the key prevents an inadvertent influencing of the measurement. Search Function Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Sniffer > Keys > Sniffer flow key Command 415 Command *CONFig:HFButton When the search function is activated, the alarm is automatically connected to Trigger 2 as soon as it is switched to High Flow. · Switched-off Search Function: Alarm, when Trigger 1 is exceeded. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 65 / 140 7 | Operation LDS3000 INFICON · Switched-on Search Function and operation in Low Flow: Alarm, when Trigger 1 is exceeded. · Switched-on Search Function and operation in High Flow: Alarm, when Trigger 2 is exceeded. 0 Off 1 ON Sniffer LEDs: Brightness Control unit LD protocol ASCII protocol Setting > Trigger > Search Command 380 Command *CONFig:SEARch In the SL3000XL the following are dependent on the trigger used; the leak rate bar, changing the background lighting, the beeper and changing the sniffer tip lighting. Set the brightness of the LEDs designed to illuminate the spot under examination. This setting refers to the measurement process without LED alarm configuration, see below. From "0" (off) to "6" (max.) Sniffer LEDs: Alarm configuration Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Sniffer > LED > Sniffer LED brightness Command 414 Command *CONFig:BRIGHTness Behavior of the LEDs on the sniffer, when trigger value 1 is exceeded. Off No response Flashing The LEDs are flashing Brighter The LEDs shine with maximum brightness. Sniffer beep: Alarm configuration Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Sniffer > LED > Sniffer LED alarm config. Command 413 Command *CONFig:LIGHTAlarm Response by the beep on the sniffer if the trigger value is exceeded. Off No response Trigger Acoustic signal / vibration alarm Control unit LD protocol Settings > Set up > Operation modes > Sniff > Sniffer > Beep > Sniffer Beep Command 417 66 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 | 7 Display of the hydrogen percentage ASCII protocol Command *CONFig:BEEP The sniffing with forming gas involves the use of hydrogen. The hydrogen percentage is taken into consideration with this specification. This will increase the displayed leak rate by the corresponding factor. You can also set the gas percentage for other gases (M3, He). 0 ... 100% Auto standby interval Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Gas percentage > Mass2 > Gas percentage H2 Command 416 Command *CONFig:PERcent Defines the duration in minutes until standby is activated. If the device operates in high flow, the filters of the sniffer line will foul up more quickly. Auto standby switches to low flow for protection. Moving the sniffer line automatically switches the previously selected flow back on. From "0" (off) to "60" (max.) Pressure value XL capillary clogged (high flow) Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Auto standby > Interval auto standby Command 480 Command *CONFig:STANDBYDel You set a minimum pressure value in order to detect if the XL capillary (high flow, 3000 sccm) is blocked. If the value is fallen short of, the system issues warning 550. Error message 551 is output with strong lower deviation. 100 ... 300 mbar Pressure value XL capillary broken (high flow) Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Capillary > Blocked XL > Pressure capillary blocked XL Command 455 Command *CONFig:PRESSXLLow You set a maximum pressure value in order to detect a disruption in the XL capillary (high flow, 3000 sccm). If the value is exceeded, the system issues warning 552. 200 ... 600 mbar Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniff > Capillary > Broken XL > Pressure capillary broken XL Command 456 Command *CONFig:PRESSXLHigh LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 67 / 140 https://manual-hub.com/ 7 | Operation LDS3000 Select flow INFICON Select low flow or high flow. Comment: The selection can also be made with the right sniffer key or assigned to one of the favorite keys of the control unit. Small (low flow) Large (high flow) Control unit LD protocol ASCII protocol Settings > Configuration> Operating Mode > Flow > Flow Control or Functions > Flow > Flow Control Command 229 Command *CONFig:Highflow 7.21 Resetting the settings Mass spectrometer module The settings of the mass spectrometer module can be reset to factory settings. 0 Load factory settings 10 Reset the settings for compatibility mode LDS1000 11 Reset the settings for compatibility mode LDS2010 12 Reset the settings for XL sniffer adapter mode Control unit LD protocol ASCII protocol Functions > Data > Parameters > Reset > Control unit settings Functions > Data > Parameters > Reset > MSB settings Functions > Data > Parameters > Reset > Parameter access level Command 1161 Command *RST:FACTORY Command *RST:SL3000 For devices with AQ mode: Loading AQ mode reloads the factory settings for the AQ mode, see also Select Compatibility Mode [} 43]. 68 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 8 Operation LDS3000 AQ (Accumulation) 8.1 Switching the device on 1 Switch on the backing pump. 2 Establish the power supply to the mass spectrometer module. ð System starts up automatically. ð If an XL Sniffer Adapter and the CU1000 are connected, your will be asked after run-up, whether the "XL Sniffer Adapter" operation mode should be set. This does not apply to devices in AQ mode. Longer run-up time for devices in AQ mode To counteract falsification of the measurement results by an increased background value, the warm-up time after switching on is about 10 minutes. Wait at least 60 minutes before determining the peak or before calibrating. See also "Carrying out a measurement [} 82]". 8.2 Default settings Language selection Select the display language. The factory setting is English. (The display on the handle of the SL3000XL sniffer line shows messages in English instead of in Russian and Chinese.) German, English, French, Italian, Spanish, Portuguese, Russian, Chinese, Japanese Setting date and time Control unit LD protocol ASCII protocol Setting the date Format: DD.MM.YY Settings > Set up > Control unit > Language Command 398 *CONFig:LANG Control unit LD protocol ASCII protocol Setting the time Format: hh: mm Settings > Date/Time > Date Command 450 *HOUR:DATE LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 69 / 140 8 | Operation LDS3000 AQ (Accumulation) Control unit LD protocol ASCII protocol Settings > Date/Time > Time Command 450 *HOUR:TIME INFICON 8.3 Selecting a unit for the leak rate Leak rate unit display Selecting the leak rate unit in the display for vacuum or sniff 0 mbar l/s (factory setting) 1 Pa m3/s 2 atm cc/s 3 Torr l/s 4 ppm (not VAC, not AQ) 5 g/a (not VAC, not AQ) 6 oz/yr (not VAC, not AQ) 7 sccm (AQ only) Control unit LD protocol ASCII protocol Display > Units (display) > Leak rate device VAC (SNIF) Command 396 (vacuum) Command 396 (sniffing) Command *CONFig:UNIT:VACDisplay Command *CONFig:UNIT:SNDisplay Leak rate unit interface Selecting the leak rate unit of the interfaces for vacuum or sniff 0 mbar l/s (factory setting) 1 Pa m3/s 2 atm cc/s 3 Torr l/s 4 ppm (not VAC) 5 g/a (not VAC) 6 oz/yr (not VAC) 7 sccm (AQ only) 70 / 140 Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > Units (interface) > Leak rate device VAC (SNIF) Command 431 (vacuum) Command 432 (sniffing) Command *CONFig:UNIT:LRVac Command *CONFig:UNIT:LRSnif LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 Pressure unit interface 8.4 Select device for pressure Selecting the pressure device of the interfaces 0 mbar (factory setting) 1 Pa 2 atm 3 Torr Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > Units (interface) > Pressure unit Command 430 (Vacuum/Sniff) Command *CONFig:UNIT:Pressure 8.5 Select Compatibility Mode To retrofit an existing leak detection system LDS1000 / LDS2010 with a LDS3000, activate the appropriate compatibility mode: · Compatibility mode for LDS1000 or · Compatibility mode for LDS2010 When changing to a compatibility mode all parameters are to be reset to factory settings and the device is to be restarted. The language is displayed according to the factory setting. To change the language, see "Default settings [} 69]". If you want to use the LDS3000 later in normal operation mode, make sure to save your parameters on a USB flash drive, see "Loading and saving parameters [} 83]". You can load the saved parameters again after you have switched to normal operation. Compatibility mode for LDS1000 Compatibility mode for LDS2010 Mode LDS3000 Mode XL Sniffer Adapter Mode AQ (This mode is only available for AQ devices. It is preset for AQ devices. Switching to other modes is possible.) Control unit LD protocol ASCII protocol Settings > Set up > Compatibility > Compatibility mode Command 2594 (dec) Command *CONFig:COMP The following table shows the functional differences between and common features of LDS2010 and LDS3000: LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 71 / 140 8 | Operation LDS3000 AQ (Accumulation) INFICON LDS2010 LDS3000 Trigger outputs without joint reference with joint reference other outputs with joint reference with joint reference Trigger 1 (sniffer LED, relay exit, audio signal) Control of sniffer LED, PWM audio Control of sniffer LED, audio outputs an the control unit for active outputs an the control unit for active speakers speakers Limit Low / High (serial interfaces, display, analogue output) Limit Low affects all outputs, Limit High only the display separately adjustable for interface protocols, display and analog outputs Gas ballast (3 settings) OFF: Switches the gas ballast valve 0 = Off of the pump module off. 1 = on, but controllable via digital ON: Switches the gas ballast valve input on IO1000 of the pump module on until the next mains-off. 2 = on, but not controllable via digital input on IO1000 If "CAL fashion" is unequal to 3 (menu item 26), the gas ballast valve can be controlled with digital input DynCAL. F-ON: Fixed on enables switching the gas ballast valve on permanently (power failure-proof and independent of the digital inputs). Control mode LOCAL, RS232, RS485 None, control is also possible from all control locations. LDS1000 compatibility mode 9.2 other functions Default values and error messages (default values are output via interface, the touchscreen shows the original message - -> reason: new hardware can cause errors that did not exist with previous models) Correcting the leak rate in Standby adjustable (yes/no) (machine factor) adjustable (yes/no) ZERO with start starting with V1.02 like LDS2010 Opening the sniffer valve in SNIF after start in SNIF after start Rotation speed of turbo molecular only 2 rotation speeds adjustable pump Adjustable via serial interface from 750 Hz to 1500 Hz, via operator unit 1000 Hz and 1500 Hz Address RS485 Yes, because bus capable No, because not bus capable Sniffer key on/off selectable selectable 72 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 LDS2010 LDS3000 Default value for int. calibration leak 1E-15 mbar l/s 9.9E2 mbar l/s Default value ext. calibration leak VAC/SNIF mode 1E-7 mbar l/s 9.9E2 mbar l/s Setting range for int. calibration leak 10E-7 1E-9 ... 