CORE MORROW Piezo Nano Motion

P11 Piezo Nanopositioning Stage User Manual

Version: V1.0

This document describes the following products:

• P11.X100S
• P11.X100K
• P11.Z100S
• P11.Z100K
• P11.XY100S
• P11.XY100K
• P11.XZ100S
• P11.XZ100K
• P11.XYZ100S
• P11.XYZ100K

DECLARATION

Thank you for choosing CoreMorrow's products! This user manual is applicable to P11 series piezo nanopositioning stage. For your smooth and correct use of this product, please read this manual carefully before use. Please follow the instructions in the manual installation and use procedures. Improper operation may cause injury to the operator or damage to the product. Therefore, the entire installation and operation process should be completed by a professional with a certain foundation and understanding of the product principle, or under the guidance of a professional. If the product is disassembled or modified without permission, CoreMorrow will not be responsible for any consequences arising therefrom. It is illegal to change the product model and other false sales of CoreMorrow products. Users are advised to be vigilant. Once you find out or be deceived, contact CoreMorrow directly, CoreMorrow will crack down on illegal activities and prevent deception and economic losses. CoreMorrow will certainly investigate legal responsibility of the illegal subject and related parties. With the continuous development and innovation of technology, CoreMorrow will add the latest information to the manual as needed without notice. Please contact CoreMorrow if you need any information.

1. Introduction

1.1 Purpose and content

The manual is mainly for your smooth and correct use of piezo stage. The manual contains all necessary information for P11 series piezo stage. The manual describes the precautions during installation and use.

1.2 Symbol and meaning

• DANGER: Improper handling may cause injury to the operator.
• Attention: Improper handling can cause damage to the equipment.
• [No specific order required]
• 1. Please operate in order.

1.3 Expected reader

The manual default user has knowledge of piezo stages and controllers, and has a basis for its installation and use.

1.4 Manual lost replacement

If the manual is accidentally lost, please contact our customer service department, CoreMorrow will send you the latest version of user manual.

2. Safety Guide

CoreMorrow P11 piezo nanopositioning stage is designed with advanced technology and safety standards. For safety and proper use of the product, please pay attention to the following points when using:

⚠ Temperature change and pressure will charge the piezo stage. The piezo stage will remain charged for a period of time after being disconnected from the controller, so the operator should pay attention when using it:

• Do not disassemble the P11 piezo stage.
• Discharge the P11 piezo stage before installation; this can be achieved by connecting it to the controller.
• Do not pull out the controller during operation.
• Before using, please check whether the connecting wire of the product is in good condition, and whether the product and the controller are effectively protected from grounding. In case of danger, please strictly regulate the operation during operation, and do not touch it (up to 150V voltage) after power on.

⚠ In order to prevent damage to the product caused by improper operation, please pay attention to the following points when using:

• The P11 piezo stage should be used as much as possible in dust-free, oil-free, lubricant-free environments.
• Since the product adopts a flexible structure design, it is recommended that the load does not exceed the bearing capacity of the product. Pay attention to the torque when loading. Do not twist or tilt the load surface to avoid damage to the structure.
• Recommended voltage is 0~120V for long-term operation to extend lifetime.
• Do not disassemble the product to avoid product damage.
• Avoid stretching and bending the cable interface to prevent damage to the cable.
• Please use the dedicated cable provided by CoreMorrow to connect the piezo stage and piezo controller.
• Please do not use cable extension wires. If a longer cable is needed, please contact CoreMorrow.

3. Product Overview

3.1 Product Introduction

The P11 series piezo nanopositioning stage has the following advantages:

High performance piezo stack:

The P11 piezo stage is driven by a high-performance piezo stack. The piezo stage is fully insulated, so its performance and service life are far superior to those of conventional stages. The insulating layer effectively prevents the piezo stack from being damaged by moisture. The stability of the piezo stack can be ensured under extreme conditions. The piezo stage has the characteristics of no rebound and no wear.

