This document serves as the comprehensive instruction manual for the Carl Zeiss AURIGA® series Modular CrossBeam® workstation. It provides essential information for users operating this advanced scientific instrument.
The AURIGA® series workstations are designed for sophisticated electron and ion beam microscopy applications, offering capabilities such as Scanning Electron Microscopy (SEM), Focused Ion Beam (FIB) imaging and milling, and Gas Injection System (GIS) functionalities.
Key Features and Capabilities:
- Advanced SEM operation with GEMINI® column technology.
- Focused Ion Beam (FIB) imaging and precise material removal (milling).
- Gas Assisted Deposition (GAD) and Etching (GAE) using electron or ion beams.
- Modular design allowing for various upgrade stages (FIB, GIS, Charge Compensation).
- User-friendly SmartSEM® software interface for control and data acquisition.
Manual Contents:
This manual covers critical aspects including safety instructions, detailed descriptions of the workstation's components and principles of operation, installation requirements, operational procedures, maintenance and repair guidelines, troubleshooting tips, and disposal information.
For further information on Carl Zeiss microscopy solutions, please visit www.zeiss.com/microscopy.