9.9E-1 mbar l/s Machine factor adjustment manually manually/automatically Machine / sniff factor value range Machine factor: 1E-3...9.9E+3 Sniffer factor: 1E-3...9.9E+3 Machine factor: 1E-4...1E+5 Sniffer factor: 1E-4...1E+4 Pressure: Capillary surveillance 20 available, pressure adjustable Analog output fixed characteristics freely configurable Calibration request Preamplifier temperature change 5 K or 30 min Preamplifier temperature change 5 K or 30 min. or TMP rotation speed changed Pressure / leak rates units (VAC/ yes SNIF) for all interfaces Control unit and rest separated User permissions 3 levels over PIN on the control unit 4 levels through control unit or or key switch optional key switch Key-operated switch permanently installed can, if required, be connected externally, see "Assigning the digital inputs of the I/O module [} 95]" (Key switch) 8.6 Making basic settings via the wizard We recommend using the AQ Wizard for important settings and calibration. The following information refers to a CU1000 that has been adapted for use with the LDS3000 AQ. If you want to deviate from the standard settings or want to find out more about interface protocol commands, please refer to further chapters of this manual for details. AQ Wizard To start the AQ wizard, press on the display of the CU1000 Main menu > Functions > Assistant Alternatively press the word "Wizard" at the bottom of the display. Make your entries in the windows that are called one after the other. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 73 / 140 8 | Operation LDS3000 AQ (Accumulation) INFICON 1. Chamber volume (net volume) The unit of volume can be selected under Main Menu > Settings > Set up > Op. modes > AQ > Volume unit. (LD protocol: Command 1763 ASCII protocol: *CONFig:AQ:VOLume) 2. Trigger level 1 (LD/ASCII protocol: See "Setting trigger values [} 63]") 3. Mass (selection between helium or forming gas) (LD/ASCII protocol: See "Select gas type (mass) [} 46]" 4. Percentage of gas (for example, the hydrogen content in forming gas) (LD/ASCII protocol: See display of hydrogen content in "Settings for the XL sniffer adapter [} 65]" 5. Measurement time (The time can be freely adjusted, but there is also a recommendation, depending on parameters.) (LD protocol: Command 1765 ASCII protocol: *CONFig:AQ:TIME) Alternatively, you can make your settings in the following places: Main menu > Settings > Set up > Operation modes > AQ Main menu > Settings > Mass 8.7 Determine peak To obtain the most accurate measurement results, you should always determine the current "peak" before calibration. At the end of this process, the value for the old anode voltage is replaced by the value for the new anode voltage. The adjustment uses air-helium or air-hydrogen. An adjustment only with nitrogen is not possible. The following information about the display refers to a CU1000 that has been adapted for use with the LDS3000 AQ. ü To prevent falsification of measurement results due to an increased background value, you have waited for at least 60 minutes to warm up. 1 Main menu > Functions > CAL > Peak. 2 Confirm with "OK". ð The "CAL peak" window opens. 3 Remove the calibration leak from the chamber. 74 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 4 Wait until the background signal is stable. 5 To confirm the stable background value and start the adjustment, confirm with "OK". ð (LD protocol: 4, Parameter 7 (peak adjust AQ) ASCII protocol: *CAL:PEAK) IO1000: "Peakfind" input ð (LD and ASCII protocol: The status must then be queried via command 260 (State Calibration) or *STATus: CAL) ð After adjustment, the old and new anode voltage are displayed. 8.8 Store leak rate of calibration leaks Enter the specifications for the used calibration leak once. A specific leak rate must be set for each gas (mass). Range: 1E-9 ... 9.9E-2 mbar l/s Minimum size for leak rate of the calibration leak In order to perform a stable calibration, we recommend a minimum size for the leak rate of the used calibration leak. If the measurement time proposed by the AQ Wizard is maintained, the leak rate should not fall below the following value: - When using forming gas, the selected setpoint (Trigger 1) - When using helium 1/5 of the selected setpoint (Trigger 1) If the leak rate of the used calibration leak is too small, an error message will be issued to start or finish the calibration. The following information refers to a CU1000 that has been adapted for use with the LDS3000 AQ. ü The desired unit in which you want to enter the leak rate is set. If the unit of leak rate displayed in your system differs from the unit indicated on the calibration leak, at least temporarily set the unit as indicated on the calibration leak. See also "Selecting a unit for the leak rate [} 42]". 1 Main menu > Functions > CAL > Settings > Ext. calibration leak 2 Enter the desired gas and the associated leak rate. (LD protocol: Command 390 ASCII protocol: *CONFig:CALleak:EXTVac) LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 75 / 140 8 | Operation LDS3000 AQ (Accumulation) 8.9 Calibrating the device INFICON 8.9.1 Time and general preferences NOTICE Incorrect calibration because of operating temperature that is too low Calibrating the device in the cold state can deliver incorrect measurement results. For optimum accuracy the device should have been turned on at least 60 minutes previously. It is recommended to calibrate the device once per shift in the desired operating modes and for the desired gases. Thereafter you can switch between the operation modes and gases without re-calibrating. Further, calibration is required after a calibration prompt by the system. Switching off the preamplifier test The device tests the installed preamplifier during calibration. You can switch off of the amplifier test. This increases the speed of the calibration, but reliability drops off. 0 OFF 1 ON Control unit LD protocol ASCII protocol Settings > Set-up> MS-module > Preamplifier > Test > Preamplifier test with CAL Command 370 Command *CONFig:AMPTest (ON,OFF) Enabling calibration request If Calibration request is enabled, the device will prompt the operator to perform a calibration 30 minutes after it has been switched on and in case of temperature changes greater than 5°C. 0 OFF 1 ON Control unit LD protocol ASCII protocol Functions > CAL > Settings > CAL request. > Calibration request or Settings > Set-up> CAL request. > Calibration request Command 419 *CONFig:CALREQ (ON,OFF) 76 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 Calibration warning Wrn650 The warning message Wrn650 "Calibration within the first 20 minutes is not recommended" can be allowed or suppressed. 0 OFF (suppressed) 1 ON (allowed) Control unit LD protocol ASCII protocol Functions > CAL > Settings > CAL request. > Calibration warning W650 or Settings > Set-up> CAL request. > Calibration warning W650 Command 429 *CONFig:CALWarn ON (OFF) See also 2 Setting machine and sniff factor [} 81] 8.9.2 Entering the calibration factor The calibration is usually determined by the appropriate calibration routine. Therefore, it is usually not necessary to adjust the calibration factor manually. An incorrectly set calibration inevitably leads to wrong leak rate indicator! 8.9.3 Calibration factor vacuum Also applies to devices in AQ mode. Entry of calibration factors for masses 2, 3, 4. The values will be overwritten during the next calibration. 0.01 ... 5000 Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Vacuum > Calibr. factor > mass 2 (3, 4) > calibration factor VAC H2 (M3, He) Command 520 Command *FACtor:CALVac 8.9.4 Calibrating Please also note the general instructions for calibration, see "Calibrating the device [} 46]". LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 77 / 140 8 | Operation LDS3000 AQ (Accumulation) INFICON Requirements for all procedures · You have an external calibration leak. · The information on the calibration leak is entered, see also "Store leak rate of calibration leaks [} 75]". · To prevent falsification of measurement results due to an increased background value, you have waited for at least 60 minutes to warm up. · The current "peak" was determined, see also "Determine peak [} 74]". Control unit CU1000 1 Place the open calibration leak in the measuring chamber and close the measuring chamber. 2 Main menu > Functions > CAL > external ð The leak rate of the calibration leak will be displayed and a question to start the calibration. 3 To start the calbration confirm with "OK". 4 Follow the instructions on the screen. LD or ASCII protocol, IO1000 1 Place the open calibration leak in the measuring chamber and close the measuring chamber. 2 For a stable leak rate signal, wait at least the duration of the set AQ measurement time. 3 Start the calibration LD protocol: Command 4, Parameter 1 ASCII protocol: *CAL:EXT IO1000: Input "CAL external", see also the following figure ð If helium is used, proceed to the last step (no. 8). 4 For a background determination of forming gas (hydrogen), then query the status: LD protocol: Command 260 (State Calibration) ASCII protocol: *STATus:CAL ð Wait until it reaches the following state: LD protocol: Command 260 State 75 "WAIT_ZERO_AQ" ASCII protocol: *STATus:CAL? on "CLOSE" IO1000: Input "CAL stable", see also the following figure 5 Remove the calibration leak from the measuring chamber and close the measuring chamber. 6 For a stable leak rate signal, wait at least the duration of the set AQ measurement time. 78 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 7 Start the background measurement. LD protocol: Command 11, Parameter 1 (Continue calibration) ASCII protocol: *CAL:CLOSED IO1000: Input "CAL external", see also the following figure 8 Then query the status: LD protocol: Command 260 (State Calibration) ASCII protocol: *STATus:CAL ð Wait until it reaches the following state: LD protocol: Command 260 State 0 "READY" ASCII protocol: *STATus:CAL? on "IDLE" IO1000: Output "CAL active", see also the following figure ð The calibration is completed. ð In case of error: LD protocol: Command 260 State 51...59 (error conditions) ASCII protocol: *STATus:CAL? on "FAIL" IO1000: Output "Error or Warning" LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 79 / 140 8 | Operation LDS3000 AQ (Accumulation) INFICON Fig. 16: External calibration with IO1000 on a device for AQ mode. Description of the PLC inputs and outputs see "Assigning inputs and outputs [} 88]" 8.10 Perform ZERO After the run-up of the LDS3000 AQ and the choice of forming gas as gas type, the existing hydrogen in the vacuum system initially ensures that a rising curve is visible on the display. This display can be misunderstood as a sign of leakage. To remove distorting traces of hydrogen, wait about 30 minutes after starting up the device to measure. To eliminate the residual offset, execute ZERO AQ. ZERO AQ is not used to suppress measurement signals. 80 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 ü Mass is hydrogen (forming gas). If no hydrogen (forming gas) is entered, you can set it under "Main menu > Settings > Mass" or via "Wizard" at the bottom of the measurement window display. ü There is neither a test specimen nor a calibration leak in the measuring chamber. 1 Main menu > Functions > ZERO AQ 2 Follow the instructions on the screen. ð LD and ASCII protocol: After removing the test specimen or calibration leak, first wait for the measuring time. ð LD protocol: Command 6, Parameter 1; ASCII protocol: *ZERO:ON ð IO1000: Input ZERO 8.11 Setting machine and sniff factor The internal calibration will only calibrate the measurement system of a mass spectrometer module that is uncoupled from the test system. If the measurement system is operated in parallel to an additional pump system after an internal calibration though (following the partial flow principle), the measurement system will indicate a leak rate that is too low based on the partial flow ratio. With the help of a corrective machine factor for vacuum mode and a sniff factor for sniffer mode, the measurement system indicates the actual leak rate. The factors are taken into consideration along wit the ratio of effective pumping speed of the measurement system in a comparison to the pumping speed of the measurement system on the test system. 8.11.1 Setting machine and sniff factor manually Setting the machine factor ü Mass spectrometer module calibrated internally. 1 Measure external calibration leak using the test system. ð The device indicates a leak rate that is too low based on the partial flow ratio. 