Flexible hinge structure:

The P11 adopts a flexible hinge mechanism, which offers the advantages of no friction and high positioning accuracy. The flexible hinge is a component not affected by static and dynamic friction. It is based on the elastic deformation of solid material (such as steel) and has no rolling or sliding parts. With high stiffness and load-carrying capacity, the hinge guides are maintenance-free and wear-free, suitable for a wide range of temperatures without the need for lubricants.

SGS sensor:

The SGS sensor detects position information by expanding; they are fixed at appropriate positions in the transmission portion, and the displacement is measured. The P11 piezo stage can travel up to 100µm, realizing three-axes motion simultaneously. It utilizes a flexible hinge mechanism to ensure XYZ three-axes motion without coupling, offering no mechanical friction, fast response speed, and repeatable positioning accuracy. It can also be customized according to requirements, providing high flexibility and easy operation to meet different applications. The P11 is mainly used in biotechnology, interferometry, quality inspection, optical detection, nanopositioning, microscopy and imaging, image processing, and other fields, and has very good development prospects.

3.2 Product Features

• Quick response time.
• Closed-loop SGS sensor with high positioning accuracy.
• Mainly used for high frequency.

3.3 Motion direction

Figure 1 illustrates the motion direction for various P11 piezo nanopositioning stages:

• P11.X100: Motion along the X-axis (indicated by a red arrow).
• P11.Z100: Motion along the Z-axis (indicated by a blue arrow).
• P11.XY100: Motion along the X-axis (red arrow) and Y-axis (green arrow).
• P11.XZ100: Motion along the X-axis (red arrow) and Z-axis (blue arrow).
• P11.XYZ100: Motion along the X-axis (red arrow), Y-axis (green arrow), and Z-axis (blue arrow).

Connection Mark and Motion Direction

4. Operating environment

• Operating temperature: -20~80℃
• Environment: free of dust, clean, and non-corrosive substances.
• Relative humidity: <60%
• Recommended voltage between 0 and 120V for long-term and high-reliability operation.

5. Installation and operation

Before installation, first check the safety, such as whether the cable is damaged or broken, and whether the power supply has grounding protection.

5.1 Installation and connection

• Ensure that the installation plane is flat.
• Secure the piezo stage with M2.5 screws and tighten.
• Install the load and tighten properly to ensure positioning accuracy.
• Connect the cable to the corresponding interface of the controller according to the connector head.

Figure 2 shows the sensor and PZT connectors.

Figure 3 illustrates the P11 installation diagram, indicating the load connection hole (M3 Screw), the moving part, and the fixed mounting hole (M2.5 Screw).

5.2 Load

When installing the load, ensure that the load mass is less than the maximum load of the P11, and install the load as much as possible at the center of the moving surface. The correct placement of the load is shown in Figure 4.

For protection, a very high load is not recommended. If a higher load is used, please reduce the position center of the load's gravity. The error placement methods are shown in Figure 5 and Figure 6.

Figure 5 depicts an incorrect placement where the load center of gravity exceeds the stage, marked with a cross symbol [✖].

Figure 6 shows a forbidden placement where longer loads are added to the side of the piezo stage, which would cause serious damage to the product, also marked with a cross symbol [✖].

If the screws used for tightening and connecting are too long, they may not be installed correctly or some may leak out, potentially scratching the stage and affecting motion accuracy. If the screws are too short, the connection may not be compact and could loosen easily, damaging the internal structure of the stage.

CoreMorrow recommends using the connection method shown in Figure 7 (Correct connection), marked with a checkmark symbol [✔].

Please do not connect as shown in Figure 8 (Incorrect connection), marked with cross symbols [✖].

5.3 Operating

Please confirm the following information before starting the power supply:

• The P11 piezo nanopositioning stage has been grounded.
• The environment meets the requirements of the P11 working environment.
• The fixing screws must be tightened.

The above information is determined to perform controller-related operations:

1. Please carefully read the piezo controller user manual before operating, then start the controller.
2. Set the piezo controller to zero.
3. After checking for no abnormalities, input voltage values according to requirements (keyboard or analog control).
4. It can work normally within the rated voltage range of the piezo ceramic (0~120V, max not exceeding 150V).
5. Please set the piezo controller to zero after use.