2 Setting machine or sniff factor, see below. ð The device indicates the actual leak rate. Devices in AQ mode: The machine factor "1" is preset. This setting should not be changed. Corrects a possible deviation between internal and external calibration in vacuum mode. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 81 / 140 8 | Operation LDS3000 AQ (Accumulation) INFICON Should be at value 1.00 without the option internal calibration leak. After the value is changed, the leak rate resulting from the change is displayed. This simplifies adjustment. Value range 1E-4...1E+5 Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Vacuum > Machine factor > Mass 2 (3, 4) > machine factor VAC H2 (M3, He) Command 522 Command *FACtor:FACMachine Setting the sniff factor Corrects a possible deviation between internal and external calibration in sniffer mode Value range 1E-4...1E+4 Control unit LD protocol ASCII protocol Settings > Set up > Operation modes > Sniffing > Sniff factor Mass 2 (3, 4) > Sniff factor H2 (M3, He) Command 523 Command *FACtor:FACSniff 8.12 Carrying out a measurement WARNING Danger due to imploding measuring chamber An external measuring chamber connected to an LDS3000 AQ is pumped off at approximately 60 sccm. Within normal measurement times (2 - 30 seconds) no dangerous negative pressure is generated. If the measuring chamber is leak-proof, but not vacuum resistant, and continues to pump, it may implode. This can occur, for example, in a 1-liter measuring chamber after about 10 minutes. Do not continue pumping a measuring chamber after the measuring time has expired. Consider suitable protective measures! 82 / 140 ü The device is switched on. ü The peak has been determined, see "Determine peak [} 74]". ü The calibration was done, see "Calibrating [} 77]". ü AQ ZERO has been determined, see "Perform ZERO [} 80]". LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 1 If you are measuring with forming gas, make sure that the device has been running for at least half an hour. This time is needed to perform stable measurements. ð If you measure with helium, this waiting time is about 10 minutes. 2 Place the test object in the measuring chamber and close the measuring chamber. The test object should not be placed on the areas that may be leaking. ð Either a test object filled with helium or forming gas under pressure is brought into the measuring chamber or pressurized in the measuring chamber. ð If the test object leaks, the display shows an increasing leak rate. 3 Wait for the set measuring time. ð The leak rate is calculated and displayed. 4 Remove the test object from the measuring chamber and continue the measurements with step 2. ð Start or stop buttons are not used. 8.13 Loading and saving parameters You can use a USB flash drive on CU1000 to backup and restore the control unit and mass spectrometer module parameters. Save parameter: "Functions > Data > Parameter > Save > Save parameter" Loading parameters: ü The currently set compatibility mode must match the compatibility mode in the parameter file. See also Select Compatibility Mode [} 71]. "Functions > Data > Parameter > Load > Load parameter" 8.14 Copying measurement data, deleting measurement data The measurement data can be saved to a USB flash drive with CU1000. · "Functions > Data > Recorder > Copy > Copy files" The measurement data can be deleted on the CU1000. · "Functions > Data > Recorder > Delete > Delete files" LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 83 / 140 8 | Operation LDS3000 AQ (Accumulation) INFICON 8.15 Adjust "Zero time factor AQ" In order to avoid apparently negative leak rates when measuring with forming gas, the leakage rate display is adjusted to 0 after a certain time (zero time factor AQ x measuring time). Zero time factor AQ can be set under: Main menu > Settings > Set up > Operation modes > AQ > Measurement time The default value is 4 and can be changed to 1...10 in integers. (LD protocol: Command 1767 ASCII protocol: *CONFig:AQ:ZEROTime) 8.16 Selecting display limits Display range Lowering and raising the display limits: If very small leak rates are not of interest for your application, raising the lower limit of the display can facilitate the assessment of the leak rate indicator. up to 15 decades in VAC up to 11 decades in SNIF up to 8 decades in AQ mode If an unsuitable setting causes the usable range to be less than the decade, the upper limit is shifted until a visible decade remains. Note: The current display limits are shown in the control unit when setting between the two parameters. Using the command 399 with the LD protocol the current display limit can be read out. Control unit LD protocol ASCII protocol Display > Display limits Command 397 Command: *CONFig:DISPL_LIM:HIGH Command: *CONFig:DISPL_LIM:LOW 8.17 Set the rotation speed of the turbo molecular pump Rotation speed of turbo molecular pump In some applications, it may be advisable to reduce the rotation speed of the turbomolecular pump, to increase the sensitivity of the device. As a result, however, the maximum allowable inlet pressure decreases at the GROSS, FINE and ULTRA connections. After changing the rotation speed recalibration is required! 84 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operation LDS3000 AQ (Accumulation) | 8 For devices with AQ mode: Do not change the set 1000 Hz. Rotation speed of turbo molecular pump in Hertz 1000 1500 Control unit LD protocol ASCII protocol Settings > Set up > MS module > TMP > Settings > TMP rotational speed 501 *CONFig:SPEEDTMP 8.18 Cathode Selection Selecting a cathode The mass spectrometer includes two cathodes. In the factory setting the device uses cathode 1. If it is defective, the device automatically switches to the other cathode. With this setting it is possible to select a certain cathode. 0 CAT1 1 CAT2 2 Auto Cat1 (automatic switching to cathode 2, factory setting) 3 Auto Cat2 (automatic switching to cathode 1) 4 OFF Control unit LD protocol ASCII protocol Settings > Set up > MS module > Ion source > Cathode selection 530 *CONFig:CAThode *STATus:CAThode 8.19 Resetting the settings Mass spectrometer module The settings of the mass spectrometer module can be reset to factory settings. 0 Load factory settings 10 Reset the settings for compatibility mode LDS1000 11 Reset the settings for compatibility mode LDS2010 12 Reset the settings for XL sniffer adapter mode LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 85 / 140 8 | Operation LDS3000 AQ (Accumulation) INFICON Control unit LD protocol ASCII protocol Functions > Data > Parameters > Reset > Control unit settings Functions > Data > Parameters > Reset > MSB settings Functions > Data > Parameters > Reset > Parameter access level Command 1161 Command *RST:FACTORY Command *RST:SL3000 For devices with AQ mode: Loading AQ mode reloads the factory settings for the AQ mode, see also Select Compatibility Mode [} 71]. 86 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Using the expansion module (LDS3000, LDS3000 AQ) | 9 9 Using the expansion module (LDS3000, LDS3000 AQ) 9.1 Selecting the type of expansion module Selecting the expansion module Selecting the type of module connected to the I/O connection I/O module Bus module Control unit LD protocol ASCII protocol Settings > Configuration > Interfaces > Device Selection > Module on I/O connection or Settings > Configuration > Accessories > Device Selection. > Module on I/O connection 9.2 Settings for I/O module IO1000 9.2.1 General interface settings Setting the interface protocol Setting the protocol for the module connected to the I/O connection. This setting can be overwritten with the DIP switch on the IO1000. LD ASCII Binary LDS1000 Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > Protocol > I/O module protocol 2593 *CONFig:RS232 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 87 / 140 9 | Using the expansion module (LDS3000, LDS3000 AQ) INFICON 9.2.2 Assigning inputs and outputs Assigning analog outputs of the I/O module The analog outputs of I/O module IO1000 can with assigned with different measurement value displays. Possible functions: see the following table Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > I/O module > Analog outp. > Config. Analog outputs 1/2 Commands 222, 223, 224 Command *CONFig:RECorder:LINK1 Command *CONFig:RECorder:LINK2 Command *CONFig:RECorder:SCALE Command *CONFig:RECorder:UPPEREXP Limit values can be defined for the output voltages. VAC: Min. 1 x 10-13...1 x 10-1 mbar l/s Max. 1 x 10-12...1 x 10-1 mbar l/s SNIF: Min. 1 x 10-9...1 x 10-1 mbar l/s Max. 1 x 10-8...1 x 10-1 mbar l/s Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > LR limits Command 226 (Vac) Command 227 (Snif) Command *CONFig:LIMITS:VAC Command *CONFig:LIMITS:SNIF Functions, assignment of analog outputs: Off Pressure p1 / Pressure p2 Leak rate mantissa Leak rate exponent Linear leak rate The analog outputs are switched off (Output voltage = 0 V). 1 ... 10 V; 0.5 V / decade; 1 V = 1 x 10-3 mbar 1 ... 10 V; linear; in the selected unit 1 ... 10 V; 0.5 V / decade; Step function; 1 V = 1 x 10-12; in selected unit x ... 10 V; linear; in the selected unit Useful only if the other analog output is assigned "Leak rate exponent". Useful only if the other analog output is assigned "Leak rate mantissa" or "Leak rate ma. Hys." is occupied. 88 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Using the expansion module (LDS3000, LDS3000 AQ) | 9 The upper limit (= 10 V) is set via the parameter "Upper limit exponent". The lower value is always 0 (leak rate), which corresponds to 0 V output voltage. The exponent of the upper limit can be set in entire decades, such as 1 x 10-4 mbar l/s. Settings > Set up > Interfaces > I/O module > Analog scale > AO exponent upper limit. This setting is for both analog outputs, if an appropriate output function is selected. Depending on the selected leak rate unit there is a different absolute limit. The selected range can be additionally narrowed by the limits, which is valid for all interfaces, see above. Leak rate log. x ... 10 V; logarithmic; in the selected unit The upper limit (= 10 V) and the scale (V / decades) are set via the parameters "Upper limit exponent" and "Scale for leak rate". For example: Upper limit set to 1 x 10-5 mbar l/s (= 10 V). Scale set to 5 V / decade. Lower limit is at 1 x 10-7 mbar l/s (= 0 V). The logarithmic output function of both the slope in V / decade as well as the upper limit (10 V limit) can be set. This results in the minimum displayable value. The following slopes are available: 0.5, 1, 2, 2.5, 3, 5, 10 V/The higher the selected slope value, the smaller the displayable area. The logarithmic settings are the most useful when several decades can be displayed, so a setting of <10 V / decade. The upper limit is the same for both analog outputs. In both of the following figures the 1 V / decade and 5 V / decade with different upper limit settings are exemplified. Depending on the selected leak rate unit there is a different absolute limit. The selected range can be additionally narrowed by the limits, which is valid for all interfaces, see above. Set by interface The output voltage can be specified for tests with the LD log command 221. Leak rate Ma. Hys. 0.7 ... 10 V; linear; in the selected unit Useful only if the other analog output is assigned "Leak rate exponent". Through an overlap of the mantissa in the range 0.7 to 1.0, a constant jumping between two decades is prevented. 0.7 V corresponds to a leak rate of 0.7 x 10-x. 9.9 V corresponds to a leak rate of 9.9 x 10x. Pressure p1 (1 V / Dec.)/ Pressure p2 (1 V / Dec.) 1 ... 10 V; 1 V / decade; 2.5 V = 1 x 10-3 mbar; 8.5 V = 1000 mbar Leak rate log. H./ Leak rate exp. Inv. Special function. Use only on the recommendation of INFICON. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 89 / 140 9 | Using the expansion module (LDS3000, LDS3000 AQ) INFICON Fig. 17: Analog output voltage leak rate log. 1 V / decade Fig. 18: Analog output voltage leak rate log. 5 V / decade Output voltages in case The following voltages will be applied at the analog outputs in the event of an error: of error Compatibility mode Voltage LDS1000 0 V 90 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Using the expansion module (LDS3000, LDS3000 AQ) | 9 LDS2010 LDS3000 10 V 10.237 V Configuration The following table can be used for the transmission of settings from LDS2010 to (LDS2010-compatible) LDS3000. LDS2010 setting. Menu item 22 Analog output channel 1 1 1 2 2 1 2 2 3 1 3 2 4 1 4 2 5 1 5 2 6 1 Function LDS2010 Function Scaling of Upper limit (10 LDS3000 the leak rate V = ...) Leak rate mantissa in used unit. 1 ... 10 V Leak rate mantissa Leak rate exponent (step function) in used Leak rate unit. exponent . 1 ... 10 V, 0.5 V / Decade, 1 V = 1E-12 Leak rate log. in used unit. 1 ... 10 V, 0.5 V / Decade, 1 V = 1E-12 Leak rate log. Pressure p1 log. in used unit. Pressure 1 ... 10 V, 0.5 V / Decade, 1 V = 1E-3 mbar p1 Leak rate mantissa in mbar·l/s 1 ... 10 V Leak rate mantissa Leak rate exponent (step function) in LR mbar·l/s exponent 1 ... 10 V, -1 V / Decade, 0 V = 1E0 mbar l/ inverted s Leak rate log. 0 ... 10 V, 1 V / Decade, 0 V = 1E-10 mbar l/s Leak rate log. Pressure p1 log. in mbar 1 V / decade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar, 5.5 V = 1E0 mbar p1 1 V/ dec. Leak rate mantissa in used unit. 1 ... 10 V rise, 0.7 ... 10 V fall LR mantissa hyst. Leak rate exponent in used unit. 1 ... 10 V, 0.5 V / Decade, 0 V = 1E-14 Leak rate exponent Leak rate log. in Pa·m³/s 0 ... 10 V, 1 V/Decade, 0 V = 1E-12 Pa·m³/s = 1E-12 mbar l/s Leak rate log. irrelevant irrelevant 0.5 V/dec. irrelevant irrelevant irrelevant 1 V/dec. irrelevant irrelevant irrelevant 1 V/dec. irrelevant irrelevant 1E6 [used unit] irrelevant irrelevant irrelevant 1.00E+00 irrelevant irrelevant irrelevant 1E-2 mbar l/s LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 91 / 140 9 | Using the expansion module (LDS3000, LDS3000 AQ) INFICON LDS2010 setting. Menu item 22 Analog output channel 6 2 8 1 8 2 9 1 9 2 10 1 10 2 11 1 11 2 12 1 12 2 13 1 13 2 Function LDS2010 Function LDS3000 Pressure p1 log. in Pa 1 V / decade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar p1 1 V/ dec. Leak rate log. in Pa·m³/s 0 ... 10 V, 1 V/Decade, 0 V = 1E-12 Pa·m3/s = 1E-12 mbar l/s Leak rate log. Pressure p2 log. in Pa 1 V / decade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar p2 1 V/ dec. Pressure p1 log. in Pa 1 V / decade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar p1 1 V/ dec. Pressure p2 log. in Pa 1 V / decade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar p2 1 V/ dec. Leak rate log. in mbar l/s Leak rate 0 ... 8 V, 2 V / Decade, 0 V = 1E-3 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 10 V, 3 V / Decade, 0 V = 1E-3 mbar l/ log. s Leak rate log. in mbar l/s Leak rate 0 ... 8 V, 2 V / Decade, 0 V = 1E-4 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 10 V, 3 V / Decade, 0V = 1E-4 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 8 V, 2 V / Decade, 0 V = 1E-5 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 10 V, 3 V / Decade, 0 V = 1E-5 mbar l/ log. s Leak rate log. in mbar l/s Leak rate 0 ... 8 V, 2 V / Decade, 0 V = 1E-6 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 10 V, 3 V / Decade, 0 V = 1E-6 mbar l/ log. s Scaling of Upper limit (10 the leak rate V = ...) irrelevant irrelevant 1 V/dec. 1E-2 mbar l/s irrelevant irrelevant irrelevant irrelevant irrelevant irrelevant 2 V/dec. 1E+2 mbar l/s Special 1 1E+1 mbar l/s 2 V/dec. 1E+1 mbar l/s Special 1 1E+0 mbar l/s 2 V/dec. 1E0 mbar l/s Special 1 1E-1 mbar l/s 2 V/dec. 1E-1 mbar l/s Special 1 1E-2 mbar l/s 92 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Using the expansion module (LDS3000, LDS3000 AQ) | 9 LDS2010 setting. Menu item 22 Analog output channel 14 1 14 2 15 1 15 2 16 1 16 2 17 1 17 2 18 1 18 2 20 1 20 2 21 1 Function LDS2010 Function Scaling of Upper limit (10 LDS3000 the leak rate V = ...) Leak rate log. in mbar l/s Leak rate 2 V/dec. 0 ... 8 V, 2 V / Decade, 0 V = 1E-7 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 10 V, 3 V / Decade, 0 V = 1E-7 mbar l/ log. s Special 1 Leak rate log. in mbar l/s Leak rate 2 V/dec. 0 ... 8 V, 2 V / Decade, 0 V = 1E-8 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 10 V, 3 V / Decade, 0 V = 1E-8 mbar l/ log. s Special 1 Leak rate log. in mbar l/s Leak rate 2 V/dec. 0 ... 8 V, 2 V / Decade, 0 V = 1E-9 mbar l/s log. Leak rate log. in mbar l/s Leak rate 0 ... 10 V, 3 V / Decade, 0 V = 1E-9 mbar l/ log. s Special 1 Leak rate log. in mbar l/s Leak rate 0 ... 8 V, 2 V / Decade, 0 V = 1E-10 mbar l/ log. s 2 V/dec. Leak rate log. in mbar l/s 0 ... 10 V, 3 V / Decade, 0 V = 1E-10 mbar l/s Leak rate log. Special 1 Leak rate log. in mbar l/s Leak rate 0 ... 8 V, 2 V / Decade, 0 V = 1E-11 mbar l/ log. s 2 V/dec. Leak rate log. in mbar l/s 0 ... 10 V, 3 V / Decade, 0 V = 1E-11 mbar l/s Leak rate log. Special 1 Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 1 V/dec. 0 ... 4 V, 1 V / Decade, 0 V = 1E-3 mbar l/s log. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-1 mbar l/s Linear leak irrelevant rate 1E-2 mbar l/s 1E-3 mbar l/s 1E-3 mbar l/s 1E-4 mbar l/s 1E-4 mbar l/s 1E-5 mbar l/s 1E-5 mbar l/s 1E-6 mbar l/s 1E-6 mbar l/s 1E-7 mbar l/s 1E1 mbar l/s 1E7 mbar l/s 1E0 mbar l/s LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 93 / 140 9 | Using the expansion module (LDS3000, LDS3000 AQ) INFICON LDS2010 setting. Menu item 22 Analog output channel 21 2 22 1 22 2 23 1 23 2 24 1 24 2 25 1 25 2 26 1 26 2 27 1 27 2 28 1 28 2 Function LDS2010 Function Scaling of Upper limit (10 LDS3000 the leak rate V = ...) Leak rate log. in mbar l/s Leak rate 1 V/dec. 0 ... 4 V, 1 V / Decade, 0 V = 1E-4 mbar l/s log. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-2 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 1 V/dec. 0 ... 4 V, 1 V / Decade, 0 V = 1E-5 mbar l/s log. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-3 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 1 V/dec. 0 ... 4 V, 1 V / Decade, 0 V = 1E-6 mbar l/s log. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-4 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 1 V/dec. 0 ... 4 V, 1 V / Decade, 0 V = 1E-7 mbar l/s log. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-5 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 1 V/dec. 0 ... 4 V, 1 V / Decade, 0 V = 1E-8 mbar l/s log. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-6 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 1 V/dec. 0 ... 4 V, 1 V / Decade, 0 V = 1E-9 mbar l/s log. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-7 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 0 ... 4 V, 1 V / Decade, 0 V = 1E-10 mbar l/ log. s 1 V/dec. Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-8 mbar l/s Linear leak irrelevant rate Leak rate log. in mbar l/s Leak rate 0 ... 4 V, 1 V / Decade, 0 V = 1E-11 mbar l/ log. s 1 V/dec. 1E6 mbar l/s 1E-1 mbar l/s 1E5 mbar l/s 1E-2 mbar l/s 1E4 mbar l/s 1E-3 mbar l/s 1E3 mbar l/s 1E-4 mbar l/s 1E2 mbar l/s 1E-5 mbar l/s 1E1 mbar l/s 1E-6 mbar l/s 1E0 mbar l/s 1E-7 mbar l/s 1E-1 mbar l/s 94 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Using the expansion module (LDS3000, LDS3000 AQ) | 9 LDS2010 setting. Menu item 22 Analog output channel Function LDS2010 Function Scaling of Upper limit (10 LDS3000 the leak rate V = ...) 29 1 Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-9 mbar l/s Linear leak irrelevant rate 1E-8 mbar l/s 29 2 Leak rate log. in mbar l/s Leak rate 1 V/dec. 1E-1 mbar l/s 0 ... 4 V, 1 V / Decade, 0 V = 1E-11 mbar l/ log. s 30 1 Leak rate lin. In mbar l/s 0 ... 10 V, 1 V = 1E-10 mbar l/s Linear leak irrelevant rate 1E-9 mbar l/s 30 2 Leak rate log. in mbar l/s Leak rate 1 V/dec. 1E-1 mbar l/s 0 ... 4 V, 1 V / Decade, 0 V = 1E-11 mbar l/ log. s Analog input readout No function can be configured for the analog input. It is reserved for future applications. LD command 220 can be used to read out the voltage value on the analog input. 9.2.2.1 Assigning the digital inputs of the I/O module Key-operated switch The digital inputs PLC-IN 1 ... The available functions can be assigned in any way necessary to the 10 I/O module. Active signal: typically 24 V Inactive signal: typically 0 V. The 24V output of the I/O module can be used as an active signal. Every function can be inverted. Possible functions: see the following table Control unit Settings > Set up > Interfaces > I/O module > Digital inputs > Configuration PLC Input LD protocol Command 438 ASCII protocol *CONFig:PLCINLINK:1 (2 ... 10) An external key switch with up to three switching outputs can be connected via three PLC inputs. The key switch can be used to select the access level of the operator of the control unit. Button 1 - Operator Button 2 - Supervisor Button 3 - Integrator Example for a suitable key switch: Hopt+Schuler, No. 444-05 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 95 / 140 9 | Using the expansion module (LDS3000, LDS3000 AQ) Function Functions, assignment of digital inputs: Flank/state: Description INFICON No function CAL dynam. CAL external CAL intern SNIF/VAC Start inactive active: active inactive: inactive active: active inactive: inactive active: inactive active: active inactive: inactive active: STOP inactive active: ZERO ZERO pulse Delete Gas ballast Selection dyn/ norm inactive active: active inactive: inactive active: inactive active: inactive active: active inactive: inactive active: active inactive: Start / Stop inactive active: No function Start external dynamic calibration. Apply value for background and finish calibration. Start external calibration. Apply value for background and finish calibration. Start internal calibration. Enable sniffer mode. Enable vacuum mode. Switch to Meas. (ZERO is possible, all trigger outputs switch depending on the leak rate.) Switch to Standby. (ZERO is not possible, all trigger outputs will return "Leak rate threshold value exceeded".) Switch ZERO on. Switch ZERO off. Switching ZERO on or off. Erase warning or error message / cancel calibration. Open gas ballast valve. Close gas ballast valve unless always open. External calibration mode with activation of digital input "CAL": External dynamic calibration (without auto tune, allowing for the measuring times and pump cycle times set via the digital inputs) External normal calibration (with auto tune, not considering the system-specific measuring times and pump cycle times) Switch to Meas. (ZERO is possible, all trigger outputs switch depending on the leak rate.) Key 1 Key 2 Key 3 CAL active inactive: active: active: active: inactive active: Switch to Standby. (ZERO is not possible, all trigger outputs will return "Fail".) User "Operator" User "Supervisor" User "Integrator" When set to Standby, the device will start an internal calibration. When set to Meas, the device will start an external calibration. 96 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Function Flank/state: TL inactive active: active inactive: TL Plus inactive active: XL flow inactive active: active inactive: CAL Mach inactive active: Internal PROOF inactive active: External PROOF inactive active: START / STOP inactive active: impulse ZERO update inactive active: active inactive: Calibration leak open inactive active: active inactive: calibration leak on pulse inactive active: active inactive: Flow inactive active: active inactive: CAL machine inactive active: Internal CAL check inactive active: External CAL check inactive active: Start / Stop impulse inactive active: Mass 2 / Mass 4 inactive active: active inactive: Peakfind inactive active: Using the expansion module (LDS3000, LDS3000 AQ) | 9 Description The internal calibration leak is opened. The internal calibration leak is closed. The internal calibration leak opens or closes. The XL flow is turned on with the XL Adapter. The XL flow is turned off with the XL Adapter. Start machine factor calibration Start the internal Proof function. Start the external Proof function. Activate Start or Stop. Update or switch on ZERO No function Open calibration leak Close calibration leak Open calibration leak if closed, or close if open No function Switch flow of SL3000XL to 3000 sccm (XL adapter) Switch flow of SL3000XL to 300 sccm (XL adapter) Determining the machine factor or of the sniff factor Check calibration with internal calibration leak Check calibration with external calibration leak Switching between measuring operation and standby Activate mass 4 Activate mass 2 Start peak determination (AQ only) 9.2.2.2 Assigning the digital outputs of the I/O module The digital outputs PLC-OUT 1 ... The available functions can be assigned in any way necessary to the 8 I/O module. Every function can be inverted. Possible functions: see the following table LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 97 / 140 9 | Using the expansion module (LDS3000, LDS3000 AQ) INFICON Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > I/O module > Digital outputs > Configuration PLC Output Command 263 *CONFig:PLCOUTLINK:1 (2 ... 8) Functions, assignment of digital outputs: Function State: Open open: Trigger 1 closed: open: Trigger 2 closed: open: Trigger 3 closed: open: Trigger 4 closed: open: Ready closed: open: Warning closed: open: Error closed: open: CAL active closed: open: CAL request closed: Description always open Value exceeded leak rate threshold Trigger 1 Value fell below leak rate threshold Trigger 1 Value exceeded leak rate threshold Trigger 2 Value fell below leak rate threshold Trigger 2 Value exceeded leak rate threshold Trigger 3 Value fell below leak rate threshold Trigger 3 Value exceeded leak rate threshold Trigger 4 Value fell below leak rate threshold Trigger 4 Emission switched on, calibration process inactive, no error Emission switched off or calibration process active or error Warning no warning Error no error Device is to be calibrated. Device is not to be calibrated. and no external calibration: Calibration request (with temperature change from 5 °C or 30 minutes after the start-up or if default rotation speed was changed) closed: open: Run up closed: open: ZERO active closed: open: Emission on closed: open: and external calibration or "CAL check": Request "Open or close external calibration leak" no request Run up no run-up ZERO switched on ZERO switched off Emission switched on Emission switched off 98 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Function State: Measuring closed: open: Standby closed: open: SNIF Error or warning Gas ballast Calibration leak open CAL stable closed: open: closed: open: closed: open: closed: open: closed: open: Cathode 2 closed: open: Using the expansion module (LDS3000, LDS3000 AQ) | 9 Description Measuring (ZERO is possible, all trigger outputs switch depending on the leak rate.) Standby or emission disabled (ZERO is not possible, all trigger outputs will return "Leak rate threshold value exceeded".) Standby (ZERO is not possible, all trigger outputs will return "Leak rate threshold value exceeded".) Measuring (ZERO is possible, all trigger outputs switch depending on the leak rate.) SNIF VAC Error or warning No error or warning Gas ballast is active Gas ballast is inactive calibration leak is active calibration leak is inactive Calibration completed with calibration leak (see "Time and general preferences [} 46]") Assignment not stable or calibration is inactive Cathode 2 is active Cathode 1 is active 9.3 Settings for bus module BM1000 Address of bus module Setting the bus module address. (Node address with Profibus, MACID with DeviceNet) 0 ... 255 Control unit LD protocol ASCII protocol Settings > Set up > Interfaces > Bus module > Address 326 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 99 / 140 10 | Warning and error messages (LDS3000, LDS3000 AQ) INFICON 10 Warning and error messages (LDS3000, Error messages Warnings LDS3000 AQ) The instrument is equipped with extensive self-diagnostic functions. Errors are events that the device cannot correct itself and that force interruption of its operation. The error message consists of a number and a descriptive text. After you have removed the cause of the error, start operation again with the restart key. Warnings warn of instrument modes that can impair the accuracy of measurements. Operation of the device is not interrupted. Confirm acknowledgment of the warning with the OK key or the right key on the sniffer handle. The following table displays all the warnings and error messages. It lists possible causes for the malfunction and instructions on how to eliminate these. Please note that work marked with an asterisk must be carried out only by service staff that is authorized by INFICON. Warning Error message (Wrn) LDS3000 Error (Err) Error number Limit values Cause LDS1000 Binary or Protocol ASCII protocol compatibilit y mode LDS1000/ LDS2010 1xx system error (RAM, ROM, EEPROM, clock, ...) Wrn102 Timeout EEPROM MSB 84 43 Box (Parameter number) EEPROM on IF board or MSB defective Wrn104 An EEPROM parameter is 84 43 initializing Following software update or EEPROM defective Wrn106 EEPROM parameter 84 43 initializing Following software update or EEPROM defective Wrn110 Clock not set 16 16 Jumper for clock not set, battery drained, clock defective Wrn122 No response from the BUS 99 99 module Connection to BUS module interrupted 100 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Warning and error messages (LDS3000, LDS3000 AQ) | 10 Warning Error message (Wrn) LDS3000 Error (Err) Error number Limit values Cause LDS1000 Binary or Protocol ASCII protocol compatibilit y mode LDS1000/ LDS2010 Wrn123 Unsupported configuration 99 99 INFICON from BM1000 The selected configuration is not supported by the connected INFICON BM1000-fieldbus type. Wrn125 I/O module not connected 99 99 Connection to I/O module interrupted Wrn127 Wrong bootloader version 99 99 Boot loader not compatible with application Err129 Incorrect device (EEPROM) 99 99 EEPROM does not contain any compatible data Err130 Sniffer not connected 99 99 The sniffer line is not electrical connected. See also "Setting capillary surveillance [} 63]". Wrn132 SL3000 not supported Only the SL3000XL may be used with the XL Sniffer Adapter Wrn150 Pressure sensor 2 is not connected Connecting pressure sensor PSG500 to a FINE connection. Wrn153 The version of the CU1000 software is outdated Update of CU1000 software recommended Wrn156 Wrong ID AQ mode Wrong ID AQ mode 2xx operating voltage error Wrn201 U24_MSB too low 24 120 21.6V 24V power supply pack Wrn202 U24_MSB too high 24 120 26.4V 24V power supply pack Wrn203 24V_PWR12 voltage out of 24 120 20V Short circuit at valve 1 (calibrated range (TL_valve/GB_valve) 30V leak) or valve 2 (gas ballast) Wrn204 24V_PWR34 voltage out of 24 120 20V Short circuit at valve 3 or valve 4 range 30V (valve 3/4) Wrn205 24V_PWR56 voltage out of 24 120 20V Short circuit at valve 5 (sniff) or range (Sniff_valve/valve6) 30V valve 6 Wrn221 Internal voltage 24V_RC 24 120 20V Short circuit 24V at the control unit voltage out of range 30V output LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 101 / 140 https://manual-hub.com/ 10 | Warning and error messages (LDS3000, LDS3000 AQ) INFICON Warning Error message (Wrn) LDS3000 Error (Err) Error number Limit values Cause LDS1000 Binary or Protocol ASCII protocol compatibilit y mode LDS1000/ LDS2010 Wrn222 Internal voltage 24V_IO 24 120 20V Short circuit 24V at IO output voltage out of range 30V Wrn223 Internal voltage 24V_TMP 24 120 20V Short circuit 24V of the TMP voltage out of range 30V Wrn224 Internal voltage 24V_1 24 120 20V Short circuit 24V (Pirani) voltage out of range 30V Pressure sensor PSG500 (1,2,3), sniffer line Wrn240 Voltage +15V out of range 24 120 +15V too low, IF board or MSB defective Wrn241 Voltage -15V out of range 24 120 -15V too low, short circuit at preamplifier, IF board or MSB defective Err242 +15V or -15V voltage 24 120 shorted +15V or -15V too low, short circuit at preamplifier, IF board or MSB defective Wrn250 REF5V voltage out of 24 120 range 4.5V 5.5V +15V or 5V too low, short circuit at preamplifier, IF board or MSB defective Err252 REF5V voltage shorted 24 120 +15V or REF5V too low, short circuit at preamplifier, IF board or MSB defective 3xx detection system (offset preamplifier, preamplifier test, emission, cathode test) Wrn300 Anode voltage too low 41 132 7V < the setpoint Short circuit anode voltage, pressure in mass spectrometer too high, IF board, MSB or ion source defective Wrn301 Anode voltage too high 40 131 7V > the setpoint MSB defective Wrn302 Suppressor voltage too low 39 130 297V Short circuit suppressor, IF board or MSB defective Wrn303 Suppressor voltage too 38 129 high 363V MSB defective 102 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Warning and error messages (LDS3000, LDS3000 AQ) | 10 Warning Error message (Wrn) LDS3000 Error (Err) Error number Limit values Cause LDS1000 Binary or Protocol ASCII protocol compatibilit y mode LDS1000/ LDS2010 Wrn304 Anode-cathode voltage too 36 127 40V Short circuit anode-cathode, IF low board or MSB defective Wrn305 Anode-cathode voltage too 35 126 high 140V MSB defective Err306 Anode voltage faulty 36 127 40 V deviation from the default value The anode voltage does not match the default value or the set value is outside the allowable setting range. Wrn310 Cathode 1 is defective 45 136 Cathode defective, line to cathode interrupted, IF board or MSB defective Wrn311 Cathode 2 is defective 46 137 Cathode defective, line to cathode interrupted, IF board or MSB defective Err312 Cathode defective 47 138 Cathode defective, line to cathode interrupted, IF board or MSB defective Wrn332 System helium contaminated Leak rate too negative (e.g., below - 0.15 * Trigger 1). The reaction time of the warning can be adjusted. See "Adjust "Zero time factor AQ" [} 84]" Wrn334 Sudden increase in leak rate Gross leak Err340 Emission error 44 135 < 90% of the target value Emission was stable previously, pressure probably too high, message after 15s > 110% of the target value Wrn342 Cathode not connected 47 138 Both cathodes defective during self-testing after switch on or plug not connected LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 103 / 140 https://manual-hub.com/ 10 | Warning and error messages (LDS3000, LDS3000 AQ) INFICON Warning Error message (Wrn) LDS3000 Error (Err) Error number Limit values Cause LDS1000 Binary or Protocol ASCII protocol compatibilit y mode LDS1000/ LDS2010 Wrn350 Suppressor not connected 39 130 Supressor cable is not plugged in or defective during the self-test after switching on Wrn352 Preamplifier not connected Preamplifier defective, cable not plugged in Err358 Preamplifier oscillates between 2 ranges Signal varies too much (see command 1120) Preamplifier defective Wrn359 Overdriven preamplifier 31 123 Signal too large preamplifier defective Wrn360 Preamplifier output too low 31 123 <-70 mV at Poor ion source or contaminated 500 G mass spectrometer Wrn361 Preamplifier offset too high 31 123 >+/-50 mV Preamplifier defective at 500 G, >+/-10 mV at 15 G, <+/-10 mV at 470 M, <+/-9 mV at 13 M Wrn362 Preamplifier range error 31 123 Preamplifier or MSB box defective Wrn390 500 G outside the range 31 123 450 G 550 G Preamplifier defective, error at the suppressor, IF board or MSB defective 4xx TMP fault (also temperature) Err400 TMP fault number 49 15 Wrn401 TMP warning number Err402 No communication with 49 15 TMP Cable to TMP / TMP defective, IF board or MSB defective Err403 TMP rotation speed too 53 142 low < 95% of the target value Pressure too high, TMP defective 104 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Warning and error messages (LDS3000, LDS3000 AQ) | 10 Warning Error message (Wrn) LDS3000 Error (Err) Error number Limit values Cause LDS1000 Binary or Protocol ASCII protocol compatibilit y mode LDS1000/ LDS2010 Err404 TMP current consumption 49 2 3A too high Err405 No TMP run-up time 60 61 5 min. Pressure too high, TMP faulty Err410 TMP temperature too high 49 2 61°C Cooling failed, check MSB module operating conditions Wrn411 High TMP temperature 49 2 60°C Cooling failed, check MSB module operating conditions Err420 TMP voltage too high 49 2 Power supply defective, TMP defective Wrn421 TMP voltage too low Cable cross-section 24 V supply for MSB modules too low, output current 24-V power supply too low (I <10 A), power supply defective, TMP defective Err422 TMP no run-up time 49 2 8 min. TMP foreline pressure too high, VV pump final pressure too high, leakage high vacuum system, flood valve not close, TMP bearing damage, TMP flawed Err423 TMP pressure rise 49 2 Inrush of air, flood valve defective or incorrectly dimensioned 5xx Pressure and flow errors Wrn500 Pressure sensor not connected 58 144 Wrn502 Pressure sensor 2 not connected Wrn520 Pressure too high 73 148 Wrn521 Pressure rise, anode 73 148 voltage collapse 0.5V Pressure sensor PSG500 P1 not connected, IF board or MSB defective Pressure sensor PSG500 P2 not connected, IF board or MSB defective. 