Please do not touch the product during operation to avoid affecting the piezo stage performance or causing damage to the piezo stage.

The resolution of piezo ceramic is not limited; it depends on the performance of the piezo controller. To better achieve motion accuracy, it is recommended to use a CoreMorrow piezo controller. For the operation of the piezo controller, please refer to the piezo controller user manual.

Note:

• Please do not remove the grounding protection during operation. If it needs to be temporarily removed, reconnect the grounding protection before starting again.
• Drive voltage should not exceed 150V.
• If abnormal noise or oscillation occurs during operation, immediately turn off the power and check parameter settings.

6. Transportation and inspection

6.1 Transportation

The piezo stage is packed in a carton. Transportation is carried out under the condition of packaging. This product can be transported by various means of transportation under normal conditions. During transportation, it should avoid direct rain and snow, avoid contact with corrosive substances, and avoid strong collision. Try to avoid improper behavior such as squeezing or irregular placement.

6.2 Unpacking inspection

Please check the following information:

• Before opening the package, please carefully check the packaging for damage, bruising, wetting, moisture, deformation, etc.
• Please check the parts on a case-by-case basis based on the supply contract and the packing list.
• Check for obvious damage on the surface of the product.
• Verify that the product identification is clear and complete.
• Check if the connector is loose, or the connection line is broken or not.

If any of the above occurs, please make a detailed record, take a photo, and contact CoreMorrow immediately.

Precautions:

• Please handle gently when unpacking to avoid permanent damage to the stage caused by bumps.
• Please do not use heavy tools or rough methods to open them.
• Please do not discard all packaging materials for return shipments.

7. Maintenance and processing

7.1 Problem Processing

Common problems are shown in the following table:

If the user has problems that could not be solved, please record the fault situation and contact CoreMorrow. The professional technical engineer will help solve the problem. Problems caused by improper operation are not covered by the warranty. CoreMorrow is not responsible for any problems caused by dismantling the piezo stage without permission.

7.2 Daily maintenance

If the piezo stage is not used for a long time, please store it in a room environment with no dust, good ventilation, clean, and non-corrosive substances. Please do not loosen the screws on the stage structure, as this could affect the accuracy of the stage.

Daily cleaning:

Please disconnect the piezo stage from the controller, then clean its surface. When cleaning, first wipe a small amount of detergent with a towel and gently wipe the surface of the piezo stage, then wash it with alcohol. Please do not use ultrasonic waves for cleaning.

When cleaning the surface, try not to pick up the product. If it is necessary to pick up, please place a sponge under the piezo stage for protection. The piezo stage should not be too high from the sponge to prevent it from falling off.

8. Connector

8.1 Driving and Sensor cable

The driving cable interface is a 1-contact LEMO, model number LEMO ERA.00.250.CTL, as shown in Figure 9.

The sensor cable interface is a 4-contacts LEMO, model number LEMO ERA.0S.304.CLL, as shown in Figure 10.

Figure 11 illustrates the LEMO Sensors Connector wiring. The pins are numbered as follows:

• 1: +10V (Supply voltage)
• 2: Sensor feedback signal + (Sensor signal out)
• 3: Sensor feedback signal - (Sensor signal out)
• 4: GND (Supply voltage)
• Shell: GND (protect)

9. Customer Service

If you have questions about the products you are currently using, please provide the following information:

• Piezo stage model number and related number.
• Controller model for this product.
• Software driver version for this product.
• Computer operating system for installing supporting software.

10. Contact us

Harbin Core Tomorrow Science & Technology Co., Ltd.

Tel: +86-451-86268790

Email: info@coremorrow.com

Website: www.coremorrow.com

Address: Building 12, No.191 Xuefu Road, Nangang District, Harbin, HLJ, China

CoreMorrow Official and CTO WeChat QR codes are provided below.

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