18 mbar Pressure p1 too high < Setpoint Pressure p1 too high, message - 20V after 1.4s LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 105 / 140 10 | Warning and error messages (LDS3000, LDS3000 AQ) Wrn522 Pressure rise, emission 73 148 collapsed Wrn540 Pressure too low, Sniffer 63 62 blocked Err541 Sniffer blocked (p1) 62 146 Wrn542 Sniffer broken 64 147 Wrn550 Pressure too low, XL Sniffer blocked Wrn552 XL Sniffer broken Wrn554 XL Sniffer P2 too small 63 62 Wrn556 Throttle added Err557 Throttle blocked 6xx Calibration errors Wrn600 Calibration factor too low 81 153 Wrn601 Calibration factor too high 81 153 Wrn602 KalFaktor lower than last 81 153 calibration Wrn603 KalFaktor higher than last 81 153 calibration Wrn604 Int. Cal. not possible, lack 81 153 of calibration leak control Wrn605 Difference during calibration too small INFICON < 90% of the target value Emission was stable previously, pressure p1 too high, message after 5s > 110% of the target value Sniffer flow Sniffer clogged, sniffer valve warning defective,filter clogged parameter Sniffer blocked, sniffer valve defective (pressure lower than half of the configured warning value), filter clogged Sniffer broken Clean or replace the high flow capillary of the sniffer line. Replace dirty filter. Replace the high flow capillary of the sniffer line. Pressure on SL3000XL too low in low flow. Pressure too low (p1) Pressure too low (p1) 0.01 Calibration leak or machine factor set incorrectly 10000 Calibrated leak or machine factor set incorrectly, partial flow factor too high < 50% of the old value Calibrated leak, machine factor or partial flow factor has changed > 200% of the old value Calibrated leak, machine factor or partial flow factor has changed calibration leak is not enabled Calibration leak defective or signal too weak. 106 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Warning and error messages (LDS3000, LDS3000 AQ) | 10 Wrn610 Machine factor too low 81 153 Wrn611 Machine factor too high 81 153 Wrn612 Machine factor lower than 81 153 last time Wrn613 Machine factor greater 81 153 than last time Wrn625 Int. calibration leak not set 0 0 Wrn626 Ext. Calibration leak not 0 0 set Wrn630 Calibration request 0 0 Wrn650 Calibration is not recommended in the first 20 minutes Wrn670 Calibration error 81 153 Wrn671 Peak not found 81 153 Wrn680 Deviation to the calibration 0 0 detected 7xx temperature errors (preamplifier, electronics) Wrn700 Preamplifier temp. too low 33 60 Wrn702 Preamplifier temp. too high 32 124 Wrn710 MSB temperature too high 54 44 1.00E-04 Machine factor adjustment inaccurate 1.00E+04 Machine factor adjustment inaccurate, partial flow factor too high < 50% of the old value Partial flow factor has changed > 200% of the old value Partial flow factor has changed Leak rate of int. calibration leak is still set to factory setting Leak rate of calibration leak is still set to factory setting Among other things when changing the speed specification or preamplifier temperature by 5°C since the last calibration A calibration during the first 20 minutes after starting (warm-up phase) the leak detector is not recommended. The warning message can be turned off: - LD protocol: Bef 429 ASCII *CONFig:CALWarn (ON,OFF) Since a problem has occurred during the calibration, you have to recalibrate. The signal was too restless during the peak search. Calibration has been aborted. The verification of calibration has shown that you should recalibrate. 2°C 60°C 55°C Temperature too low Temperature too high Temperature too high LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 107 / 140 10 | Warning and error messages (LDS3000, LDS3000 AQ) Err711 Max. MSB temperature 54 44 exceeded 8xx not used 9xx maintenance messages (e.g. TMP) Wrn901 Maintenance bearing/ 99 99 lubricant Wrn910 Maintenance diaphragm 99 99 pump 65°C INFICON Temperature too high 3 years TMP maintenance necessary 8000 hour maintenance of diaphragm pump required 10.1 Illustration of error codes with the help of the status LEDs Any errors or warnings occurring in the MSB box will be indicated both as an error code by the control unit and as a blink code by the Status LED. The blink code is preceded by a long white signal. This is followed by an error or warning number. An error number is indicated by means of red signals, while a warning number is displayed using orange signals (the orange signals have a strong green tinge, however): -> Blink code start: long white signal · Hundreds digit: 0 ... 9 red signals for error or 0 ... 9 orange signals for warnings · Break: blue signal · Tens digit: 0 ... 9 red signals for error or 0 ... 9 orange signals for warnings · Break: blue signal · Units digit: 0 ... 9 red signals for error or 0 ... 9 orange signals for warnings The blink code is repeated cyclically. For example: The pressure is too high. -> Error code = Warning 520 -> Blink code of the status LED: White (long), 5·orange, blue, 2·orange, blue 108 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operating CU1000 (optional) | 11 11 Operating CU1000 (optional) 11.1 Touchscreen elements 11.1.1 Measurement display elements Fig. 19: Measurement display 1 Keyboard lock 4 Operator 7 Tracer gas 10 Graphic representation of the leak rate and the peak hold function 13 Button "Favorite 2" 16 Value axis 2 Communication status 5 ZERO 8 Operation mode 11 Time axis 14 Button "Favorite 1" 17 Value axis 3 Data recording 6 Message 9 Leak rate with peak hold function 12 Foreline pressure 15 Menu LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 109 / 140 https://manual-hub.com/ 11 | Operating CU1000 (optional) INFICON 1 - Keyboard lock The control unit is locked or unlocked by pressing and holding the icon for the keyboard lock. 2 - Icon for the communication status · Icon connected: The device communicates with the mass spectrometer module. · Icon disconnected: The device does not communicate with the mass spectrometer module. Establish communication: 1 Reset control unit. 2 Checking the status of the mass spectrometer module. 3 Check cable connection. 3 - Icon for the data recording The measurement is recorded. 4 - Ser The registered operator is shown abbreviated. Display Meaning Ope Operator Sup Supervisor Int Integrator Ser Service For more information, see "Operator types and authorizations [} 116]". 5 - Zero Background suppression is active. 6 - Caution icon Active warnings are stored in the unit. The active warnings can be displayed via the menu "Info > History > Active warnings". 7 - Tracer gas Set tracer gas and tracer gas concentration percentage. Display He H2 Meaning Helium (4He) Hydrogen 110 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operating CU1000 (optional) | 11 Display M3 8 - Operation mode Configured operation mode Display VA SNIF LOW FLOW HIGH FLOW Standby Meaning E.g. H-D, 3He or H3 Operation mode Vacuum Sniffing XL sniffer adapter in LOW FLOW XL sniffer adapter in HIGH FLOW XL sniffer adapter in HIGH FLOW on standby 9 - Leak rate Current measurement for the leak rate. 10 - Graph Graphic display of the leak rate Q(t). 11 - Leak rate Time axis of the leak rate Q(t). 12 - Primary vacuum pressure (not with operation mode XL Sniffer Adapter) Backing pressure p1. 13 - Button "Favorite 2" You can assign preferred parameters to this button, see "Touch screen settings [} 113]". In the figure in "Measurement display elements [} 109]", the "Favorite 2" button is assigned the function "Start / Stop", for example. 14 - Button "Favorite 1" You can assign preferred parameters to this button, see "Touch screen settings [} 113]". In the figure in "Measurement display elements [} 109]", the button "Favorite 1" is assigned with the function "ZERO", for example. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 111 / 140 11 | Operating CU1000 (optional) INFICON 15 - Icon for the menu All functions and parameters of the control unit can be accessed using the "Menu" key . A full display of the menu of the menu is included as a file on the USB flash drive supplied with the LDS3000. 16 - Value axis Value axis of the leak rate Q(t). 17 - Device of measurement Device of measurement of the value axis. 11.2 Elements of the error and warning display WARNING Displayed message with details Detailed display further active errors or warnings (if present) Number: 500 Pressure sensor not connected (Value = 4.23E-2) Further errors or warnings 501 502 To the display further active errors or warnings (if present) Information to cause or remedy to the message shown above To confirm all messages You will find an overview of possible errors and warnings in the operating instructions of the LDS3000 (mass spectrometer module), chapter "Warning and error messages". 112 / 140 11.3 Settings and functions Settings and functions of the control unit are explained in the following. You will find the settings and functions of the mass spectrometer module LDS3000 you can set using the control unit in the operating instructions of the mass spectrometer module. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operating CU1000 (optional) | 11 11.3.1 Touch screen settings The touch screen grays out the parameters if · the user is not authorized to modify the values, · the older version of the software run by mass spectrometer module LDS3000 does not support this parameter. Scaling of the Q(t)axis Linear or logarithmic Lin. Log. Control unit Display > Q(t) axis > Linear or logarithmic Number of decades with logarithmic view 1 2 3 4 Control unit Display > Q(t) axis > Decades Autoscale Off (When "Off", you can change the appearance by pressing the intersection of the coordinate axes, then flicking and releasing the desired axis with your finger, or by pressing and releasing the end of the desired co-ordinate axis) On Control unit Display > Q(t) axis > Auto scale Scaling of the time axis Scaling of the time axis 15 s 30 s 60 s 120 s 240 s 480 s 960 s Display units Control unit Device of pressure Mbar Pa Display > Time axis > Time axis scale Atm Torr Control unit Display > Units (display) > Pressure unit LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 113 / 140 11 | Operating CU1000 (optional) Measured value display Type of graphic display Diagram Bar graph INFICON Control unit Display > Measurement view > Measurement view mode Numeric representation of the measurements Off On Display brightness Control unit Display brightness 20 ... 100% Display > Measurement view > Show value Trigger display on the touch screen Control unit Display > Brightness > Display brightness Selection of the trigger (leak rate threshold) displayed on the touch screen. 1 2 3 4 Assigning favorite buttons Control unit Settings > Trigger > Trigger sel. The favorite buttons offer direct access to individual functions. They can be assigned with access control "Supervisor" or higher by the user. Favorite 1: Middle button (see the figure in "Measurement display elements [} 109]"). Favorite 2: Right button Favorite 3: Button on the bottom right of the main menu. CAL Volume ZERO (at AQ instead of ZERO: ZERO AQ) Measurement view Start/Stop Display settings - - - (= without function) Check CAL Flow control (At AQ additionally: AQ Wizard) Display of messages on the touch screen Control unit Settings > Favorites > Favorite 1 (2, 3) Warnings and error messages can be displayed on the touch screen. Off 114 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON On Operating CU1000 (optional) | 11 Show calibration note Control unit Settings > Set up > Control unit > Messages > Show warnings Suppress or allow the calibration note with the following content: · Leak rate of the applied calibration leak · No calibration should take place during the first 20 mins OFF (suppressed) ON (allowed) Show calibration request Control unit Settings > Set up > Control unit > Messages > Show calibration notes The calibration request can be allowed or suppressed. OFF (suppressed) ON (allowed) Display of messages on the touch screen Control unit Settings > Set up > Control unit > Messages > Show calibration request Warnings and error messages can be displayed on the touch screen. Off On Control unit Settings > Set up > Control unit > Messages > Show warnings Setting the audio alarm Volume of the headphones or active speaker --- No sound Proportional: The frequency of the audible signal is proportional to the bar graph display or diagram height. The frequency range is 300 Hz to 3300 Hz. Setpoint: The pitch is proportional to the leak rate. The signal sounds if the leak rate exceeds the selected trigger value. Pinpoint: The sound of the acoustic signal changes its frequency within a specific range of leak rates. Range: A decade below the selected trigger threshold up to one decade above. The sound keeps at a constant low and a constant high frequency below and above this range, respectively. Trigger: If the selected trigger threshold is exceeded, a two-pitch signal sounds. Control unit Settings > Set up > Control unit > Audio > Audio alarm mode LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 115 / 140 https://manual-hub.com/ 11 | Operating CU1000 (optional) INFICON Behavior with warnings or error messages: If the touch screen shows a warning or an error, then a two-pitch signal sounds simultaneously. Automatic switch off of the touch screen The touch screen can be switched off automatically after a specific time without any operation to save energy. 30 s 1 min 2 min 5 min 10 min 30 min 1 h (=never) Control unit Settings > Set up > Control unit > Energy > Display off after 11.3.2 Operator types and authorizations There are four different operator types that are distinguished by different authorizations. The integrator is registered ex works. Additional operators can be registered. The following table shows options for individual operator types to register new operator types. Operator registration Viewer - Operator Operator Viewer Supervisor Supervisor Operator Viewer Integrator Integrator Supervisor Operator Viewer For the types "Integrator", "Supervisor" and "Operator", a four-digit PIN must be assigned during registration (0000 ... 9999). "0000" is assigned to all operators ex works. If an operator keeps the pin "0000", this operator will always be registered is during the start up of the system (without PIN query). A key-operated switch can be used in addition to a PIN if an I/O module is connected. The key-operated switch is connected to the I/O module via three digital inputs (see operating instructions of the LDS3000). The following table shows the authorizations of individual operator types. Function Viewer Changing - parameters Changing the display of error information Operator x x Supervisor x x Integrator x x 116 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operating CU1000 (optional) | 11 Load parameters Save parameters Display error information Parameter list display and change Display list of parameter change authorizations Function Viewer Calling up - factory settings Entering - maintenance history Operator - - Supervisor - - The menu "Service" is accessible only to INFICON service staff. Integrator x x The saved/backed-up parameters of control unit CU1000 and of the mass spectrometer module can be loaded from a USB stick. Control unit Function > Data > Parameters > Load The parameters of control unit CU1000 and of the mass spectrometer module can be saved to a USB flash drive. Control unit Function > Data > Parameters > Save The type of error information can be set differently for each operator type. The Integrator always receives the complete information. Number: Message number text: Brief description Info: Expanded message information · Only numbers · Number and text · Number, text and info Control unit Function > Data > Parameter > Error info Viewer (Operator, Supervisor) Parameters can be displayed as an alphabetical list with names and current value s. Each list entry is a button which, when pressed, will open the parameter's set-up dialog box. Control unit List > Parameters list or: Functions > Data > Parameters > List Parameters can be displayed as an alphabetical list with names and current change authorizations. Each list entry is a button which, when pressed, will change access control. Changes are possible in accordance with the hierarchy of the operator. Control unit Functions > Data > Parameters > Parameter Access 11.3.2.1 Logging out the operator The operator activates access level "Viewer" to log out. "Access Ctrl > Viewer" LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 117 / 140 11 | Operating CU1000 (optional) 11.3.3 Functions INFICON 11.3.3.1 Resetting the settings Mass spectrometer module The settings of the mass spectrometer module can be reset to factory settings. Control unit Functions > Data > Parameters > Reset > MSB settings Access controls The authorization for changing parameters can be reset to factory setting. Control unit Functions > Data > Parameters > Reset > Param. access control Control unit The control unit settings can be reset to factory settings. Control unit Functions > Data > Parameters > Reset > Control unit settings 11.3.3.2 Recording data The data is saved as a TXT file. Each TXT file contains the following information: · Date created · Software version · Serial number · Start time · Time stamp (measurement indicates offset in seconds in relation to start time) · File name · Time stamp (offset in seconds in relation to start time) · Leak rate (expressed in selected unit) · Pressure p1 (expressed in selected unit) · Device status Switching on/off Switching data recording on/off · Off · ON Control unit Functions > Data > Recorder > Settings > Data recording Record interval Time interval between data recordings · 100 ms, 200 ms, 500 ms, 1 s, 2 s, 5 s Control unit Functions > Data > Recorder > Settings > Record interval 118 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Memory location Copy data Deleting data Operating CU1000 (optional) | 11 The data stored in the control unit can be saved to a USB stick. The memory in the control unit is limited to the recording of a 24-hour measurement. · USB flash drive · Control unit Control unit Functions > Data > Recorder > Settings > Storage location The data stored in the control unit can be saved to a USB stick. The memory in the control unit is limited to the recording of a 24-hour measurement. · USB flash drive · Control unit Control unit Functions > Data > Recorder > Copy > Copy files The data stored in the control unit can be saved to a USB stick. The memory in the control unit is limited to the recording of a 24-hour measurement. · USB flash drive · Control unit Control unit Functions > Data > Recorder > Delete > Delete files 11.3.3.3 Calling up information Measurement values Temperature Energy and operating hours History Control unit Different information and states of the system can be called up with the info menu. · Preamplifier · Environment · TMP · Electronic · TMP · Energy values: Information on consumption values · Operation hours: Display for operating hours · Supply voltages: Information on internal supply voltages · Power supply: Information on the supply voltages of the components · Error, error history / warning history · Calibration, calibration history · TMP error, TMP history · Warnings, active warnings · Maintenance, maintenance history · Version control unit: Information on the software version LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 119 / 140 11 | Operating CU1000 (optional) INFICON Mass spectrometer module Interfaces · Memory: Information on available memory · Settings: Control unit settings. · Serial port wired: Information on the communication connection · Data exchange: Information on the data exchange between mass spectrometer module and the control unit · MSB (1): Information on the software version · MSB (2): Information on operating parameters · TMP controller (1): Information on the turbo molecular pump · TMP controller (2): Information on the turbo molecular pump, continued · Ion source: Information on the ion source used · Preamplifier: Information on the preamplifier · Preamplifier test: Information on the preamplifier test. · I/O module (1): Information on the software version, inputs and outputs · I/O module (2): Visualized information to the digital inputs 120 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operating CU1000 (optional) | 11 Fig. 20: I/O module (2): Visualized information to the digital inputs 1 Input signal condition 3 Status of the function (active or inactive) 2 Configured function (INV = Function is inverted) · I/O module (3): Visualized information to the digital outputs LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 121 / 140 11 | Operating CU1000 (optional) INFICON Fig. 21: Visualized information to the digital outputs 1 Configured function (INV = Function is inverted) 3 Status of the function (active or inactive) 2 Output signal condition · Bus module (1): Information on the bus module · Bus module (2): Information on the bus module, continued 122 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operating CU1000 (optional) | 11 11.3.4 Updating the software Software updates from INFICON are installed with the aid of a USB flash drive. The update function of the device can be found under "Functions > Data > Update". An update is possible, · if one or several updates are available on the USB flash drive, but only one update per type at most (control unit, MSB box, I/O module), · if these parts are also connected free of disturbances and have an update function. The corresponding buttons in the update menu such as "Control Unit", "MSB Box", and "I/O Module" are active and can be activated individually. NOTICE Aborted connection Data loss due to an aborted connection Do not switch off the device and do not remove the USB flash drive while the software is being updated! Switch the device off and back on after a software update has taken place. 11.3.4.1 Updating the software of the control unit The software is included in two files named Handset_IFC_Vx.xx.xx.exe and Handset_IFC_Vx.xx.xx.key. 1 Copy the file into the main directory of a USB flash drive. 2 Connect the USB flash drive to the USB port on the device. 3 Select: "Functions > Data > Update > Control unit". ð Do not switch off the device and do not remove the USB flash drive while the software is being updated! 4 Check the version information. 5 Select the "Start" button to start the update. Do not switch off the device and do not remove the USB flash drive while the software is being updated! 6 Follow the instructions on the touchscreen and wait until the update is complete. 11.3.4.2 Checking and updating the software version of the MSB box The current software is available from the Inficon support. The functions of the XL Sniffer adapter set are taken into consideration in system software version 2.11 or higher. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 123 / 140 11 | Operating CU1000 (optional) INFICON 1 Copy the file Flash_LDS3000_MSB_Vxx.xx.xxx.bin into the main directory of a USB flash drive. 2 Connect the USB flash drive to the USB port on the device. 3 Select: "Functions > Data > Update > MSB". ð The display shows information on the current and the new software version as well as on the boot loader. 4 Check the version information. ð Select the "Start" button to start the update. ð Do not switch off the device and do not remove the USB flash drive while the software is being updated! Do not switch off the device and do not remove the USB flash drive while the software is being updated! 5 Follow the instructions on the touchscreen and wait until the update is complete. 6 If the system displays warning 104 or 106, confirm with "C". 11.3.4.3 Updating the software of the I/O module The software of the I/O module can be updated from the control unit if the mass spectrometer module has the software version "MS module 1.02" or higher. 1 Copy the file Flash_LDS3000_IO_Vxx.xx.xxx.bin into the main directory of a USB flash drive. 2 Connect the USB flash drive to the USB port on the device. 3 Select: "Functions > Data > Update > I/O module" ð The display shows information on the current and the new software as well as on the current boot loader. 4 Check the version information. 5 Select the "Start" button to start the update. ð Do not switch off the device and do not remove the USB flash drive while the software is being updated! 6 Follow the instructions on the touchscreen and wait until the update is complete. ð The following tips are shown after selecting the "Start" button on the touchscreen: · Connect and switch on the IO1000. · Activate boot mode (switch DIP S2.3 on and off once). · When the STATUS LED flashes green, press OK. 124 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Operating CU1000 (optional) | 11 Fig. 22: DIP switch on the I/O module LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 125 / 140 12 | Maintenance INFICON 12 Maintenance The mass spectrometer module is a leak testing unit that is intended for industrial applications. The device is composed of parts and assemblies that are, for the most part, low maintenance. Servicing the mass spectrometer module merely requires that you change the oil reservoir of the turbo molecular pump and check the fan on the turbo molecular pump. We recommend that you sign a service agreement with INFICON or one of INFICON's authorized service partners. 12.1 Maintenance at INFICON WARNING Danger to health Contaminated devices could endanger the health of INFICON employees. Fill in the declaration of contamination completely. Attach the declaration of contamination to the outside of the packaging. The declaration of contamination is a legal requirement and serves to protect our employees. INFICON sends devices which are sent without a completed declaration of contamination back to the sender. See "Declaration of Contamination [} 136]". 12.2 General maintenance information The maintenance work that needs to be performed on the mass spectrometer module is grouped into three service levels: · Service level I: Customer without any technical training · Service level II: Customer with technical and INFICON training · Service level III: INFICON Service DANGER Life threatening hazard from electric shock High voltages are inside the device. Touching parts where electrical voltage is present can result in death. Disconnect the device from the power supply prior to any maintenance work. 126 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Maintenance | 12 NOTICE Material damage from pollution The mass spectrometer module is a precision measurement device. Even little pollution can already damage the device. Make sure that the working environment is clean and you use clean tools whenever performing any maintenance work. 12.3 Maintenance plan If the maintenance work of the maintenance plan is not carried out, the warranty for the mass spectrometer module is void. Maintenance work Operating hours Duration 24 8000 1 years 16000 24000 36000 2 years 3 years Service level Turbomolecular pump Changing the oil wick cartridge, spare part no.: 200003801 Replace bearing (recommended) Clean fan and check for 1 proper operation X2 II and III X2 III I and II Accessories Clean sniffer valve X III Calibrate internal calibration X2 III leak Internal Perform internal calibration X1 I calibration External Perform external calibration X1 I calibration Leak test MS Perform helium leak test on X III module MS module X: after operating hours or time period X1: after operating hours X2: by duration 1: depending on environment and use LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 127 / 140 https://manual-hub.com/ 12 | Maintenance 12.4 Maintenance work INFICON 12.4.1 Change oil reservoir of turbo molecular pump Spare part kit oil reservoir P/N: 200003801 Scope of delivery: Oil reservoir with small O-ring (1 piece), Porex rods (8 pieces), O-ring for cover (1 piece) Face spanner P/N: 551-200 The turbo molecular pump is filled with an operating fluid for the lubrication of the ball bearings. The oil reservoir must be replaced every 2 years at the latest. With extreme strain of the pump or in unclean processes, the lubricant reservoir must be replaced at shorter intervals. The cover of the oil reservoir can be unscrewed only when the turbo molecular pump is flooded. Flood the turbo molecular pump 1 Shut down mass spectrometer module, see "Decommissioning the measuring instrument [} 133]". 2 Wait until turbo molecular pump is drained (at least 1 min). 3 Disconnect 24 V power supply pack from MSB box. 4 Allow the turbo molecular pump to cool down if necessary. 5 Remove turbo molecular pump. 6 Open the ventilation screw (1) slowly. ð Turbo molecular pump is flooded until it reaches atmospheric pressure. 1 128 / 140 Fig. 23: Turbo molecular pump SplitFlow 80 1 Ventilating screw LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Maintenance | 12 Removing old oil wick cartridge WARNING Danger of poisoning due to harmful substances The oil wick cartridge and parts of the turbo molecular pump can be contaminated with toxic substances that are contained in the pumped media. Take suitable safety precautions. Decontaminate contaminated parts prior to any maintenance work. Dispose of old oil reservoirs in compliance with applicable regulations. NOTICE Damage to the turbo molecular pump due to loosening of screws To remove the oil reservoir, unscrew only the cover. Do not loosen any screws underneath the cover! Otherwise the pump will be irreparably damaged. ü Face spanner, P/N: 551-200 ü Two screwdrivers ü Mass spectrometer and turbo molecular pump flooded. 1 Unscrew the cover (1) using a face spanner. 2 Use two screwdrivers to lift out the oil reservoir (2). Do not loosen any screws! 1 2 1 Cover 2 Oil reservoir Exchange Porex rods NOTICE Material damage due to cleaning liquids Cleaning liquids can damage the unit. Do not use any cleaning liquids. Use a clean, lint-free cloth. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 129 / 140 12 | Maintenance INFICON ü Tweezers ü Porex rods 1 Pull out old Porex rods (1) (8 pieces) with tweezers. 2 Remove any contaminants found on the turbo molecular pump and the cover using a clean, lint-free cloth. 3 Insert new Porex rods (1) (8 pieces) with tweezers. 1 1 Porex rods Inserting a new oil reservoir NOTICE Material damage if o-ring is mounted improperly An improperly mounted o-ring can cause leaks. The device will experience malfunctions and become damaged. Carefully insert the O-ring of the cover. 130 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON 1 2 3 Maintenance | 12 4 1 Cover 2 Oil reservoir with O-ring 3 O-ring for cover 4 Ventilating screw ü Face spanner ü New O-ring for cover ü New oil reservoir ü The new oil reservoir contains a sufficient level of operating fluid. Do not fill in any more operating fluid. 1 Check the expiration date of the new oil reservoir (2). 2 Do not push the new oil reservoir (2) into the pump at full height, but only up to the O-ring of the oil reservoir. ð The new oil reservoir is correctly positioned by screwing in the cover (1). 3 Remove the old O-ring (3) from the cover. 4 Insert a new O-ring (3) for the cover. ð To prevent the threads from tilting, place the cover (1) on it and slowly turn it counterclockwise until the threaded ends of the cap and pump fit into each other. As soon as this is achieved, the cover will slightly sink back into the pump. This position allows the threads to mesh better. 5 Screw in the cover (1) with a face spanner without any effort. 6 Tighten the cover with a torque of 13 Nm +/-10%. 7 Hand-tighten the ventilation screw (4). 8 Install the turbo molecular pump. 9 Put the mass spectrometer module into operation. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) 131 / 140 https://manual-hub.com/ 12 | Maintenance INFICON Confirm maintenance work ü Control unit installed ü Access = Integrator Confirm maintenance work on control unit: "Access ctrl > Integrator > Maintenance > Maintenance work" 132 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON Decommissioning the measuring instrument | 13 13 Decommissioning the measuring instrument 13.1 Shutting down the leak detector 1 Switch off the leak detector on the power supply pack. 2 Wait until the turbo molecular pump has stopped running. 13.2 Disposing of the mass spectrometer module The operator can dispose of the device or it can be sent to INFICON. The device consists of materials that can be recycled. This option should be exercised to prevent waste and also to protect the environment. For disposal, always comply with local and regional environmental and safety regulations. 13.3 Returning the mass spectrometer module WARNING Danger due to harmful substances Contaminated devices could endanger the health. The contamination declaration serves to protect all persons who come into contact with the device. Fill in the declaration of contamination completely. 1 Please do not hesitate to contact the manufacturer and send a completed declaration of contamination before sending anything to us. ð You will then receive a return number. 2 Use the original packaging when returning. 3 Before sending the device, attach a copy of the completed contamination declaration. See Declaration of Contamination [} 136]. LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 133 / 140 14 | Appendix 14 Appendix 14.1 CE Declaration of Conformity INFICON 134 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON 14.2 Declaration of Incorporation Appendix | 14 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 135 / 140 14 | Appendix 14.3 Declaration of Contamination INFICON 136 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ INFICON 14.4 RoHS Appendix | 14 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ 137 / 140 14 | Appendix INFICON 138 / 140 LDS3000(AQ)-MSM-Operating-instructions-jiqa54en1-10-(1911) https://manual-hub.com/ https://manual-hub.com/ https://manual-hub.com/